Ammonia water evaporation and absorption device in regeneration process of alkaline etching liquid

Abstract

The utility model provides an ammonia water evaporation and absorption device in an alkaline etching liquid regeneration process, the device comprises an evaporation unit, a condensation collection unit and an absorption unit, the evaporation unit comprises an evaporator, the condensation collection unit comprises a condenser and a condensate collection tank, the absorption unit comprises a jet device and a regeneration liquid absorption cylinder, and the regeneration liquid absorption cylinder is connected with the evaporator. A top outlet of the evaporator is connected with the condensate collecting tank through the condenser, a top outlet of the condensate collecting tank is connected with a gas phase inlet of the jet device, a liquid phase inlet of the jet device is connected with a bottom outlet of the regenerated liquid absorption cylinder, and an outlet of the jet device is connected with an inlet of the regenerated liquid absorption cylinder. According to the utility model, by arranging the evaporation, condensation collection and absorption structure units and adopting an ammonia water evaporation and ammonia gas jet absorption mode, ammonia is supplemented during regeneration of the alkaline etching liquid, so that the swelling amount of the alkaline etching liquid can be effectively reduced, and the treatment cost is reduced; the device is simple in structure, small in occupied area and high in automation degree, and equipment modularization is easy to achieve.

Description

TECHNICAL FIELD

[0001] The utility model belongs to etching liquid regeneration technical field relates to a kind of ammonia evaporation and absorption device in the alkaline etching liquid regeneration process. BACKGROUND

[0002] In the production process of printed circuit board (PCB), alkaline etching is an important step, and alkaline etching solution is used in the process. Alkaline etching solution belongs to copper-ammonia complex ion system chemical liquid, mainly used for etching copper layer to form the required conductive pattern on the circuit board. With the etching, the copper ion concentration in the etching solution is higher and higher, and the etching speed slows down. Alkaline etching waste liquid is obtained. Based on the composition of alkaline etching waste liquid, the treatment scheme includes neutralization and regeneration treatment. The neutralization and compression mud treatment process is simple but the operation cost is high. When the copper ion reaches the discharge standard, there is a large amount of high ammonia-nitrogen wastewater, which is difficult to treat. Therefore, the current method is to recover and recycle, first reduce the copper content in the etching waste liquid, then add a certain amount of ammonia and ammonium chloride, and restore its etching ability.

[0003] In the existing alkaline etching solution regeneration and recovery process, the way to supplement ammonia is usually to add liquid ammonia or ammonia water to the alkaline etching solution circulation system. Liquid ammonia, as a flammable and explosive hazardous chemical, is not suitable for direct use as it can easily cause safety accidents. If ammonia water is used, the industrial ammonia water concentration is low, and the required amount is large. After adding ammonia water, the amount of ammonium chloride also increases, which makes the whole system expand in volume, and the etching solution cannot be fully recycled. The incremental part needs to be outsourced for treatment, resulting in an increase in the cost of waste liquid treatment.

[0004] CN 101676229A discloses a full-closed circuit PCB alkaline etching solution regeneration and copper recovery system, which includes four full-closed circuits, namely etching solution circulation, extractant circulation, back-extraction agent circulation and ammonia gas circulation. The technical method includes: extracting part of copper from etching waste liquid with extractant, adjusting copper ion concentration to the level of fresh etching solution through multi-stage separation, adding liquid ammonia with water jet, adjusting ammonia concentration with pH automatic control, and adjusting other components for production. In this system and method, the focus is on the recovery of copper when recycling alkaline etching waste liquid. When the ammonia concentration is increased, the traditional method of adding liquid ammonia is still used, which has safety risks and limited application range.

[0005] CN 214050483U discloses an ammonia water evaporator, the evaporator includes an evaporation tank and a heating tank, the bottom of the evaporation tank is fixedly connected with the bottom of the heating tank through a liquid delivery pipe, one side of the bottom of the evaporation tank is fixedly sleeved with a sampling pipe, one side of the evaporation tank is fixedly connected with a feed pipe and a gas return pipe, the other side of the evaporation tank is fixedly sleeved with a glass pipe and a gas storage tank, the top and the inside of the evaporation tank are fixedly connected with a liquid level probe and a cooling mechanism, the inside and one side top of the heating tank are fixedly connected with a heating mechanism and a communication pipe respectively, and the bottom of the heating tank is fixedly connected with a discharge pipe. The device discloses that the ammonia water is evaporated into ammonia gas only by the setting of the evaporation tank and the heating pipe, but the evaporated ammonia gas also contains a large amount of steam, and the device does not clearly show the subsequent cooling and absorption equipment, that is, how to adjust and regenerate the alkaline etching liquid.

[0006] In summary, for the supplement of ammonia in the regeneration and recovery process of the alkaline etching liquid, a suitable device is needed to convert the ammonia water into ammonia gas in the form of absorption, and the absorption mode is clear, so as to avoid excessive expansion of the volume of the etching liquid, and at the same time, the alkaline etching liquid can be fully recycled, and the processing cost is reduced. Utility model content

[0007] In view of the problems existing in the prior art, the purpose of the utility model is to provide an ammonia water evaporation and absorption device in the regeneration process of alkaline etching liquid. The device is provided with evaporation, condensation collection and absorption structure units, ammonia water evaporation and ammonia gas absorption are adopted to supplement ammonia in the regeneration process of alkaline etching liquid, the problem of excessive expansion of alkaline etching liquid caused by direct use of ammonia water can be effectively avoided, the discharge of waste liquid is reduced, the processing cost of alkaline etching liquid regeneration is reduced, the safety risk is low, and the degree of automation is high.

[0008] In order to achieve this purpose, the utility model adopts the following technical solutions:

[0009] The utility model provides a kind of ammonia water evaporation and absorption device in the regeneration process of alkaline etching liquid, the device includes the evaporation unit, condensation collection unit and absorption unit connected in sequence, the evaporation unit includes evaporator, the condensation collection unit includes condenser and condensate collection tank, the absorption unit includes jetifier and regeneration liquid absorption jar, the top outlet of the evaporator is connected with condensate collection tank via condenser, the top outlet of the condensate collection tank is connected with the gas phase inlet of jetifier, the liquid phase inlet of jetifier is connected with the bottom outlet of regeneration liquid absorption jar, and the outlet of jetifier is connected with the inlet of regeneration liquid absorption jar.

[0010] The utility model discloses a device for recycling alkaline etching liquid, which comprises an ammonia water storage tank, an evaporator, a condenser, a liquid level probe, a heating assembly, a pressure relief valve, a jet pump and a PLC control valve.

[0011] The following is the preferred technical scheme of the utility model, but not as the restriction of the technical scheme provided by the utility model, through the following technical scheme, the technical purpose and beneficial effect of the utility model can be better achieved and realized.

[0012] As the preferred technical scheme of the utility model, the device further comprises an ammonia water storage tank, and an outlet of the ammonia water storage tank is connected with an inlet of the evaporator.

[0013] As the preferred technical scheme of the utility model, the evaporator is internally provided with a heating assembly and a liquid level probe.

[0014] The evaporator is provided with a first liquid discharge port at the bottom and a pressure relief valve at the top.

[0015] In the utility model, the concentration of ammonia water to be evaporated is 20-28wt%, for example, 20wt%, 22wt%, 24wt%, 25wt%, 27wt% or 28wt% and the like, which serves as the source of ammonia gas, and the regenerated liquid obtained after copper recovery serves as the ammonia water acceptor; the ammonia water in the ammonia water storage tank is pumped to the evaporator through the PLC control valve and the delivery pump, and the remaining liquid in the evaporator is low-concentration ammonia water, which can be reconfigured into high-concentration ammonia water or subjected to subsequent treatment.

[0016] The evaporator is provided with a heating assembly, which heats the ammonia water, and the heating mode includes any one or a combination of air heating, electric heating, steam heating or hot water heating, and the heating temperature changes with the concentration of ammonia water and the vacuum degree, for example, the temperature in the evaporator can be selected from 70-85℃, for example, 70℃, 72℃, 75℃, 78℃, 80℃, 82℃ or 85℃ and the like, and the vacuum degree is selected from -50 to -80kPa, for example, -50kPa, -55kPa, -60kPa, -65kPa, -70kPa, -75kPa or -80kPa and the like.

[0017] As the preferred technical scheme of the utility model, the condenser comprises any one of a shell-and-tube condenser, a double-pipe condenser, a tube-and-shell condenser or a spiral plate condenser.

[0018] The condenser is provided with an ammonia gas inlet, an ammonia gas outlet and a condensate water outlet, and the ammonia gas outlet and the condensate water outlet are connected with the upper inlet and the middle and lower inlet of the condensate collecting tank respectively.

[0019] In the utility model, the gas generated by the evaporator includes ammonia gas and water vapor, and after entering the condenser, part of the gas is condensed, and the outlet of the condenser is divided into two parts, which are ammonia gas outlet and condensate water outlet respectively, the former outputs ammonia gas, and the latter is mainly used in the later stage of evaporation, and the water content is high, and after being condensed, the ammonia water enters the condensate collecting tank; the cooling medium used in the condenser is tap water or cooling circulating water, and the temperature is below 20 DEG C, for example, 20 DEG C, 18 DEG C, 16 DEG C, 15 DEG C, 14 DEG C, 12 DEG C or 10 DEG C etc.; the condenser is also provided with a cooling water inlet and a cooling water outlet, which enter from the lower end of the condenser and are discharged from the upper end and contact the outer wall of the condenser pipe.

[0020] As a preferred technical scheme of the utility model, the bottom of the condensate collecting tank is provided with a second liquid discharge port, and the second liquid discharge port is connected with the inlet of the evaporator.

[0021] In the utility model, when ammonia water is evaporated, part of the water will evaporate in addition to ammonia gas, and the evaporated water enters the condenser from the outlet of the evaporator and is cooled, although the condensation of water vapor is mainly, but part of the ammonia gas is also dissolved to obtain ammonia water, and after a certain volume is collected, the ammonia water can be pumped back to the evaporator for evaporation again.

[0022] As a preferred technical scheme of the utility model, the top outlet of the condensate collecting tank is an ammonia gas outlet, and an electric valve is arranged on the connecting pipeline of the ammonia gas outlet and the jet device.

[0023] As a preferred technical scheme of the utility model, a jet pump is arranged on the connecting pipeline between the bottom outlet of the regenerated liquid absorption cylinder and the liquid phase inlet of the jet device.

[0024] In the utility model, an electric valve, a jet device and a jet pump are arranged on the pipeline between the condensate collecting tank and the regenerated liquid absorption cylinder, the jet mixing of ammonia gas and regenerated liquid is realized in the jet device, and the jet mixture returns to the regenerated liquid absorption cylinder.

[0025] As a preferred technical scheme of the utility model, the outlet pipeline of the jet device extends into the liquid in the regenerated liquid absorption cylinder, and a first liquid level meter is arranged in the regenerated liquid absorption cylinder.

[0026] In the utility model, when the jet mixture returns to the regenerated liquid absorption cylinder, the outlet of the pipeline needs to be immersed in the regenerated liquid, so that the loss of ammonia gas caused by the spraying of the regenerated liquid into the air when the regenerated liquid returns to the absorption cylinder is avoided.

[0027] The utility model discloses a regeneration liquid is through the jet flow of jet flow ware, forms certain vacuum degree in the jet flow ware, and the airflow absorption port of jet flow ware is connected to the condensate collection jar, because evaporimeter, condenser, condensate collection jar are all connected through the pipeline, so the three are all in the negative pressure state when the jet flow ware works, and the negative pressure can reach -50~-80kPa when normally working, for example -50kPa, -55kPa, -60kPa, -65kPa, -70kPa, -75kPa or -80kPa etc., and the pH of the regeneration liquid after the treatment of the device is greater than 9.0, for example 9.0, 9.2, 9.5, 9.8 or 10.0 etc., and no increment, can be pumped to the regeneration liquid storage tank and stored, and the ammonia nitrogen content in the ammonia water after evaporation is less than 100ppm, for example 100ppm, 90ppm, 80ppm, 70ppm, 60ppm or 50ppm etc.

[0028] As the preferred technical scheme of the utility model, the absorption unit further comprises a regeneration liquid dispensing cylinder, and a lower outlet of the regeneration liquid dispensing cylinder is connected to an inlet of the regeneration liquid absorption cylinder.

[0029] As the preferred technical scheme of the utility model, a dispensing pump is arranged on a connecting pipeline between the lower outlet of the regeneration liquid dispensing cylinder and the inlet of the regeneration liquid absorption cylinder, and a second liquid level meter and a stirring assembly are arranged in the regeneration liquid dispensing cylinder.

[0030] In the utility model, the regeneration liquid dispensing cylinder provides regeneration liquid for the regeneration liquid absorption cylinder, the medicine solution in the regeneration liquid dispensing cylinder is low-copper regeneration liquid after electrolysis, and when the chlorine ion concentration is low, the regeneration liquid dispensing cylinder can add ammonium chloride accordingly, and then send the ammonium chloride to the regeneration liquid absorption cylinder to absorb ammonia gas, so that the finally obtained regeneration liquid meets the requirements of being used for alkaline etching again.

[0031] Compared with the prior art, the utility model has the following beneficial effects:

[0032] (1) The device of the utility model is provided with the structure units of evaporation, condensation collection and absorption, ammonia water evaporation and ammonia gas jet flow absorption are adopted to supplement ammonia in the regeneration process of alkaline etching liquid, so that the cyclic utilization of the alkaline etching liquid is realized, the expansion amount of the alkaline etching liquid is effectively reduced, the discharge of waste water is reduced, the additional treatment of waste liquid is not needed, and the treatment cost is reduced.

[0033] (2) The ammonia water after evaporation treatment has low concentration, the secondary treatment is simple, liquid ammonia is not needed, and the safety risk can be reduced.

[0034] (3) The device of the utility model has simple structure, small floor area and high automation degree, and the equipment modularization is easy to realize. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 is a structural schematic view of an ammonia water evaporation and absorption device in a basic etching liquid regeneration process according to an embodiment 1 of the present application;

[0036] Wherein, 1-evaporator, 11-heating assembly, 2-condenser, 3-condensed liquid collection tank, 4-jet device, 5-regeneration liquid absorption cylinder, 6-jet pump, 7-regeneration liquid blending cylinder. DETAILED DESCRIPTION

[0037] In order to better illustrate the present application, the technical scheme of the present application is understood, the present application is further described in detail below, but the following examples are only simple examples of the present application, and do not represent or limit the protection scope of the present application, the protection scope of the present application is subject to the claims.

[0038] The following is a typical but non-limiting embodiment of the present application:

[0039] Embodiment 1:

[0040] The present embodiment provides a kind of ammonia water evaporation and absorption device in basic etching liquid regeneration process, the structural schematic view of the device as shown in Figure 1 Including evaporative unit, condensing collection unit and absorption unit connected in sequence, the evaporative unit includes evaporator 1, the condensing collection unit includes condenser 2 and condensed liquid collection tank 3, the absorption unit includes jet device 4 and regeneration liquid absorption cylinder 5, the top outlet of the evaporator 1 is connected with condensed liquid collection tank 3 through condenser 2, the top outlet of the condensed liquid collection tank 3 is connected with the gas phase inlet of jet device 4, the liquid phase inlet of jet device 4 is connected with the bottom outlet of regeneration liquid absorption cylinder 5, and the outlet of jet device 4 is connected with the inlet of regeneration liquid absorption cylinder 5.

[0041] The device further includes ammonia water storage tank, and the outlet of the ammonia water storage tank is connected with the inlet of the evaporator 1.

[0042] The evaporator 1 is provided with heating assembly 11 and liquid level probe, and the heating assembly 11 is a heat pump heating assembly.

[0043] The bottom of the evaporator 1 is provided with a first liquid discharge port, and the top of the evaporator 1 is provided with a pressure relief valve.

[0044] The condenser 2 is a shell-and-tube condenser, and the condenser 2 is provided with an ammonia gas inlet, an ammonia gas outlet and a condensed water outlet, and the ammonia gas outlet and the condensed water outlet are connected with the upper inlet and the middle and lower inlet of the condensed liquid collection tank 3, respectively.

[0045] The bottom of the condensed liquid collection tank 3 is provided with a second liquid discharge port, and the second liquid discharge port is connected with the inlet of the evaporator 1.

[0046] The top outlet of the condensate collection tank 3 is an ammonia gas outlet, and an electric valve is arranged on the connecting pipeline between the condensate collection tank 3 and the jet device 4.

[0047] A jet pump 6 is arranged on the connecting pipeline between the bottom outlet of the regeneration liquid absorption cylinder 5 and the liquid inlet of the jet device 4.

[0048] The outlet pipeline of the jet device 4 extends into the liquid in the regeneration liquid absorption cylinder 5, and a first liquid level meter is arranged in the regeneration liquid absorption cylinder 5.

[0049] The absorption unit further comprises a regeneration liquid dispensing cylinder 7, and the lower outlet of the regeneration liquid dispensing cylinder 7 is connected to the inlet of the regeneration liquid absorption cylinder 5.

[0050] A dispensing pump is arranged on the connecting pipeline between the lower outlet of the regeneration liquid dispensing cylinder 7 and the inlet of the regeneration liquid absorption cylinder 5, and a second liquid level meter and a stirring assembly are arranged in the regeneration liquid dispensing cylinder 7.

[0051] Embodiment 2:

[0052] The embodiment provides an ammonia water evaporation and absorption device in an alkaline etching liquid regeneration process, and the device comprises an evaporation unit, a condensation collection unit and an absorption unit connected in sequence, the evaporation unit comprises an evaporator 1, the condensation collection unit comprises a condenser 2 and a condensate collection tank 3, and the absorption unit comprises a jet device 4 and a regeneration liquid absorption cylinder 5.

[0053] The device further comprises an ammonia water storage tank, and the outlet of the ammonia water storage tank is connected to the inlet of the evaporator 1.

[0054] The evaporator 1 is provided with a heating assembly 11 and a liquid level probe, and the heating assembly 11 is an electric heating assembly.

[0055] The evaporator 1 is provided with a first liquid discharge port at the bottom and a pressure relief valve at the top.

[0056] The condenser 2 is a shell-and-tube condenser, and the condenser 2 is provided with an ammonia gas inlet, an ammonia gas outlet and a condensate water outlet, and the ammonia gas outlet and the condensate water outlet are connected to the upper inlet and the middle and lower inlets of the condensate collection tank 3, respectively.

[0057] The bottom of the condensate collection tank 3 is provided with a second liquid discharge port, and the second liquid discharge port is connected to the inlet of the evaporator 1.

[0058] The top outlet of the condensate collection tank 3 is an ammonia gas outlet, and an electric valve is arranged on the connecting pipeline between the condensate collection tank 3 and the jet device 4.

[0059] A jet pump 6 is arranged on the connecting pipeline between the bottom outlet of the regeneration liquid absorption cylinder 5 and the liquid inlet of the jet device 4.

[0060] The outlet pipeline of the jet device 4 extends into the liquid in the regeneration liquid absorption cylinder 5, and a first liquid level meter is arranged in the regeneration liquid absorption cylinder 5.

[0061] The absorption unit further comprises a regeneration liquid dispensing cylinder 7, and the lower outlet of the regeneration liquid dispensing cylinder 7 is connected to the inlet of the regeneration liquid absorption cylinder 5.

[0062] A dispensing pump is arranged on the connecting pipeline between the lower outlet of the regeneration liquid dispensing cylinder 7 and the inlet of the regeneration liquid absorption cylinder 5, and a second liquid level meter and a stirring assembly are arranged in the regeneration liquid dispensing cylinder 7.

[0063] Embodiment 3:

[0064] The embodiment provides an ammonia water evaporation and absorption device in a basic etching liquid regeneration process, and the device comprises an evaporation unit, a condensation collection unit and an absorption unit connected in sequence, the evaporation unit comprises an evaporator 1, the condensation collection unit comprises a condenser 2 and a condensate collection tank 3, and the absorption unit comprises a jet device 4 and a regeneration liquid absorption cylinder 5.

[0065] The device further comprises an ammonia water storage tank, and the outlet of the ammonia water storage tank is connected to the inlet of the evaporator 1.

[0066] The evaporator 1 is provided with a heating assembly 11 and a liquid level probe, and the heating assembly 11 is a steam heating assembly.

[0067] The evaporator 1 is provided with a first liquid discharge port at the bottom and a pressure relief valve at the top.

[0068] The condenser 2 is a double-pipe condenser, and the condenser 2 is provided with an ammonia gas inlet, an ammonia gas outlet and a condensate water outlet, and the ammonia gas outlet and the condensate water outlet are connected to the upper inlet and the middle and lower inlets of the condensate collection tank 3, respectively.

[0069] The bottom of the condensate collection tank 3 is provided with a second liquid discharge port, and the second liquid discharge port is connected to the inlet of the evaporator 1.

[0070] The top outlet of the condensate collecting tank 3 is an ammonia gas outlet, and an electric valve is arranged on the connecting pipeline of the jet device 4.

[0071] A jet pump 6 is arranged on the connecting pipeline between the bottom outlet of the regenerated liquid absorbing cylinder 5 and the liquid phase inlet of the jet device 4.

[0072] The outlet pipeline of the jet device 4 extends into the liquid in the regenerated liquid absorbing cylinder 5, and a first liquid level meter is arranged in the regenerated liquid absorbing cylinder 5.

[0073] The device in the above embodiment is used for evaporation and absorption of ammonia water, ammonia is supplemented into the regenerated liquid, the recycling of the alkaline etching liquid is realized, and the specific steps include the following steps:

[0074] Ammonia water is provided from the ammonia water storage tank to the evaporator, and evaporation of the ammonia water is realized through heating, different heating modes are adopted according to the type of the heating assembly, the gas after evaporation is condensed from the top, part of the gas after condensation enters the condensate collecting tank, the liquid after condensation is collected at the bottom of the condensate collecting tank, and after a certain volume is collected, the liquid is returned to the evaporator to be mixed with the ammonia water and evaporated again, and the ammonia water after evaporation in the evaporator is discharged from the bottom and further treated;

[0075] The uncondensed ammonia gas enters the condensate collecting tank from the top, enters the jet device, according to the structure and operation of the jet device, a certain vacuum degree is maintained, the ammonia gas is mixed with the regenerated liquid from the regenerated liquid absorbing cylinder by jet, the regenerated liquid is transported to the jet device by the jet pump, the gas-liquid mixture after jet mixing enters the regenerated liquid absorbing cylinder and directly immerses in the liquid to avoid loss of the ammonia gas, the regenerated liquid in the regenerated liquid absorbing cylinder comes from the regenerated liquid dispensing cylinder, the regenerated liquid after copper recovery and needing ammonia supplement is stored in the regenerated liquid dispensing cylinder, after the ammonia gas is absorbed by the regenerated liquid absorbing cylinder, the alkaline etching liquid after regeneration is obtained when the pH value reaches the required value, and the alkaline etching liquid is stored for standby use.

[0076] As can be seen from the above embodiment, the device provided by the utility model realizes the recycling of the alkaline etching liquid by supplementing ammonia in the regeneration process of the alkaline etching liquid through the setting of the structure units such as evaporation, condensation collection and absorption, the ammonia water evaporation and ammonia gas jet absorption, effectively reduces the expansion amount of the alkaline etching liquid, reduces the discharge of waste water, does not need to perform additional treatment on the waste liquid, reduces the treatment cost, the ammonia water after evaporation treatment has a low concentration, the secondary treatment is simple, liquid ammonia is not needed, the safety risk can be reduced, the device has simple structure, small land occupation and high automation degree, and the modularization of equipment is easy to realize.

[0077] The applicant declares that the utility model is illustrated by the above embodiments, but the utility model is not limited to the above detailed device, namely, it does not mean that the utility model must rely on the above detailed device to be implemented. The skilled in the art should understand that any improvement of the utility model, equivalent replacement of the utility model device and addition of auxiliary device, selection of specific mode and the like fall within the protection scope and the disclosure scope of the utility model.

Claims

1. An ammonia water evaporation and absorption device in a regeneration process of an alkaline etching solution, characterized by, The device comprises a vaporization unit, a condensation collection unit and an absorption unit connected in sequence, the vaporization unit comprises a vaporizer, the condensation collection unit comprises a condenser and a condensate collection tank, and the absorption unit comprises a jet and a regeneration liquid absorption cylinder, the top outlet of the vaporizer is connected with the condensate collection tank through the condenser, the top outlet of the condensate collection tank is connected with the gas phase inlet of the jet, the liquid phase inlet of the jet is connected with the bottom outlet of the regeneration liquid absorption cylinder, and the outlet of the jet is connected with the inlet of the regeneration liquid absorption cylinder.

2. The ammonia water evaporation and absorption device in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, The device further comprises an ammonia water storage tank, and the outlet of the ammonia water storage tank is connected with the inlet of the vaporizer.

3. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, The vaporizer is provided with a heating assembly and a liquid level probe; The bottom of the vaporizer is provided with a first liquid discharge port, and the top of the vaporizer is provided with a pressure relief valve.

4. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, The condenser comprises any one of a tube type condenser, a jacket type condenser, a shell and tube type condenser or a spiral plate type condenser. The condenser is provided with an ammonia gas inlet, an ammonia gas outlet and a condensate water outlet, and the ammonia gas outlet and the condensate water outlet are connected with the upper inlet and the middle and lower inlet of the condensate collection tank, respectively.

5. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, The bottom of the condensate collection tank is provided with a second liquid discharge port, and the second liquid discharge port is connected with the inlet of the vaporizer.

6. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, The top outlet of the condensate collection tank is an ammonia gas outlet, and an electric valve is arranged on the connecting pipeline between the top outlet and the jet.

7. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, A jet pump is arranged on the connecting pipeline between the bottom outlet of the regeneration liquid absorption cylinder and the liquid phase inlet of the jet.

8. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, The outlet pipeline of the jet extends into the liquid in the regeneration liquid absorption cylinder, and the regeneration liquid absorption cylinder is provided with a first liquid level meter.

9. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 1, characterized in that, The absorption unit further comprises a regeneration liquid dispensing cylinder, and the lower outlet of the regeneration liquid dispensing cylinder is connected with the inlet of the regeneration liquid absorption cylinder.

10. The ammonia evaporation and absorption apparatus in the regeneration process of the alkaline etching solution according to claim 9, characterized in that, A dispensing pump is arranged on the connecting pipeline between the lower outlet of the regeneration liquid dispensing cylinder and the inlet of the regeneration liquid absorption cylinder, and the regeneration liquid dispensing cylinder is provided with a second liquid level meter and a stirring assembly.

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