Vacuum coating equipment and condensing coil
By designing a condenser coil in the vacuum coating equipment, the condensation area is increased by utilizing the bent and straight sections. Combined with a molecular pump and annular coil, the problem of insufficient water vapor capture is solved, achieving efficient vacuuming and improved production efficiency.
Patent Information
- Application Number
- CN202423120526.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-17
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2034-12-17
AI Technical Summary
Existing vacuum coating equipment has insufficient water vapor capture capacity during vacuuming, resulting in excessively long vacuuming time and affecting production efficiency.
The design employs a condenser coil, including a condenser section and a connecting section. Multiple bends and straight sections are laid inside the furnace body to increase the condensation area. Combined with the use of a molecular pump and annular coil, efficient condensation of water vapor is achieved.
It improved the water vapor capture capacity, shortened the vacuuming time, and increased production efficiency.
Smart Images
Figure CN223633439U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of vacuum coating, and more particularly to a vacuum coating device and a condensing coil applied to the vacuum coating device. BACKGROUND
[0002] When the vacuum coating machine is in the coating operation, the inside of the furnace body needs to be in a vacuum environment. The coating in the vacuum environment can prevent interference and help to increase the bonding force between the new layer and the base body, thereby forming a more solid film layer.
[0003] When the vacuum coating machine is in the vacuum pumping stage, the non-ideal gas such as water vapor in the gas in the inside of the furnace body. In order to improve the vacuum pumping effect in the furnace body, a ring-shaped coil is arranged in the molecular pump pipeline in the prior art, the ring-shaped coil is cooled to a temperature below a certain temperature, the water vapor is condensed to the outer wall of the ring-shaped coil from the gaseous state to the liquid state by using the low temperature of the ring-shaped coil, so as to capture the water vapor molecules in the furnace body and reduce the water content in the air in the furnace body. As the water vapor is reduced, the load of the vacuum pumping system is also reduced, so that the vacuum pumping time can be shortened. However, when the product to be coated has a large amount of gas, the water vapor capturing capacity of the ring-shaped coil is generally low, the vacuum pumping of the coating machine is slow due to the slow release of water vapor, which leads to the increase of the vacuum pumping time and the decrease of the production efficiency. CONTENT
[0004] The embodiment of the present application provides a vacuum coating device and a condensing coil, which can improve the water vapor capturing capacity in the furnace body of the coating machine, shorten the vacuum pumping time and improve the production efficiency.
[0005] The condensing coil provided by the present application adopts the following technical scheme:
[0006] In the first aspect, the present application provides a condensing coil, which adopts the following technical scheme:
[0007] A condensing coil comprises:
[0008] The cold trap pipeline comprises a condensing section and a connecting section, the connecting section is used for penetrating the furnace body and is in communication with the refrigerating machine connection port outside the furnace body, and the condensing section is located in the inside of the furnace body; the condensing section comprises a plurality of bending parts and a plurality of straight parts, and two adjacent straight parts are communicated by one bending part.
[0009] According to some embodiments of the present application, the cold trap pipeline is arranged close to the inner wall of the molecular pump of the furnace body, the condensing section comprises a first condensing area and a plurality of second condensing areas, the first condensing area and the plurality of second condensing areas enclose at least one avoiding area, and the avoiding area is used for avoiding the molecular pump pipeline port.
[0010] According to some embodiments of the present application, the first condensing area comprises at least one flat portion, and the second condensing area comprises at least one flat portion, and the flat portion in the first condensing area is perpendicular to the flat portion in the second condensing area.
[0011] According to some embodiments of the present application, the normal projection of the condensing section on the bottom surface of the furnace body is arc-shaped, and is matched with the curvature of the inner wall of the furnace body.
[0012] According to some embodiments of the present application, the installation base plate is used for connecting with the inner wall of the furnace body, the condensing section is installed on the inner wall of the furnace body through the installation base plate, and the condensing section has a gap with the inner wall of the furnace body.
[0013] According to some embodiments of the present application, the installation base plate comprises a heat insulation plate and a bottom plate, the bottom plate is fixedly connected with the inner wall of the furnace body, the heat insulation plate is located on the side of the bottom plate away from the inner wall of the furnace body and is fixedly connected with the bottom plate, and the condensing section is fixedly arranged on the heat insulation plate.
[0014] According to some embodiments of the present application, a plurality of installation base plates are arranged, and the first condensing area and the second condensing area are respectively provided with at least one installation base plate.
[0015] According to some embodiments of the present application, the cold trap pipeline is a metal pipeline, the length of the cold trap pipeline is 13.4 m, and the size is Φ16*1.0 mm.
[0016] In the second aspect, the present application provides a vacuum coating equipment, which adopts the following technical scheme:
[0017] The vacuum coating equipment comprises a furnace body, a molecular pump and a condensing coil as described above, the condensing coil is located in the furnace body and is fixedly connected with the inner wall of the furnace body where the molecular pump is arranged.
[0018] According to some embodiments of the present application, a stop valve is further arranged, the inner wall of the molecular pump pipeline is provided with an annular coil, and the condensing coil and the annular coil are connected in communication through the stop valve.
[0019] From the above technical scheme, the embodiments of the present application have the following advantages:
[0020] The cold trap pipe is communicated with the refrigerator connecting port outside the furnace body through the connecting section, and the condensing section is located inside the furnace body, and the cold trap pipe is filled with refrigerant under the action of the refrigerator, and the internal space is compact, and under the premise of a certain space, the length of the condensing section is as long as possible by laying multiple straight sections and multiple bending sections, thereby increasing the contact area of the condensing section and air, maximizing the condensing efficiency, improving the water vapor capturing capacity in the furnace body, shortening the vacuum time, and improving the production efficiency. BRIEF DESCRIPTION OF DRAWINGS
[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments described in the present application, and other drawings can also be obtained by those skilled in the art according to these drawings.
[0022] Figure 1 A schematic diagram of the overall structure of the condensing coil disclosed in the embodiments of the present application;
[0023] Figure 2 A partial enlarged view of A in the above figure; Figure 1
[0024] Figure 3 A schematic diagram of the structure of the condensing coil and the inner wall of the furnace body in the vacuum coating equipment disclosed in the embodiments of the present application.
[0025] Explanation of reference signs:
[0026] 1, condensing coil; 11, cold trap pipe; 111, condensing section; 1111, bending section; 1112, straight section; 1113, first condensing area; 1114, second condensing area; 1115, avoidance area; 112, connecting section; 12, mounting base plate; 121, heat insulation plate; 122, bottom plate; 2, furnace body. DETAILED DESCRIPTION
[0027] The present application will be further described in detail below with reference to the drawings.
[0028] The embodiments of the present application provide a vacuum coating equipment and a condensing coil, which can improve the water vapor capturing capacity in the furnace body, shorten the vacuum time, and improve the production efficiency.
[0029] In order to make the person skilled in the art better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should belong to the protection scope of the present application. In addition, the technical solutions of various embodiments can be combined with each other, but it must be based on the person skilled in the art can realize, when the combination of technical solutions appears contradictory or cannot be realized, it should be considered that the combination of technical solutions does not exist, also not within the protection scope claimed by the present application.
[0030] The terms "first", "second", "third", "fourth" and the like in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.
[0031] Please refer to Figure 1 and Figure 3 , the present application discloses a vacuum coating equipment, including furnace body 2( Figure 3 part of the furnace body of the vacuum coating equipment is shown), molecular pump and condenser coil 1, condenser coil 1 is used for trapping water vapor in furnace body 2, condenser coil 1 is located in furnace body 2, and is fixedly connected with the inner wall of furnace body 2 configured with molecular pump; molecular pump effectively extracts air, water vapor, inert gas and other impurity molecules in furnace body 2 through strong suction capacity, reduces internal pressure, maintains high vacuum environment inside the equipment, and the inner wall of molecular pump pipeline is provided with annular coil, and condenser coil 1 is communicated with annular coil through stop valve.
[0032] The air in the furnace body 2 is discharged from the molecular pump pipeline under the strong pumping capacity of the molecular pump. When the air emission amount of the plated substrate (product) is general, the communication between the condensing coil 1 and the annular coil is controlled by the stop valve to fill the condensing coil 1 and the annular coil with refrigerant alternately, and the air in the furnace body 2 is condensed through the condensing coil 1 or the annular coil, so that the vacuumizing time can be shortened. When the air emission amount of the plated substrate (product) is large, the communication between the condensing coil 1 and the annular coil is controlled by the stop valve to fill the condensing coil 1 and the annular coil with refrigerant, and the air in the furnace body 2 is condensed through the condensing coil 1 and the annular coil at the same time, so that the water vapor changes from gas to liquid, thereby improving the water vapor capturing capacity in the furnace body 2, shortening the vacuumizing time, shortening the film plating time, and improving the production efficiency.
[0033] Please refer to Figure 1 As an embodiment of the condensing coil 1 in the embodiment of the present application, the condensing coil 1 comprises a cold trap pipeline 11 and a mounting base plate 12. The mounting base plate 12 is used to connect with the inner wall of the furnace body 2, and the cold trap pipeline 11 is assembled to the inner wall of the furnace body 2 through the mounting base plate 12. The cold trap pipeline 11 is used to fill refrigerant, and the water vapor in the air in the furnace body 2 changes from gas to liquid to realize condensation through the temperature difference, so as to capture the water vapor molecules in the furnace body 2 and reduce the water content in the air in the furnace body 2. Since the water vapor is reduced, the load of the vacuumizing system is also reduced, so that the vacuumizing time can be shortened and the production efficiency can be improved.
[0034] The cold trap pipeline 11 adopts a metal pipeline. In the embodiment, the cold trap pipeline 11 preferably selects a red copper pipeline. The length of the cold trap pipeline 11 is 13.4 m, and the size is Φ16*1.0 mm. The red copper pipeline has high thermal conductivity, strong low-temperature resistance, and good corrosion resistance. The stress generated by the red copper pipeline when the temperature changes is small, and the mechanical properties of the red copper pipeline are good at low temperature. The red copper pipeline is relatively small in corrosion by moisture and chemical substances in a low-temperature environment, can effectively transfer heat from the low-temperature area, avoid the influence of temperature rise on the equipment, is conducive to maintaining the stability of the low-temperature environment, and ensures the high-efficiency operation and safety of the system.
[0035] The cold trap pipeline 11 comprises a condensing section 111 and a connecting section 112, the connecting section 112 is used for penetrating the furnace body 2 and communicating with the refrigerating machine connection port outside the furnace body 2, the cold trap pipeline 11 communicates with the refrigerating machine connection port outside the furnace body 2 through the connecting section 112, and the refrigerating machine operates to fill the cold trap pipeline 11 with refrigerant; the condensing section 111 is located inside the furnace body 2 and is used for capturing water vapor molecules in the furnace body 2. In the embodiment, the connecting section 112 is two end regions of the cold trap pipeline 11, and the condensing section 111 is all regions of the cold trap pipeline 11 except the two end regions, the connecting section 112 communicates with the external refrigerating machine connection port through a connecting hole provided in the inner wall of the furnace body 2, and the two end regions extend out of the furnace body 2 through the same connecting hole, which reduces the additional opening of the furnace body 2 and is beneficial to ensuring the sealing of the furnace body 2.
[0036] The condensing section 111 comprises a plurality of bending portions 1111 and a plurality of straight portions 1112, and two adjacent straight portions 1112 are communicated by one bending portion 1111. In order to maximize the condensing efficiency, the length of the condensing section 111 is as long as possible under the premise of a certain space, and the contact area between the condensing section 111 and air is increased, so that the water vapor capturing capacity in the furnace body 2 is improved, the vacuumizing time is shortened, and the production efficiency is improved.
[0037] The condensing section 111 comprises a first condensing area 1113 and a plurality of second condensing areas 1114, and the first condensing area 1113 and the plurality of second condensing areas 1114 enclose at least one avoiding area 1115, which is used for avoiding the molecular pump pipeline port. In the embodiment, three molecular pump pipeline ports are provided, and the first condensing area 1113 and the plurality of second condensing areas 1114 enclose three avoiding areas 1115, which are used for avoiding the molecular pump pipeline ports at different positions, so as to avoid the interference of the condensing section 111 on the molecular pump. If the condensing pipe is directly close to the molecular pump pipeline port, the water or other liquid substances on the surface of the condensing section 111 may enter the molecular pump, causing the performance of the pump to be reduced. In an embodiment, a longer second condensing area 1114 is connected to the left side of the first condensing area 1113, and two shorter second condensing areas 1114 are connected to the right side of the first condensing area 1113, and the three avoiding areas 1115 are respectively located on the upper and lower sides and the right side of the first condensing area 1113.
[0038] The first condensing area 1113 comprises at least one flat section 1112, and the second condensing area 1114 comprises at least one flat section 1112. The flat section 1112 in the first condensing area 1113 is perpendicular to the flat section 1112 in the second condensing area 1114. It can be understood that the direction of the refrigerant flow in the first condensing area 1113 is perpendicular to the direction of the refrigerant flow in the second condensing area 1114. The direction of the refrigerant flow in the flat section 1112 of the first condensing area 1113 is horizontal, and the direction of the refrigerant flow in the flat section 1112 of the second condensing area 1114 is vertical. Under the premise of avoiding the pipeline opening of the molecular pump, the setting of the first condensing area 1113 can avoid the interference between the pipelines, improve the space utilization rate in the vertical space of the furnace body 2, help to increase the surface area of the condensing section 111, and especially in the internal space of the equipment with limited space, improve the compactness and arrangement efficiency. Secondly, by changing the flow direction of the refrigerant in the condensing section 111, the temperature of the refrigerant can be uniformly distributed, and the temperature difference gradient in different areas of the condensing section 111 can be reduced.
[0039] In the present embodiment, a plurality of flat sections are arranged in the first condensing area 1113, and the plurality of flat sections are arranged in parallel with each other, further improving the space utilization rate in the vertical space of the furnace body 2. The lengths of the plurality of flat sections in the first condensing area 1113 are the same, and in other embodiments, the lengths of the plurality of flat sections in the first condensing area 1113 can be different. A plurality of flat sections are arranged in the second condensing area 1114, and the plurality of flat sections are arranged in parallel with each other. The lengths of the plurality of flat sections in each second condensing area 1114 can be the same or different, and the lengths of the flat sections in different second condensing areas 1114 can be the same or different.
[0040] Please refer to Figure 1 and Figure 3 In order to lay as long a condensing section 111 as possible in the compact internal space of the furnace body 2, the orthogonal projection of the condensing section 111 on the bottom surface of the furnace body 2 is arc-shaped and matches the curvature of the inner wall of the furnace body 2, which can reduce the space occupied by the condensing section 111. In the same space, the surface area of the condensing section 111 with the orthogonal projection on the bottom surface of the furnace body 2 being arc-shaped is larger than that of the condensing section 111 with the orthogonal projection on the bottom surface of the furnace body 2 being linear, so that more flat sections and bent sections can be accommodated, thereby increasing the surface area of the condensing section 111 in contact with air. In other embodiments, the orthogonal projection of the condensing section 111 on the bottom surface of the furnace body 2 can also be linear, polygonal, or other shapes.
[0041] Please refer to Figures 1 to 3The condensing section 111 is installed on the inner wall of the furnace body 2 through the mounting base plate 12, and has a gap with the inner wall of the furnace body 2. It can be understood that by keeping a certain gap between the condensing section 111 and the inner wall of the furnace body 2, the condensing section 111 is prevented from directly contacting the inner wall of the furnace body 2, thereby reducing the heat transfer from the outside to the condensing section 111 through the furnace body 2, causing the temperature of the condensing section 111 to rise, affecting the condensing effect.
[0042] The mounting base plate 12 is provided with a plurality of mounting base plates 12, and the first condensing section 1113 and the second condensing section 1114 are respectively provided with at least one mounting base plate 12, which can increase the installation stability of the condensing pipe of each condensing section, thereby increasing the installation stability of the cold trap pipe 11.
[0043] Please refer to Figure 2 The mounting base plate 12 includes a heat insulation plate 121 and a bottom plate 122, the bottom plate 122 is used for fixedly connecting with the inner wall of the furnace body 2, the heat insulation plate 121 is located on the side of the bottom plate 122 away from the inner wall of the furnace body 2 and is fixedly connected with the bottom plate 122, and the condensing section 111 is fixedly arranged on the heat insulation plate 121. In this embodiment, the heat insulation plate 121 is divided into two parts, and the condensing section 111 is fixed by buckling the two parts. The heat insulation plate 121 is a polytetrafluoroethylene heat insulation plate 121, and the bottom plate 122 is a stainless steel bottom plate 122. The structure of the two layers of materials makes it relatively convenient to disassemble and maintain the cold trap pipe 11. In addition, polytetrafluoroethylene (Teflon) has extremely low thermal conductivity and excellent heat insulation performance, which can prevent the low temperature of the cold trap pipe 11 from directly contacting the furnace wall, effectively reduce heat loss, and reduce the heat transferred from the furnace body 2 to the condensing section 111, prevent the temperature from rising too fast to affect condensation, maintain the condensing effect of the condensing section 111, and help optimize the formation process of the film layer; the stainless steel bottom plate 122 not only has high strength, but also can resist temperature difference and corrosion, and can stably bear the weight of the cold trap pipe 11 and the stress that may be generated during work for a long time.
[0044] The above-described embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims
1. A condensing coil, characterized by, The application relates to a condensing pipe for a molecular pump, which comprises a condensing section and a connecting section, wherein the connecting section is arranged to pass through a furnace body and is connected with a refrigerating machine joint on the outside of the furnace body, and the condensing section is arranged in the furnace body; the condensing section comprises a plurality of bending sections and a plurality of straight sections, and two adjacent straight sections are connected by a bending section. The condensing pipe is arranged close to the inner wall of the furnace body where the molecular pump is arranged, the condensing section comprises a first condensing area and a plurality of second condensing areas, the first condensing area and the plurality of second condensing areas form at least one avoiding area for avoiding the molecular pump pipe joint.
2. A condensing coil as set forth in claim 1 wherein, The first condensing area comprises at least one straight section, the second condensing area comprises at least one straight section, and the straight sections in the first condensing area and the straight sections in the second condensing area are perpendicular to each other.
3. A condensing coil as set forth in claim 2 wherein, The condensing section is arranged on the bottom surface of the furnace body, and the normal projection of the condensing section is an arc which is matched with the curvature of the inner wall of the furnace body.
4. A condensing coil as set forth in claim 2, wherein, The application further comprises a mounting base which is arranged to be connected with the inner wall of the furnace body, the condensing section is mounted on the inner wall of the furnace body through the mounting base, and the condensing section has a gap with the inner wall of the furnace body.
5. A condensing coil as set forth in claim 2, wherein, The mounting base comprises a heat insulation plate and a bottom plate, the bottom plate is arranged to be fixedly connected with the inner wall of the furnace body, the heat insulation plate is arranged on the side of the bottom plate which is far away from the inner wall of the furnace body and is fixedly connected with the bottom plate, and the condensing section is fixedly arranged on the heat insulation plate.
6. A condensing coil as set forth in claim 5, characterized by A plurality of mounting bases are arranged, and at least one mounting base is arranged for the first condensing area and the second condensing area respectively.
7. A condensing coil as set forth in claim 5, wherein, The condensing pipe is made of a metal pipe, the length of the condensing pipe is 13.4 m, and the size of the condensing pipe is Phi 16*1.0 mm.
8. A condensing coil as set forth in claim 1, wherein, The application relates to a furnace body, a molecular pump and a condensing coil as claimed in any one of claims 1 to 8, wherein the condensing coil is arranged in the furnace body and is fixedly connected with the inner wall of the furnace body where the molecular pump is arranged.
9. A vacuum coating apparatus, characterized by The application further comprises a stop valve, an annular coil is arranged on the inner wall of the molecular pump pipe, and the condensing coil is connected with the annular coil through the stop valve.
10. The vacuum coating apparatus of claim 9, wherein,