Transmission assembly and deposition equipment

Abstract

The embodiment of the utility model provides a transmission assembly and deposition equipment. The transmission assembly comprises a shielding disc which comprises a first surface and a second surface which are opposite to each other in the thickness direction; the tray frame comprises a third surface and a fourth surface which are opposite in the thickness direction, the tray frame is used for bearing the shielding disc, the second surface makes contact with the third surface, and the tray frame moves the shielding disc into a processing cavity or moves the shielding disc out of the processing cavity; and the sensor comprises a first detection unit arranged on the second surface and a second detection unit arranged on the third surface, and the sensor is used for determining the position offset between the shielding disc and the tray rack according to the first detection unit and the second detection unit.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, including but not limited to a transmission component and a deposition device. Background Technology

[0002] Physical Vapor Deposition (PVD) refers to the process of vaporizing a material source surface into gaseous atoms or molecules, or partially ionizing them into ions, under vacuum conditions using physical methods, and then depositing the resulting film onto a substrate surface using low-pressure gas (or plasma). The shutter disk is a crucial component of the PVD equipment. During burn-in or pasting processes, the shutter disk blade moves it from the storage chamber to the processing chamber, shielding and protecting the electrostatic chuck (ESC) to prevent film deposition on the ESC. After burn-in and pasting processes, the shutter disk is moved back from the processing chamber to the storage chamber to avoid interfering with the deposition process in the processing chamber.

[0003] However, it is currently difficult to detect the relative positional relationship between the pallet holder and the shielding tray, making it impossible to determine whether the pallet holder can stably support the shielding tray. During pallet holder movement, the shielding tray may fall off. Furthermore, it is also difficult to detect the position of the shielding tray within the processing chamber. If the shielding tray shifts position within the processing chamber, and the pallet holder forcibly removes the shielding tray and transfers it to the storage chamber, it may also fall off the pallet holder, impacting the ESC or causing other effects. Utility Model Content

[0004] In view of this, the present invention provides a transmission component and a deposition apparatus.

[0005] In a first aspect, embodiments of the present invention provide a transmission assembly, the transmission assembly comprising: a shielding disk, the shielding disk including a first surface and a second surface opposite to each other along the thickness direction; a tray frame, the tray frame including a third surface and a fourth surface opposite to each other along the thickness direction, the tray frame being used to carry the shielding disk, wherein the second surface and the third surface are in contact, the tray frame being used to move the shielding disk into or out of the processing chamber; and a sensor, the sensor including a first detection unit disposed on the second surface and a second detection unit disposed on the third surface, the sensor being used to determine the positional offset between the shielding disk and the tray frame based on the first detection unit and the second detection unit.

[0006] In some embodiments, the second surface is provided with a groove structure, and the first detection unit is disposed at the groove structure; the third surface is provided with a protrusion structure, and the second detection unit is disposed at the protrusion structure; when the tray frame is used to carry the shielding tray, the protrusion structure is embedded in the groove structure, and the first detection unit and the second detection unit are in contact.

[0007] In some embodiments, the shape of the shielding disc includes a circle; the groove structure is disposed at the center of the shielding disc.

[0008] In some embodiments, the pallet rack includes a first sub-bracket and a second sub-bracket fixedly connected, the first sub-bracket having an arc shape and the second sub-bracket having a straight shape, the first sub-bracket being axially symmetrical about the second sub-bracket; the protrusion structure is provided at the second sub-bracket of the pallet rack.

[0009] In some embodiments, the orthographic projection shape of the groove structure on the second surface includes a first circle, and the orthographic projection shape of the protrusion structure on the third surface includes a second circle; wherein the diameter of the first circle is greater than or equal to the diameter of the second circle.

[0010] In some embodiments, the first detection unit includes an annular detection area disposed at the groove structure, and the second detection unit includes a circular detection area disposed at the protrusion structure, wherein the diameter of the circular detection area is the same as the inner diameter of the annular detection area; the sensor is used to determine the positional offset between the shielding plate and the tray frame based on the relative positional relationship between the center of the annular detection area and the center of the circular detection area.

[0011] In some embodiments, the transfer assembly further includes: a bracket arm connected to the tray frame; a rotating shaft connected to the bracket arm; and a first motor coupled to the rotating shaft, the first motor driving the rotating shaft to rotate, thereby driving the bracket arm to move the tray frame into or out of the processing chamber.

[0012] Secondly, this utility model provides a deposition device, the deposition device comprising: a transmission component as described in the above technical solution; a controller coupled to the transmission component, the controller being configured to move the tray frame if the positional offset between the shielding plate and the tray frame is less than or equal to a preset offset; and the controller being further configured to pause the movement of the tray frame and issue an alarm signal if the positional offset between the shielding plate and the tray frame is greater than the preset offset.

[0013] In some embodiments, the deposition apparatus further includes: a storage chamber and a processing chamber in communication with each other; the controller is configured to control the shielding disk to move from the storage chamber to the processing chamber when performing a pre-burning process or a coating process, and the controller is further configured to control the shielding disk to move from the processing chamber to the storage chamber when performing a deposition process.

[0014] In some embodiments, the deposition apparatus further includes: a base disposed in the processing chamber; a plurality of ejector pins disposed in the processing chamber and evenly arranged along the circumference of the base; and a second motor coupled to the ejector pins, the second motor being used to drive the plurality of ejector pins to rise or fall.

[0015] This utility model provides a transport component and a deposition apparatus. The transport component includes: a shielding disk, the shielding disk including a first surface and a second surface opposite to each other along the thickness direction; a tray frame, the tray frame including a third surface and a fourth surface opposite to each other along the thickness direction, the tray frame for carrying the shielding disk, and the second surface and the third surface being in contact, the tray frame for moving the shielding disk into or out of the processing chamber; and a sensor, the sensor including a first detection unit disposed on the second surface and a second detection unit disposed on the third surface, the sensor for determining the positional offset between the shielding disk and the tray frame based on the first detection unit and the second detection unit. In this embodiment of the invention, a sensor is used to determine the positional offset between the shielding plate and the pallet frame. On the one hand, the positional offset between the shielding plate and the pallet frame can be monitored in real time during the movement of the shielding plate. When the positional offset is greater than a preset offset, the movement of the pallet frame is paused to prevent greater adverse effects. On the other hand, the positional offset between the shielding plate and the pallet frame can be determined before the pallet frame carries the shielding plate. When the positional offset is greater than a preset offset, the pallet frame carrying the shielding plate is paused to prevent greater adverse effects. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the deposition equipment;

[0017] Figure 2 This is a three-dimensional structural diagram of the transport component in a deposition apparatus;

[0018] Figure 3 A partial structural schematic diagram of the transmission component provided in an embodiment of this utility model;

[0019] Figure 4 Figure (a) is a top view of the annular detection area provided in an embodiment of this utility model. Figure 4 Figure (b) is a top view of the circular detection area provided in an embodiment of this utility model;

[0020] Figure 5 A cross-sectional structural schematic diagram of the transmission component provided in an embodiment of this utility model;

[0021] Figure 6 This is a cross-sectional structural schematic diagram of the deposition equipment provided in an embodiment of the present utility model;

[0022] Figure 7 Figure (a) is a schematic diagram showing a structure where the positional offset between the shielding plate and the tray frame is less than or equal to a preset offset. Figure 7 Figure (b) is a schematic diagram of a structure in which the positional offset between the shielding plate and the tray frame is greater than a preset offset. Detailed Implementation

[0023] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments and accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, to avoid confusion with the present invention, some technical features well-known in the art have not been described; that is, not all features of actual embodiments are described herein, nor are well-known functions and structures described in detail.

[0025] In the accompanying drawings, for clarity, the dimensions of layers, areas, and elements, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0026] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion. And when a second element, component, area, layer, or portion is discussed, it does not imply that the first element, component, area, layer, or portion necessarily exists in this utility model.

[0027] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below,” “under,” or “below” other elements or features will be oriented “above” other elements or features. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0028] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0029] To fully understand this utility model, detailed steps and structures will be presented in the following description to illustrate the technical solution of this utility model. Preferred embodiments of this utility model are described in detail below; however, in addition to these detailed descriptions, this utility model may have other embodiments.

[0030] refer to Figure 1 and Figure 2 , Figure 1 This is a three-dimensional structural diagram of the deposition equipment. Figure 2 This is a three-dimensional structural diagram of the transport component in a deposition apparatus. The following will combine... Figure 1 and Figure 2The structure of the deposition equipment is explained below. The deposition equipment 100 may include: a processing chamber 102; a storage chamber 104 disposed on one side of the processing chamber 102 and connected to the processing chamber 102; an electrostatic chuck 106 disposed in the processing chamber 102; a shielding plate 108; and a tray frame 110 for carrying the shielding plate 108. Here, the tray frame 110 can carry the shielding plate 108. When the shielding plate 108 is moved from the storage chamber 104 to the processing chamber 102, the deposition equipment 100 is typically used to perform a pre-firing process or a coating process. The shielding plate 108 can be used to shield and protect the electrostatic chuck 106. Alternatively, the shielding plate 108 can be moved from the processing chamber 102 to the storage chamber 104. In this case, the deposition equipment 100 is typically used to perform a deposition process, preventing the shielding plate 108 from affecting the deposition process in the processing chamber 102.

[0031] Here, the pre-firing process is a conditioning operation in the PVD equipment used to ensure the performance of the film formed by the deposition process. Typically, after the processing chamber has been exposed to the atmosphere or has been out of service for a period of time, a pre-firing process is required to remove oxides and other impurities from the target surface using plasma. During the pre-firing process, a shielding disk is used to cover or shield the surface of the electrostatic chuck to prevent target material from depositing on the electrostatic chuck surface.

[0032] Here, the coating process is also a conditioning operation in PVD equipment, used to ensure the performance of the film layer formed by the deposition process. The coating process refers to adding a covering layer on top of the material layer deposited on the chamber surface to prevent the material layer from peeling off the chamber surface and causing contamination during subsequent processing. For example, a titanium nitride layer is formed on the chamber surface. Titanium nitride layers are typically brittle and may peel off during subsequent processing. In this case, a titanium layer can be added on top of the titanium nitride layer using a coating process. This titanium layer primarily serves to prevent the titanium nitride layer from peeling off.

[0033] During the use of the aforementioned deposition equipment, a tray frame is required to support and move the shielding plate. During this movement, the relative position between the shielding plate and the tray frame may change, and the tray frame may even become unstable in supporting the shielding plate, causing it to fall off. Furthermore, when performing pre-firing or coating processes, the shielding plate needs to be placed into the processing chamber. After these processes are completed, the tray frame needs to remove the shielding plate from the processing chamber. At this time, the position of the shielding plate may shift due to the rising and falling of the ejector pins, making it impossible for the tray frame to safely remove the plate. This could cause the shielding plate to fall off the tray frame, potentially damaging the ESC (Electronic Stability Control) or causing other problems.

[0034] In view of this, the present invention provides a transmission component and a deposition apparatus.

[0035] refer to Figure 3, Figure 3 This is a partial structural diagram of the transmission component provided in an embodiment of the present utility model. Figure 3 As shown, this utility model embodiment provides a transmission component 200, which includes: a shielding disk 202, the shielding disk 202 including a first surface 202a and a second surface 202b opposite to each other along the thickness direction; a tray frame 204, the tray frame 204 including a third surface 204a and a fourth surface 204b opposite to each other along the thickness direction, the tray frame 204 for carrying the shielding disk 202, and the second surface 202b and the third surface 204a in contact, the tray frame 204 for moving the shielding disk 202 into or out of the processing chamber; and a sensor 206, the sensor 206 including a first detection unit 208 disposed on the second surface 202b and a second detection unit 210 disposed on the third surface 204a, the sensor 206 for determining the positional offset between the shielding disk 202 and the tray frame 204 based on the first detection unit 208 and the second detection unit 210.

[0036] Here, the shielding plate 202 is used to shield and protect the base, which can be, for example, an electrostatic chuck. The first surface 202a can also be called the top surface of the shielding plate 202, and the second surface 202b can also be called the bottom surface of the shielding plate 202.

[0037] Here, the appropriate dimension of the shielding plate 202 along the direction perpendicular to its thickness can be selected based on the size of the base; and the appropriate thickness of the shielding plate 202 can be selected based on its shielding and protective functions. For example, the dimension of the shielding plate 202 along the direction perpendicular to its thickness can be, but is not limited to, 6 inches, 8 inches, or 12 inches. For example, the thickness of the shielding plate 202 can be, but is not limited to, 0.1 inches or 0.2 inches.

[0038] It should be noted that although the technical term "shielding plate" is used in the description of this utility model, the shape of the shielding plate 202 is not limited to circular. The shape of the shielding plate 202 can be, but is not limited to, rectangular, polygonal, elliptical, or other shapes. This utility model does not have a special limitation on the shape of the shielding plate 202. Figure 3 The illustration is provided with the shielding disk 202 being circular as an example only.

[0039] Here, the tray frame 204 is used to support the shielding tray 202. The third surface 204a can also be referred to as the top surface of the tray frame 204, and the fourth surface 204b can also be referred to as the bottom surface of the tray frame 204. When the tray frame 204 is used to support the shielding tray 202, the bottom surface of the shielding tray 202 is in contact with the top surface of the tray frame 204, and the movement of the tray frame 204 drives the shielding tray 202. In other words, when the tray frame 204 is used to support the shielding tray 202, the bottom surface of the shielding tray 202 and the top surface of the tray frame 204 are coplanar.

[0040] Here, the appropriate size of the tray frame 204 can be selected based on the size of the shielding tray 202; and the appropriate thickness of the tray frame 204 can be selected based on the weight of the shielding tray 202. This utility model does not impose any special limitations on the shape of the tray frame 204; the tray frame 204 can be, but is not limited to, a cross shape, a ring shape, or other shapes, as long as the tray frame 204 can stably support the shielding tray 202.

[0041] Here, sensor 206 may include a first detection unit 208 disposed on the bottom surface of the shielding tray 202 and a second detection unit 210 disposed on the top surface of the tray frame 204. When the tray frame 204 is used to support the shielding tray 202, the first detection unit 208 and the second detection unit 210 come into contact, and the positional offset between the shielding tray 202 and the tray frame 204 can be determined. Specifically, a point can be selected on the bottom surface of the shielding tray 202 as a first reference point, and a point can be selected on the top surface of the tray frame 204 as a second reference point. When the tray frame 204 is used to support the shielding tray 202, if the first reference point and the second reference point coincide, the positional offset between the shielding tray 202 and the tray frame 204 can be determined to be 0; if the first reference point and the second reference point do not coincide, the positional offset between the shielding tray 202 and the tray frame 204 can be determined to be the distance between the first reference point and the second reference point.

[0042] For example, a two-dimensional coordinate system can be established with the center of the bottom surface of the shielding plate 202 as the origin. When the tray frame 204 carries the shielding plate 202, the bottom surface of the shielding plate 202 and the top surface of the tray frame 204 are coplanar. The positional offset between the shielding plate 202 and the tray frame 204 can be determined based on the distance between the first reference point and the second reference point in the two-dimensional coordinate system.

[0043] In some embodiments, the second surface 202b is provided with a groove structure 212, and the first detection unit 208 is provided at the groove structure 212; the third surface 204a is provided with a protrusion structure 214, and the second detection unit 210 is provided at the protrusion structure 214; when the tray frame 204 is used to carry the shielding tray 202, the protrusion structure 214 is embedded in the groove structure 212.

[0044] Here, a groove structure 212 is provided on the bottom surface of the shielding plate 202, and the first detection unit 208 is located in the groove structure 212; a protrusion structure 214 is provided on the top surface of the tray frame 204, and the second detection unit 210 is located on the protrusion structure 214.

[0045] It should be noted that when the protruding structure 214 is embedded in the grooved structure 212, it helps the pallet frame 204 to more stably support the shielding disc 202. During the movement of the pallet frame 204 carrying the shielding disc 202, unexpected situations may occur, causing the protruding structure 214 to fail to embed in the grooved structure 212, and the first detection unit 208 to fail to contact the second detection unit 210. In this case, it is not conducive to the pallet frame 204 continuing to support the shielding disc 202 during movement.

[0046] In some embodiments, the orthographic projection shape of the groove structure 212 on the second surface 202b is the same as the orthographic projection shape of the protrusion structure 214 on the third surface 204a. This makes it more advantageous for the protrusion structure 214 to be embedded in the groove structure 212, and the tray frame 204 can more stably support the shielding plate 202.

[0047] In some embodiments, the orthographic projection size of the groove structure 212 on the second surface 202b is greater than or equal to the orthographic projection size of the protrusion structure 214 on the third surface 204a.

[0048] In some embodiments, the dimension of the groove structure 212 along the thickness direction may be greater than, equal to, or less than the dimension of the protrusion structure 214 along the thickness direction. In the first case, when the dimension of the groove structure 212 along the thickness direction is less than the dimension of the protrusion structure 214 along the thickness direction, the protrusion structure 214 is embedded in the groove structure 212, the bottom surface of the shielding plate 202 and the top surface of the tray frame 204 do not contact each other, while the bottom surface of the protrusion structure 214 and the groove structure 212 contact each other, resulting in a smaller contact area between the shielding plate 202 and the tray frame 204. In the second case, when the dimension of the groove structure 212 along the thickness direction is greater than the dimension of the protrusion structure 214 along the thickness direction, the protrusion structure 214 is embedded in the groove structure 212, the bottom surface of the shielding plate 202 and the top surface of the tray frame 204 contact each other, while the bottom surface of the protrusion structure 214 and the groove structure 212 do not contact each other; compared to the first case, the contact area between the shielding plate 202 and the tray frame 204 is larger in this case. In the third case, when the dimension of the groove structure 212 along the thickness direction is equal to the dimension of the protrusion structure 214 along the thickness direction, the protrusion structure 214 is embedded in the groove structure 212, the bottom surface of the shielding plate 202 and the top surface of the tray frame 204 are in contact, and the bottom surface of the protrusion structure 214 and the groove structure 212 are in contact. The contact area between the shielding plate 202 and the tray frame 204 is larger, which is conducive to the tray frame 204 supporting the shielding plate 202 more stably.

[0049] In some embodiments, the shape of the shielding disk 202 includes a circle; the groove structure 212 is disposed at the center of the shielding disk 202.

[0050] Here, the shape of the shielding disk 202 may include a circle, and the center of the second surface 202b of the shielding disk 202 is the center of the circle. The second surface 202b of the shielding disk 202 may be provided with a groove structure 212, and the orthographic projection shape of the groove structure 212 on the second surface 202b may also include a circle, with the centers of the two circles coinciding.

[0051] In some embodiments, the pallet rack 204 includes a first sub-support 216 and a second sub-support 218 fixedly connected. The first sub-support 216 has an arc shape, and the second sub-support 218 has a straight shape. The first sub-support 216 is axially symmetrical about the second sub-support 218. A protrusion structure 214 is provided at the second sub-support 218 of the pallet rack 204.

[0052] Here, the orthographic projection shape of the tray frame 204 in a plane perpendicular to the thickness direction is an axisymmetric figure. The shape of the first sub-support 216 may include, but is not limited to, a semicircle, and the shape of the second sub-support 218 may include, but is not limited to, a straight line. The second sub-support 218 may extend radially along the semicircle. The second sub-support 218 has a first end and a second end that are oppositely arranged along its extension direction. The first end is fixedly connected to the first sub-support 216, and the second end is the center of the semicircle. The protruding structure 214 may be provided at the second end of the second sub-support 218.

[0053] In some embodiments, the orthographic projection shape of the groove structure 212 on the second surface 202b includes a first circle, and the orthographic projection shape of the protrusion structure 214 on the third surface 204a includes a second circle; wherein the diameter of the first circle is greater than or equal to the diameter of the second circle.

[0054] Here, the orthographic projection shape of both the groove structure 212 and the protrusion structure 214 can be circular, which is more conducive to the protrusion structure 214 being embedded in the groove structure 212, and the tray frame 204 can more stably support the shielding plate 202.

[0055] In some embodiments, the first detection unit 208 includes an annular detection region disposed at the groove structure 212, the annular detection region being as follows: Figure 4 As shown in Figure (a), the annular detection area includes a large circle with diameter D1 and a small circle with diameter D2, whose centers coincide at point O1. That is, the outer diameter of the annulus is D1, the inner diameter is D2, and the width D3 is 0.5*(D1-D2). The second detection unit 210 includes a circular detection area located at the protrusion structure 214, as shown in Figure (a). Figure 4As shown in Figure (b), the circular detection area comprises a circle with a diameter of D4 and a center at point O2. Here, the diameter D4 of the circular detection area and the inner diameter D2 of the annular detection area can be the same, i.e., D4 = D2. The sensor 206 is used to determine the positional offset between the shielding disk 202 and the tray frame 204 based on the relative positional relationship between the center O1 of the annular detection area and the center O2 of the circular detection area.

[0056] Here, the center O1 of the annular detection area can be regarded as the first reference point of the shielding disk 202 mentioned above, and the center O2 of the circular detection area can be regarded as the second reference point of the tray frame 204 mentioned above. The positional offset between the shielding disk 202 and the tray frame 204 is determined based on the distance between the center O1 of the annular detection area and the center O2 of the circular detection area.

[0057] In some embodiments, when the small circles in the circular detection area and the annular detection area coincide, the center O2 of the circular detection area and the center O1 of the annular detection area coincide, and the positional offset between the shielding disk 202 and the tray frame 204 is 0. At this time, the shielding disk 202 can be carried by the tray frame 204 and moved by carrying the shielding disk 202.

[0058] In some embodiments, when the circular detection area is within the larger circle of the annular detection area, the distance between the center O2 of the circular detection area and the center O1 of the annular detection area is within ±D3, and the positional offset between the shielding plate 202 and the tray frame 204 is within ±D3. In this case, the tray frame 204 can be used to carry the shielding plate 202 and move it.

[0059] In some embodiments, when the circular detection area exceeds the large circle range of the annular detection area, the distance between the center O2 of the circular detection area and the center O1 of the annular detection area is outside ±D3, and the positional offset between the shielding plate 202 and the tray frame 204 is outside ±D3, the tray frame 204 cannot be used to support the shielding plate 202 and cannot be used to support the shielding plate 202 for movement. It is necessary to pause the movement of the tray frame 204 and issue an alarm signal.

[0060] It should be noted that the annular and circular detection areas are set relative to each other. As the relative positions of the annular and circular detection areas change, the overlap area between them also changes. This change in overlap area can be represented by a change in electrical signal. Therefore, based on the pattern of this electrical signal change, the relative positional relationship between the annular and circular detection areas can be determined, and thus the positional offset between the shielding plate and the tray frame can be determined.

[0061] refer to Figure 5 , Figure 5 This is a cross-sectional structural diagram of the transmission component provided in an embodiment of the present utility model. (See diagram below.) Figure 5 As shown, in some embodiments, the transfer assembly 200 further includes: a bracket arm 220 connected to a tray frame 204; a rotating shaft 222 connected to the bracket arm 220; and a first motor 224 coupled to the rotating shaft 222, the first motor 224 driving the rotating shaft 222 to rotate, thereby driving the bracket arm 220 to move the tray frame 204 into or out of the processing chamber.

[0062] Here, the two ends of the bracket arm 220 are connected to the tray frame 204 and the rotating shaft 222, respectively. The first motor 224 can be used as a drive component in the transmission assembly. The first motor 224 is coupled to the bracket arm 220 through the rotating shaft 222 to control the position of the bracket arm 220, and thus control the position of the tray frame 204 and the shielding plate 202.

[0063] refer to Figure 6 , Figure 6 This is a cross-sectional structural diagram of the deposition apparatus provided in an embodiment of the present invention. Figure 5 and Figure 6 As shown, this utility model embodiment provides a deposition apparatus 300, which includes: a processing chamber 304; a storage chamber 306 disposed on one side of the processing chamber 304 and connected to the processing chamber 304; and a transfer component 200 as described in the above technical solution (e.g., Figure 6 (As shown in the dashed box in the middle), the tray frame 204 can carry the shielding tray 202 from the storage chamber 306 to the processing chamber 304, or the tray frame 204 can carry the shielding tray 202 from the processing chamber 304 to the storage chamber 306.

[0064] In some embodiments, processing chamber 304 may be one chamber in a multi-chamber processing system formed by combining multiple chambers. In other embodiments, processing chamber 304 may be a single processing chamber. In some embodiments, processing chamber 304 may include a deposition chamber, such as a PVD deposition chamber.

[0065] In some embodiments, the deposition apparatus 300 may further include: a first sensor 316, a second sensor 318, a third sensor 320, and a fourth sensor 322, wherein the first sensor 316 and the second sensor 318 are used to sense whether the shielding disk 202 has reached a first preset position in the storage chamber 306, and the third sensor 320 and the fourth sensor 322 are used to sense whether the tray holder 204 has reached a second preset position in the storage chamber 306.

[0066] Here, the first preset position refers to the theoretical setting position of the shielding disk 202 in the storage chamber 306. At this time, the orthographic projection of the edge of the shielding disk 202 on the horizontal plane is located between the first sensor 316 and the second sensor 318. When the shielding disk 202 reaches the first preset position, the shielding disk 202 will not affect the normal operation of the deposition device 300. The second preset position refers to the theoretical setting position of the tray holder 204 in the storage chamber 306. At this time, the orthographic projection of the edge of the tray holder 204 on the horizontal plane is located between the third sensor 320 and the fourth sensor 322. When the tray holder 204 reaches the second preset position, the tray holder 204 will not affect the normal operation of the deposition device 300.

[0067] Here, the first sensor 316, the second sensor 318, the third sensor 320, and the fourth sensor 322 can each include a transmitter and a receiver. When the transmitter emits a laser beam and there is no object obstructing the laser beam between the transmitter and the receiver, the sensor does not emit a signal when the laser beam can reach the receiver. When the transmitter emits a laser beam and there is an object obstructing the laser beam between the transmitter and the receiver, the laser beam cannot reach the receiver, and the sensor emits a signal.

[0068] Here, when the tray holder 204 carrying the shielding disk 202 moves into the storage chamber 306, if the first sensor 316 does not emit a signal, but the second sensor 318, the third sensor 320, and the fourth sensor 322 all emit signals, it indicates that the tray holder 204 carries the shielding disk 202, and the shielding disk 202 has reached the first preset position in the storage chamber 306, and the tray holder 204 has reached the second preset position in the storage chamber 306, then the deposition process can be performed in the processing chamber 304. When the shielding disk 202 is located in the processing chamber 304 and the tray holder 204 is located in the storage chamber 306, if the first sensor 316, the second sensor 318, and the third sensor 320 do not emit signals, but the fourth sensor 322 emits a signal, it indicates that the tray holder 204 does not carry the shielding disk 202, and the tray holder 204 has reached the second preset position in the storage chamber 306, then the pre-burning process or the coating process can be performed in the processing chamber 304.

[0069] In some embodiments, the deposition apparatus 300 may further include: a base 308 disposed in the processing chamber 304 and a plurality of ejector pins 310, the plurality of ejector pins 310 being uniformly arranged along the circumference of the base 308; a second motor 312 coupled to the ejector pins 310, the second motor 312 being used to drive the plurality of ejector pins 310 to rise or fall; and a third motor 314 being used to drive the base 308 to rise or fall.

[0070] Here, the base 308 can be circular in shape, and the base 308 can be, for example, an electrostatic chuck.

[0071] Here, the number of ejector pins 310 can be multiple, such as three, four, five, or more. As long as the ejector pins 310 can stably support the shielding plate 202 after rising, and there is no interference between the ejector pins 310 and the tray frame 204, it is acceptable.

[0072] Here, a through hole is provided in the base 308 at the position corresponding to the ejector pin 310. The second motor 312 can drive the ejector pin 310 to rise and pass through the through hole in the base 308 until the highest point of the ejector pin 310 is higher than the surface of the base 308; or, the second motor 312 can drive the ejector pin 310 to fall and pass through the through hole in the base 308 until the highest point of the ejector pin 310 is lower than the surface of the base 308.

[0073] For example, when it is necessary to shield and protect the base 308 using the shielding disk 202, moving the shielding disk 202 from the storage chamber 306 to the processing chamber 304 may include the following steps:

[0074] In the first step, the tray frame 204 can carry the shielding tray 202 from the storage chamber 306 to the processing chamber 304. At this time, the tray frame 204 is used to carry the shielding tray 202. The shielding tray 202 is located above the base 308. The tray frame 204 is located between the shielding tray 202 and the base 308, and there is a certain gap between the surfaces of the shielding tray 202 and the base 308.

[0075] In the second step, the second motor 312 drives the ejector pin 310 to rise until the highest point of the ejector pin 310 contacts the bottom surface of the shielding plate 202. The ejector pin 310 continues to rise until the shielding plate 202 is changed from being supported by the tray frame 204 to being supported by the ejector pin 310. At this time, the highest point of the ejector pin 310 is higher than the surface of the tray frame 204. The ejector pin 310 can play the role of supporting the shielding plate 202. There is a certain distance between the shielding plate 202, the surface of the tray frame 204, and the surface of the base 308.

[0076] In the third step, the tray holder 204 can be moved from the processing chamber 304 to the storage chamber 306. During the movement, the tray holder 204 does not carry the shielding plate 202. The first sensor 316, the second sensor 318, the third sensor 320, and the fourth sensor 322 can be used to determine whether the tray holder 204 has reached the preset position.

[0077] In the fourth step, the second motor 312 drives the ejector pin to descend until the highest point of the ejector pin 310 is lower than or equal to the surface of the base 308. At this point, the shielding plate 202 contacts the surface of the base 308, and the base 308 can then support the shielding plate 202. Thus, the shielding plate 202 covers the surface of the base 308, serving to shield and protect the shielding plate 202.

[0078] Here, in the first step, the tray frame 204 carries the shielding tray 202 from the storage chamber 306 to the processing chamber 304. Sensors can monitor the positional offset between the shielding tray 202 and the tray frame 204 in real time, determining the relationship between this offset and a preset offset. When the offset is less than or equal to the preset offset, the tray frame 204 can continue moving the shielding tray 202. When the offset is greater than the preset offset, the movement of the tray frame 204 is paused, and an alarm signal is issued to prevent further adverse effects, such as the shielding tray 202 falling off the tray frame 204.

[0079] Here, the preset offset refers to the maximum positional offset between the shielding plate 202 and the tray frame 204 without affecting the normal operation of the deposition equipment 300, that is, the maximum positional offset acceptable for the normal operation of the deposition equipment 300.

[0080] In this embodiment of the invention, sensors are used to further improve the monitoring methods for the shielding disc during its movement, ensuring its stable operation.

[0081] For example, when it is not necessary to use the shielding disk 202 to shield and protect the base 308, moving the shielding disk 202 from the processing chamber 304 to the storage chamber 306 may include the following steps:

[0082] In the fifth step, the second motor 312 drives the ejector pin 310 to rise until the highest point of the ejector pin 310 contacts the bottom surface of the shielding plate 202. The ejector pin 310 can then support the shielding plate 202. The second motor 312 drives the ejector pin 310 to continue rising. At this point, the highest point of the ejector pin 310 is higher than the surface of the base 308. The ejector pin 310 can then support the shielding plate 202. There is a certain gap between the shielding plate 202 and the surface of the base 308.

[0083] In the sixth step, the tray frame 204 can be moved from the storage chamber 306 to the processing chamber 304. The tray frame 204 is located between the shielding plate 202 and the base 308, and there is a certain distance between the tray frame 204 and the shielding plate 202 and the base 308.

[0084] In the seventh step, the second motor 312 drives the ejector pin 310 to descend until the shielding plate 202 is changed from being supported by the ejector pin 310 to being supported by the tray frame 204; the second motor 312 drives the ejector pin 310 to descend until the highest point of the ejector pin 310 is lower than or equal to the surface of the base 308.

[0085] In the eighth step, the tray holder 204 can carry the shielding tray 202 from the processing chamber 304 to the storage chamber 306. The first sensor 316, the second sensor 318, the third sensor 320 and the fourth sensor 322 can be used to determine whether the tray holder 204 and the shielding tray 202 have reached the preset position.

[0086] Here, in the sixth step, before replacing the shielding plate 202 carried by the ejector pin 310 with the shielding plate 204 carrying the shielding plate 202, it is necessary to use sensors to monitor the positional offset between the shielding plate 202 and the tray frame 204 in real time, and determine the relationship between the positional offset between the shielding plate 202 and the tray frame 204 and a preset offset. When the positional offset between the shielding plate 202 and the tray frame 204 is less than or equal to the preset offset, the shielding plate 202 can be replaced by the tray frame 204 carrying the shielding plate 202. When the positional offset between the shielding plate 202 and the tray frame 204 is greater than the preset offset, the tray frame 204 cannot be used to carry the shielding plate 202, and an alarm signal is issued to prevent greater adverse effects. At this time, the shielding plate 202 cannot be removed from the processing chamber 304 to the storage chamber 306 using the tray frame 204, which can reduce the risk of the shielding plate 202 during movement and play a safety interlocking role.

[0087] Here, in the eighth step, the tray frame 204 can carry the shielding tray 202 from the processing chamber 304 to the storage chamber 306. Sensors can be used to monitor the positional offset between the shielding tray 202 and the tray frame 204 in real time, determining the relationship between this offset and a preset offset. When the positional offset between the shielding tray 202 and the tray frame 204 is less than or equal to the preset offset, the tray frame 204 can continue moving the shielding tray 202. When the positional offset between the shielding tray 202 and the tray frame 204 is greater than the preset offset, the movement of the tray frame 204 is paused, and an alarm signal is issued to prevent further adverse effects.

[0088] During the aforementioned movement, whether the tray holder 204 is moved individually into the storage chamber 306, or the tray holder 204 carrying the shielding disk 202 is moved into the storage chamber 306, the placement positions of the tray holder 204 and the shielding disk 202 within the storage chamber 306 can be detected using the first sensor 316, the second sensor 318, the third sensor 320, and the fourth sensor 322. However, during the movement of the tray holder 204 carrying the shielding disk 202 from the storage chamber 306 to the processing chamber 304, or vice versa, the positional offset between the tray holder 204 and the shielding disk 202 needs to be detected using sensors. In addition, the shielding plate 202 is in the processing chamber 304. Due to the rise and fall of the ejector pin 310, the shielding plate 202 will also rise and fall with the movement of the ejector pin 310. The position of the shielding plate 202 may be offset. The positional offset between the shielding plate 202 and the tray frame 204 also needs to be detected by the sensor.

[0089] In some embodiments, a target and a magnetron are provided in the processing chamber 304. The target provides material deposited on the substrate during the deposition process, and the magnetron facilitates uniform consumption of the target material during the deposition process. An inert gas is provided to the processing chamber 304 to form a plasma between the substrate 308 and the target. The plasma is accelerated toward the target and causes the target material to detach from the target. The detached target material is deposited on the substrate located on the substrate 308 to form a film.

[0090] In some embodiments, the deposition apparatus 300 further includes a controller 302, which is coupled to the transfer assembly 200; the controller 302 is configured to control the shielding disk 202 to move from the storage chamber 306 to the processing chamber 304 when performing a pre-burning process or a coating process, and the controller 302 is also configured to control the shielding disk 202 to move from the processing chamber 304 to the storage chamber 306 when performing a deposition process.

[0091] Here, depending on the requirements of various processes performed in the deposition equipment 300, when it is necessary to use the shielding disk 202 to shield and protect the base 308, the shielding disk 202 is moved from the storage chamber 306 to the processing chamber 304; when it is not necessary to use the shielding disk 202 to shield and protect the base 308, the shielding disk 202 is moved from the processing chamber 304 to the storage chamber 306.

[0092] Figure 7 Figure (a) is a schematic diagram showing a structure where the positional offset between the shielding plate and the tray frame is less than or equal to a preset offset. For example... Figure 7As shown in Figure (a), in some embodiments, the controller 302 is used to control the tray 204 to carry the shielding disk 202 and move it based on the positional offset between the shielding disk 202 and the tray frame 204 being less than or equal to a preset offset. Figure 7 Figure (b) is a schematic diagram showing a structure where the positional offset between the shielding plate and the tray frame is greater than a preset offset. For example... Figure 7 As shown in Figure (b), the controller 302 is also used to control the pallet holder 204 to stop moving and issue an alarm signal if the positional offset between the shielding plate 202 and the pallet holder 204 is greater than a preset offset.

[0093] As mentioned above, the width D3 of the ring can be used as a preset offset. When the circular detection area is within the larger circle of the ring detection area, the positional offset between the tray frame 204 and the shielding disk 202 is less than or equal to the preset offset. The tray frame 204 can be used to carry the shielding disk 202 to the processing chamber 304 (refer to the relevant description of the first step above), or the tray frame 204 can be used to carry the shielding disk 202 to the storage chamber 306 (refer to the relevant description of the eighth step above), or the tray frame 204 can be used to carry the shielding disk 202 in the processing chamber 304 (refer to the relevant description of the sixth step above).

[0094] As mentioned above, the width D3 of the ring can be used as a preset offset. When the circular detection area is outside the large circle range of the ring detection area, the positional offset between the tray frame 204 and the shielding disk 202 is greater than the preset offset. The movement of the tray frame 204 is paused during the process of the tray frame 204 carrying the shielding disk 202 moving to the processing chamber 304; or, the movement of the tray frame 204 is paused during the process of the tray frame 204 carrying the shielding disk 202 moving to the storage chamber 306; or, the use of the tray frame to carry the shielding disk 202 is paused in the processing chamber 304.

[0095] In this embodiment of the invention, a detection patch is provided on the bottom surface of the shielding plate, and a displacement detector is provided on the top surface of the tray frame. For example... Figure 7 As shown in Figure (a), when the shielding plate does not shift or its position offset is less than or equal to the preset offset, the displacement detector can always detect the position of the detection patch. Therefore, the shielding plate can be moved using a tray frame without triggering an alarm signal. Figure 7 As shown in Figure (b), when the shielding plate is displaced and the position offset is greater than the preset offset, the displacement detector cannot detect the signal of the detection patch. Therefore, it is necessary to pause the tray frame to ensure that the tray frame will not forcibly remove the shielding plate when the shielding plate is displaced, which would cause the shielding plate to damage other components.

[0096] This invention provides a transport assembly and a deposition apparatus. The transport assembly includes: a shielding disk, the shielding disk including a first surface and a second surface opposite to each other along the thickness direction; a tray frame, the tray frame including a third surface and a fourth surface opposite to each other along the thickness direction, the tray frame for carrying the shielding disk, wherein the second surface and the third surface are in contact, the tray frame for moving the shielding disk into or out of the processing chamber; and a sensor, the sensor including a first detection unit disposed on the second surface and a second detection unit disposed on the third surface, the sensor for determining the positional offset between the shielding disk and the tray frame based on the first detection unit and the second detection unit. In this embodiment of the invention, a sensor is used to determine the positional offset between the shielding plate and the pallet frame. On the one hand, the positional offset between the shielding plate and the pallet frame can be monitored in real time during the movement of the shielding plate. When the positional offset is greater than a preset offset, the movement of the pallet frame is paused to prevent greater adverse effects. On the other hand, the positional offset between the shielding plate and the pallet frame can be determined before the pallet frame carries the shielding plate. When the positional offset is greater than a preset offset, the pallet frame carrying the shielding plate is paused to prevent greater adverse effects.

[0097] It should be understood that the phrase "one embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of the present invention. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. It should be understood that in the various embodiments of the present invention, the sequence number of the above-described processes does not imply a sequential order of execution; the execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention. The sequence numbers of the above-described embodiments of the present invention are merely descriptive and do not represent the superiority or inferiority of the embodiments.

[0098] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the concept of the present utility model and using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A transmission component, characterized in that, The transmission component includes: A shielding disk, the shielding disk including a first surface and a second surface opposite each other along the thickness direction; A tray holder, the tray holder including a third surface and a fourth surface opposite each other along the thickness direction, the tray holder for carrying the shielding tray, wherein the second surface and the third surface are in contact, the tray holder for moving the shielding tray into or out of the processing chamber; The sensor includes a first detection unit disposed on the second surface and a second detection unit disposed on the third surface. The sensor is used to determine the positional offset between the shielding plate and the tray frame based on the first detection unit and the second detection unit.

2. The transmission component according to claim 1, characterized in that, The second surface has a groove structure, and the first detection unit is located at the groove structure; the third surface has a protrusion structure, and the second detection unit is located at the protrusion structure; when the tray frame is used to support the shielding tray, the protrusion structure is embedded in the groove structure.

3. The transmission component according to claim 2, characterized in that, The shape of the shielding disc includes a circle; the groove structure is located at the center of the shielding disc.

4. The transmission component according to claim 2, characterized in that, The pallet frame includes a first sub-support and a second sub-support that are fixedly connected. The first sub-support has an arc shape, and the second sub-support has a straight shape. The first sub-support is axially symmetrical about the second sub-support. The protruding structure is provided at the second sub-support of the pallet frame.

5. The transmission component according to claim 2, characterized in that, The orthographic projection shape of the groove structure on the second surface includes a first circle, and the orthographic projection shape of the protrusion structure on the third surface includes a second circle; wherein the diameter of the first circle is greater than or equal to the diameter of the second circle.

6. The transmission component according to claim 5, characterized in that, The first detection unit includes an annular detection area located at the groove structure, and the second detection unit includes a circular detection area located at the protrusion structure. The diameter of the circular detection area is the same as the inner diameter of the annular detection area. The sensor is used to determine the positional offset between the shielding plate and the tray frame based on the relative positional relationship between the center of the annular detection area and the center of the circular detection area.

7. The transmission component according to claim 1, characterized in that, The transmission component further includes: A bracket arm, which is connected to the pallet frame; A rotating shaft, which is connected to the bracket arm; A first motor is coupled to the rotating shaft. The first motor drives the rotating shaft to rotate, thereby driving the bracket arm so that the tray frame moves into or out of the processing chamber.

8. A deposition apparatus, characterized in that, The deposition apparatus includes: The transmission component as described in any one of claims 1 to 7; A controller, coupled to the transmission component, is configured to move the tray holding the shielding plate if the positional offset between the shielding plate and the tray frame is less than or equal to a preset offset; and the controller is further configured to pause the movement of the tray frame and issue an alarm signal if the positional offset between the shielding plate and the tray frame is greater than the preset offset.

9. The deposition apparatus according to claim 8, characterized in that, The deposition apparatus also includes: A storage chamber and a processing chamber are interconnected; the controller is used to control the shielding disk to move from the storage chamber to the processing chamber when a pre-burning process or a coating process is performed, and the controller is also used to control the shielding disk to move from the processing chamber to the storage chamber when a deposition process is performed.

10. The deposition apparatus according to claim 9, characterized in that, The deposition apparatus also includes: A base, wherein the base is disposed in the processing chamber; Multiple ejector pins are disposed in the processing chamber and are evenly arranged along the circumference of the base; A second motor is coupled to the ejector pins and is used to drive the plurality of ejector pins to rise or fall.

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