Water vapor separation device
By designing a transparent treatment box and structures such as partitions, baffles, and vents, the problem of escaping gas and wastewater entering the exhaust system was solved, achieving effective separation of exhaust gas and wastewater, and improving exhaust efficiency and equipment safety.
Patent Information
- Application Number
- CN202423165687.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-22
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2034-12-22
AI Technical Summary
In the CMP process of semiconductor manufacturing plants, the escaped HF and ammonia gases were not effectively treated, posing a threat to the health of production equipment and operators. At the same time, wastewater entering the exhaust system affected the treatment effect.
Design a water vapor separation device, including a transparent treatment box, an inlet pipe, an exhaust pipe, a drain pipe, and a partition plate. The partition plate blocks wastewater from entering the exhaust pipe, airflow guides the separation of exhaust gas, and the baffle and air holes reduce wastewater splashing and increase the duct interface to share the exhaust pressure.
It effectively separates waste gas and wastewater, reduces the impact of wastewater on exhaust, improves gas flow rate and exhaust efficiency, and ensures equipment stability and operational safety.
Smart Images
Figure CN223646342U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to water vapor separation technical field, specifically a water vapor separation device. BACKGROUND
[0002] In the CMP process link of semiconductor manufacturing plant, the hydrogen fluoride with strong corrosiveness and the ammonia with strong stimulation used often inevitably diffuse HF gas with toxicity and strong corrosiveness and ammonia gas with strong pungent smell in the whole complex production process due to the comprehensive influence of process characteristics and relevant storage, conveying, use conditions and other factors.
[0003] If these diffused gases cannot be effectively treated and controlled, they will have serious adverse effects on the stability and precision of production equipment and precision instruments in the plant, and also greatly threaten the health of on-site operators and the overall operation environment safety in the plant.
[0004] When treating these gases, exhaust facilities are usually added to the drainage pipeline, but in use, it is found that when the gases are extracted, the wastewater enters the exhaust facilities due to the lack of blocking facilities, thereby affecting the exhaust effect.
[0005] Therefore, a water vapor separation device is proposed to solve the above problems. UTILITY MODEL CONTENT
[0006] In order to make up for the deficiencies of the prior art and solve at least one technical problem raised in the background art.
[0007] The utility model solves its technical problem and adopts the technical scheme: a water vapor separation device, including transparent treatment box, the transparent treatment box top is provided with water inlet pipeline, exhaust pipe in proper order, the transparent treatment box bottom is provided with drainage pipeline, the water inlet pipeline, exhaust pipe, drainage pipeline all are connected through a plurality of bolts and transparent treatment box, the middle part of transparent treatment box is fixedly connected with the partition board, the partition board is located in the middle part of transparent treatment box, by the transparent setting of transparent treatment box can increase the inspection when extracting waste gas and check waste gas extraction at any time, thereby timely adjustment is made, after the wastewater enters the inside of transparent treatment box, can move to the drainage pipeline under the block of partition board, thereby reducing the drainage pipeline, the waste gas in wastewater can be guided by the airflow generated by exhaust pipe, thereby accelerating the movement to exhaust pipe, finally being discharged from the inside of transparent treatment box, thereby separating waste gas, and the partition board divides transparent treatment box into two areas, which can reduce the wastewater into waste gas area, thereby reducing the influence of wastewater on the extraction of wastewater.
[0008] Preferably, the partition plate side wall is fixed with a baffle plate; the baffle plate is located below the exhaust pipe; a plurality of air holes are formed on the surface of the baffle plate; the baffle plate can block the splashing of the wastewater after entering, thereby intercepting the wastewater, so that the wastewater stays in the lower half of the transparent treatment box due to the blocking of the baffle plate, and the air holes provide a channel for gas movement, thereby reducing the influence on the movement of the gas, and the air holes can disperse the gas into small air flows, thereby accelerating the flow speed of the gas.
[0009] Preferably, the transparent treatment box side wall is provided with an air pipe interface; the air pipe interface is located in the upper half of the transparent treatment box; the air pipe interface can share the exhaust pressure of the exhaust pipe, thereby reducing the exhaust resistance in the transparent treatment box, so that the gas quickly passes through the air pipe interface and the exhaust pipe to leave the inside of the transparent treatment box, thereby reducing the residence time of the gas in the transparent treatment box, so that the space in the transparent treatment box is quickly released to receive the subsequent gas.
[0010] The utility model discloses the beneficial effect lies in:
[0011] 1. The water vapor separation device, by the transparent treatment box transparent setting can increase the inspection when extracting waste gas to check the waste gas extraction at any time, thereby timely adjustment, after the wastewater enters the inside of the transparent treatment box can be blocked to the drain pipe movement under the separation plate, thereby reducing the drain pipe, and the waste gas in the wastewater is guided by the airflow generated by the exhaust pipe, thereby accelerating the movement to the exhaust pipe, and finally being discharged from the inside of the transparent treatment box, thereby separating the waste gas, and the separation plate divides the transparent treatment box into two regions, thereby reducing the wastewater into the waste gas region, thereby reducing the influence of the wastewater on the extraction of the wastewater.
[0012] 2. The water vapor separation device, by increasing the baffle plate, the wastewater after entering can be blocked to the splashing of the wastewater, thereby intercepting the wastewater, so that the wastewater stays in the lower half of the transparent treatment box due to the blocking of the baffle plate, and the air holes provide a channel for gas movement, thereby reducing the influence on the movement of the gas, and the air holes can disperse the gas into small air flows, thereby accelerating the flow speed of the gas. BRIEF DESCRIPTION OF DRAWINGS
[0013] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can be obtained according to these drawings without creating labor.
[0014] Fig. 1 It is the main body schematic view of the utility model;
[0015] Fig. 2 This is a schematic diagram of the structure of the baffle in this utility model.
[0016] In the diagram: 1. Transparent treatment box; 11. Water inlet pipe; 12. Exhaust pipe; 13. Drainage pipe; 14. Bolt; 15. Partition plate; 2. Baffle; 21. Air vent; 3. Duct interface. Detailed Implementation
[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.
[0018] Specific implementation examples are given below.
[0019] like Figs. 1-2As shown in the embodiment of this utility model, a water vapor separation device includes a transparent treatment box 1. A water inlet pipe 11 and an exhaust pipe 12 are sequentially arranged on the top of the transparent treatment box 1; a drainage pipe 13 is arranged at the bottom of the transparent treatment box 1; the water inlet pipe 11, exhaust pipe 12, and drainage pipe 13 are all connected to the transparent treatment box 1 by multiple bolts 14; a partition plate 15 is fixedly connected to the middle of the transparent treatment box 1; the partition plate 15 is located in the middle of the transparent treatment box 1. During operation, the water inlet pipe 11 is first connected to the wastewater pipe. Then, when wastewater enters the transparent treatment box 1 through the water inlet pipe 11, the wastewater will fall rapidly due to centrifugal force and finally leave the transparent treatment box 1 through the drainage pipe 13. When the wastewater enters the transparent treatment box 1, it will contact the partition plate 15, thereby preventing the wastewater from moving below the exhaust pipe 12. Simultaneously connecting the water inlet pipe 11 to the wastewater pipe, the exhaust pipe 12 can be connected to an exhaust device to form an adsorption airflow. When the gas enters the transparent treatment box along with the wastewater... After entering the transparent treatment box 1, the adsorption airflow generated by the exhaust pipe 12 guides the flow of these gases, causing them to move below the exhaust pipe 12 and finally be discharged through the exhaust pipe 12. Since the partition plate 15 divides the upper part of the transparent treatment box 1 into two areas, the impact of wastewater entering on the exhaust is reduced. At the same time, the exhaust situation can be observed through the transparent treatment box 1. By making the transparent treatment box 1 transparent, the inspection during waste gas extraction can be increased, allowing for timely checks and adjustments. After the wastewater enters the transparent treatment box 1, it can move towards the drain pipe 13 due to the obstruction of the partition plate 15, thus reducing the likelihood of the drain pipe 13 entering below the exhaust pipe 12. At the same time, the waste gas inside the wastewater is guided by the airflow generated by the exhaust pipe 12, accelerating its movement towards the exhaust pipe 12, and finally being discharged into the transparent treatment box 1. This separation of waste gas and the partition plate 15 dividing the transparent treatment box 1 into two areas reduces the entry of wastewater into the waste gas area, thereby reducing the impact of wastewater on wastewater extraction.
[0020] like Fig. 2As shown, a baffle 2 is fixedly connected to the side wall of the partition plate 15; the baffle 2 is located below the exhaust pipe 12; the surface of the baffle 2 is provided with multiple air holes 21; during operation, after the wastewater enters the transparent treatment tank 1, since the wastewater enters from the top and finally contacts the bottom of the transparent treatment tank 1, an impact will occur when the wastewater contacts the bottom of the transparent treatment tank 1, resulting in splashing. At this time, the baffle 2 will block these splashed wastewater, thereby reducing the amount of wastewater entering below the exhaust pipe 12. At the same time, the gas will move towards the exhaust pipe 12 through the air holes 21, thereby reducing the impact on the movement of the gas while blocking the wastewater; by adding the baffle 2, the impact and splashing wastewater after entering can be blocked, thereby intercepting the wastewater, so that the wastewater stays in the lower half of the transparent treatment tank 1 due to the obstruction of the baffle 2. At the same time, the air holes 21 will provide a channel for the movement of the gas, thereby reducing the impact on the movement of the gas. The air holes 21 can also disperse the gas into small airflows, thereby accelerating the gas flow speed.
[0021] like Fig. 2 As shown, the transparent processing box 1 has a duct interface 3 on its side wall; the duct interface 3 is located in the upper part of the transparent processing box 1; during operation, when it is observed that there is too much gas inside the transparent processing box 1, the duct interface 3 can also be connected to the exhaust device, thereby sharing the workload of the exhaust pipe 12, increasing the gas's movement path, and accelerating the gas discharge, thereby reducing the workload of the exhaust pipe 12, allowing the duct interface 3 to work with the exhaust pipe 12 to quickly discharge the gas; by adding the duct interface 3, the exhaust pressure can be shared with the exhaust pipe 12, thereby reducing the exhaust resistance inside the transparent processing box 1, allowing the gas to quickly leave the transparent processing box 1 through the duct interface 3 and the exhaust pipe 12, thereby reducing the gas's residence time inside the transparent processing box 1, and allowing the space inside the transparent processing box 1 to be quickly released to receive subsequent gas.
[0022] Working Principle: First, the inlet pipe 11 and wastewater pipe are connected. When wastewater enters the transparent treatment tank 1 through the inlet pipe 11, it quickly falls due to centrifugal force and exits through the drain pipe 13. Upon entering the transparent treatment tank 1, the wastewater contacts the partition plate 15, preventing it from moving below the exhaust pipe 12. Simultaneously with connecting the inlet pipe 11 to the wastewater pipe, the exhaust pipe 12 can be connected to an exhaust system, creating an adsorption airflow. When the gas enters the transparent treatment tank 1 along with the wastewater, the adsorption airflow generated by the exhaust pipe 12 guides the gas flow, causing it to move below the exhaust pipe 12 and finally be discharged. Because the partition plate 15 divides the upper part of the transparent treatment tank 1 into two areas, the impact on the exhaust process is reduced when wastewater enters. The impact of the wastewater can be observed through the transparent treatment box 1. After the wastewater enters the transparent treatment box 1, it enters from the top and finally contacts the bottom of the transparent treatment box 1. When the wastewater contacts the bottom of the transparent treatment box 1, it will impact and splash. At this time, the baffle 2 will block these splashed wastewater, thereby reducing the amount of wastewater entering below the exhaust pipe 12. At the same time, the gas will move towards the exhaust pipe 12 through the air hole 21, thereby blocking the wastewater and reducing the impact on the movement of the gas. When it is observed through the transparent treatment box 1 that there is too much gas inside the transparent treatment box 1, the air duct interface 3 can also be connected to the exhaust equipment, thereby sharing the workload of the exhaust pipe 12, increasing the gas movement path, and speeding up the gas discharge, thereby reducing the workload of the exhaust pipe 12 and allowing the air duct interface 3 to cooperate with the exhaust pipe 12 to quickly discharge the gas.
[0023] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.
Claims
1. A water vapor separation device, comprising a transparent processing box (1), characterized in that: The transparent treatment box (1) is provided with a water inlet pipe (11) and an exhaust pipe (12) in sequence on the top; the transparent treatment box (1) is provided with a drainage pipe (13) at the bottom; the water inlet pipe (11), the exhaust pipe (12), and the drainage pipe (13) are all connected to the transparent treatment box (1) by multiple bolts (14); a partition plate (15) is fixedly connected to the middle of the transparent treatment box (1); the partition plate (15) is located in the middle of the transparent treatment box (1).
2. The water vapor separation device according to claim 1, characterized in that: The partition plate (15) has a baffle (2) fixedly attached to its side wall; the baffle (2) is located below the exhaust pipe (12); the surface of the baffle (2) has multiple air holes (21).
3. The water vapor separation device according to claim 2, characterized in that: The transparent processing box (1) has a duct interface (3) on its side wall; the duct interface (3) is located in the upper part of the transparent processing box (1).