Alkali metal heating deposition system
By heating alkali metals in a furnace to volatilize them, and then passing a horizontal pipe through a hot oven for insulation, and a second vertical pipe through a cooling water tank for cooling, the problem of low alkali metal deposition efficiency is solved, achieving high-efficiency and high-quality deposition. This ensures smooth gas flow and high pipeline purity, and improves the system's automation and operating efficiency.
Patent Information
- Application Number
- CN202520042695.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-08
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2035-01-08
AI Technical Summary
In existing alkali metal heating deposition systems, the workpiece is exposed to a high-temperature environment for a long time, resulting in low alkali metal gas deposition efficiency and the possibility of gas deposition in the pipeline, which affects the deposition quality.
Alkali metals are heated in a furnace to volatilize, and then passed through a horizontal pipe through a hot oven for insulation. A second vertical pipe passes through a cooling water tank for rapid cooling, allowing the alkali metal gas to deposit on the workpiece surface. The gas is rapidly deposited through the cooling water tank, ensuring a smooth flow of alkali metal gas. The second vertical pipe extends from the bottom of the hot oven into the cooling water tank for rapid cooling. The design of the insulation cover and cooling chamber structure ensures efficient gas deposition on the workpiece surface.
It significantly improves the deposition efficiency and quality of alkali metals, ensures smooth gas flow, prevents outside air from entering the pipeline, maintains a high-purity environment inside the pipeline, reduces heat loss, and improves the automation level and working efficiency of the system.
Smart Images
Figure CN223646617U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of alkali metal deposition technology, and in particular to an alkali metal heated deposition system. Background Technology
[0002] The process of depositing alkali metals on a workpiece after heating usually refers to alkali metal deposition technology. Alkali metals (such as lithium, sodium, potassium, etc.) are heated to volatilize and are eventually deposited on the surface of the workpiece located at the cold end.
[0003] In existing technologies, alkali metal thermal deposition systems include a metal heating furnace and a hot drying oven located on one side of the metal heating furnace. A glass pipe connects the metal heating furnace and the hot drying oven. The alkali metal is heated at one end of the metal heating furnace, causing it to volatilize. The volatilized alkali metal gas then flows through the glass pipe into the hot drying oven and deposits on the workpiece surface. However, because the workpiece is exposed to a high-temperature environment for an extended period, the deposition efficiency of the alkali metal gas on the workpiece surface is low, thus requiring further improvement. Utility Model Content
[0004] To improve the deposition efficiency of alkali metals, this application provides an alkali metal heated deposition system.
[0005] The alkali metal heated deposition system provided in this application adopts the following technical solution:
[0006] An alkali metal heating deposition system includes a frame, a heating furnace mounted on the frame, a hot drying oven mounted on the frame and located on one side of the heating furnace, and a cooling water tank mounted on the frame and located below the hot drying oven. The frame is provided with pipes, including a horizontal pipe fixed to the frame and passing through the hot drying oven, a first vertical pipe connected to one end of the horizontal pipe, and a second vertical pipe detachably connected to and connected to the horizontal pipe. One end of the first vertical pipe passes through the top wall of the heating furnace and extends into the inner cavity of the heating furnace. An alkali metal embedded in the heating furnace body is installed at the end of the first vertical pipe. The horizontal pipe passes through the hot drying oven, and the second vertical pipe passes through the bottom wall of the hot drying oven and extends into the inner cavity of the cooling water tank. The workpiece is placed at the lower part of the second vertical pipe.
[0007] By employing the above technical solution, the alkali metal is heated in a furnace to volatilize, ensuring the smooth entry of the alkali metal gas into the pipeline. Secondly, the horizontal pipe passes through a hot drying oven, which continuously heats and insulates the horizontal pipe, reducing the possibility of alkali metal gas deposition inside the pipeline and ensuring smooth gas flow. Finally, a second vertical pipe passes through the bottom of the hot drying oven and extends into a cooling water tank. The cooling water tank rapidly cools the second vertical pipe, allowing the alkali metal gas to cool quickly and deposit efficiently on the workpiece surface, thus significantly improving deposition efficiency and quality.
[0008] Preferably, the cooling water tank includes a top seat mounted on the frame, an inner tank with an open upper part and fixedly connected to the lower end face of the top seat, and an outer tank fixedly connected to the top seat and covering the inner tank. A liquid storage cavity is formed between the inner wall of the inner tank and the lower end face of the top seat, and the liquid storage cavity stores liquid. A second vertical pipe passes through the top seat and is submerged in the liquid at its lower part. A cooling cavity is formed between the outer wall of the inner tank and the inner wall of the outer tank. The frame is equipped with a medium conveying assembly for conveying cooling medium to the cooling cavity.
[0009] By adopting the above technical solution, the structural design of the top seat, inner tank and outer tank enables the formation of the liquid storage chamber and the cooling chamber. The cooling medium in the cooling chamber can absorb the heat of the liquid in the liquid storage chamber, thereby enabling the liquid in the liquid storage chamber to absorb the heat transferred by the second vertical pipe, ensuring the rapid cooling of the second vertical pipe.
[0010] Preferably, the medium conveying assembly includes a medium inlet pipe connected to the outer tank, a medium outlet pipe connected to the outer tank, and a refrigeration box disposed on the frame to cool the medium. Both the medium inlet pipe and the medium outlet pipe are connected to the refrigeration box, and the refrigeration box is equipped with a delivery pump to pump the cooling medium to the cooling chamber.
[0011] By adopting the above technical solution, the medium conveying component includes a medium inlet pipe, a medium outlet pipe and a refrigeration box connected to the outer tank. The refrigeration box pumps the cooling medium to the cooling chamber through a delivery pump, so that the cooling medium in the cooling chamber remains in a flowing state and continuously absorbs heat from the liquid in the storage chamber, ensuring that the cooling effect of the cooling water tank is stable and reliable.
[0012] Preferably, the end of the horizontal tube away from the first vertical tube extends through the side wall of the hot air oven, the horizontal tube is equipped with a control valve external to the hot air oven, and the end of the horizontal tube is equipped with a vacuum pump for evacuating the pipe.
[0013] By adopting the above technical solution, before heating the alkali metal, the control valve is opened and the vacuum pump is started to extract the gas in the pipeline. After the extraction is completed, the control valve is closed, which effectively prevents outside air from entering the pipeline and ensures a high-purity environment inside the pipeline, thereby improving the quality of alkali metal deposition.
[0014] Preferably, the frame is provided with a heat insulation cover located above the heating furnace and covering the upper part of the first vertical pipe and the end of the horizontal pipe near the heating furnace. The inner wall of the heat insulation cover is provided with a first supplementary heater for heating the upper part of the first vertical pipe and the end of the horizontal pipe near the heating furnace. The lower end face of the heat insulation cover abuts against the upper end face of the heating furnace, and the side wall of the heat insulation cover is provided with a first clearance groove for the horizontal pipe to pass through.
[0015] By adopting the above technical solution, an insulation cover is added to reduce the heat loss of the heating furnace. The insulation cover provides an installation carrier for the first supplementary heating heater. The first supplementary heating heater heats the pipes placed outside the heating furnace body to maintain the temperature of the pipes and reduce the premature condensation and deposition of alkali metals on the inner walls of the first vertical and horizontal pipes, thereby reducing the waste of alkali metal materials.
[0016] Preferably, the frame is provided with a lifting platform, the heating furnace is fixedly connected to the upper surface of the lifting platform, the heat insulation cover is slidably connected to the frame along the vertical direction, the first clearance groove is a vertically arranged strip groove and the lower opening of the first clearance groove extends to the lower end surface of the heat insulation cover, and the frame is provided with a first lifting drive mechanism for driving the heat insulation cover to lift and slide.
[0017] By adopting the above technical solution, when the alkali metal in the heating furnace is consumed, the lifting platform descends, causing the heating furnace to descend, and the first lifting drive mechanism drives the insulation cover to rise, increasing the distance between the insulation cover and the heating furnace, so that the first vertical pipe is exposed, which facilitates the filling of alkali metal.
[0018] Preferably, the first lifting drive mechanism includes a first guide frame fixedly connected to the frame and located on one side of the heat insulation cover, a first slide block vertically slidably connected to the first guide frame and fixedly connected to the heat insulation cover, a first lead screw rotatably connected to the first guide frame, and a first motor fixedly connected to the first guide frame. The output shaft of the first motor is coaxially fixedly connected to the end of the first lead screw, and the first lead screw is threaded through the first slide block.
[0019] By adopting the above technical solution, the first guide frame provides stable guiding support for the first slide block, ensuring that the insulation cover remains stable during the lifting process; the cooperation between the first lead screw and the first motor realizes the smooth lifting of the insulation cover, improving the automation level and work efficiency of the system.
[0020] Preferably, the lower part of the hot drying oven is open, the lower end face of the hot drying oven abuts against the upper end face of the top seat, the hot drying oven is vertically slidably connected to the frame, and the opposite side walls of the hot drying oven are provided with second clearance grooves for the horizontal tube to slide through. The second clearance groove is a vertically arranged strip groove, and the lower opening of the second clearance groove extends to the lower end face of the hot drying oven. The frame is provided with a second lifting drive mechanism for driving the hot drying oven to rise and slide. The outer tank is vertically slidably connected to the frame, and the frame is provided with a third lifting drive mechanism for driving the outer tank to rise and slide.
[0021] By adopting the above technical solution, after the deposition is completed, the second lifting drive mechanism drives the hot drying oven to rise, and the third lifting drive mechanism drives the cooling water tank to fall, so that the horizontal tube and the second vertical tube are exposed, making it easy to remove the second vertical tube from the horizontal tube to replace the workpiece.
[0022] Preferably, the hot oven is equipped with a circulating hot air fan that delivers hot air to the inner cavity, and the hot oven is equipped with an air knife fan that blows air onto the side wall with a second clearance groove to prevent hot air from escaping from the hot oven.
[0023] By adopting the above technical solution, the circulating hot air blower can continuously supply circulating hot air into the hot drying oven, maintaining a constant temperature inside the oven and ensuring that alkali metal gases do not prematurely deposit due to temperature drop during transmission. Simultaneously, the air knife blower blows air onto the side wall with the first clearance slot, effectively preventing hot air from escaping from the second clearance slot and thus preventing heat loss.
[0024] Preferably, the frame is provided with a second supplementary heater located between the heating furnace and the hot drying oven, and the second supplementary heater heats the horizontal tubes placed outside the hot drying oven.
[0025] By adopting the above technical solution, the second supplementary heater can effectively prevent the horizontal tube placed in the hot oven from cooling down due to the blowing action of the air knife fan, ensuring that the alkali metal gas is smoothly transmitted to the second vertical tube, and further improving the deposition efficiency of alkali metal.
[0026] In summary, this utility model has the following beneficial effects:
[0027] 1. The alkali metal is heated in a furnace to volatilize, ensuring the smooth entry of the alkali metal gas into the pipeline. Secondly, a horizontal pipe passes through a hot drying oven, which continuously heats and insulates the horizontal pipe, reducing the possibility of alkali metal gas deposition inside the pipeline and ensuring smooth gas flow. Finally, a second vertical pipe passes through the bottom of the hot drying oven and extends into a cooling water tank. The cooling water tank rapidly cools the second vertical pipe, allowing the alkali metal gas to cool quickly and deposit efficiently on the workpiece surface, thus significantly improving deposition efficiency and quality.
[0028] 2. Before heating the alkali metal, open the control valve and start the vacuum pump to extract the gas in the pipeline. After extraction is completed, close the control valve to effectively prevent outside air from entering the pipeline and ensure a high-purity environment inside the pipeline, thereby improving the quality of alkali metal deposition.
[0029] 3. The circulating hot air blower continuously supplies circulating hot air into the oven, maintaining a constant temperature inside and ensuring that alkali metal gases do not prematurely deposit due to temperature drop during transmission. Simultaneously, the air knife blower blows air onto the sidewall with the first clearance slot, effectively preventing hot air from escaping through the second clearance slot and thus preventing heat loss. Attached Figure Description
[0030] Figure 1 This is a schematic diagram of the overall structure of an alkali metal heated deposition system;
[0031] Figure 2 This is a schematic diagram of the heating furnace.
[0032] Figure 3 This is a schematic diagram of the internal structure of the hot air oven and the cooling water tank;
[0033] Figure 4 This is a schematic diagram of the structure of a hot air drying oven.
[0034] In the diagram, 1. Frame; 11. Support plate; 12. Lifting platform; 13. Second supplementary heater; 14. Inlet; 15. Mounting plate; 2. Heating furnace; 21. Heating cylinder; 22. Heating wire; 23. Insulation cover; 231. First clearance groove; 24. First supplementary heater; 3. Hot drying oven; 31. Second clearance groove; 32. Circulating hot air fan; 33. Air knife fan; 34. Air knife guide tube; 35. Air knife nozzle; 4. Cooling water tank; 41. Top seat; 42. Inner tank; 43. Outer tank; 44. Third clearance groove; 45. Liquid storage chamber; 46. Cooling chamber ; 47. Guide rod; 5. Pipe; 51. Horizontal pipe; 52. First vertical pipe; 53. Second vertical pipe; 54. Container bottle; 55. Sealing plate; 56. Control valve; 6. First lifting drive mechanism; 61. First guide frame; 62. First slide; 63. First lead screw; 64. First motor; 7. Second lifting drive mechanism; 71. Second guide frame; 72. Second slide; 73. Second lead screw; 74. Second motor; 8. Lifting cylinder; 9. Medium conveying assembly; 91. Medium inlet pipe; 92. Medium outlet pipe; 93. Refrigeration box; 94. Conveying pump. Detailed Implementation
[0035] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.
[0036] This application discloses an alkali metal heated deposition system, referring to... Figure 1 It includes a frame 1, a heating furnace 2 disposed on the frame 1, a hot drying oven 3 disposed on the frame 1 and located on one side of the heating furnace 2, and a cooling water tank 4 disposed on the frame 1 and located below the hot drying oven 3.
[0037] Reference Figure 1 , Figure 2 A support plate 11 is fixedly connected to the left outer wall of the frame 1. A lifting platform 12 is fixedly connected to the upper end of the support plate 11. The lifting platform 12 is a scissor lift platform. The heating furnace 2 is fixedly connected to the upper end of the lifting platform 12. A heating cylinder 21 is fixedly inserted through the top wall of the heating furnace 2. The heating cylinder 21 is vertically arranged, with an open end at the top and a closed end at the bottom. A heating wire 22 is spirally wound around the outer peripheral wall of the heating cylinder 21.
[0038] Reference Figure 2 , Figure 3 A second supplementary heater 13 is fixedly connected to the upper end of the frame 1, located between the heating furnace 2 and the hot drying oven 3. The second supplementary heater 13 is fixedly connected to a pipe 5, which includes a horizontal pipe 51 fixedly passing through the second supplementary heater 13 and the hot drying oven 3, a first vertical pipe 52 connected to one end of the horizontal pipe 51, and a second vertical pipe 53 detachably connected to and connected to the horizontal pipe 51. The first vertical pipe 52 and the horizontal pipe 51 are fixedly connected. A container bottle 54 built into the heating cylinder 21 is detachably connected to the lower end of the first vertical pipe 52. In this embodiment, the container bottle 54 is screwed to the first vertical pipe 52, and the container bottle 54 is filled with alkali metal. A sealing plate 55 is fixedly connected to the first vertical pipe 52 and abuts against the upper end of the heating cylinder 21. The second vertical tube 53 is built into the hot oven 3. Multiple second vertical tubes 53 are provided and distributed at intervals along the axial direction of the horizontal tube 51. In this embodiment, the second vertical tube 53 and the horizontal tube 51 are screwed together. The lower end of the second vertical tube 53 is a closed end for placing the workpiece.
[0039] Reference Figure 1 , Figure 2 A heat insulation cover 23 is vertically slidably connected to the frame 1 and located above the heating furnace 2. The heat insulation cover 23 has a first clearance groove 231 on its side wall near the hot drying oven 3, through which the horizontal pipe 51 passes. The first clearance groove 231 is a vertically arranged strip-shaped groove, and its lower opening extends to the lower end face of the heat insulation cover 23. A first supplementary heat heater 24 is fixedly connected to the top inner wall of the heat insulation cover 23 to heat the upper part of the first vertical pipe 52 and the left end of the horizontal pipe 51. The supplementary heat heater is located above the left end of the horizontal pipe 51.
[0040] The frame 1 is provided with a first lifting drive mechanism 6 for driving the insulation cover 23 to move up and down. Specifically, the first lifting drive mechanism 6 includes a first guide frame 61 fixedly connected to the frame 1 and located on the rear side of the insulation cover 23, a first slide block 62 vertically slidably connected to the first guide frame 61 and fixedly connected to the upper end face of the insulation cover 23, a first lead screw 63 rotatably connected to the first guide frame 61, and a first motor 64 fixedly connected to the first guide frame 61. The output shaft of the first motor 64 is coaxially fixedly connected to the end of the first lead screw 63, and the first lead screw 63 is threaded through the first slide block 62.
[0041] Reference Figure 1 , Figure 3The lower part of the hot oven 3 is open, and the lower end face of the hot oven 3 abuts against the upper end face of the cooling water tank 4. The hot oven 3 is vertically slidably connected to the frame 1. The left and right sides of the hot oven 3 are provided with second clearance grooves 31 for the horizontal tube 51 to slide through. The second clearance groove 31 is a vertically arranged strip groove, and the lower opening of the second clearance groove 31 extends to the lower end face of the hot oven 3. The frame 1 is provided with a second lifting drive mechanism 7 for driving the hot oven 3 to move up and down. Specifically, the second lifting drive mechanism 7 includes a second guide frame 71 fixedly connected to the frame 1 and located at the rear side of the hot oven 3, a second slide block 72 vertically slidably connected to the second guide frame 71 and fixedly connected to the rear side wall of the hot oven 3, a second lead screw 73 rotatably connected to the second guide frame 71, and a second motor 74 fixedly connected to the second guide frame 71. The output shaft of the second motor 74 is coaxially fixedly connected to the end of the second lead screw 73, and the second lead screw 73 is threaded through the second slide block 72.
[0042] Reference Figure 3 , Figure 4 The hot oven 3 is fixedly connected to a circulating hot air blower 32 that supplies hot air to the inner cavity. The hot oven 3 is equipped with an air knife blower 33 that blows air onto the side wall with a second clearance groove 31 to prevent hot air from escaping from the hot oven 3. Specifically, the air knife blower 33 is fixedly connected to the upper end face of the hot oven 3. An air knife guide 34 is fixedly connected to the side wall of the hot oven 3. The inner cavity of the air knife guide 34 is connected to the air outlet of the air knife blower 33. An air knife nozzle 35 is opened on the side wall of the air knife guide 34, located on one side of the second clearance groove 31. The air outlet direction of the air knife nozzle 35 is parallel to the side wall of the hot oven 3. The end of the horizontal pipe 51 away from the first vertical pipe 52 extends out of the right side wall of the hot oven 3. The horizontal pipe 51 is equipped with a control valve 56 externally placed in the hot oven 3. The end of the horizontal pipe 51 away from the first vertical pipe 52 is externally connected to a vacuum pump for evacuating the pipe 5.
[0043] The cooling water tank 4 includes a top seat 41 located below the hot oven 3 and vertically slidably connected to the frame 1, an inner tank 42 with an open upper part and fixedly connected to the lower end face of the top seat 41, and an outer tank 43 fixedly connected to the lower end face of the top seat 41 and covering the inner tank 42. The upper end face of the frame 1 has an opening 14 for the top seat 41 to slide through. A liquid storage cavity 45 is formed between the inner wall of the inner tank 42 and the lower end face of the top seat 41, and the liquid storage cavity 45 stores liquid. The top seat 41 has an inner cavity, which is filled with heat insulation cotton. A third clearance groove 44 is vertically opened on the upper end face of the top seat 41 and communicates with the liquid storage cavity 45. The second vertical pipe 53 passes through the third clearance groove 44 and is submerged in liquid at its lower part.
[0044] A mounting plate 15 is fixedly connected to the frame 1, located below the cooling water tank 4. Multiple guide rods 47, which slide through the mounting plate 15, are fixedly connected to the lower end face of the outer tank 43. The mounting plate 15 is equipped with a third lifting drive mechanism for driving the cooling water tank 4 to move up and down. Specifically, the third lifting drive mechanism is a lifting cylinder 8. The cylinder body of the lifting cylinder 8 is fixedly connected to the lower end face of the mounting plate 15, and the piston rod of the lifting cylinder 8 passes through the mounting plate 15 and is fixedly connected to the lower end face of the outer tank 43. A cooling cavity 46 is formed between the outer wall of the inner tank 42 and the inner wall of the outer tank 43. The frame 1 is equipped with a medium conveying assembly 9 for conveying cooling medium to the cooling cavity 46. The medium delivery assembly 9 includes a medium inlet pipe 91 connected to the outer tank 43, a medium outlet pipe 92 connected to the outer tank 43, and a refrigeration box 93 installed on the frame 1 to cool the medium. The refrigeration box 93 is fixedly connected to the upper end face of the mounting plate 15. Both the medium inlet pipe 91 and the medium outlet pipe 92 are flexible hoses and are connected to the refrigeration box 93. The refrigeration box 93 is equipped with a delivery pump 94 that pumps the cooling medium to the cooling chamber 46.
[0045] The implementation principle of the alkali metal thermal deposition system in this application embodiment is as follows: The alkali metal in the container bottle 54 is heated by the heating furnace 2 to volatilize, ensuring the smooth entry of the alkali metal gas into the pipe 5. Next, the horizontal pipe 51 passes through the hot drying oven 3, which continuously heats and insulates the horizontal pipe 51, reducing the possibility of alkali metal gas deposition inside the pipe 5 and ensuring smooth gas flow. Finally, the second vertical pipe 53 passes through the bottom of the hot drying oven 3 and extends into the cooling water tank 4. The cooling water tank 4 rapidly cools the second vertical pipe 53, causing the alkali metal gas to cool quickly and deposit efficiently on the workpiece surface, thereby significantly improving deposition efficiency and quality.
[0046] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. An alkali metal heated deposition system, characterized in that: The equipment includes a frame (1), a heating furnace (2) mounted on the frame (1), a hot drying oven (3) mounted on the frame (1) and located on one side of the heating furnace (2), and a cooling water tank (4) mounted on the frame (1) and located below the hot drying oven (3). The frame (1) is provided with pipes (5), which include a horizontal pipe (51) fixed to the frame (1) and passing through the hot drying oven (3), a first vertical pipe (52) connected to one end of the horizontal pipe (51), and a detachable connection to the horizontal pipe (51). The first vertical pipe (52) is connected to the second vertical pipe (53) of the horizontal pipe (51). One end of the first vertical pipe (52) passes through the top wall of the heating furnace (2) and extends into the inner cavity of the heating furnace (2). The end of the first vertical pipe (52) is equipped with an alkali metal built into the body of the heating furnace (2). The horizontal pipe (51) passes through the hot oven (3). The second vertical pipe (53) passes through the bottom wall of the hot oven (3) and extends into the inner cavity of the cooling water tank (4). The workpiece is placed in the lower part of the second vertical pipe (53).
2. The alkali metal heated deposition system according to claim 1, characterized in that: The cooling water tank (4) includes a top seat (41) disposed on the frame (1), an inner tank (42) with an open upper part and fixedly connected to the lower end face of the top seat (41), and an outer tank (43) fixedly connected to the top seat (41) and covering the inner tank (42). A liquid storage cavity (45) is formed between the inner wall of the inner tank (42) and the lower end face of the top seat (41). The liquid storage cavity (45) stores liquid. A second vertical pipe (53) passes through the top seat (41) and is submerged in the liquid at its lower part. A cooling cavity (46) is formed between the outer wall of the inner tank (42) and the inner wall of the outer tank (43). The frame (1) is provided with a medium conveying assembly (9) for conveying cooling medium to the cooling cavity (46).
3. The alkali metal heated deposition system according to claim 2, characterized in that: The medium conveying assembly (9) includes a medium inlet pipe (91) connected to the outer tank (43), a medium outlet pipe (92) connected to the outer tank (43), and a refrigeration box (93) set on the frame (1) to cool the medium. The medium inlet pipe (91) and the medium outlet pipe (92) are both connected to the refrigeration box (93). The refrigeration box (93) is equipped with a delivery pump (94) that pumps the cooling medium to the cooling chamber (46).
4. The alkali metal heated deposition system according to claim 1, characterized in that: The end of the horizontal tube (51) away from the first vertical tube (52) extends through the side wall of the hot oven (3). The horizontal tube (51) is equipped with a control valve (56) externally placed in the hot oven (3). The end of the horizontal tube (51) is equipped with a vacuum pump for evacuating the pipe (5).
5. The alkali metal heated deposition system according to claim 1, characterized in that: The frame (1) is provided with a heat insulation cover (23) located above the heating furnace (2) and covering the upper part of the first vertical pipe (52) and the end of the horizontal pipe (51) near the heating furnace (2). The inner wall of the heat insulation cover (23) is provided with a first supplementary heater (24) for heating the upper part of the first vertical pipe (52) and the end of the horizontal pipe (51) near the heating furnace (2). The lower end face of the heat insulation cover (23) abuts against the upper end face of the heating furnace (2). The side wall of the heat insulation cover (23) is provided with a first clearance groove (231) for the horizontal pipe (51) to pass through.
6. The alkali metal heated deposition system according to claim 5, characterized in that: The frame (1) is provided with a lifting platform (12), the heating furnace (2) is fixedly connected to the upper end face of the lifting platform (12), the heat insulation cover (23) is slidably connected to the frame (1) in a vertical direction, the first clearance groove (231) is a vertically arranged strip groove and the lower opening of the first clearance groove (231) extends to the lower end face of the heat insulation cover (23), and the frame (1) is provided with a first lifting drive mechanism (6) for driving the heat insulation cover (23) to lift and slide.
7. The alkali metal heated deposition system according to claim 6, characterized in that: The first lifting drive mechanism (6) includes a first guide frame (61) fixedly connected to the frame (1) and located on one side of the heat insulation cover (23), a first slide block (62) slidably connected to the first guide frame (61) and fixedly connected to the heat insulation cover (23), a first lead screw (63) rotatably connected to the first guide frame (61), and a first motor (64) fixedly connected to the first guide frame (61). The output shaft of the first motor (64) is coaxially fixedly connected to the end of the first lead screw (63), and the first lead screw (63) is threaded through the first slide block (62).
8. The alkali metal heated deposition system according to claim 2, characterized in that: The lower part of the hot oven (3) is open, and the lower end face of the hot oven (3) abuts against the upper end face of the top seat (41). The hot oven (3) is vertically slidably connected to the frame (1). The opposite side walls of the hot oven (3) are provided with a second clearance groove (31) for the horizontal tube (51) to slide through. The second clearance groove (31) is a vertically arranged strip groove. The lower opening of the second clearance groove (31) extends to the lower end face of the hot oven (3). The frame (1) is provided with a second lifting drive mechanism (7) for driving the hot oven (3) to rise and slide. The outer tank (43) is vertically slidably connected to the frame (1). The frame (1) is provided with a third lifting drive mechanism for driving the outer tank (43) to rise and slide.
9. The alkali metal heated deposition system according to claim 8, characterized in that: The hot oven (3) is equipped with a circulating hot air blower (32) for delivering hot air to the inner cavity, and the hot oven (3) is equipped with a wind knife blower (33) for blowing air onto the side wall with a second clearance groove (31) to prevent hot air from overflowing from the hot oven (3).
10. An alkali metal heated deposition system according to claim 9, characterized in that: The frame (1) is provided with a second supplementary heater (13) located between the heating furnace (2) and the hot oven (3), and the second supplementary heater (13) heats the horizontal tube (51) placed outside the hot oven (3).