Double-layer diffusion quartz boat

Abstract

The utility model relates to the technical field of quartz boats, and discloses a double-layer diffusion quartz boat which comprises two lower-layer supporting frames, the tops of the two lower-layer supporting frames are fixedly connected with a connecting column, and the top of the connecting column is fixedly connected with two upper-layer connecting frames. A plurality of placing holes are formed in the two lower-layer supporting frames and the two upper-layer connecting frames, sleeve columns are in threaded connection with the left sides and the right sides of the exteriors of the multiple supporting columns, the exteriors of the two upper-layer connecting frames are slidably connected to the interiors of the sliding grooves, conical columns are fixedly connected to the interiors of the multiple sleeve columns, and the two ends of the conical columns are fixedly connected to the interiors of the conical columns. Alignment holes are formed in the left sides and the right sides of the multiple supporting columns correspondingly. According to the utility model, through the matching of the sleeve column and the placing hole, the device can flexibly adapt to materials with different sizes, the stability of the materials in the high-temperature treatment process is ensured, and the design not only improves the operation safety, but also ensures the processing quality, and meets diversified use requirements.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz boat technical field especially relates to a double -deck diffusion quartz boat. BACKGROUND

[0002] When high temperature processing is carried out on semiconductor, double -deck diffusion quartz boat is often used, it is made of high -purity quartz material mainly, to bear extremely high temperature and have good resistance to chemical corrosion. The design of quartz boat ensures the stability and uniformity of material in the heating process, thereby improves processing efficiency and the quality of final product, therefore, usually will be divided into custom quartz boat, standard size quartz boat, disposable quartz boat, detachable quartz boat.

[0003] The detachable quartz boat is composed of upper shell and lower shell, support frame, placing plate, fixing frame and the like, the upper shell and the lower shell are tightly combined with each other, form a sealed high temperature processing space, to ensure the stability and purity of material in the processing process. The support frame provides additional mechanical support, ensures that the quartz boat can still maintain the shape under high temperature, does not deform or displace, and the placing plate provides firm support for the material to be processed, ensures uniform heating.

[0004] But in use, part of quartz boat is fixed when using, the design is not enough rigorous, lead to when adjusting position, cannot carry out accurate fixing, thereby produces loose phenomenon, lead to the displacement of processing material in high temperature environment, influence processing consistency and quality, for this, a double -deck diffusion quartz boat is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0005] In order to make up for the above shortage, the utility model provides a double -deck diffusion quartz boat, aims at improving the problem that part of device in prior art cannot carry out accurate fixing and produces looseness when adjusting position.

[0006] In order to realize the above purpose, the utility model adopts the following technical scheme:

[0007] A double -deck diffusion quartz boat, including two lower layer support frames, the top of two lower layer support frames is fixedly connected with connecting column, the top of connecting column is fixedly connected with two upper layer connecting frames, the adjacent side of two lower layer support frames and two connecting columns is slidably connected with a plurality of support columns, a plurality of placing holes are set up in the inside of two lower layer support frames and two upper layer connecting frames, the outside left and right sides of a plurality of support columns are screw connected with sleeve column, the inside of two connecting columns is set up with sliding slot, the outside of two upper layer connecting frames is slidably connected in the inside of sliding slot, a plurality of sleeve columns are fixedly connected with tapered column in the inside, the left and right sides of a plurality of support columns are all set up with alignment hole;

[0008] As a further description of the above technical solutions:

[0009] The bottom of the lower layer support frame is fixedly connected with a plurality of connecting plates, the bottom of the plurality of connecting plates is fixedly connected with a bottom plate, a fixing hole is formed in the inside of the bottom plate, and a limiting ring is fixedly connected to the outside right side of the two connecting columns;

[0010] As a further description of the above technical solutions:

[0011] A plurality of placing grooves are formed in the inside of the plurality of support columns, and the plurality of support columns and the plurality of placing grooves are matched to fix the object;

[0012] As a further description of the above technical solutions:

[0013] The plurality of tapered columns are tapered, the plurality of sleeve columns are respectively threadedly connected in the plurality of support columns, and the plurality of tapered columns can be fixed in the inside of the plurality of alignment holes;

[0014] As a further description of the above technical solutions:

[0015] The plurality of bottom plates can support the entire device, and processing can be stably performed;

[0016] As a further description of the above technical solutions:

[0017] A plurality of circular grooves are formed in the outside of the plurality of sleeve columns, and the plurality of sleeve columns can be conveniently disassembled and assembled;

[0018] As a further description of the above technical solutions:

[0019] The plurality of placing holes are designed to be matched with the outside of the support columns;

[0020] As a further description of the above technical solutions:

[0021] The inside front side of the plurality of alignment holes can be matched with the tail end of the tapered column to be fixed.

[0022] The utility model has the advantages of the following:

[0023] 1、The utility model discloses a sleeve column and a placing hole are matched, the device can flexibly adapt to materials of different sizes, the universality and applicability of the whole are improved, the close combination of the tapered column and the alignment hole further enhances the fixing effect, ensures the stability of the material in the high-temperature processing process, this design not only improves the safety of operation, but also ensures the processing quality, satisfies the diversified use demand.

[0024] 2. The utility model discloses a bottom plate and fixed hole effective collocation, and the device ensures that the position of material is accurately fixed during processing, greatly reduces the deviation phenomenon caused by vibration or thermal deformation, and the design enhances the stability of the whole system, makes material keep good alignment under high temperature environment, realizes consistency and reliability during processing. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 A three-dimensional schematic view of a double-layer diffusion quartz boat is provided for the utility model;

[0026] Figure 2 A structure schematic view of a sliding groove of a double-layer diffusion quartz boat is provided for the utility model;

[0027] Figure 3 A structure schematic view of a conical column of a double-layer diffusion quartz boat is provided for the utility model;

[0028] Figure 4 A structure schematic view of an alignment hole of a double-layer diffusion quartz boat is provided for the utility model.

[0029] Legend:

[0030] 1, lower support frame;2, connecting column;3, upper connecting frame;4, support column;5, sleeve column;6, placing hole;7, sliding groove;8, conical column;9, alignment hole;10, connecting plate;11, fixed hole;12, bottom plate;13, limit ring;14, placing groove. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0032] REFERENCE Figures 2 to 4The utility model provides an embodiment: a double -deck diffusion quartz boat, two lower layer support frame 1's top fixedly connected with connecting column 2, design is cylindrical, to provide excellent strength and bending resistance, two upper layer connecting frame 3 are fixedly connected to the top of connecting column 2, and its design is to ensure the stability when long time high temperature is used, the adjacent side slidingly connected with a plurality of support column 4 of two lower layer support frame 1 and two connecting column 2, and its design saves space and guarantees the flexibility of support, a plurality of placing hole 6 are seted up in two lower layer support frame 1 and two upper layer connecting frame 3, the design of a plurality of placing hole 6 can make its inside and support column 4 outside mutually adhere, have good stability and fixed effect, a plurality of support column 4's outside left and right sides are screw -threaded with sleeve column 5, ensure that it can firmly be connected with support column 4 and be convenient to fix, the inside of two connecting column 2 is seted up with the sliding slot 7, can provide the direction for the sliding of upper layer connecting frame 3, ensure that it moves stably in the operation process, the outside of two upper layer connecting frame 3 is slidingly connected in the inside of sliding slot 7, a plurality of sleeve column 5's inside fixedly connected with conical column 8, the left and right sides of a plurality of support column 4 are seted up with alignment hole 9, a plurality of conical column 8 are conical, the shape design is top thin, bottom wide, through a plurality of sleeve column 5 are screw -threaded in a plurality of support column 4 respectively, can make its a plurality of conical column 8 be fixed in a plurality of alignment hole 9's inside, a plurality of sleeve column 5's outside is seted up with a plurality of circular grooves, can be convenient to disassemble and install, the inside front side of a plurality of alignment hole 9, can mutually adhere with the tail end of conical column 8 and fix;

[0033] Referring to Figure 1 The bottom of the lower layer support frame 1 is fixedly connected with a plurality of connecting plates 10 for supporting the lower layer support frame 1, and the bottom of the plurality of connecting plates 10 is fixedly connected with a bottom plate 12 to withstand pressure and temperature fluctuations during equipment operation and ensure the stability of the overall structure. A fixing hole 11 is formed in the inside of the bottom plate 12, which can be conveniently fixed on the bottom plate 12 during assembly, providing additional stability. The outside right side of the two connecting columns 2 is fixedly connected with a limiting ring 13, which is designed to limit the movement range of the upper layer connecting frame 3. A plurality of placing grooves 14 are formed in the inside of the plurality of support columns 4, effectively fixing the objects to be processed. The plurality of support columns 4 and the plurality of placing grooves 14 cooperate to fix the objects, and the plurality of bottom plates 12 can support the entire device, enabling stable processing.

[0034] Working principle: when placing materials, first adjust the inside of the placement hole 6 through the support column 4, the design can place materials of different sizes in the lower support frame 1 and the upper connecting frame 3, and after placement is completed, it is fixed through the sleeve column 5 to prevent deviation during processing, which can cause uneven material processing, and when the sleeve column 5 is twisted, the tapered design of the tapered column 8 inside can rotate inside the alignment hole 9, which increases the fixation of the support column 4, wherein the design of multiple grooves outside the sleeve column 5 can prevent falling during twisting, and increase the friction force;

[0035] In the process of using the device, first place the lower support frame 1 on the workbench or in the furnace, make sure that the bottom is stably supported by the multiple connecting plates 10. At the same time, the limiting ring 13 limits the movement range of the upper connecting frame 3, so as to ensure that it remains stable during operation. Then, the bottom plate 12 bears the pressure from the operation of the equipment, keeping the overall structure stable. The operator places the object to be processed into the placement slot 14 inside the support column 4, which can effectively fix the object and prevent it from moving during processing.

[0036] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the foregoing detailed description of the present application, for those skilled in the art, it can still be modified, or part of the technical features of the equivalent replacement, within the spirit and principles of the present application, any modification, equivalent replacement, improvement, etc., should be included in the scope of protection of the present application.

Claims

1. A double diffusion quartz boat comprising two lower support frames (1), characterized in that: The top of two lower support frames (1) is fixedly connected with a connecting column (2), the top of the connecting column (2) is fixedly connected with two upper connecting frames (3), the adjacent side of two lower support frames (1) and two connecting columns (2) is slidably connected with a plurality of support columns (4), the inside of two lower support frames (1) and two upper connecting frames (3) is provided with a plurality of placing holes (6), the outside of a plurality of support columns (4) is threadedly connected with a sleeve column (5), the inside of two connecting columns (2) is provided with a sliding groove (7), the outside of two upper connecting frames (3) is slidably connected in the inside of the sliding groove (7), the inside of a plurality of sleeve columns (5) is fixedly connected with a tapered column (8), the left and right sides of a plurality of support columns (4) are provided with a positioning hole (9).

2. The double diffusion quartz boat according to claim 1, wherein: The bottom of the lower support frame (1) is fixedly connected with a plurality of connecting plates (10), the bottom of a plurality of connecting plates (10) is fixedly connected with a bottom plate (12), the inside of the bottom plate (12) is provided with a fixing hole (11), the outside right side of two connecting columns (2) is fixedly connected with a limiting ring (13).

3. The double diffusion quartz boat according to claim 1, wherein: The inside of a plurality of support columns (4) is provided with a plurality of placing grooves (14), which is fixed by the cooperation of a plurality of support columns (4) and a plurality of placing grooves (14).

4. The double diffusion quartz boat according to claim 1, wherein: A plurality of tapered columns (8) are tapered, a plurality of sleeve columns (5) are threadedly connected in a plurality of support columns (4) respectively, so that a plurality of tapered columns (8) can be fixed in a plurality of positioning holes (9).

5. The double diffusion quartz boat according to claim 2, wherein: A plurality of bottom plates (12) can support the entire device and can be processed stably.

6. The double diffusion quartz boat according to claim 1, wherein: A plurality of sleeve columns (5) are provided with a plurality of circular grooves on the outside, which can be conveniently disassembled and installed.

7. The double diffusion quartz boat of claim 1, wherein: The design of a plurality of placing holes (6) can make the inside and the outside of the support column (4) mutually fit.

8. The double diffusion quartz boat according to claim 1, wherein: The inside of a plurality of positioning holes (9) can be mutually fitted with the tail end of the tapered column (8) to be fixed.

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