Vacuum chamber conveying device

Abstract

The utility model discloses a vacuum chamber conveying device. The vacuum chamber conveying device comprises a first vacuum chamber, a second vacuum chamber, a transfer module, a sample feeding platform and a sample testing platform, the second vacuum chamber is communicated with the first vacuum chamber through a fastener; the transfer module and the sample testing platform are arranged in the first vacuum chamber, a tested sample and a to-be-tested sample can be alternated under the driving of the motor, and then the sample testing platform receives the to-be-tested sample and then carries out detection; meanwhile, the transfer module can adjust and fix the samples according to the samples of different specifications; the sample conveying platform is arranged in the second vacuum chamber and can receive the detected sample and return the detected sample to the second vacuum chamber for sample replacement; samples can be adjusted and fixed according to different models of samples, the samples can be continuously replaced, and the waiting time for sample detection is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to scanning electron microscope technical field especially, it is a kind of scanning electron microscope vacuum chamber sample automatic continuous transfer device. BACKGROUND

[0002] Scanning electron microscope is using electron optics principle, using electron beam to bombard sample surface, and the secondary electron and backscattered electron generated thereby are collected by detector, so that sample can be observed with higher magnification, which makes scanning electron microscope have important role in semiconductor, new material, biology and other multiple fields.In the use of scanning electron microscope, sample transfer function is essential.In prior art scheme, there is a scheme of transmission by pushing module, the fork mechanism is made to extend or retract by driving mechanism on vacuum chamber to convey sample, and when replacing sample between vacuum and atmospheric environment, it also needs to be taken out after vacuum is destroyed.

[0003] In the use of above scheme, since vacuum of vacuum chamber needs to be destroyed and restored every time sample is replaced, the following problems will be caused under this condition: vacuum pump needs to be used to pump air when restoring vacuum, and the waiting time for restoring vacuum is long, so that sample replacement efficiency is low, and it is not suitable for large batch continuous detection sample.

[0004] Due to the above reasons, under the existing conditions, the utility model designs sample feeding device with transfer function, transfers during conveying sample, realizes the automatic continuous sample receiving and sending of sample, greatly improves detection efficiency, and saves sample replacement time.

[0005] It should be noted that the above introduction to technical background is only for the convenience of clearly and completely describing the technical scheme of the utility model, and for the convenience of understanding by those skilled in the art.It cannot be considered that the above technical scheme is known to those skilled in the art only because these schemes are described in the background technology part of the utility model. CONTENT OF UTILITY MODEL

[0006] The utility model provides a kind of vacuum chamber conveying device to solve at least one problem existing in the background art.

[0007] The utility model provides a vacuum chamber conveying device, its characterized in be including: first vacuum chamber, second vacuum chamber, transfer module, sample platform, measure sample platform, second vacuum chamber and first vacuum chamber pass through fastener intercommunication, transfer module, measure sample platform set up in first vacuum chamber, can make the sample that has detected with the sample that waits for detecting under the drive of motor to carry out alternation, then measure sample platform takes the sample that waits for detecting and carries out detection, simultaneously transfer module can adjust fixed sample according to different specification sample, sample platform sets up in second vacuum chamber, can take the sample that has detected and returns back in second vacuum chamber and carries out sample sample.

[0008] Optionally, the first vacuum chamber has a containing space comprising an opening, and the transfer module and the sample platform are arranged in the containing space.

[0009] Optionally, the second vacuum chamber has a containing space comprising an opening, and the sample platform is arranged in the containing space.

[0010] Optionally, the transfer module comprises a support frame, a support column, a main body fixing plate, a top end fixing plate, a bottom end fixing plate, a motor fixing plate, a support fixing plate, a screw rod support seat, a screw rod fixing seat, a screw rod nut, a screw rod, a guide shaft, a driven synchronous wheel, a driving synchronous wheel, a synchronous belt, and the 17 components are fixed and assembled into the transfer module by fasteners; the main body fixing plate is connected with the top end fixing plate and the bottom end fixing plate; the screw rod module is composed of the support fixing plate, the screw rod nut, the screw rod, the guide shaft and the linear bearing; the screw rod module is fixed between the top end fixing plate and the screw rod support seat and the bottom end fixing plate and the screw rod fixing seat; the support frame is fixed on the screw rod module by the support column supported by the connecting piece of the screw rod module; the motor is connected with the driving synchronous wheel and the motor fixing plate, one end of the screw rod is connected with the driven synchronous wheel, and the driven synchronous wheel is connected with the driving synchronous wheel through the synchronous belt to realize synchronous transmission; the array of U-shaped holes on the support frame can adjust and fix different specifications of samples, and the support frame moves up and down by driving the screw rod module by the motor to realize the alternation between the detected sample and the sample to be detected.

[0011] Optionally, the sample platform comprises a fork mechanism driven by a motor to move in the first vacuum chamber and the second vacuum chamber.

[0012] Optionally, the sample platform comprises a built-in linear motor, a fixing plate and a shell for left and right movement and up and down lifting of the sample. BRIEF DESCRIPTION OF DRAWINGS

[0013] The drawings described herein are intended to provide further understanding of the present application, form a part of the present application, and the illustrative embodiments of the present application and the description thereof are used to explain the present application, and do not constitute an improper limitation of the present application. The text above the figures is the textual description of the figures.

[0014] Fig. 1 is a schematic diagram of the overall structure of one embodiment of the present application.

[0015] Fig. 2 is a schematic diagram of the transfer mold module structure in one embodiment of the present application.

[0016] Fig. 3 is an exploded schematic diagram of the transfer mold module in one embodiment of the present application.

[0017] Fig. 4 is a schematic diagram of the overall cross-section of one embodiment of the present application.

[0018] The reference numerals in the drawings are as follows: 1 first vacuum chamber; 2 second vacuum chamber; 3 transfer mold module; 301 support frame; 30 main body fixing plate; 303 top end fixing plate; 304 bottom end fixing plate; 305 motor fixing plate; 306 support fixing plate; 307 screw rod support seat; 308 support column; 309 screw rod nut; 310 linear bearing; 311 screw rod; 312 guide shaft; 313 screw rod fixing seat; 314 driven synchronous wheel; 315 servo motor; 316 driving synchronous wheel; 317 synchronous belt; 4 sample feeding platform; 5 sample measuring platform. DETAILED DESCRIPTION

[0019] The exemplary embodiments disclosed by the present application will be described in greater detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present application. However, it will be apparent to one skilled in the art that the present application can be practiced without one or more of these specific details. In other instances, well-known features have not been described in detail to avoid obscuring the present application. In this description, the same reference numerals are used to identify the same components in the various embodiments described.

[0020] In the drawings, the size of layers, regions, elements, and the like can be exaggerated for clarity. Like numbers refer to like elements throughout. It will be understood that when an element or layer is referred to as being "on" or "connected to" another element or layer, it can be directly on or connected to the other element or layer or intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element or layer, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present application. Similarly, a second element, component, region, layer or section discussed below could be termed a first element, component, region, layer or section without departing from the teachings of the present application.

[0021] According to an aspect of the present application, Fig. 1 exemplarily shows a schematic diagram of the overall structure of the device in one specific embodiment according to the present application. In order to facilitate the description, a sample measurement platform is additionally shown which cooperates with the vacuum chamber conveying device, and which is used to detect different positions of the sample. The vacuum chamber conveying device of the present application is used to convey the sample to be detected and the sample that has been detected. As shown in Fig. 1, the vacuum chamber conveying device provided by the present application at least comprises a first vacuum chamber 1, a second vacuum chamber 2, a transfer module 3, a sample feeding platform 4, and a sample measurement platform 5. The first vacuum chamber 1 and the second vacuum chamber 2 have accommodating spaces, and openings are formed in the accommodating spaces. The transfer module 3, the sample feeding platform 4, and the sample measurement platform 5 are respectively arranged in the accommodating spaces of the first vacuum chamber 1 and the second vacuum chamber 2. The first vacuum chamber 1, the second vacuum chamber 2, the transfer module 3, and the sample feeding platform 4 cooperatively serve as an organic whole and cooperatively work with the sample measurement platform 5, so as to realize vacuum chamber conveying.

[0022] The transfer module 3 used by the vacuum chamber conveying device provided by the embodiment comprises a support frame 301, a support column 308, a main body fixing plate 302, a top end fixing plate 303, a bottom end fixing plate 304, a motor fixing plate 305, a support fixing plate 306, a screw rod support seat 307, a screw rod fixing seat 313, a screw rod nut 309, a screw rod 311, a guide shaft 312, a driven synchronous wheel 314, a driving synchronous wheel 316, a synchronous belt 317, and a servo motor 315. The above 17 components are fixed and assembled into the transfer module 3 by fasteners. The assembly diagram is shown in FIG. 2 and FIG. 3. The main body fixing plate 302 is connected with the top end fixing plate 303 and the bottom end fixing plate 304. Then the screw rod module is composed of the support fixing plate 306, the screw rod nut 309, the screw rod 311, the guide shaft 312, and the linear bearing 310. After the top end fixing plate 303 is connected with the screw rod support seat 307 and the bottom end fixing plate 304 is connected with the screw rod fixing seat 313, the screw rod module can be fixed between them. The screw rod module is supported by the support column 308 through the connecting piece to fix the support frame 301 on the screw rod module. Then the motor 315 is connected with the driving synchronous wheel 316 and the motor fixing plate 305, one end of the screw rod 311 is connected with the driven synchronous wheel 314, and the driven synchronous wheel 314 is connected with the driving synchronous wheel 316 through the synchronous belt 317 to realize synchronous transmission. The array of U-shaped holes on the support frame 301 can be adjusted and fixed according to different specifications of samples. The support frame 301 moves up and down by driving the screw rod module by the servo motor 315 to realize the transfer and temporary storage between the detected samples and the to-be-detected samples. The sample feeding platform 4 is arranged in the second vacuum chamber and moves between the first vacuum chamber 1 and the second vacuum chamber 2, and is responsible for the transfer of the samples.

[0023] In one specific embodiment, the specific application scenario is as follows: the operator places the to-be-detected sample on the sample feeding platform in the second vacuum chamber 2. The second vacuum chamber 2 is closed to start vacuumizing. When a certain vacuum degree is reached, the sample feeding platform 4 starts to transfer the to-be-detected sample from the second vacuum chamber 2 to the target position in the first vacuum chamber 1. After reaching the target position, the sample testing platform 5 takes the to-be-detected sample for testing. The sample feeding platform returns from the first vacuum chamber 1 to the second vacuum chamber 2, and the vacuum chamber sample conveying is completed.

[0024] In another implementation process, for the detection process after the sample delivery process of a to-be-detected sample is completed, a new to-be-detected sample can be placed on the sample delivery platform 4 in the second vacuum chamber 2 again. After the detection of the last to-be-detected sample is completed, the sample delivery platform 5 places the detected sample on the transfer module 3 for temporary storage, at this time, the to-be-detected sample in the second vacuum chamber 2 can be directly transferred from the sample delivery platform 4 to the sample delivery platform 5 in the first vacuum chamber 1 for detection, in this process, the sample delivery platform 4 is in an empty state, then the transfer module 3 places the temporarily stored detected sample on the sample delivery platform 4 in the empty state, the sample delivery platform 4 transfers the detected sample to the second vacuum chamber 2, and the rapid and continuous sample replacement of the sample is completed.

[0025] It can be seen that the vacuum chamber delivery device of the utility model can realize accurate alignment when the sample is replaced. Especially, each component of the transfer module 3 is designed as a lightweight structure, which provides great convenience for installation and maintenance work. The sample detection efficiency is improved and large quantities of continuous sample detection can be realized, and different types of samples can be detected at the same time.

[0026] The above only describes the preferred embodiments of the utility model, and does not limit the utility model, any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A vacuum chamber transfer device, characterized by, The utility model relates to a kind of sample transfer device, including: First vacuum chamber, second vacuum chamber, transfer module, sample delivery platform, sample testing platform; Second vacuum chamber is communicated with first vacuum chamber by fastener;Transfer module, sample testing platform are arranged in first vacuum chamber, can be driven under motor to make the sample that has been detected and the sample to be detected are alternated, then sample testing platform is detected after being detected sample is fetched;While transfer module can be adjusted fixed sample according to different specifications sample;Sample delivery platform is arranged in second vacuum chamber, can fetch the sample that has been detected and is returned to second vacuum chamber to carry out sample sample.

2. A vacuum chamber conveyor as claimed in claim 1, wherein, First vacuum chamber has containing space including opening, and transfer module, sample testing platform are arranged in its containing space.

3. A vacuum chamber conveyor as defined in claim 1, wherein Second vacuum chamber has containing space including opening, and sample delivery platform is arranged in its containing space.

4. A vacuum chamber conveyor as defined in claim 1, wherein Transfer module includes: support frame, support column, main body fixed plate, top end fixed plate, bottom end fixed plate, motor fixed plate, support fixed plate, screw rod support seat, screw rod fixed seat, screw rod nut, screw rod, guide shaft, linear bearing, driven synchronous wheel, driving synchronous wheel, synchronous belt, above 17 components of motor are fixedly assembled into transfer module by fastener;Main body fixed plate is connected with top end fixed plate and bottom end fixed plate;Then by support fixed plate, screw rod nut, screw rod, guide shaft and linear bearing, screw rod module is formed;After top end fixed plate is connected with screw rod support seat, bottom end fixed plate is connected with screw rod fixed seat, screw rod module can be fixed between them;Screw rod module is fixed on screw rod module by support column of connecting piece support, then motor is connected with driving synchronous wheel and motor fixed plate, one end of screw rod is connected with driven synchronous wheel, and driven synchronous wheel is connected with driving synchronous wheel by synchronous belt to realize synchronous transmission;Array U-shaped hole on support frame can be adjusted fixed according to different specifications sample, and the replacement between the sample that has been detected and the sample to be detected is realized by moving support frame up and down by motor driving screw rod module.

5. A vacuum chamber conveyor as defined in claim 1, wherein, Sample delivery platform includes fork mechanism driven by motor in first vacuum chamber, second vacuum chamber.

6. A vacuum chamber conveyor as defined in claim 1, wherein, Sample testing platform includes built-in linear motor, fixed plate, shell, to move sample left and right and lift up and down.

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