Adjusting tool

Abstract

The utility model provides an adjusting tool which comprises a supporting part and two measuring parts, the two measuring parts are arranged on the supporting part, each measuring part comprises a first measuring arm and a second measuring arm, the first measuring arm and the second measuring arm are located at the same horizontal height, the first measuring arm is used for making contact with an ultraviolet lamp holder belt gear, and the second measuring arm is used for making contact with an ultraviolet lamp holder belt gear. And the second measuring part is used for contacting the surface of the machine chamber belt gear. The two groups of measuring parts of the adjusting tool can be used for simultaneously measuring and adjusting the heights of the two groups of ultraviolet lamp holder belt gears and the height of the machine chamber belt gear in the transmission mechanism quickly and accurately, and the adjusting steps are effectively simplified.

Description

Technical Field

[0001] This utility model relates to the field of chemical thin film deposition equipment, and specifically to an adjustment fixture. Background Technology

[0002] In the semiconductor manufacturing field, chemical thin film deposition (CLD) is a key process widely used in wafer surface treatment. This technology involves subjecting gaseous substances to a low-temperature chemical reaction to generate a solid thin film, which is then deposited on the wafer surface to create specific functional layers. However, in actual production, the equipment chambers for this technology require regular maintenance due to factors such as excessive wafer particle size and the need for timely equipment upkeep.

[0003] Especially in CVD (Chemical Vapor Deposition) equipment, the UVC (Ultraviolet Curing Chemical Vapor Deposition) processing unit serves as a crucial post-processing step. Through the combined use of ultraviolet lamps and ozone, it cures the wafer surface to improve film performance. In existing UVC equipment, the ultraviolet lamps need to rotate at a fixed speed and direction to ensure uniform treatment of the wafer surface. To achieve this, a synchronous belt drive mechanism is typically used to ensure that the two lamps move synchronously and at the same speed.

[0004] However, during routine maintenance and troubleshooting of the equipment, it is often necessary to open the cavity to disassemble and inspect the lamp heads and gears. Accurate installation of the synchronous belt and gears becomes a critical task during reactivation. Due to long-term use and potential structural deformation, if the height of the belts and gears in the two sets of UV lamp holders and the machine chamber of the transmission mechanism is not ensured to be on the same horizontal line during installation, friction may occur in the synchronous belt during operation, or even breakage may occur, seriously affecting the normal operation and production capacity of the equipment.

[0005] In existing technologies, the height of two sets of UV lamp head seat belt gears and the machine tool chamber belt gear in the transmission mechanism is usually adjusted repeatedly. This process is tedious and prone to errors. Utility Model Content

[0006] In view of the cumbersome and error-prone process of adjusting the height of the two sets of UV lamp holder belt gears and the machine tool cavity belt gear in the transmission mechanism using vernier calipers or steel rulers in the existing technology, this application provides an adjustment fixture. The two measuring parts of this adjustment fixture can simultaneously measure and adjust the height of the two sets of UV lamp holder belt gears and the machine tool cavity belt gear in the transmission mechanism, which is fast and accurate, and effectively simplifies the adjustment steps.

[0007] One embodiment of this application provides an adjustment fixture, including:

[0008] Support base;

[0009] Two sets of measuring units are provided, both of which are mounted on the support base. Each set of measuring units includes a first measuring arm and a second measuring arm. The first measuring arm and the second measuring arm are at the same horizontal height. The first measuring arm is used to contact the surface of the UV lamp holder belt gear, and the second measuring arm is used to contact the surface of the machine chamber belt gear.

[0010] In one embodiment, the support base includes a support column and a support platform, the support platform passes through the support column, and a first locking member is provided between the support platform and the support column; two sets of the measuring parts are provided on the support platform.

[0011] In one implementation, each set of measuring units is symmetrically arranged on the support platform.

[0012] In one embodiment, the first measuring arm and the second measuring arm are detachably connected to the support platform.

[0013] As one implementation method, the support platform is provided with an angle scale.

[0014] In one embodiment, both the first measuring arm and the second measuring arm are connected to the support platform via a second locking member.

[0015] In one embodiment, the second locking element is a screw.

[0016] In one embodiment, the first locking element is a screw.

[0017] In one implementation, the length of the first measuring arm is less than the length of the second measuring arm.

[0018] As one implementation, along the length of the first measuring arm, the surface of the first measuring arm that contacts the ultraviolet lamp holder belt gear is provided with a stepped structure with gradually changing height.

[0019] Along the length of the second measuring arm, the surface of the second measuring arm that contacts the belt gear of the machine chamber is provided with a stepped structure with gradually changing height.

[0020] The gradient direction of the step structure of the first measuring arm is the same as the gradient direction of the step structure of the second measuring arm.

[0021] As described above, the adjusted tooling of this application has the following beneficial effects:

[0022] The adjustment fixture of this application, by setting up two sets of measuring sections, can simultaneously calibrate the height of the two sets of UV lamp holder belt gears and the machine tool chamber belt gear in the transmission mechanism, ensuring that the heights of the two sets of UV lamp holder belt gears and the machine tool chamber belt gear in the transmission mechanism are at the same level. This reduces the risk of wear and breakage of the synchronous belt, significantly reduces adjustment time, and allows even less experienced operators to quickly and accurately complete the installation of the synchronous belt. Due to the simplified adjustment steps, it also reduces the risk of synchronous belt adjusting screws becoming damaged due to repeated measurements when adjusting height using vernier calipers or steel rulers. Attached Figure Description

[0023] Figure 1 The diagram shows the structure of two sets of UV lamp holder belt gears and the machine tool chamber belt gear in the transmission mechanism in the prior art.

[0024] Figure 2 The diagram shown is a three-dimensional structural schematic of the adjustment tooling according to an embodiment of the present utility model;

[0025] Figure 3 The diagram shown is a front view of the adjustment tooling according to an embodiment of the present utility model.

[0026] Figure 4 The diagram shows a schematic representation of the adjustment fixture used in an embodiment of this invention for adjusting the height of the belt gears in the machine tool chamber of two sets of UV lamp holder belt gears and transmission mechanism.

[0027] Component designation explanation

[0028] 10, UV lamp holder belt gear; 20, machine chamber belt gear; 100, support base; 110, support column; 120, support platform; 130, first locking element; 200, measuring part; 210, first measuring arm; 220, second measuring arm; 230, second locking element; 240, stepped structure. Detailed Implementation

[0029] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0030] Please see Figures 1 to 4It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the illustrations only show the components related to this utility model and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0031] Chemical vapor deposition (CVD) is a process for depositing solid thin films on a substrate surface through vapor-phase chemical reactions. This technology is widely used in semiconductors, optoelectronics, materials science, and other fields to prepare various functional thin film materials.

[0032] During the daily operation of CVD equipment, the equipment chamber may require periodic maintenance due to issues such as excessive wafer particle size or due maintenance schedules. This is especially true in ultraviolet curing chemical vapor deposition (UVC) equipment, where the UV lamp head cures the wafer surface with the aid of ozone. These devices require the UV lamp head to rotate at a fixed speed and direction to ensure uniform treatment of the wafer surface.

[0033] In existing UVC equipment, the rotation of the UV lamp heads relies on a synchronous belt drive system to ensure that the two UV lamp heads move at the same speed. Therefore, during routine maintenance and troubleshooting, it is necessary to disassemble and reassemble the synchronous belt, UV lamp heads, and gearbox. During the restoration process, the installation of the synchronous belt and gearbox is involved, such as... Figure 1 As shown, special attention needs to be paid to adjusting the height of the UV lamp holder belt gear 10 and the machine chamber belt gear 20 to ensure that the heights of the two sets of UV lamp holder belt gear 10 and machine chamber belt gear 20 are horizontal and at the same height. This is to avoid deformation of some load-bearing structures due to long-term use, which may cause the synchronous belts to be at different horizontal heights after rework, resulting in friction or even breakage of the synchronous belts, thus affecting the equipment's production capacity.

[0034] In the existing technology, vernier calipers or steel rulers are often used to repeatedly measure the height of the UV lamp holder belt gear 10 and the machine chamber belt gear 20. However, this measurement method is not only cumbersome and time-consuming, but also has low accuracy and increases the probability of damage to the timing belt adjusting screw.

[0035] To address the above-mentioned shortcomings, this application provides an adjustment fixture. The following embodiments will provide a detailed description.

[0036] This embodiment provides an adjustment fixture, such as Figure 2 and Figure 3 As shown, the adjustment fixture includes a support base 100 and two sets of measuring parts 200.

[0037] Among them, such as Figure 2 and Figure 3 As shown, both sets of measuring units 200 are mounted on the support base 100. The heights of the two sets of measuring units 200 on the support base 100 can be the same or different. Understandably, in order to adjust the heights of the two sets of UV lamp holder belt gears 10 and the machine tool chamber belt gear 20 in the transmission mechanism to be on the same horizontal line, it is preferable to set the heights of the two sets of measuring units 200 on the support base 100 to be the same.

[0038] Each measuring unit 200 includes a first measuring arm 210 and a second measuring arm 220. The first measuring arm 210 and the second measuring arm 220 are at the same horizontal height. The first measuring arm 210 is used to contact the surface of the UV lamp holder belt gear 10, and the second measuring arm 220 is used to contact the surface of the machine chamber belt gear 20. In this way, it is possible to quickly measure whether the UV lamp holder belt gear 10 and the machine chamber belt gear 20 are at the same horizontal height, and adjust the height of the UV lamp holder belt gear 10 and the machine chamber belt gear 20 simultaneously using the first measuring arm 210 and the second measuring arm 220 as standards. Optionally, for ease of observation and adjustment, the lower surface of the first measuring arm 210 is set to contact the upper surface of the UV lamp holder belt gear 10, and the lower surface of the second measuring arm 220 is set to contact the upper surface of the machine chamber belt gear 20.

[0039] The adjustment fixture provided in this embodiment, by setting up a support base 100 and two sets of measuring parts 200, can simultaneously calibrate the height of the two sets of UV lamp holder belt gears 10 and machine chamber belt gears 20. This simplifies the adjustment steps and reduces the risk of thread damage caused by repeated measurements using vernier calipers and steel rulers. By precisely adjusting the height of the two sets of UV lamp holder belt gears 10 and machine chamber belt gears 20, it ensures that they are at the same horizontal level, reducing the risk of wear and breakage of the synchronous belt. It can significantly reduce adjustment time, enabling equipment maintenance personnel to quickly and accurately confirm the height consistency of the synchronous belt rotating assembly (the two sets of UV lamp holder belt gears 10 and machine chamber belt gears 20), improving the efficiency of fault diagnosis and troubleshooting.

[0040] In optional embodiments, such as Figure 2 and Figure 3As shown, the support base 100 includes a support column 110 and a support platform 120. The support column 110 passes through the support platform 120, and a first locking member 130 is provided between the support platform 120 and the support column 110. The support column 110 has a certain height, and the support platform 120 can move freely along the height direction of the support column 110. When the support platform 120 needs to be fixed at a certain height on the support column 110, it can be locked and fixed by the first locking member 130, thus adapting to UVC equipment with different heights. Two sets of measuring parts 200 are provided on the support platform 120. It can be understood that the surface of the support platform 120 that supports the measuring parts 20 is a smooth surface, that is, the surface is at a consistent height in the horizontal direction. Specifically, as shown... Figure 2 As shown, the number of support columns 110 can be multiple, such as three. A base is provided at the bottom of the multiple support columns 110. The base can support the multiple support columns 110 and also facilitate the loading and unloading of the entire adjustment fixture. Setting multiple support columns 110 helps to increase the supporting force on the support platform 120. A first locking member 130 is provided between each support column 110 and the support platform 120. Through holes matching the number of support columns 110 are provided on the support platform 120. The shape of the through holes is adapted to the shape of the support columns 110. The support columns 110 can be set as cuboid structures to increase the fastening force between the support columns 110 and the support platform 120. Optionally, the first locking member 130 can be a screw. The screw can be used to easily disassemble the support platform 120 and the support columns 110 to realize the height adjustment of the support platform 120 on the support columns 110.

[0041] In optional embodiments, such as Figure 2 and Figure 3 As shown, each measuring unit 200 is symmetrically arranged on the support platform 120. Since the two sets of UV lamp holder belt gears 10 and machine chamber belt gears 20 are symmetrically arranged, symmetrically arranging each measuring unit 200 on the support platform 120 ensures synchronization with the two sets of UV lamp holder belt gears 10 and machine chamber belt gears 20, and facilitates the measurement and adjustment of the height of the two sets of UV lamp holder belt gears 10 and machine chamber belt gears 20.

[0042] In optional embodiments, such as Figure 2 and Figure 3As shown, the first measuring arm 210 and the second measuring arm 220 are detachably connected to the support platform 120. Since the angle between the UV lamp holder belt gear 10 and the machine chamber belt gear 20 may differ in different UVC devices, to accommodate the different angles between the UV lamp holder belt gear 10 and the machine chamber belt gear 20, both the first measuring arm 210 and the second measuring arm 220 are detachably connected to the support platform 120, facilitating timely adjustment of the angle between them.

[0043] In an optional embodiment, the surface of the support platform 120 that supports the measuring unit 200 is provided with an angle scale. This makes it easy to maintain the consistency of the angles of the first measuring arm 210 and the second measuring arm 220 in the two sets of measuring units 200. And once the angle between the first measuring arm 210 and the second measuring arm 220 in one set of measuring units 200 is determined, the angle between the first measuring arm 210 and the second measuring arm 220 in the other set of measuring units 200 can be quickly adjusted according to the above angle.

[0044] In an optional embodiment, both the first measuring arm 210 and the second measuring arm 220 are connected to the support platform 120 via a second locking member 230. This allows for easy adjustment of the position of the first measuring arm 210 and the second measuring arm 220 on the support platform 120, thereby facilitating the adjustment of the angle between the first measuring arm 210 and the second measuring arm 220. Optionally, the second locking member 230 is a screw, which allows for easy disassembly of the connection between the support platform 120 and the first measuring arm 210 and the second measuring arm 220, and further adjustment of the angle between the first measuring arm 210 and the second measuring arm 220.

[0045] In optional embodiments, such as Figure 2 As shown, the length of the first measuring arm 210 is less than the length of the second measuring arm 220. Figure 4 As shown, when the adjustment fixture is applied to the height adjustment of the UV lamp holder belt gear 10 and the machine tool chamber belt gear 20, the front and rear working distances on the machine tool will be slightly closer on one side and slightly farther on the other. Specifically, the adjustment fixture is closer to the UV lamp holder belt gear 10 and farther from the machine tool chamber belt gear 20. To accommodate this situation, the length of the first measuring arm 210 is set to be shorter than the length of the second measuring arm 220. This also saves processing materials and reduces the cost of producing the adjustment fixture.

[0046] In optional embodiments, such as Figure 2 and Figure 3As shown, along the length of the first measuring arm 210, a stepped structure 240 with a gradually changing height is provided on the surface of the first measuring arm 210 that contacts the UV lamp holder belt gear 10; along the length of the second measuring arm 220, a stepped structure 240 with a gradually changing height is provided on the surface of the second measuring arm 220 that contacts the machine chamber belt gear 20; the gradual change direction of the stepped structure 240 of the first measuring arm 210 is the same as the gradual change direction of the stepped structure 240 of the second measuring arm 220. Since the heights of the UV lamp holder belt gear 10 and the machine chamber belt gear 20 may be different in different UVC equipment, stepped structures can be provided on the lower surfaces of the first measuring arm 210 and the second measuring arm 220 to accommodate the different heights of the UV lamp holder belt gear 10 and the machine chamber belt gear 20 in different UVC equipment. However, considering the load-bearing capacity of the support platform 120 on the first measuring arm 210 and the second measuring arm 220, the height difference between the stepped structure 240 of the first measuring arm 210 and the stepped structure 240 of the second measuring arm 220 cannot be too large. This limitation only applies to UV lamp holder belt gears 10 and machine chamber belt gears 20 in different UVC devices where the height difference is not significant. For UV lamp holder belt gears 10 and machine chamber belt gears 20 in different UVC devices where the height difference is large, it is necessary to adjust the height of the support platform 120 on the support column 110.

[0047] In an optional embodiment, the entire adjustment fixture can be made of stainless steel.

[0048] Compared to existing technologies that use vernier calipers or steel rulers to repeatedly measure the height of the UV lamp holder belt gears and machine chamber belt gears, and tighten them by adjusting the screws of the timing belt, the adjustment fixture in this embodiment can quickly measure and adjust the height of the two sets of UV lamp holder belt gears and machine chamber belt gears through the measuring unit. The operation steps are simple, the measurement results are clear at a glance, the adjustment is fast, and the accuracy is high. It can effectively avoid friction of the timing belt during operation caused by the inconsistency in the height of the UV lamp holder belt gears and machine chamber belt gears, reduce the risk of timing belt breakage, and improve the production capacity of the equipment.

[0049] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. An adjustment fixture, characterized in that, include: Support base; Two sets of measuring units are provided, both of which are mounted on the support base. Each set of measuring units includes a first measuring arm and a second measuring arm. The first measuring arm and the second measuring arm are at the same horizontal height. The first measuring arm is used to contact the surface of the UV lamp holder belt gear, and the second measuring arm is used to contact the surface of the machine chamber belt gear.

2. The adjustment fixture according to claim 1, characterized in that, The support base includes a support column and a support platform. The support platform passes through the support column, and a first locking member is provided between the support platform and the support column. Two sets of the measuring parts are provided on the support platform.

3. The adjustment fixture according to claim 2, characterized in that, Each set of measuring units is symmetrically arranged on the support platform.

4. The adjustment fixture according to claim 3, characterized in that, The first measuring arm and the second measuring arm are detachably connected to the support platform.

5. The adjustment fixture according to claim 4, characterized in that, Angle scales are provided on the support platform.

6. The adjustment fixture according to claim 4, characterized in that, Both the first measuring arm and the second measuring arm are connected to the support platform via a second locking member.

7. The adjustment fixture according to claim 6, characterized in that, The second locking element is a screw.

8. The adjustment fixture according to claim 2, characterized in that, The first locking element is a screw.

9. The adjustment fixture according to claim 1, characterized in that, The length of the first measuring arm is less than the length of the second measuring arm.

10. The adjustment fixture according to any one of claims 1 to 9, characterized in that, Along the length of the first measuring arm, the surface of the first measuring arm that contacts the belt gear of the ultraviolet lamp holder is provided with a stepped structure with gradually changing height. Along the length of the second measuring arm, the surface of the second measuring arm that contacts the belt gear of the machine chamber is provided with a stepped structure with gradually changing height. The gradient direction of the step structure of the first measuring arm is the same as the gradient direction of the step structure of the second measuring arm.

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