Sand blasting pipe of multi-wire cutting machine

Abstract

An outer pipe assembly comprises an outer pipe body and a flow guide part which are connected with each other, the outer pipe body is provided with a mounting cavity, an outer mounting part and an inner mounting part, an inner pipe assembly comprises an inner pipe body arranged in the mounting cavity, and the inner pipe body is provided with a flow guide cavity, a flow guide hole and an assembly part. Through cooperation of the outer pipe assembly and the inner pipe assembly, a two-layer guarantee system is formed, during use, mortar firstly enters the flow guide cavity of the inner pipe body, evenly flows out through the flow guide holes after being filled, and flows into the sand curtain groove of the flow guide piece along the installation cavity of the outer pipe body, and therefore a complete sand curtain is formed and sprayed out; therefore, the problem that the net is not completely covered due to tension or flow of the mortar is solved, especially the situation that the sand curtain is not complete due to adjustment of the flow of the mortar is avoided, and the sand curtain is evenly sprayed out of the sand curtain groove to cover the whole net. Therefore, the problem of steps or line marks caused by insufficient cutting capability when the wafer is cut out is avoided, the yield of the wafer is improved, and the productivity of equipment is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of silicon wafer cutting processing, in particular to a sand blasting pipe of a multi-wire saw. BACKGROUND

[0002] The multi-wire saw is a device for cutting processing of silicon wafers. The multi-wire cutting is a new cutting processing method for cutting hard and brittle materials such as semiconductors into hundreds of thin slices at one time by high-speed reciprocating movement of a metal wire to bring abrasive into a semiconductor processing area for grinding.

[0003] The traditional multi-wire cutting process is to suck the mortar into the processing chamber through the sand pump, guide the flow through the sand blasting pipe, spray the mortar onto the wire mesh, and drive the mortar to grind and cut the material through the high-speed movement of the wire.

[0004] The traditional sand pipe mainly includes two parts, the first part is a hollow cylinder for connecting the device mortar pipeline, and the second part is a two-piece plate structure, the first part is welded with the second part, and the connecting part has a mortar groove for mortar flow, which can also be called spraying or output. For example, the length of the mortar groove is set according to the actual situation, and the width of the mortar groove is about 1.3mm.

[0005] However, such a structure makes it impossible for the mortar to be evenly sprayed onto the wire mesh when sprayed, resulting in insufficient cutting capacity of the wire mesh, and the cutting of the wafer has wire marks and steps, affecting the yield.

[0006] Moreover, the sand pipe cannot adapt to the appropriate flow, so it is difficult to adjust the mortar flow, and it is found in production that if the mortar flow is too small, the wire mesh will not be completely covered on one side, and if the mortar flow is too large, the mortar will gather in the middle of the wire mesh due to the mortar tension, and the mortar on both sides of the wire mesh will not be covered. INVENTION CONTENTS

[0007] Therefore, it is necessary to provide a sand blasting pipe of a multi-wire saw.

[0008] One embodiment of the present application is a sand blasting pipe of a multi-wire saw, which comprises an outer pipe assembly and an inner pipe assembly.

[0009] The outer pipe assembly comprises an outer pipe body and a flow guide connected together, the outer pipe body is provided with a mounting cavity, an outer mounting portion and an inner mounting portion, and the outer pipe body is mounted to the outside through the outer mounting portion.

[0010] The inner pipe assembly comprises an inner pipe body arranged in the mounting cavity, the inner pipe body is provided with a flow guide cavity, a flow guide hole and an assembly portion, the assembly portion is connected with the inner mounting portion to fix the inner pipe body in the mounting cavity.

[0011] The flow guide cavity is communicated with the flow guide hole, and in a state that the outer pipe body is installed externally, the flow guide cavity is used for inputting the mortar;

[0012] The flow guide member is provided with a sand curtain groove communicated with the installation cavity, and in a state that the inner pipe body is fixed in the installation cavity, the sand curtain groove is communicated with the flow guide hole through the installation cavity.

[0013] The sand blasting pipe of the multi-wire cutting machine, through cooperation of the outer pipe assembly and the inner pipe assembly, forms a two-layer protection system. In use, the mortar first enters the flow guide cavity of the inner pipe body, and then uniformly flows out through the flow guide hole after being filled, flows into the sand curtain groove of the flow guide member along the installation cavity of the outer pipe body, and is sprayed out to form a complete sand curtain, thereby solving the problem of incomplete wire mesh coverage caused by tension or flow of the mortar, especially the incomplete sand curtain caused by adjustment of the mortar flow, so that the sand curtain is uniformly sprayed out of the sand curtain groove to cover all the wire meshes, thereby avoiding the problems of steps or line marks caused by insufficient cutting capacity when cutting wafers, improving the wafer yield, and facilitating improvement of equipment productivity.

[0014] In some embodiments, in a state that the inner pipe body is fixed in the installation cavity, a gap region is formed between the inner pipe body and the outer pipe body;

[0015] The flow guide cavity is communicated with the sand curtain groove through the flow guide hole and the gap region.

[0016] In some embodiments, the outer pipe body and the inner pipe body have the same axial direction, and along the axial direction, a cross section of the gap region is circular ring-shaped.

[0017] In some embodiments, the outer pipe body is provided with a communication groove, and the installation cavity is communicated with the sand curtain groove through the communication groove.

[0018] In some embodiments, the communication groove has a part of a side surface shape of a cylinder, and the outer pipe body is provided with a chamfer at the communication groove.

[0019] In some embodiments, the inner installation part is an internal thread, and the assembly part is an external thread matched with the internal thread; or,

[0020] The outer installation part is a threaded structure, and the outer pipe body is screwed and installed externally through the outer installation part, so that the flow guide cavity of the inner pipe body is communicated with an external sand blasting hole to input the mortar.

[0021] In some embodiments, the inner pipe assembly further includes a plug connected with the inner pipe body, and in a state that the inner pipe body is fixed in the installation cavity, the plug seals the installation cavity.

[0022] In some embodiments, the plug is integrally formed with the inner tube body; or...

[0023] The plug is welded to the inner tube body; or...

[0024] The plug is cylindrical.

[0025] In some embodiments, the outer tube body is integrally formed with the flow guide; or...

[0026] The outer tube is welded to the flow guide; or...

[0027] The outer tube has a hollow cylindrical shape; or...

[0028] The flow guide has a cuboid shape; or...

[0029] The inner tube is detachably disposed in the mounting cavity.

[0030] In some embodiments, in use, the flow guide hole is located at the top of the flow guide cavity and above the sand curtain groove. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of an embodiment of the sandblasting pipe for a multi-wire cutting machine described in this application.

[0033] Figure 2 for Figure 1 Another schematic diagram of the embodiment shown.

[0034] Figure 3 for Figure 2 Another schematic diagram of the embodiment shown.

[0035] Figure 4 for Figure 3 A schematic cross-sectional view along the AA direction of the embodiment shown.

[0036] Figure 5 for Figure 3 Another schematic diagram of the embodiment shown.

[0037] Figure 6 for Figure 5 A perspective view of the embodiment shown.

[0038] Figure 7 for Figure 6 A partial enlarged structural diagram of the embodiment shown.

[0039] Figure 8 for Figure 1 A schematic diagram of the inner tube assembly in the illustrated embodiment.

[0040] Figure 9 for Figure 8 Another schematic diagram of the embodiment shown.

[0041] Figure 10 for Figure 1 A schematic diagram of the outer tube assembly in the embodiment shown.

[0042] Figure 11 for Figure 10 Another schematic diagram of the embodiment shown.

[0043] Figure 12 for Figure 11 A schematic cross-sectional view along the BB direction of the embodiment shown.

[0044] Figure 13 for Figure 11 A perspective view of the embodiment shown.

[0045] Figure 14 for Figure 13 A partial enlarged schematic diagram of the embodiment shown.

[0046] Reference numerals: 100 for multi-wire cutting machine sandblasting pipe, 110 for outer pipe assembly, 111 for outer pipe body, 112 for guide component, 113 for mounting cavity, 114 for connecting groove, 115 for outer mounting part, 116 for inner mounting part, 117 for sand curtain groove, 120 for inner pipe assembly, 121 for inner pipe body, 122 for guide cavity, 123 for guide hole, 124 for assembly part, 125 for plug, 130 for gap area, 140 for axial direction, 200 for input direction. Detailed Implementation

[0047] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0048] It is to be understood that when an element such as a layer, film or region is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element or intervening elements can also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. It will be understood that, although the terms "first", "second", etc. can be used herein to describe various elements, these elements should not be limited by these terms since such elements are commonly known to have temporal meanings as well. The above-described elements (operations, functionality) can be implemented in digital electronic circuitry, or in computer software, firmware, or hardware, including the

[0049] In addition, the terms "first", "second", etc. are used herein only to describe various elements, and do not imply a relative importance or a specific order. Thus, a first element discussed above could later be referred to as a second element without departing from the teachings provided herein. The singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise.

[0050] In this application, the use of "on", "under", "above", and "on top of" can mean that the first element is directly in contact with the second element, or indirectly in contact with the second element through an intermediate medium. In addition, "on", "above", and "on top of" the second element can mean that the first element is directly above or obliquely above the second element, or only means that the first element is horizontally higher than the second element. "Under", "below", and "underneath" the second element can mean that the first element is directly below or obliquely below the second element, or only means that the first element is horizontally lower than the second element.

[0051] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The use of the terms "and / or" includes a combination of one or more of the associated listed items.

[0052] The application discloses a sand blasting pipe of a multi-wire saw machine, which comprises part or all of the technical features of the following embodiments, i.e. the sand blasting pipe comprises part or all of the following structures. In one embodiment of the application, the sand blasting pipe of the multi-wire saw machine comprises an outer pipe assembly and an inner pipe assembly; the outer pipe assembly comprises an outer pipe body and a flow guide member connected to each other, the outer pipe body is provided with a mounting cavity, an outer mounting portion and an inner mounting portion, and the outer pipe body is mounted to the outside through the outer mounting portion; the inner pipe assembly comprises an inner pipe body arranged in the mounting cavity, the inner pipe body is provided with a flow guide cavity, a flow guide hole and an assembly portion, the assembly portion is connected to the inner mounting portion to fix the inner pipe body in the mounting cavity; the flow guide cavity is in communication with the flow guide hole, and the flow guide cavity is used for inputting mortar when the outer pipe body is mounted to the outside; the flow guide member is provided with a sand curtain groove in communication with the mounting cavity, and the sand curtain groove is in communication with the flow guide hole through the mounting cavity when the inner pipe body is fixed in the mounting cavity. The sand blasting pipe of the multi-wire saw machine forms a two-layer protection system through cooperation of the outer pipe assembly and the inner pipe assembly, and when used, the mortar first enters the flow guide cavity of the inner pipe body, is uniformly discharged through the flow guide hole after being filled, flows into the sand curtain groove of the flow guide member along the mounting cavity of the outer pipe body, and is thus completely discharged in the form of a sand curtain, thereby solving the problem that the wire net is not completely covered due to tension or flow of the mortar, especially the problem of incomplete sand curtain caused by adjustment of the flow of the mortar, and the sand curtain is uniformly discharged from the sand curtain groove to cover all the wire nets, so that the problems of steps or wire marks caused by insufficient cutting capacity when cutting wafers are avoided, the yield of wafers is improved, and the production capacity of the equipment is improved. The sand blasting pipe of the multi-wire saw machine will be described in detail below. Figures 1 to 14 The sand blasting pipe of the multi-wire saw machine will be described in detail below.

[0053] In some embodiments, a sand blasting pipe 100 of a multi-wire saw machine comprises an outer pipe assembly 110 and an inner pipe assembly 120, as shown in Figure 1 and Figure 2 The outer pipe assembly 110 comprises an outer pipe body 111 and a flow guide member 112 connected to each other, as shown in Figure 3 and Figure 4 The outer pipe body 111 is provided with a mounting cavity 113, an outer mounting portion 115 and an inner mounting portion 116, and the outer pipe body 111 is mounted to the outside through the outer mounting portion 115, as shown in Figure 12 and Figure 13 The inner pipe assembly 120 comprises an inner pipe body 121 arranged in the mounting cavity 113, the inner pipe body 121 is provided with a flow guide cavity 122, a flow guide hole 123 and an assembly portion 124, the assembly portion 124 is connected to the inner mounting portion 116 to fix the inner pipe body 121 in the mounting cavity 113, the flow guide cavity 122 is in communication with the flow guide hole 123, and the flow guide cavity 122 is used for inputting mortar when the outer pipe body 111 is mounted to the outside, as shown in Figure 4 and Figure 8The inner tube assembly 120 comprises an inner tube body 121 arranged in the installation cavity 113, the inner tube body 121 is provided with a flow guide cavity 122, a flow guide hole 123 and an assembly part 124, the assembly part 124 is connected with the inner installation part 116 to fix the inner tube body 121 in the installation cavity 113; the flow guide cavity 122 is communicated with the flow guide hole 123, and in the state that the outer tube body 111 is installed outside, the flow guide cavity 122 is used for inputting the mortar; the flow guide piece 112 is provided with a sand curtain groove 117 communicated with the installation cavity 113, and in the state that the inner tube body 121 is fixed in the installation cavity 113, the sand curtain groove 117 is communicated with the flow guide hole 123 through the installation cavity 113. Such structure design, through the cooperation of the outer tube assembly 110 and the inner tube assembly 120, forms a two-layer guarantee system, when in use, the mortar first enters the flow guide cavity 122 of the inner tube body 121, and then evenly flows out through the flow guide hole 123 after filling, flows into the sand curtain groove 117 of the flow guide piece 112 along the installation cavity 113 of the outer tube body 111, thereby forming a complete sand curtain spray, and further solves the problem that the wire net is not completely covered due to the tension or flow of the mortar, especially the incomplete sand curtain caused by the adjustment of the mortar flow, so that the sand curtain is evenly sprayed from the sand curtain groove 117 and covers all the wire nets, thereby avoiding the step or line mark problem caused by insufficient cutting capacity when cutting the wafer, improving the wafer yield, and being beneficial to improve the equipment capacity.

[0054] In some embodiments, the outer tube body 111 is integrally provided with the flow guide 112, or the outer tube body 111 is welded with the flow guide 112. For example, the outer tube body 111 is at least partially in the shape of a cylinder, i.e. the outer tube body 111 has a hollow cylindrical shape. In the illustrated embodiment, the flow guide 112 is at least partially in the shape of a cuboid, and has an arc-shaped surface that is adapted to the shape of the cylindrical outer tube body 111, i.e. the flow guide 112 has a cuboid shape. In other embodiments, the flow guide 112 can also have other shapes, such as a conical shape, a truncated cone shape, or a prism shape, etc. For example, the flow guide 112 is provided with a straight sand curtain slot 117, i.e. the output of the sand curtain slot 117 is in a straight line, and the position where the mounting cavity 113 is communicated with the sand curtain slot 117 is in a straight line, or the position where the communication slot 114 to be described below is communicated with the sand curtain slot 117 is in a straight line. For example, the flow guide 112 is provided with a curved sand curtain slot 117, such as an arc-shaped sand curtain slot 117, and the position where the mounting cavity 113 is communicated with the sand curtain slot 117 is in a corresponding curved shape, such as an arc shape, or the position where the communication slot 114 to be described below is communicated with the sand curtain slot 117 is in a corresponding curved shape, such as an arc shape. Such a structure design further improves the integrity of the sand curtain output, and can be adjusted according to the actual cutting needs of various wafers, so that the sand curtain is uniformly sprayed from the sand curtain slot 117 to cover all the wire meshes.

[0055] In some embodiments, as Figure 4 and Figure 6As shown, in the state that the inner tube body 121 is fixed in the installation cavity 113, there is a gap area 130 between the inner tube body 121 and the outer tube body 111; the flow guide cavity 122 sequentially passes through the flow guide hole 123 and the gap area 130, and is connected with the sand curtain groove 117. It can be understood that the gap area 130 is a part of the installation cavity 113, and it can also be understood that the remaining space in the installation cavity 113 after the inner tube body 121 is installed is used as the gap area 130. In the embodiment, in the use state, the flow guide hole 123 is located at the top of the flow guide cavity 122 and above the sand curtain groove 117. With such a structure design, when the multi-wire cutting machine sand blasting pipe 100 is in use, the inner tube body 121 obtains the sand slurry from the equipment, the sand slurry enters the flow guide cavity 122, and under the pressure of the equipment inputting the sand slurry, the sand slurry flows out from the flow guide cavity 122 to the upper side of the flow guide hole 123 from the lower side of the flow guide hole 123 in a full load state of the flow guide cavity 122, and then enters the gap area 130, and then enters the sand curtain groove 117, or enters the sand curtain groove 117 through the communication groove 114 to be described below. At this time, the flow, tension and uniformity of the sand slurry are guaranteed by the inner tube body 121, and in cooperation with the design of the flow guide piece 112 and the sand curtain groove 117, a two-layer guarantee system is formed, one layer is the structural design of the inner tube assembly 120, and the other layer is the structural design of the outer tube assembly 110 and the structural cooperation with the inner tube assembly 120 under the structural design. Thus, it is further beneficial to form a complete sand curtain output, and thus better solve the problem of incomplete wire mesh coverage caused by the tension or flow of the sand slurry, especially the incomplete sand curtain caused by the flow adjustment of the sand slurry, so that the sand curtain is uniformly sprayed from the sand curtain groove 117 to cover all the wire meshes. Therefore, the step or line mark problem caused by insufficient cutting capacity when cutting wafers is avoided, the wafer yield is improved, and the equipment productivity is improved.

[0056] In some embodiments, as Figure 4 and Figure 5As shown, the outer tube body 111 and the inner tube body 121 have the same axial direction 140, along which the cross section of the gap region 130 is circular ring shape. In some embodiments, the outer tube body 111 has hollow cylinder shape. In some embodiments, the inner tube body 121 has hollow cylinder shape. In some embodiments, the flow guide 112 has cuboid shape. Such structural design can form uniform flow environment between the outer tube assembly 110 and the inner tube assembly 120 of the multi-wire cutting machine sand blasting pipe 100, so that the mortar uniformly passes from the flow guide cavity 122, sequentially through the flow guide hole 123, the gap region 130, i.e. part of the installation cavity 113, and then enters the sand curtain groove 117, and finally uniformly outputs to form a sand curtain; or for embodiments with the communication groove 114, so that the mortar uniformly passes from the flow guide cavity 122, sequentially through the flow guide hole 123, the gap region 130, i.e. part of the installation cavity 113, the communication groove 114, and then enters the sand curtain groove 117, and then uniformly outputs to form a sand curtain.

[0057] In each embodiment, the inner tube assembly 120 includes an inner tube body 121 arranged in the installation cavity 113. In some embodiments, the inner tube body 121 is detachably arranged in the installation cavity 113. As an example, the inner tube body 121 is detachably arranged in the installation cavity 113 in a screwing manner. In some embodiments, the inner mounting portion 116 is internally threaded, and the assembly portion 124 is externally threaded matching the internal thread. Such structural design can facilitate the installation and disassembly of the inner tube assembly 120, so as to facilitate the cleaning or replacement of the inner tube assembly 120.

[0058] In some embodiments, as shown in Figure 6 and Figure 7 The inner tube body 121 is provided with a flow guide cavity 122, a flow guide hole 123, and an assembly portion 124, the assembly portion 124 is connected with the inner mounting portion 116 to fix the inner tube body 121 in the installation cavity 113; the flow guide cavity 122 is in communication with the flow guide hole 123, and in the state that the outer tube body 111 is installed externally, the flow guide cavity 122 is used for flowing in mortar. In some embodiments, in combination with Figure 8 and Figure 9The guide holes 123 are circular and linearly arranged at regular intervals. In other embodiments, the guide holes 123 may also be elliptical or straight. In some embodiments, in use, the guide holes 123 are located at the top of the guide cavity 122 and above the sand curtain groove 117. With this structural design, when the multi-wire cutting machine's sandblasting pipe 100 is in use, the inner tube 121 receives slurry from the equipment. The slurry enters the guide cavity 122. When the guide cavity 122 is fully loaded with slurry, that is, when the guide cavity 122 is completely filled with slurry, the slurry flows out from the guide cavity 122 along the lower part of the guide hole 123 and the upper part of the guide hole 123, flows into the gap area 130, and then enters the sand curtain trough 117. It is then output from the sand curtain trough 117 to the outside. At this time, since the guide cavity 122 is full, the gap area 130 is also full, and if there is a connecting groove 114, it is also full, and the sand curtain trough 117 is also full, the sand curtain formed by the output of the sand curtain trough 117 is complete and uniform. This allows the sand curtain to be sprayed evenly from the sand curtain trough 117 and cover the entire wire mesh. Therefore, it avoids the problem of steps or wire marks caused by insufficient cutting capacity when cutting wafers, improves the wafer yield, and helps to increase the equipment's production capacity.

[0059] In some embodiments, the combination continues. Figure 8 and Figure 9 The inner tube assembly 120 further includes a plug 125 connected to the inner tube body 121. With the inner tube body 121 fixed in the mounting cavity 113, the plug 125 closes the mounting cavity 113; that is, the end of the mounting cavity 113 where the plug 125 is located is closed by the plug 125. In this embodiment, the plug 125 is cylindrical. In some embodiments, the plug 125 is integrally formed with the inner tube body 121; or, the plug 125 is welded to the inner tube body 121. This structural design facilitates the insertion of the inner tube 121, followed by sealing one end of the mounting cavity 113 with the plug 125. This ensures that after the inner tube 121 is inserted, one end of the mounting cavity 113 is sealed by the inner tube 121, and the other end is sealed by the plug 125. Consequently, the mortar output from the external blasting holes can only enter the guide cavity 122 through the opening of the inner tube 121. After filling the guide cavity 122, it flows evenly through the guide hole 123 to the gap area 130 of the mounting cavity 113, then through the connecting groove 114 into the sand curtain groove 117, and finally exits from the sand curtain groove 117. Depending on the output pressure, this can be described as either flowing out of the sand curtain groove 117 or being sprayed out of the sand curtain groove 117.

[0060] In some of these embodiments, such as Figure 1 and Figure 10 As shown, the external mounting part 115 has a threaded structure, combined with Figure 4 andFigure 6 The outer pipe body 111 is screwed to the outside through the outer mounting portion 115, so that the flow guide cavity 122 of the inner pipe body 121 is communicated with the sandblasting hole outside to input the mortar. In this embodiment, as shown in Figure 8 and Figure 9 The inner mounting portion 116 is internally threaded, and in combination with Figure 12 and Figure 13 The assembly portion 124 is externally threaded matching the internal thread; such a structure design is beneficial on the one hand for tightly mounting the inner pipe assembly 120 inside the outer pipe assembly 110, and the connection position is sealed relative to the mortar, so that when the mortar enters the flow guide cavity 122 of the inner pipe body 121 and the flow guide cavity 122 is not filled with the mortar, the mortar will not flow into the mounting cavity 113 of the outer pipe body 111, thus avoiding that part of the mortar leaks out of the sand curtain groove 117 to cause an incomplete sand curtain, and further solving the problem of incomplete coverage of the wire mesh due to the tension or flow of the mortar; on the other hand, it is beneficial for stably connecting the outer pipe body 111 of the outer pipe assembly 110 to the mortar output port of the equipment, and the connection position is also sealed relative to the mortar, ensuring that the sand curtain ejected from the sand curtain groove 117 covers completely, and the output position has a certain pressure, thereby ensuring the effectiveness and stability of the sandblasting process as much as possible, and ensuring the cutting ability when cutting wafers, avoiding the problem of steps or lines caused by insufficient cutting ability.

[0061] In some embodiments, as shown in Figure 11 and Figure 12 The outer pipe body 111 is provided with a communication groove 114, and in combination with Figure 13 and Figure 14 The mounting cavity 113 is communicated with the sand curtain groove 117 through the communication groove 114. In some embodiments, the communication groove 114 has a part of the side shape of a cylinder, and the outer pipe body 111 is provided with a chamfer at the communication groove 114. Such a structure design, at the position of the mounting cavity 113 or the gap area 130 thereof communicated with the sand curtain groove 117, is provided with a transitional communication groove 114, that is, at the position of the outer pipe body 111 communicated with the flow guide 112, is provided with a transitional communication groove 114, so that the mortar enters the sand curtain groove 117 after passing through the communication groove 114 from the gap area 130, realizing uniform flow guide effect; the effect of uniform flow guide is better in combination with the embodiment with chamfer.

[0062] The multi-wire cutting machine sandblasting pipe 100 will be further illustrated below in combination with Figures 1 to 14 In some embodiments, the multi-wire cutting machine sandblasting pipe 100 is used for mortar flow guide of a multi-wire cutting machine, which comprises an outer pipe assembly 110 and an inner pipe assembly 120.

[0063] The outer tube assembly 110 comprises an outer tube body 111 and a flow guide 112. The outer tube body 111 is in the shape of a hollow cylinder, which can also be referred to as having the shape of a first hollow cylinder. An installation cavity 113 is formed inside the outer tube body 111. The flow guide 112 is in the shape of a cuboid and is provided with a straight sand curtain groove 117 that is in communication with the installation cavity 113.

[0064] The outer tube body 111 is provided with an outer installation portion 115 having a threaded structure on the outside, which can also be referred to as an outer thread. In order to distinguish from the thread of the inner tube assembly 120, the outer thread of the outer tube body 111 can also be referred to as a first outer thread. An inner thread is provided as an inner installation portion 116 in the installation cavity 113 of the outer tube body 111. The outer tube body 111 is connected to the sandblasting hole of the equipment through the first outer thread. As an example, the first hollow cylinder, the inner thread and the first outer thread have the same axial direction 140. In this embodiment, the tail of the first hollow cylinder is a through hole, and a communication groove 114 is formed below.

[0065] As an example, the communication groove 114 is a cylindrical flow guide groove with a width of 1.3 mm. The cylindrical flow guide groove is chamfered and is welded to the cuboid part of the flow guide 112 to communicate the sand curtain groove 117.

[0066] In order to facilitate processing, the inner thread can be provided separately in an inner thread component, and the first outer thread can also be provided separately in an outer thread component. Then, the inner thread component is welded to the installation cavity 113 of the outer tube body 111, and the outer thread component is welded to the outside of the outer tube body 111.

[0067] The inner tube assembly 120 comprises an inner tube body 121 provided in the installation cavity 113 and a plug 125 closing the installation cavity 113 at one end of the installation cavity 113. The inner tube body 121 is provided with a flow guide cavity 122 and a flow guide hole 123 that is in communication with the flow guide cavity 122 and is located above the flow guide cavity 122, i.e., at the top position. The flow guide hole 123 is used to guide the mortar from the flow guide cavity 122 inside the inner tube assembly 120 to the outside of the inner tube assembly 120. As an example, the plug 125 is in the shape of a cylinder.

[0068] The inner tube body 121 is also provided with an outer thread that matches the inner thread of the outer tube body 111. In order to facilitate distinction, the outer thread can be referred to as a second outer thread. In this way, the inner tube body 121 is screwed to the inner thread of the outer tube body 111 through the outer thread, thereby realizing the fixation of the inner tube assembly 120 and the inner tube body 121, i.e., the fixation relative to the outer tube assembly 110. When the inner tube body 121 is screwed to a certain extent, the inner thread and the second outer thread tightly fit to realize the sealing of one end of the installation cavity 113, and the plug 125 abuts against the outer tube body 111 to realize the sealing of the other end of the installation cavity 113.

[0069] The inner tube body 121 is also in the shape of a hollow cylinder, which can also be referred to as the inner tube body 121 having the shape of a second hollow cylinder, and a flow guide cavity 122 is formed in the middle. The first hollow cylinder and the second hollow cylinder have the same axial direction 140, so the outer tube body 111 and the inner tube body 121 also have the same axial direction 140.

[0070] In use, the inner tube body 121 of the inner tube assembly 120 is inserted into the mounting cavity 113 of the outer tube body 111, and the inner tube body 121 is screwed to the outer tube body 111 through the screwing cooperation of the second external thread and the internal thread, and is screwed to a preset position, so that the plug 125 abuts against the outer tube body 111, and in the use state, the flow guide hole 123 is located at the top of the flow guide cavity 122, and the flow guide hole 123 is located above the sand curtain groove 117. Then the outer tube body 111 is screwed to the output threaded hole of the mortar output device through the first external thread, and in operation, the mortar enters the flow guide cavity 122 of the inner tube body 121 from the mortar output device, and after the flow guide cavity 122 is filled, it overflows from the flow guide hole 123 into the gap area 130 of the mounting cavity 113 of the outer tube body 111, and is guided to the sand curtain groove 117 through the cuboid flow guide 112, and is discharged, thereby forming a complete sand curtain. In this way, the combination of the inner tube and the outer tube is used, so that after the mortar is opened, it first enters the inner tube body 121, and after the inner tube body 121 is filled, it uniformly flows out from the upper flow guide hole 123, and then flows into the sand curtain groove 117 of the flow guide 112 along the gap area 130 between the outer tube body 111 and the inner tube body 121, thereby forming a complete sand curtain and being discharged, which improves the problem that the wire mesh is not completely covered due to the tension or flow of the mortar, and also improves the situation that the sand curtain is not complete due to the adjustment of the flow of the mortar, so that the sand curtain is uniformly discharged from the sand curtain groove and covers all the wire meshes, thereby improving the problem that steps or lines are caused when cutting wafers due to insufficient cutting capacity, improving the yield of wafers, and improving the production capacity of the equipment.

[0071] It should be noted that other embodiments of the present application also include a multi-wire cutting machine sand blasting pipe formed by the combination of the technical features of the above-mentioned embodiments, which can be implemented. The multi-wire cutting machine sand blasting pipe forms a two-layer protection system through the cooperation of the outer tube assembly and the inner tube assembly, and in use, the mortar first enters the flow guide cavity of the inner tube body, and after being filled, it uniformly flows out through the flow guide hole, and then flows into the sand curtain groove of the flow guide along the mounting cavity of the outer tube body, thereby forming a complete sand curtain and being discharged, thereby solving the problem that the wire mesh is not completely covered due to the tension or flow of the mortar, and especially the situation that the sand curtain is not complete due to the adjustment of the flow of the mortar, so that the sand curtain is uniformly discharged from the sand curtain groove and covers all the wire meshes, thereby avoiding the problem that steps or lines are caused when cutting wafers due to insufficient cutting capacity, improving the yield of wafers, and improving the production capacity of the equipment.

[0072] Any combination of the technical features in the above-described embodiments can be made, and for the sake of brevity, not all possible combinations are described, however, it is to be understood that the application embraces all such possible combinations.

[0073] The above-described embodiments only express several implementation manners of the application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that, for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the application, and these all belong to the protection scope of the application. Therefore, the patent protection scope of the application should be subject to the appended claims.

Claims

1. A sanding tube (100) for a multi-wire saw, characterized in that The outer tube assembly (110) and the inner tube assembly (120) are provided. The outer tube assembly (110) comprises an outer tube body (111) and a flow guide (112) connected to each other. The outer tube body (111) is provided with a mounting cavity (113), an outer mounting portion (115) and an inner mounting portion (116). The inner tube assembly (120) comprises an inner tube body (121) arranged in the mounting cavity (113). The inner tube body (121) is provided with a flow guide cavity (122), a flow guide hole (123) and an assembly portion (124).

2. The sanding tube (100) for a multi-wire saw according to claim 1, characterized in that The assembly portion (124) is connected with the inner mounting portion (116) to fix the inner tube body (121) in the mounting cavity (113). The flow guide cavity (122) is communicated with the flow guide hole (123).

3. The sanding tube (100) for a multi-wire saw according to claim 2, characterized in that In the state that the inner tube body (121) is fixed in the mounting cavity (113), the flow guide cavity (122) is communicated with the sand curtain groove (117) through the mounting cavity (113) and the flow guide hole (123).

4. The sanding tube (100) for a multi-wire saw according to claim 1, characterized in that In the state that the inner tube body (121) is fixed in the mounting cavity (113), the inner tube body (121) and the outer tube body (111) have a gap area (130).

5. The sanding tube (100) for a multi-wire saw according to claim 4, characterized in that The flow guide cavity (122) is sequentially communicated with the sand curtain groove (117) through the flow guide hole (123) and the gap area (130).

6. The sanding tube (100) for a multi-wire saw according to claim 1, characterized in that The outer tube body (111) and the inner tube body (121) have the same axial direction (140). In the axial direction (140), the cross section of the gap area (130) is circular ring shape.

7. The sanding tube (100) for a multi-wire saw according to claim 1, characterized in that The outer tube body (111) is provided with a communication groove (114).

8. The sanding tube (100) for a multi-wire saw according to claim 7, characterized in that The communication groove (114) has the shape of part of the side surface of a cylinder. The inner mounting portion (116) is an internal thread. The assembly portion (124) is an external thread matched with the internal thread. The outer mounting portion (115) is a threaded structure. The outer tube body (111) is screwed to the outside through the outer mounting portion (115) to make the flow guide cavity (122) of the inner tube body (121) communicated with the sand blasting hole of the outside to input the mortar. The inner tube assembly (120) further comprises a plug (125) connected with the inner tube body (121). In the state that the inner tube body (121) is fixed in the mounting cavity (113), the plug (125) seals the mounting cavity (113). The plug (125) is integrally arranged with the inner tube body (121). The plug (125) is welded with the inner tube body (121). The plug (125) is a cylinder.

9. The sanding tube (100) for a multi-wire saw according to claim 1, characterized in that The outer pipe body (111) is integrally arranged with the flow guide (112); or, The outer pipe body (111) is welded with the flow guide (112); or, The outer pipe body (111) has a hollow cylindrical shape; or, The flow guide (112) has a cuboid shape; or, The inner pipe body (121) is detachably arranged in the mounting cavity (113).

10. The strand cutting machine sand blasting pipe (100) according to any one of claims 1 to 9, characterized in that, In the use state, the flow guide hole (123) is located at the top of the flow guide cavity (122) and above the sand curtain groove (117).

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