Basket inserting machine

Abstract

The utility model relates to a basket inserting machine. A three-axis manipulator is fixed above a clip of a clamp plate and above a fixed plate; a material taking module clamping jaw is fixed on the three-axis manipulator; an overturning code scanning mechanism is fixed on one side of the clamp plate clip and on the fixed plate; a water bath inner basket is positioned and placed on the fixed plate on one side of the overturning code scanning mechanism; a robot is fixed on one side of the three-axis manipulator and on the fixing plate; a vertical clamping jaw is fixed on the robot; the three-axis manipulator drives the clamping jaw of the material taking module to take out the wafers from the clip of the clamp plate in sequence; the wafer is placed on the overturning code scanning mechanism, and after code scanning, the overturning code scanning mechanism overturns the wafer; the robot drives the vertical clamping jaw to sequentially insert the wafers into the water bath inner basket, and the technical problem that in the existing wafer carrying process, the wafers need to be overturned and then inserted into the water bath basket, and consequently the cost of the wafers is increased is solved.

Description

TECHNICAL FIELD

[0001] The embodiment of the utility model relates to a wafer conveying device, in particular to a basket inserting machine for inserting wafers into a water bath inner basket. BACKGROUND

[0002] In the existing wafer conveying process, the wafer needs to be turned over before being placed into a cleaning machine and then inserted into a water bath basket, so as to maximize the space utilization. At present, the wafer is turned over manually, which is tedious and the wafer is easily damaged during the turning over process, resulting in the increase of wafer cost. UTILITY MODEL CONTENT

[0003] The embodiment of the utility model aims to provide a basket inserting machine capable of automatically turning over wafers and automatically inserting the wafers into a water bath basket.

[0004] In order to achieve the above-mentioned purpose, the embodiment of the utility model designs a basket inserting machine, which comprises:

[0005] A fixed plate;

[0006] A clamp plate spring clip, a plurality of clamp plate spring clips are fixed on the fixed plate, and wafers are loaded into the clamp plate spring clips;

[0007] A three-axis mechanical hand, the three-axis mechanical hand is fixed above the clamp plate spring clip and above the fixed plate;

[0008] A material taking module clamp jaw, the material taking module clamp jaw is fixed on the three-axis mechanical hand;

[0009] A turning over and code scanning mechanism, the turning over and code scanning mechanism is fixed on one side of the clamp plate spring clip and on the fixed plate;

[0010] A water bath inner basket, the water bath inner basket is positioned and placed on one side of the turning over and code scanning mechanism and on the fixed plate;

[0011] A robot, the robot is fixed on one side of the three-axis mechanical hand and on the fixed plate;

[0012] A vertical clamp jaw, the vertical clamp jaw is fixed on the robot;

[0013] The three-axis mechanical hand drives the material taking module clamp jaw to sequentially take out the wafers from the clamp plate spring clip, place the wafers on the turning over and code scanning mechanism, and after code scanning, the turning over and code scanning mechanism turns over the wafers; the robot drives the vertical clamp jaw to sequentially insert the wafers into the water bath inner basket.

[0014] Further, the utility model discloses the basket inserting machine, the four around of arbitrary one clamp plate spring clamp is provided with positioning block and lengthening rod, and the wafer is positioned.

[0015] Further, the utility model discloses the basket inserting machine, the four around of arbitrary one clamp plate spring clamp is provided with positioning block and lengthening rod, and the wafer is positioned.

[0016] Further, the utility model discloses the basket inserting machine, the preset axis direction of three -axis manipulator is all provided with drive module group;

[0017] The servo motor of arbitrary one drive module group drives ball screw, and the slider is moved, and Y -axis module, Z module are set respectively on the slider, and form XYZ three -axis movement module group.

[0018] Further, the utility model discloses the basket inserting machine, the one side of the turnover scanning mechanism is fixed with scanner, and the positioning device is fixed above the turnover scanning mechanism, and the turnover is carried out through the turnover mechanism set below.

[0019] Further, the utility model discloses the basket inserting machine, drive separation gripper device is set up on the material taking module gripper, and the drive separation gripper device separates material in the material taking process to the wafer of stacking.

[0020] Further, the utility model discloses the basket inserting machine, a plurality of rows and a plurality of column grid cells are set up in the water bath inner basket.

[0021] Further, the utility model discloses the basket inserting machine, the robot is six -axis robot.

[0022] Further, the utility model discloses the basket inserting machine, in its characterized in that, set up clamping device and drive structure on the vertical gripper, drive structure drives the up and down movement of clamping device, and the clamping device is clamped or relaxed to the wafer.

[0023] Further, the utility model discloses the basket inserting machine, the wafer is taken out from the clamp plate spring clamp to the wafer and is inserted into the water bath inner basket after scanning, turnover of the basket inserting machine.

[0024] Compared with the prior art, the embodiment of this utility model involves fixing several clamping plate springs on a fixed plate, and loading wafers into the clamping plate springs; fixing a three-axis robot arm above the clamping plate springs and on the fixed plate; fixing a material handling module gripper to the three-axis robot arm; fixing a flipping barcode scanning mechanism to one side of the clamping plate springs and on the fixed plate; positioning a water bath basket on the fixed plate to one side of the flipping barcode scanning mechanism; fixing a robot to one side of the three-axis robot arm and on the fixed plate; fixing a vertical gripper to the robot; and having the three-axis robot arm drive the material handling module gripper. The wafers are sequentially removed from the clamping plate magazine and placed on the flipping and scanning mechanism. After scanning, the flipping and scanning mechanism flips the wafers. The robot drives the vertical gripper to insert the wafers sequentially into the inner basket of the water bath. This solves the technical problem that in the current wafer handling process, the wafers need to be flipped before being placed in the water bath basket to maximize space utilization. Currently, wafer flipping is done manually, which is cumbersome and the wafers are easily damaged during the flipping process, leading to increased wafer costs. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0026] Figure 2 for Figure 1 A schematic diagram of the structure in the main view direction;

[0027] Figure 3 for Figure 1 A schematic diagram of the structure in the left-view direction. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the various embodiments of this utility model will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the various embodiments of this utility model to facilitate a better understanding of this application. However, the technical solutions claimed in the claims of this application can be implemented even without these technical details and with various variations and modifications based on the following embodiments.

[0029] The embodiments of this utility model relate to a basket insertion machine, such as... Figure 1 As shown, it includes:

[0030] In this embodiment, the fixing plate 1 serves as the base plate of the basket insertion machine.

[0031] A clamp plate clip 10 is fixed on a fixed plate 1. A chip 2 is loaded into the clamp plate clip 10.

[0032] Above the clamp plate magazine 10, a three-axis mechanical hand 3 is fixed above the fixed plate 1; a material taking module gripper 20 is installed on the three-axis mechanical hand 3,

[0033] The material taking module gripper 20 is fixed on the three-axis mechanical hand 3;

[0034] On one side of the clamp plate magazine 10, a turnover code scanning mechanism 30 is fixed on the fixed plate 1; the turnover code scanning mechanism 30 is used for scanning codes and turning over the wafer 2;

[0035] On one side of the turnover code scanning mechanism 30, a water bath inner basket 40 is positioned on the fixed plate 1; the water bath inner basket 40 is used for placing the wafer standing up.

[0036] On one side of the three-axis mechanical hand 3, a robot 4 is fixed on the fixed plate 1;

[0037] A vertical gripper 60 is fixed on the robot 4; the robot 4 installs the vertical gripper 60, and the wafer 2 is sequentially inserted into the water bath inner basket 40.

[0038] The three-axis mechanical hand 3 drives the material taking module gripper 20 to sequentially take out the wafer 2 from the clamp plate magazine 10; after being scanned, the turnover code scanning mechanism 30 turns over the wafer 2; the robot 4 drives the vertical gripper 60 to sequentially insert the wafer 2 into the water bath inner basket 40. The wafer is automatically turned over and inserted into the water bath basket, which solves the technical problem that in the existing wafer carrying process, the wafer needs to be turned over before being placed into the cleaning machine and then inserted into the water bath basket, so as to maximize the space utilization. The wafer is turned over by manual operation, which is tedious, and the wafer is easily damaged during the turning over process, resulting in the increase of wafer cost.

[0039] In order to achieve the above technical effects, in the basket inserting machine in the embodiment, as shown in the drawings, Figure 1 The lifting mechanism 11 is arranged below any one of the clamp plate magazines 10 to lift the wafer 2 to the same height; the three-axis mechanical hand 3 drives the material taking module gripper 20 to grasp and place the wafer 2 on the turnover code scanning mechanism 30.

[0040] In order to achieve the above technical effects, in the basket inserting machine in the embodiment, as shown in the drawings, Figure 1 The positioning block 12 and the lengthening rod 121 are arranged around any one of the clamp plate magazines 10 to position the wafer 2.

[0041] In order to achieve the above technical effects, in the basket inserting machine in the embodiment, as shown in the drawings, Figure 1 The driving module 13 is arranged in the preset axis direction of the three-axis mechanical hand 3;

[0042] The servo motor 131 of any one driving module 13 drives the ball screw 132 to drive the sliding block 132 to move, and the Y-axis module 133 and the Z module 134 are arranged on the sliding block 132 respectively, thereby forming the XYZ three-axis moving module.

[0043] In order to realize the above technical effects, the basket inserting machine in the embodiment is provided with a scanning device 31 fixed on one side of the turnover scanning mechanism 30, a positioning device 32 fixed above the turnover scanning mechanism 30, and a turnover mechanism 33 arranged below the positioning device 32. Figure 1

[0044] In order to realize the above technical effects, the basket inserting machine in the embodiment is provided with a scanning device 31 fixed on one side of the turnover scanning mechanism 30, a positioning device 32 fixed above the turnover scanning mechanism 30, and a turnover mechanism 33 arranged below the positioning device 32. Figure 1

[0045] In order to realize the above technical effects, the basket inserting machine in the embodiment is provided with a scanning device 31 fixed on one side of the turnover scanning mechanism 30, a positioning device 32 fixed above the turnover scanning mechanism 30, and a turnover mechanism 33 arranged below the positioning device 32. Figure 1

[0046] In order to realize the above technical effects, the basket inserting machine in the embodiment is provided with a scanning device 31 fixed on one side of the turnover scanning mechanism 30, a positioning device 32 fixed above the turnover scanning mechanism 30, and a turnover mechanism 33 arranged below the positioning device 32. Figure 1

[0047] In order to realize the above technical effects, the basket inserting machine in the embodiment is provided with a scanning device 31 fixed on one side of the turnover scanning mechanism 30, a positioning device 32 fixed above the turnover scanning mechanism 30, and a turnover mechanism 33 arranged below the positioning device 32. Figure 1

[0048] In order to realize the above technical effects, the basket inserting machine in the embodiment is provided with a scanning device 31 fixed on one side of the turnover scanning mechanism 30, a positioning device 32 fixed above the turnover scanning mechanism 30, and a turnover mechanism 33 arranged below the positioning device 32. Figure 1

[0049] Those skilled in the art can understand that the above embodiments are specific embodiments for realizing the utility model, and in actual application, various changes can be made in form and details without departing from the spirit and scope of the utility model.​​​​​​

Claims

1. A basket inserting machine characterized by comprising: The utility model relates to a wafer loading and unloading device, which comprises: a fixed plate; a plurality of clamp plate poppers fixed on the fixed plate, in which wafers are loaded; a three-axis manipulator fixed above the clamp plate poppers and above the fixed plate; a material taking module clamp jaw fixed on the three-axis manipulator; a turnover code scanning mechanism fixed on one side of the clamp plate popper and on the fixed plate; a water bath inner basket positioned on one side of the turnover code scanning mechanism and on the fixed plate; a robot fixed on one side of the three-axis manipulator and on the fixed plate; an upright clamp jaw fixed on the robot. The three-axis manipulator drives the material taking module clamp jaw to take out the wafers from the clamp plate popper one by one, place them on the turnover code scanning mechanism, and after code scanning, the turnover code scanning mechanism turns over the wafers; the robot drives the upright clamp jaw to insert the wafers into the water bath inner basket one by one.

2. The basket inserter of claim 1, wherein A jacking mechanism is arranged below any one of the clamp plate poppers to jack up the wafers to the same height; the three-axis manipulator drives the material taking module clamp jaw to grasp and place the grasped wafers on the turnover code scanning mechanism.

3. The basket inserter of claim 1, wherein Positioning blocks and extension rods are arranged around any one of the clamp plate poppers to position the wafers.

4. The basket inserter of claim 1, wherein A driving module is arranged in the preset axis direction of the three-axis manipulator; A servo motor of any one of the driving modules drives a ball screw to move a sliding block, on which a Y-axis module and a Z-module are arranged to form an XYZ three-axis moving module.

5. The basket inserter of claim 1, wherein A scanner is fixed on one side of the turnover code scanning mechanism; a positioning device is fixed above the turnover code scanning mechanism; the positioning device is turned over by a turnover mechanism arranged below.

6. The basket inserter of claim 1, wherein, A driving separation clamp jaw device is arranged on the material taking module clamp jaw to separate the stacked wafers during the material taking process.

7. The basket inserter of claim 1, wherein A plurality of rows and columns of grid cells are arranged in the water bath inner basket.

8. The basket inserter of claim 1, wherein, The robot is a six-axis robot.

9. The basket inserter of claim 1, wherein, A clamping device and a driving structure are arranged on the upright clamp jaw; the driving structure drives the clamping device to move up and down; the clamping device clamps or releases the wafers.

10. The basketing machine according to any one of claims 1 to 9, characterized in that The robot inserts the wafers into the water bath inner basket after the wafers are taken out from the clamp plate popper, scanned, and turned over by the inserting basket machine.

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