Air floatation lifting platform and semiconductor processing equipment

Abstract

The utility model provides an air floatation lifting platform and semiconductor processing equipment, relates to the technical field of semiconductor processing, and aims to solve the problem that the supporting rigidity of the air floatation lifting platform is not easy to adjust. The air floatation lifting platform comprises a lifting basic mechanism and a lifting moving mechanism, the lifting basic mechanism comprises a lifting base and an air floatation bearing, the lifting moving mechanism comprises a lifting moving part, and the lifting moving part is arranged opposite to the lifting base in the mode that the lifting moving part can move relatively in the vertical direction; the lifting moving part is provided with at least three vertical side surfaces, each vertical side surface is correspondingly provided with at least two air bearings with different heights, and the air bearings are used for forming air films between the air bearings and the vertical side surfaces; the air bearing is connected with the lifting base through an adjusting assembly, and the adjusting assembly is used for adjusting the gap between the air bearing and the vertical side face. The supporting rigidity of the lifting moving part can be conveniently adjusted.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and more specifically, to an air-floating lifting platform and semiconductor processing equipment. Background Technology

[0002] In precision semiconductor manufacturing and measurement applications, high positioning accuracy is required for motion platforms in equipment such as lithography machines, large-panel LCD manufacturing and testing equipment, and optical scanning and inspection systems, where optical path limitations and equipment fixation are a concern. Ensuring high positioning accuracy necessitates coordinated operation of the air bearings supporting the lifting mechanism, requiring not only positional coordination but also coordinated supporting forces. However, current technologies present complex adjustment processes for multiple air bearings, making it difficult to guarantee effective overall horizontal support for the lifting mechanism. Utility Model Content

[0003] The first objective of this utility model is to provide an air-floating lifting platform to solve the technical problem that the support stiffness of existing air-floating lifting platforms is not easily adjustable.

[0004] The first aspect of this utility model provides an air-floating lifting platform, comprising a lifting base mechanism and a lifting moving mechanism. The lifting base mechanism includes a lifting base and air-floating bearings. The lifting moving mechanism includes a lifting moving component, which is arranged opposite to the lifting base in a manner capable of relative movement in the vertical direction. The lifting moving component has at least three vertical sides, and each vertical side is correspondingly provided with at least two air-floating bearings of different heights. The air-floating bearings are used to form an air film between the air-floating bearings and the vertical sides. The air-floating bearings are connected to the lifting base through an adjusting component, which is used to adjust the gap between the air-floating bearings and the vertical sides.

[0005] The beneficial effects of this new air-floating lifting platform are:

[0006] By setting an adjustment component to connect the air bearing and the lifting base, the gap between the air bearing and the vertical side can be adjusted, thereby easily changing the stiffness of the vertical side supported by the corresponding air bearing, and thus realizing the adjustment of the air bearing stiffness of each vertical side of the lifting moving part.

[0007] In an optional technical solution, the adjustment assembly includes multiple adjustment rods, which are movably connected to the lifting base. The adjustment rods are capable of moving relative to the lifting base in a direction toward or away from the vertical side. Multiple air bearings on the outer side of each vertical side are independently connected to the adjustment rods.

[0008] In an optional technical solution, the lifting base further includes an adjustment through hole, the adjustment through hole having an internal thread, the adjustment rod having an external thread, and the adjustment rod and the adjustment through hole being connected through the engagement of the external thread and the internal thread.

[0009] In the optional technical solution, the number of air bearings arranged opposite to each of the vertical sides is three, and the three air bearings arranged opposite to the same vertical side are arranged in an isosceles triangle.

[0010] In an optional technical solution, the lifting base mechanism further includes an air circuit integration component installed on the lifting base, the air circuit integration component being connected to air bearings corresponding to two adjacent vertical sides via air pipes.

[0011] In an optional technical solution, the lifting and moving mechanism further includes a lifting base and an encoder assembly. A voice coil motor is located at the center of the lifting base, and the power output end of the voice coil motor is connected to the lifting and moving component. The encoder assembly includes an encoder mounting base, an encoder reading head, and an encoder grating scale. The encoder grating scale is disposed on the lifting and moving component, and the encoder grating scale is positioned opposite to the encoder reading head. The encoder reading head is connected to the lifting base via the encoder mounting base. The lifting and moving component has a receiving space, and the encoder assembly is located within this receiving space. The power output end of the voice coil motor is adjacent to the receiving space within the lifting and moving component.

[0012] In an optional technical solution, the lifting and moving mechanism further includes a first buffer limiting member, which is installed on the outer side of the lifting and moving member; the lifting base mechanism further includes a second buffer limiting member, which is installed on the upper surface of the lifting base, and a portion of the first buffer limiting member is located inside the second buffer limiting member; both the first and second buffer limiting members are made of elastic material.

[0013] In an optional technical solution, the lifting and moving mechanism further includes a trigger element, which is installed on the vertical side; the lifting base mechanism further includes a limit sensor, which is disposed opposite to the trigger element.

[0014] In an optional technical solution, the trigger includes a connecting part and a detected part, the detected part and the connecting part are fixedly disposed relative to each other, and the connecting part is installed on the vertical side; the number of triggers is two, the limit sensor is disposed in a one-to-one correspondence with the trigger, and the limit sensor and the trigger are configured such that when the lifting moving part is raised or lowered, the time when one of the detected parts is detected by the limit sensor is different from the time when the other trigger is detected.

[0015] The second aspect of this utility model is to provide a semiconductor processing equipment to solve the technical problem that the support stiffness of the air-floating lifting platform is not easy to adjust.

[0016] The semiconductor processing equipment provided in the second aspect of this utility model includes the aforementioned air-floating lifting platform.

[0017] By installing the aforementioned air-floating lifting platform in the semiconductor processing equipment, the semiconductor processing equipment accordingly possesses all the advantages of the aforementioned air-floating lifting platform, which will not be elaborated upon here. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments or background art of this utility model, the drawings used in the description of the embodiments or background art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1 This is a structural schematic diagram of the air-floating lifting platform provided in Embodiment 1 of this utility model;

[0020] Figure 2 This is a schematic diagram of the lifting and moving mechanism in the air-floating lifting platform provided in Embodiment 1 of this utility model, viewed from a top view.

[0021] Figure 3 This is a cross-sectional view of the lifting and moving mechanism in the air-floating lifting platform provided in Embodiment 1 of this utility model, showing the ABC angle.

[0022] Explanation of reference numerals in the attached figures:

[0023] 100-Lifting base mechanism; 110-Lifting base; 120-Air bearing; 130-Adjusting assembly; 131-Adjusting rod; 132-Locking nut; 140-Air circuit integrated assembly; 150-Second buffer limit component; 160-Limit sensor;

[0024] 200-Lifting and moving mechanism; 210-Lifting and moving component; 211-Vertical side; 220-Lifting base; 230-Encoder assembly; 231-Encoder mounting base; 232-Encoder reading head; 233-Encoder grating ruler; 240-First buffer limit component; 260-Trigger component; 261-Vertical part; 262-Horizontal cantilever part; 263-Bending part; 270-Voice coil motor. Detailed Implementation

[0025] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it.

[0026] Example 1:

[0027] Figure 1 This is a structural schematic diagram of the air-floating lifting platform provided in Embodiment 1 of this utility model; as shown. Figure 1 As shown, the air-floating lifting platform provided in Embodiment 1 of this utility model includes a lifting base mechanism 100 and a lifting moving mechanism 200. The lifting base mechanism 100 includes a lifting base 110 and an air-floating bearing 120. The lifting moving mechanism 200 includes a lifting moving component 210, which is arranged opposite to the lifting base 110 in a manner that allows relative movement in the vertical direction. The lifting moving component 210 has at least three vertical sides 211, and each vertical side 211 is provided with at least two air-floating bearings 120 of different heights. The air-floating bearings 120 are used to form an air film between the air-floating bearings 120 and the vertical sides 211. The air-floating bearings 120 are connected to the lifting base 110 through an adjusting component 130, which is used to adjust the gap between the air-floating bearings 120 and the vertical sides 211.

[0028] By setting the adjustment component 130 to connect the air bearing 120 and the lifting base 110, the gap between the air bearing 120 and the vertical side 211 can be adjusted, thereby conveniently changing the stiffness of the vertical side 211 supported by the corresponding air bearing 120, and thus realizing the adjustment of the air stiffness of each vertical side 211 of the lifting moving part 210.

[0029] In this embodiment, the lifting base 110 is a roughly sheet-like structure with a hollow center. The hollow space in the center of the lifting base 110 can accommodate the lifting and moving mechanism 200 and allow the lifting and moving component 210 to move vertically. The vertical sides 211 of the lifting and moving component 210 are all planar and located within a vertical plane, maintaining the same clearance with the corresponding air bearing 120 when the lifting and moving component 210 moves vertically. It should be noted that the lifting and moving component 210 has at least three vertical sides 211. While the number of vertical sides 211 in the lifting and moving component 210 is at least three, it is not limited to all sides being vertical sides 211. That is, the lifting and moving component 210 can also have non-vertical sides, as long as these sides are not opposite to the air bearing 120.

[0030] The vertical side 211 is correspondingly provided with the air bearing 120, indicating that the direction in which the air bearing 120 provides support force is perpendicular to the vertical side 211, and the air bearing 120 can support the vertical side 211 during the lifting and lowering process of the lifting moving part 210.

[0031] like Figure 1 As shown, optionally, the adjustment assembly 130 includes multiple adjustment rods 131, which are movably connected to the lifting base 110. The adjustment rods 131 can move relative to the lifting base 110 in a direction toward or away from the vertical side 211. Multiple air bearings 120 on the outer side of each vertical side 211 are independently connected to the adjustment rods 131.

[0032] By setting the adjusting rod 131 through the lifting base 110, the position of the air bearing 120 can be changed by controlling the adjusting rod 131, thereby changing the gap between the air bearing 120 and the vertical side 211.

[0033] Specifically, the air bearing 120 has a recess on the side facing away from the vertical side 211, and one end of the adjusting rod 131 can be inserted into and fit into the recess. By providing the recess for inserting one end of the adjusting rod 131, the adjusting rod 131 and the air bearing 120 can move together toward the vertical side 211. If the distance between the adjusting rod 131 and the vertical side 211 increases, when the air bearing 120 is ventilated, the gas pressure can drive the air bearing 120 to automatically move away from the vertical side 211 until the air bearing 120 presses against the adjusting rod 131.

[0034] like Figure 1 As shown, optionally, the lifting base 110 also includes an adjustment through hole, which is perpendicular to the vertical side 211. The adjustment through hole has an internal thread, and the adjustment rod 131 has an external thread. The adjustment rod 131 and the adjustment through hole are connected by the engagement of the external thread and the internal thread.

[0035] By connecting the adjusting rod 131 to the adjusting through hole via a threaded connection, the rotation of the adjusting rod 131 can be converted into axial movement of the adjusting rod 131 relative to the adjusting through hole through the threaded connection between the internal and external threads. Moreover, by utilizing the self-locking property of the thread, the adjusting rod 131 can be automatically fixed after rotation, so as to support the lifting moving part 210 through the air bearing 120.

[0036] In this embodiment, the recessed portion of the air bearing 120 and the adjusting rod 131 can either rotate relative to each other or be fixed relative to each other. Since the air bearing 120 can be integrated with the air circuit assembly 140 (described later) via an air pipe (not shown), the air pipe's placement inhibits the rotation of the air bearing 120. Therefore, the air bearing 120 can rotate relative to the adjusting rod 131. Specifically, the recessed portion of the air bearing 120 and the adjusting rod 131 are in clearance fit.

[0037] In this embodiment, the outer end of the adjusting rod 131, that is, the end exposed on the side of the lifting base 110, is provided with a torque applying part. Specifically, the torque applying part can be a regular hexagonal cross section, and the torque applying part is coaxially arranged with the axis of the adjusting rod 131. In addition, a locking nut 132 can be threadedly connected to the adjusting rod 131 so that after the adjusting rod 131 has rotated relative to the lifting base 110, the locking nut 132 can be used to further lock the adjusting rod 131 and the lifting base 110, preventing the adjusting rod 131 from loosening during use.

[0038] In another implementation, the adjusting rod 131 can also be a smooth rod passing through the adjusting through hole, which is a smooth hole, allowing the position of the air bearing 120 to be changed directly by moving the smooth rod axially. A threaded hole perpendicular to the adjusting through hole can be provided on the lifting base 110, with a set screw installed in the threaded hole. Tightening the set screw can fix the adjusting rod 131.

[0039] like Figure 1 As shown, optionally, the number of air bearings 120 disposed opposite to each vertical side 211 is three, and the three air bearings 120 disposed opposite to the same vertical side 211 are arranged in an isosceles triangle.

[0040] By arranging three air bearings 120 opposite to each vertical side 211 and along an isosceles triangle, the position of each vertical side 211 can be determined by forming a three-point support with the three air bearings 120, thereby improving positioning accuracy and support stiffness.

[0041] Specifically, in this embodiment, among the three air bearings 120 that are respectively connected to each vertical side 211, two of the adjusting rods 131 pass through the lifting base 110 from the outside to the inside along the thickness direction perpendicular to the lifting base 110, while the other adjusting rod 131 is set in the protrusion located above the body of the lifting base 110, thus forming an isosceles triangle arrangement with one top and two bottoms.

[0042] Figure 2 This is a top-view structural diagram of the lifting and moving mechanism in the air-floating lifting platform provided in Embodiment 1 of this utility model; as shown... Figure 1and Figure 2 As shown, optionally, adjacent vertical sides 211 are perpendicular to each other, each vertical side 211 has the same size, and the distribution of the air bearings 120 corresponding to each vertical side 211 is the same.

[0043] By making adjacent vertical sides 211 perpendicular and the same size, the lifting moving part 210 can be roughly square in shape when viewed vertically. The air bearings 120 corresponding to each vertical side 211 are distributed in the same way, so that the lifting moving part 210 is subjected to consistent force on each vertical side 211, ensuring the smooth lifting and lowering of the lifting moving part 210.

[0044] The fact that the distribution of the air bearings 120 corresponding to each vertical side 211 is the same means that not only are the air bearings 120 corresponding to each vertical side 211 distributed along isosceles triangles, but the length of the base, the length of the legs, and the vertex angle of each isosceles triangle are the same, and the position of each triangle relative to the vertical side 211 is also the same.

[0045] like Figure 1 As shown, optionally, the lifting base mechanism 100 also includes an air circuit integration component 140 installed on the lifting base 110, the air circuit integration component 140 being connected via air pipes to air bearings 120 corresponding to two adjacent vertical sides 211.

[0046] By installing the air circuit integration assembly 140 on the lifting base 110 to connect the air bearings 120 corresponding to the two adjacent vertical sides 211, the number and total length of air pipes can be simplified, the air pipes can be prevented from interfering with the normal movement of the lifting moving part 210, and the overall structure can be made more compact and aesthetically pleasing.

[0047] Specifically, in this embodiment, the lifting base 110 is approximately square or a chamfered square, and the air circuit integration assembly 140 is installed on the upper surface of the lifting base 110 at two diagonal corners. Three air pipe connectors are provided on each side of the air circuit integration assembly 140 to connect to three air bearings 120 supporting a vertical side 211 via air pipes, supplying air to these air bearings 120.

[0048] Figure 3 This is a cross-sectional view of the lifting and moving mechanism in the air-floating lifting platform provided in Embodiment 1 of this utility model, showing the ABC angle. Figure 2 and Figure 3As shown, optionally, the lifting and moving mechanism 200 also includes a lifting base 220 and an encoder assembly 230. The lifting base 220 has a voice coil motor 270 at its center, and the power output end of the voice coil motor 270 is connected to the lifting and moving component 210. The encoder assembly 230 includes an encoder mounting base 231, an encoder reading head 232, and an encoder grating ruler 233. The encoder grating ruler 233 is disposed on the lifting and moving component 210, and the encoder grating ruler 233 is disposed opposite to the encoder reading head 232. The encoder reading head 232 is connected to the lifting base 220 through the encoder mounting base 231. The lifting and moving component 210 has a receiving space, and the encoder assembly 230 is located in the receiving space. The power output end of the voice coil motor 270 and the receiving space are disposed adjacent to each other in the lifting and moving component 210.

[0049] By placing the encoder mounting base 231, encoder reading head 232, and encoder grating ruler 233 of the encoder assembly 230 in the adjacent voice coil motor 270 housing space, the encoder assembly 230 is positioned close to the center of mass of the lifting moving part 210. If vibration occurs, the positional fluctuation of the encoder grating ruler 233 caused by vibration is significantly reduced, thereby greatly reducing the impact of vibration on lifting control.

[0050] Specifically, in this embodiment, the lifting base 220 is located at the bottom of the lifting and moving mechanism 200 and is fixed relative to the lifting base 110. A voice coil motor 270 is installed at the center of the upper surface of the lifting base 220. A portion of the lifting and moving component 210 is hollowed out to form a receiving space to accommodate the encoder assembly 230. The encoder mounting base 231 can be an L-shaped curved plate, with its lower part installed on the upper surface of the lifting base 220 in the area opposite to the lifting and moving component 210, i.e., on the bottom wall of the receiving space. The lifting base 220 also has a through hole running vertically through it for the lead wires of the encoder reading head 232 mounted on the encoder mounting base 231 to be led out. The encoder grating ruler 233 can be fixed vertically to the side wall of the receiving space and is positioned opposite to the encoder reading head 232.

[0051] like Figures 1-3 As shown, optionally, the lifting and moving mechanism 200 further includes a first buffer limiting member 240, which is installed on the outer side of the lifting and moving member 210; the lifting base mechanism 100 further includes a second buffer limiting member 150, which is installed on the upper surface of the lifting base 110, and a portion of the first buffer limiting member 240 is located inside the second buffer limiting member 150; the first buffer limiting member 240 is made of an elastic material.

[0052] By providing a first buffer limiter 240 and a second buffer limiter 150 on the outer surface of the lifting moving member 210 and the upper surface of the lifting base 110 respectively, the contact between the first buffer limiter 240 and the second buffer limiter 150, at least one of which is made of elastic material, can limit the highest position of the lifting moving member 210, thereby preventing the lifting moving member 210 from rising too far and completely detaching from the lifting base mechanism 100; at the same time, the fact that one of the first buffer limiter 240 and the second buffer limiter 150 is made of elastic material can prevent the collision impact between the two from being too strong, reducing the impact of the contact between the two on the lifting moving member 210.

[0053] Specifically, in this embodiment, viewed from above, the lifting and moving member 210 is a square with chamfered corners. More specifically, the chamfer can be a 45° bevel, and the first buffer limiting member 240 is disposed in two beveled areas located on the diagonal of the square. The two first buffer limiting members 240 are arranged opposite to each other, that is, both protrude from the surface of the lifting and moving member 210 away from the center of the lifting and moving member 210. The second buffer limiting member 150, which is gantry-shaped, can be fixedly connected to the upper surface of the lifting base 110 using a male threaded connector such as a screw or bolt, and the male threaded connector passes through the through hole that runs through the two arms of the gantry shape along the height direction. In this embodiment, the first buffer limiting member 240 is made of polyurethane, and the first buffer limiting member 240 is tubular, and more specifically, it can be a circular tube. The axis of the tube is a horizontal axis extending outward from the center of the lifting and moving member 210. Therefore, when the first buffer limit member 240 comes into contact with the top lower surface of the second buffer limit member 150, the cross section of the first buffer limit member 240 can be flattened to improve the buffering effect.

[0054] In addition, when the lower surface of the first buffer limit member 240 contacts the upper surface of the lifting base 110, it also achieves mechanical limitation on the extreme position of the downward movement of the lifting moving member 210.

[0055] like Figure 1 As shown, optionally, the lifting and moving mechanism 200 also includes a trigger 260, which is installed on the vertical side 211; the lifting base mechanism 100 also includes a limit sensor 160, which is disposed opposite to the trigger 260.

[0056] By matching the trigger 260 with the limit sensor 160, the limit sensor 160 can detect the trigger 260 to confirm that the lifting moving part 210 has descended to the correct position. The position information of the downward movement of the lifting moving part 210 is converted into an electrical signal so as to control the descent process of the lifting moving part 210 to stop or decelerate.

[0057] Specifically, in this embodiment, the trigger 260 is fixedly connected to the vertical side 211. More specifically, the trigger 260 is an L-shaped bent plate. A waist-shaped hole extending in the vertical direction is provided on the vertical portion 261 of the trigger 260 for connection with the vertical side 211. A threaded connector such as a screw or bolt passes through the waist-shaped hole, allowing the trigger 260 to achieve an adjustable connection with the lifting moving member 210. A downwardly bent portion 263 is provided at the free end of the horizontal cantilever portion 262 of the trigger 260, which can be positioned opposite to the limit sensor 160.

[0058] In this embodiment, the limit sensor 160 can be a through-beam sensor, such as a through-beam infrared sensor or a through-beam photoelectric sensor. When the bent portion 263 enters the area between the signal emitting part and the signal receiving part of the through-beam sensor, the bent portion 263 can be detected, thereby confirming that the lifting moving member 210 has moved to the corresponding position.

[0059] like Figure 1 As shown, optionally, the trigger 260 includes a connecting part and a detected part, the detected part and the connecting part are fixedly disposed relative to each other, and the connecting part is installed on the vertical side 211; there are two triggers 260, and the limit sensor 160 is disposed in a one-to-one correspondence with the trigger 260. The limit sensor 160 and the trigger 260 are configured such that when the lifting moving part 210 is raised or lowered, the time when one detected part is detected by the limit sensor 160 is different from the time when the other triggered part is detected.

[0060] By configuring the detection unit to be detected at different times by the limit sensor 160, one trigger 260 can be used as the detection object for whether the lifting moving member 210 has moved downward to the limit position, and the other trigger 260 can be used as the detection object for moving upward to the limit position, thereby facilitating the control of the movement range of the lifting moving member 210.

[0061] More specifically, in this embodiment, the vertical portion 261 and the horizontal cantilever portion 262 of the trigger 260 can be mounting portions, while the bent portion 263 of the trigger 260 is the detected portion. The lengths of the bent portions 263 of the two triggers 260 are different, while the heights of the two horizontal cantilever portions 262 are the same, and the heights of the two limit sensors 160 are the same. Therefore, the two limit sensors 160 detect the bent portion 263 as the detected portion at different times. For example, during descent, the longer bent portion 263 is detected first, while the shorter bent portion 263 is detected later.

[0062] The longer bend 263 can be used to limit the upward movement; that is, when the lifting member 210 moves upward, it stops moving when the longer bend 263 is not detected. Conversely, the shorter bend 263 can be used to limit the downward movement; that is, when the lifting member 210 moves downward, it stops descending when the shorter bend 263 is not detected.

[0063] Example 2:

[0064] Embodiment 2 also provides a semiconductor processing equipment, including the aforementioned air-floating lifting platform.

[0065] By installing the aforementioned air-floating lifting platform in the semiconductor processing equipment, the semiconductor processing equipment accordingly possesses all the advantages of the aforementioned air-floating lifting platform, which will not be elaborated upon here.

[0066] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

[0067] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0068] In the above embodiments, descriptions of directions such as "up" and "down" are based on the accompanying drawings.

[0069] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention.

[0070] Therefore, this invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An air-floating lifting platform, characterized in that, The system includes a lifting base mechanism (100) and a lifting moving mechanism (200). The lifting base mechanism (100) includes a lifting base (110) and an air bearing (120). The lifting moving mechanism (200) includes a lifting moving component (210), which is positioned opposite to the lifting base (110) in a manner that allows relative movement in the vertical direction. The lifting moving component (210) has at least three vertical sides (211), and each vertical side (211) is provided with at least two air bearings (120) of different heights. The air bearings (120) are used to form an air film between the air bearings (120) and the vertical sides (211). The air bearings (120) are connected to the lifting base (110) through an adjusting component (130), which is used to adjust the gap between the air bearings (120) and the vertical sides (211).

2. The air-floating lifting platform according to claim 1, characterized in that, The adjustment assembly (130) includes multiple adjustment rods (131), which are movably connected to the lifting base (110). The adjustment rods (131) are movable relative to the lifting base (110) in a direction toward or away from the vertical side (211). Multiple air bearings (120) on the outer side of each vertical side (211) are independently connected to the adjustment rods (131).

3. The air-floating lifting platform according to claim 2, characterized in that, The lifting base (110) also includes an adjustment through hole, the adjustment through hole having an internal thread, the adjustment rod (131) having an external thread, and the adjustment rod (131) and the adjustment through hole being connected by the engagement of the external thread and the internal thread.

4. The air-floating lifting platform according to claim 1, characterized in that, The number of air bearings (120) opposite each of the vertical sides (211) is three, and the three air bearings (120) opposite the same vertical side (211) are arranged in an isosceles triangle.

5. The air-floating lifting platform according to claim 4, characterized in that, The lifting base mechanism (100) also includes an air circuit integration assembly (140) installed on the lifting base (110), the air circuit integration assembly (140) being connected via air pipes to air bearings (120) corresponding to two adjacent vertical sides (211).

6. The air-floating lifting platform according to any one of claims 1-5, characterized in that, The lifting and moving mechanism (200) further includes a lifting base (220) and an encoder assembly (230). The lifting base (220) has a voice coil motor (270) at its center, and the power output end of the voice coil motor (270) is connected to the lifting and moving component (210). The encoder assembly (230) includes an encoder mounting base (231), an encoder reading head (232), and an encoder grating scale (233). The encoder grating scale (233) is disposed on the lifting and moving component (210), and the encoder grating scale (233) is disposed opposite to the encoder reading head (232). The encoder reading head (232) is connected to the lifting base (220) through the encoder mounting base (231). The lifting and moving component (210) has a receiving space, and the encoder assembly (230) is located in the receiving space. The power output end of the voice coil motor (270) and the receiving space are disposed adjacent to each other in the lifting and moving component (210).

7. The air-floating lifting platform according to claim 6, characterized in that, The lifting and moving mechanism (200) further includes a first buffer limiting member (240), which is installed on the outer side of the lifting and moving member (210); the lifting base mechanism (100) further includes a second buffer limiting member (150), which is installed on the upper surface of the lifting base (110), and a portion of the first buffer limiting member (240) is located inside the second buffer limiting member (150); at least one of the second buffer limiting member (150) and the first buffer limiting member (240) is made of an elastic material.

8. The air-floating lifting platform according to claim 6, characterized in that, The lifting and moving mechanism (200) further includes a trigger (260), which is installed on the vertical side (211); the lifting base mechanism (100) further includes a limit sensor (160), which is arranged opposite to the trigger (260).

9. The air-floating lifting platform according to claim 8, characterized in that, The trigger (260) includes a connecting part and a detected part. The detected part is fixedly disposed relative to the connecting part, and the connecting part is installed on the vertical side (211). There are two triggers (260). The limit sensor (160) is disposed in a one-to-one correspondence with the trigger (260). The limit sensor (160) and the trigger (260) are configured such that when the lifting moving part (210) is raised or lowered, the time when one of the detected parts is detected by the limit sensor (160) is different from the time when the other trigger (260) is detected.

10. A semiconductor processing apparatus, characterized in that, The semiconductor processing equipment includes the air-floating lifting platform according to any one of claims 1-9.

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