Aluminum nitride manufacturing device

Abstract

The utility model provides an aluminum nitride manufacturing device, and relates to the technical field of aluminum nitride preparation. The aluminum nitride manufacturing device comprises a furnace body, an air inlet pipeline and an exhaust pipeline, the air inlet pipeline and the exhaust pipeline are at least partially contained in a cavity of the furnace body, the air inlet pipeline is provided with a first through hole, the first through hole communicates with the interior of the air inlet pipeline and the cavity, and the air inlet pipeline comprises a first branch pipeline, a second branch pipeline and a first connecting pipeline; the first connecting pipeline is communicated with the first branch pipeline and the second branch pipeline, and the first through hole is formed in the first connecting pipeline. The aluminum nitride manufacturing device has the technical characteristics, so that the length of the gas inlet pipeline in the furnace body can be longer, when nitrogen escapes from the first through hole, the temperature can meet the reaction requirement, and in the process that the nitrogen flows into the first connecting pipeline through the first branch pipeline and the second branch pipeline, the circulation speed of the nitrogen is reduced, so that the nitrogen is prevented from flowing into the second connecting pipeline. The blowing-away of the to-be-reacted object is avoided, and the manufacturing efficiency and yield of the aluminum nitride powder are improved.

Description

Technical Field

[0001] This application relates to the field of aluminum nitride preparation technology, and more particularly to an aluminum nitride manufacturing apparatus. Background Technology

[0002] Aluminum nitride possesses excellent properties such as high electrical insulation, high plasma resistance, and high thermal conductivity, making it widely used in insulating heat dissipation substrates and semiconductor manufacturing equipment materials. Aluminum nitride ceramics have become ideal heat dissipation and packaging materials for next-generation large-scale integrated circuits, semiconductor module circuits, and high-power devices. To obtain high-performance aluminum nitride ceramics, preparing high-performance aluminum nitride powder is the primary factor.

[0003] Currently, the main industrial production methods for aluminum nitride include direct nitriding of aluminum powder, carbothermic reduction of alumina, and self-propagating process. Among these, aluminum nitride prepared by the carbothermic reduction of alumina has the advantages of uniform particle size distribution, high purity, and excellent forming and sintering properties, and is therefore widely used. In existing technologies, nitrogen gas enters the chamber directly through a pipeline. The limited contact area of ​​the room-temperature gas within the pipeline and the short preheating time prevent the gas from reaching the required reaction temperature, thus affecting the efficiency and yield of aluminum nitride production. Utility Model Content

[0004] This application provides an aluminum nitride manufacturing apparatus. By including a first branch pipe, a second branch pipe, and a first connecting pipe in the gas inlet pipe, with the first connecting pipe connecting the first branch pipe and the second branch pipe, and a first through hole provided in the first connecting pipe, the residence time of nitrogen gas in the gas inlet pipe is longer. When the nitrogen gas escapes from the first through hole, the temperature can reach the reaction requirements. Furthermore, as the nitrogen gas flows into the first connecting pipe through the first branch pipe and the second branch pipe, the flow rate of the nitrogen gas is reduced, thus preventing the reactants from being blown away.

[0005] In a first aspect, this application provides an aluminum nitride manufacturing apparatus, comprising:

[0006] The furnace body has a cavity;

[0007] An air intake pipe is at least partially housed within the cavity. The air intake pipe has an air inlet and a first through hole. The air inlet is located outside the furnace body and communicates with the interior of the air intake pipe. The first through hole communicates with the interior of the air intake pipe and the cavity. The air intake pipe housed within the cavity includes a first branch pipe, a second branch pipe, and a first connecting pipe. The first connecting pipe communicates with the first branch pipe and the second branch pipe. The first through hole is disposed on the first connecting pipe.

[0008] An exhaust pipe, at least partially housed within the cavity, has an exhaust port and a second through hole. The exhaust port is located outside the furnace body and communicates with the interior of the exhaust pipe, while the second through hole communicates with the interior of the exhaust pipe and the cavity.

[0009] In one possible implementation, the first branch pipe and the second branch pipe are parallel, and the extension direction of the first connecting pipe is perpendicular to or inclined to the extension direction of the first branch pipe. This ensures that the space between the first branch pipe and the second branch pipe that can accommodate the first connecting pipe remains consistent at different positions, and also reduces the length of the air inlet pipe in the first direction, thereby reducing the length of the furnace body in the first direction, which is beneficial for reducing costs.

[0010] In one possible implementation, the aluminum nitride manufacturing apparatus further includes at least two crucibles stacked sequentially along a first direction. Both the first and second branch pipes extend along the first direction. A first vent is provided between adjacent crucibles, connecting the interior of the crucible to the cavity. The projection of the first through-hole along a second direction coincides with the first vent, which is perpendicular to the first direction. This allows nitrogen gas to escape from the first through-hole and directly enter the first vent, thereby contacting the alumina powder and carbon phase inside the crucible and preventing nitrogen from diffusing outside the crucible.

[0011] In one possible implementation, the number of first connecting pipes is at least two, and the number of first through holes is at least two. Each first connecting pipe has a first through hole, and the projection of each first vent along the second direction coincides with the projection of at least one first through hole along the second direction. The large number of first through holes allows for a larger area for nitrogen to escape from the inlet pipes, ensuring a continuous influx of sufficient nitrogen into each crucible and guaranteeing that the alumina powder and carbon in each crucible can react fully.

[0012] In one possible implementation, the extension direction of the first connecting pipe is perpendicular to the extension direction of the first branch pipe, and each first connecting pipe has at least two first through holes, the projections of the at least two first through holes in the second direction coinciding with the single first vent. More nitrogen gas can simultaneously enter the crucible from the first vent, which is beneficial for the full reaction of alumina powder and carbon, thereby improving the efficiency and yield of aluminum nitride powder manufacturing.

[0013] In one possible implementation, in the second direction, the sum of the areas of at least two first through holes projected onto a single first vent is S1; the area of ​​the single first vent is S2, where 60% S2 ≤ S1. A relatively large amount of nitrogen enters the first vent, allowing it to promptly expel the reacted gas from the crucible, ensuring that the alumina powder and carbon can react fully with the nitrogen in a timely manner, thus improving the efficiency of aluminum nitride powder manufacturing.

[0014] In one possible implementation, the inner cross-sectional area of ​​the first branch pipe is S3, 0.015m. 2 ≥S3≥0.005m 2 On the air inlet pipe, the distance from the air inlet to the first through hole is L, where L ≥ 2m. This ensures that sufficient nitrogen gas enters the first connecting pipe through the first branch pipe per unit time, and that the nitrogen gas resides in the air inlet pipe for a sufficiently long time, so that the temperature reaches the reaction requirement when the nitrogen gas escapes from the first through hole.

[0015] In one possible implementation, the exhaust pipe includes a third branch pipe, a fourth branch pipe, and a second connecting pipe, the second connecting pipe connecting the third branch pipe and the fourth branch pipe, the second through hole being disposed on the second connecting pipe, and the third branch pipe and the fourth branch pipe being parallel.

[0016] A second vent is provided between two adjacent crucibles, connecting the interior of the crucible to the cavity. The first and second vents are located on opposite sides of the crucible in the second direction. The exhaust pipe and the inlet pipe are also located on opposite sides of the crucible in the second direction. By arranging the inlet pipe, crucible, and exhaust pipe in a straight line, the circulation of gas within the furnace after the reaction is reduced, which affects the purity of nitrogen and thus improves the efficiency of aluminum nitride powder manufacturing.

[0017] In one possible implementation, in the second direction, the projection of the first through hole coincides with the projection of the first vent, and the projection of the second through hole coincides with the projection of the second vent. This reduces the distance that nitrogen travels between the first through hole and the first vent, and the distance that the reacted gas travels between the second through hole and the second vent. This avoids the reacted gas remaining in the furnace and diluting the purity of the nitrogen, thereby improving the efficiency and yield of aluminum nitride powder manufacturing.

[0018] In one possible implementation, both the third and fourth branch pipes extend along the first direction, and the number of second through holes is at least two. The projections of at least two second through holes in the opposite direction of the second direction coincide with a single second vent, which helps to reduce the movement distance of the gas after reaction between the second through holes and the second vent, and avoids the gas after reaction remaining in the furnace to dilute the purity of nitrogen.

[0019] In the above technical solution, the aluminum nitride manufacturing apparatus includes a furnace body, an inlet pipe, and an exhaust pipe. The inlet pipe, housed within a cavity, comprises a first branch pipe, a second branch pipe, and a first connecting pipe. The first connecting pipe connects the first and second branch pipes, and a first through-hole is located on the first connecting pipe. This allows for a longer length of the inlet pipe within the furnace body, resulting in a longer residence time of nitrogen gas within the inlet pipe and enabling sufficient heat exchange with the inner wall of the inlet pipe. This eliminates the need for installing a heating device at the inlet. Furthermore, as nitrogen gas flows into the first connecting pipe through the first and second branch pipes, the flow rate of nitrogen gas decreases, preventing nitrogen gas from blowing away the reactants and affecting the aluminum nitride yield. This improves the efficiency and yield of aluminum nitride powder manufacturing. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic cross-sectional view of the aluminum nitride manufacturing apparatus in one implementation of this application;

[0022] Figure 2 This refers to the air intake pipe, exhaust pipe, and crucible in one implementation of this application;

[0023] Figure 3 yes Figure 2 A cross-sectional view along the AA direction.

[0024] Figure label:

[0025] 10-Furnace body, 11-Cavity;

[0026] 20-Intake pipe, 21-First branch pipe, 22-Second branch pipe, 23-First connecting pipe, 24-Intake port, 25-First through hole;

[0027] 30 - Exhaust pipe, 31 - Third branch pipe, 32 - Fourth branch pipe, 33 - Second connecting pipe, 34 - Exhaust port, 35 - Second through hole;

[0028] 40 - Crucible, 41 - First vent, 42 - Second vent. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below. Where specific conditions are not specified in the embodiments, conventional conditions or conditions recommended by the manufacturer shall apply. Reagents or instruments whose manufacturers are not specified are all conventional products that can be purchased commercially.

[0030] It should be understood that the term "and / or" as used in this application specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0031] When a component is said to be "set on" another component, it can be directly on the other component or it can be in a middle component. When a component is said to be "connected" to another component, it can be directly connected to the other component or it may be in a middle component.

[0032] In the description of this application, it should be understood that the terms "upper," "lower," "left," "middle," "right," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this application and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0033] Furthermore, in this application, unless otherwise expressly specified and limited, the terms "set up" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two elements or the interaction between two elements. Unless otherwise expressly limited, those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0034] It should be noted that the following embodiments are examples of this application and are used only to illustrate this application, and are not intended to limit this application. Other combinations and various modifications within the scope of this application are possible without departing from the spirit or scope of this application.

[0035] The aluminum nitride manufacturing apparatus provided in this application will be described in detail below.

[0036] The aluminum nitride manufacturing apparatus of this application embodiment includes a furnace body 10, an inlet pipe 20, and an exhaust pipe 30. Please refer to... Figure 1 and Figure 2 The furnace body 10 has a cavity 11, and at least a portion of the air inlet pipe 20 is housed within the cavity 11. The air inlet pipe 20 has an air inlet 24 and a first through hole 25. The air inlet 24 is located outside the furnace body 10 and connects to the interior of the air inlet pipe 20. The first through hole 25 connects the interior of the air inlet pipe 20 and the cavity 11. Nitrogen gas can enter the interior of the air inlet pipe 20 from the air inlet 24 located outside the furnace body 10, flow through the first through hole 25, exit the air inlet pipe 20, and enter the cavity 11 of the furnace body 10.

[0037] Please see Figure 2 The air intake pipe 20, which is housed in the cavity 11, includes a first branch pipe 21, a second branch pipe 22, and a first connecting pipe 23. The first connecting pipe 23 connects the first branch pipe 21 and the second branch pipe 22. A first through hole 25 is provided on the first connecting pipe 23. That is, nitrogen enters the air intake pipe 20 through the air inlet 24, enters the first branch pipe 21 and the second branch pipe 22 respectively, flows through the first connecting pipe 23, and enters the cavity 11 of the furnace body 10 through the first through hole 25.

[0038] At least a portion of the exhaust pipe 30 is housed within the cavity 11. The exhaust pipe 30 has an exhaust port 34 and a second through hole 35. The exhaust port 34 is located outside the furnace body 10 and connects to the interior of the exhaust pipe 30. The second through hole 35 connects the interior of the exhaust pipe 30 and the cavity 11. Gas in the cavity 11 of the furnace body 10 enters the interior of the exhaust pipe 30 through the second through hole 35, and then exits the exhaust pipe 30 through the exhaust port 34 located outside the furnace body 10, reaching the outside of the furnace body 10.

[0039] The method for manufacturing aluminum nitride powder includes filling a mixed raw material consisting of alumina powder and carbon into the cavity 11 of a furnace body 10, heating the temperature inside the furnace body 10 to 1450-1800℃, and then introducing nitrogen gas into the aluminum nitride manufacturing apparatus, causing the alumina powder and carbon to react under the nitrogen atmosphere. The reaction formula is Al2O3(s) + N2(g) + 3C(s) →

[0040] 2AlN(s) + 3CO(g). To ensure alumina powder and carbon react fully with nitrogen, the nitrogen should be heated to 1450-1800℃ when in contact with the alumina powder and carbon.

[0041] Since the air inlet pipe 20 housed within the cavity 11 includes a first branch pipe 21, a second branch pipe 22, and a first connecting pipe 23, nitrogen gas enters the air inlet pipe 20 through the air inlet 24 and is then split. The nitrogen gas flows into the first connecting pipe 23 through the first branch pipe 21 and the second branch pipe 22, and then enters the cavity 11 of the furnace body 10 through the first through hole 25. On the one hand, the space within the cavity 11 can be fully utilized, and the length of the air inlet pipe 20 within the furnace body 10 can be relatively long, allowing the nitrogen gas to stay in the air inlet pipe 20 for a longer period of time, enabling sufficient heat exchange with the inner wall of the air inlet pipe 20. At the same time, the air inlet pipe 20 also exchanges heat with the gas within the cavity 11 of the furnace body 10, meaning that the nitrogen gas can exchange heat with the gas within the cavity 11 of the furnace body 10, allowing the nitrogen gas to fully absorb heat as it moves within the air inlet pipe 20, raising its temperature to 1450-1800℃ before entering the cavity 11 through the first through hole 25. The step of installing a heating device at the air inlet 24 is omitted, which simplifies the aluminum nitride manufacturing device and reduces costs. At the same time, it also ensures that the temperature reaches the reaction requirements when the nitrogen gas escapes from the first through hole 25, thereby ensuring that the nitrogen gas can react in a timely and sufficient manner when it comes into contact with alumina powder and carbon, which is conducive to improving the efficiency of aluminum nitride powder manufacturing.

[0042] Compared to not having the first branch pipe 21 and the second branch pipe 22, but only bending the intake pipe 20 to extend its length, nitrogen can flow from the first branch pipe 21 and the second branch pipe 22 to the first connecting pipe 23 respectively. This allows nitrogen to flow to the first through hole 25 from two directions, avoiding the problem of excessively low flow rate of nitrogen from the first through hole 25 due to too many bends in the intake pipe 20. This ensures that nitrogen flows smoothly into the cavity 11 and reacts with the alumina powder and carbon.

[0043] On the other hand, in order for nitrogen gas to flow from the inlet 24 through the first through-hole 25 into the cavity 11 of the furnace body 10, the flow velocity of nitrogen gas at the inlet 24 is relatively high. If the exhaust pipe 30 extends in a straight line, the flow rate of nitrogen gas out of the first through-hole 25 will be relatively high, causing the reactants in the cavity 11 to be blown away. By having nitrogen gas flow into the first connecting pipe 23 through the first branch pipe 21 and the second branch pipe 22 respectively, the flow velocity of nitrogen gas will decrease during the flow of nitrogen gas into the first connecting pipe 23, thereby making the flow velocity of nitrogen gas when it flows out of the first through-hole 25 moderate, avoiding the nitrogen gas blowing away the reactants and affecting the yield of aluminum nitride, and further improving the efficiency and yield of aluminum nitride powder manufacturing. The flow rate of nitrogen in the first branch pipe 21 and the second branch pipe 22 is 600-1200 L / min, preferably 800-1200 L / min, for example, 800 L / min, 900 L / min, 1000 L / min, 1100 L / min, 1200 L / min.

[0044] By including a furnace body 10, an inlet pipe 20, and an exhaust pipe 30 in the aluminum nitride manufacturing apparatus, the inlet pipe 20, housed within a cavity 11, comprises a first branch pipe 21, a second branch pipe 22, and a first connecting pipe 23. The first connecting pipe 23 connects the first branch pipe 21 and the second branch pipe 22. A first through hole 25 is provided on the first connecting pipe 23, allowing the inlet pipe 20 to have a longer length within the furnace body 10. This results in a longer residence time of nitrogen gas within the inlet pipe 20, enabling sufficient heat exchange with the inner wall of the inlet pipe 20, thus eliminating the need to install a heating device at the inlet 24. Furthermore, as nitrogen gas flows into the first connecting pipe 23 through the first branch pipe 21 and the second branch pipe 22, the flow rate of nitrogen gas decreases, preventing nitrogen gas from blowing away the reactants and affecting the yield of aluminum nitride, thereby improving the efficiency and yield of aluminum nitride powder manufacturing.

[0045] In one possible implementation, please refer to Figure 2 and Figure 3 The aluminum nitride manufacturing apparatus also includes at least two crucibles 40, with alumina powder and carbon placed inside each crucible 40. The at least two crucibles 40 are stacked sequentially along a first direction, which is... Figure 2 In the X direction, there is a first vent 41 between two adjacent crucibles 40. The first vent 41 connects the inside of the crucible 40 and the cavity 11, so that nitrogen gas can enter the inside of the crucible 40 from the first vent 41 and react with alumina powder and carbon.

[0046] Both the first branch pipe 21 and the second branch pipe 22 extend along the first direction, so that both the first branch pipe 21 and the second branch pipe 22 can be flush with the crucible 40 in the first direction. This allows the first connecting pipe 23 to be at least partially flush with the crucible 40 in the first direction, which is beneficial for nitrogen to enter the interior of the crucible 40 more quickly and ensures that the reaction continues.

[0047] The second direction is perpendicular to the first direction. The second direction is... Figure 2 In the Y direction, the projection of the first through hole 25 along the second direction coincides with the first vent 41. That is, after nitrogen escapes from the first through hole 25, it can directly enter the first vent 41, thereby contacting the alumina powder and carbon phase in the crucible 40, avoiding the diffusion of nitrogen outside the crucible 40, which would affect the efficiency and yield of aluminum nitride powder manufacturing.

[0048] In one possible implementation, please refer to Figure 2 and Figure 3The number of first connecting pipes 23 is at least two, and the number of first through holes 25 is at least two. Each first connecting pipe 23 has a first through hole 25, and the projection of each first vent 41 along the second direction coincides with the projection of at least one first through hole 25 along the second direction. The large number of first through holes 25 allows for a larger area for nitrogen to escape from the inlet pipe 20, ensuring that each crucible 40 has sufficient nitrogen to continuously enter, guaranteeing that the alumina powder and carbon in each crucible 40 can fully react, which is beneficial to improving the efficiency and yield of aluminum nitride powder manufacturing.

[0049] Optional, please refer to Figure 2 The first branch pipe 21 and the second branch pipe 22 are parallel, and the extension direction of the first connecting pipe 23 is perpendicular or inclined to the extension direction of the first branch pipe 21. This ensures that the space between the first branch pipe 21 and the second branch pipe 22 to accommodate the first connecting pipe 23 remains consistent at different positions. This ensures that when there are at least two first connecting pipes 23, the lengths of at least two first connecting pipes 23 are equal, which also reduces the length of the air inlet pipe 20 in the first direction, thereby reducing the length of the furnace body 10 in the first direction and helping to reduce costs.

[0050] Optionally, the extension direction of the first connecting pipe 23 is perpendicular to the extension direction of the first branch pipe 21, so that the angle between the first connecting pipe 23, the first branch pipe 21 and the second branch pipe 22 are equal. When nitrogen enters the first connecting pipe 23 from the first branch pipe 21 and the second branch pipe 22, the speed is the same, so that nitrogen can escape from the first through hole 25 from both directions, so as to ensure that the speed of nitrogen escape is moderate.

[0051] Each first connecting pipe 23 has at least two first through holes 25. The projection of the at least two first through holes 25 in the second direction coincides with the single first vent 41, meaning that more nitrogen can enter the crucible 40 from the first vent 41 at the same time, which is beneficial for the full reaction of alumina powder and carbon, thereby improving the efficiency and yield of aluminum nitride powder manufacturing.

[0052] In one possible implementation, please refer to Figure 2In the second direction, the sum of the areas of at least two first through holes 25 projected onto a single first vent 41 is S1; the area of ​​the single first vent 41 is S2, and 60% of S2 ≤ S1. When the sum of the areas of at least two first through holes 25 projected onto a single first vent 41 is small, the amount of nitrogen entering the first vent 41 is small. At this time, there is not enough nitrogen to react with the alumina powder and carbon, resulting in low efficiency in aluminum nitride powder manufacturing. When the sum of the areas of at least two first through holes 25 projected onto a single first vent 41 is large, the amount of nitrogen entering the first vent 41 is large. The nitrogen can promptly push the reacted gas out of the crucible 40, ensuring that the alumina powder and carbon can react fully with the nitrogen in a timely manner, which is beneficial to improving the efficiency of aluminum nitride powder manufacturing.

[0053] Optionally, the inner cross-sectional area of ​​the first branch pipe 21 is S3, 0.015m. 2 ≥S3≥0.005m 2 This ensures that sufficient nitrogen gas passes through the first branch pipe 21 into the first connecting pipe 23 and then into the cavity 11 of the furnace body 10 within a unit time. The inner cross-sectional shape of the first branch pipe 21 includes triangles, parallelograms, pentagons, hexagons, and circles, preferably circles. When the shape of the first branch pipe 21 is circular, its inner diameter can be 0.08m, 0.09m, 0.10m, 0.11m, 0.12m, etc. Correspondingly, the inner cross-sectional area of ​​the second branch pipe 22 is S4, 0.015m². 2 ≥S4≥0.005m 2 .

[0054] On the inlet pipe 20, the distance from the inlet 24 to the first through hole 25 is L, where L ≥ 2m. This distance L represents the path length for nitrogen gas to move from the inlet 24 to the first through hole 25. This ensures a sufficiently long residence time for nitrogen gas within the inlet pipe 20, allowing it to heat up to 1450-1800℃. This guarantees that the nitrogen gas reaches the required temperature for reaction when escaping from the first through hole 25, thus ensuring timely and complete reaction when in contact with alumina powder and carbon, which is beneficial for improving the efficiency of aluminum nitride powder manufacturing.

[0055] In one possible implementation, please refer to Figure 2 and Figure 3 The exhaust pipe includes a third branch pipe 31, a fourth branch pipe 32, and a second connecting pipe 33. The second connecting pipe 33 connects the third branch pipe 31 and the fourth branch pipe 32. A second through hole 35 is provided on the second connecting pipe 33. That is, after the reaction, the gas enters the second connecting pipe 33 through the second through hole 35, then flows through the third branch pipe 31 and the fourth branch pipe 32 respectively, and leaves the furnace body 10 through the exhaust port 34.

[0056] The third branch pipe 31 and the fourth branch pipe 32 are parallel, so that the space between the third branch pipe 31 and the fourth branch pipe 32 to accommodate the second connecting pipe 33 is kept consistent at different positions, so that when the number of second connecting pipes 33 is at least two, the lengths of at least two second connecting pipes 33 can be equal.

[0057] A second vent 42 is provided between two adjacent crucibles 40. The second vent 42 connects the interior of the crucible 40 and the cavity 11, so that the gas generated after the reaction of alumina powder and carbon can enter the interior of the crucible 40 through the second vent 42 and then be discharged from the furnace body 10 through the exhaust pipe 30.

[0058] The first vent 41 and the second vent 42 are located on opposite sides of the crucible 40 in the second direction. The exhaust pipe 30 and the inlet pipe 20 are also located on opposite sides of the crucible 40 in the second direction. This means that after nitrogen escapes from the first through-hole 25, it can directly enter the crucible 40 through the first vent 41, then diffuse linearly to the second vent 42, and then enter the exhaust pipe 30 through the second through-hole 35, exiting the furnace body 10 through the exhaust port 34. By arranging the inlet pipe 20, the crucible 40, and the exhaust pipe 30 in a straight line, the circulation of gas within the furnace body 10 after the reaction is reduced, which affects the purity of the nitrogen and thus improves the efficiency of aluminum nitride powder manufacturing.

[0059] In one possible implementation, please refer to Figure 2 and Figure 3 In the second direction, the projection of the first through hole 25 coincides with the projection of the first vent 41, and the projection of the second through hole 35 coincides with the projection of the second vent 42. This further reduces the movement distance of nitrogen between the first through hole 25 and the first vent 41, and the movement distance of the gas after reaction between the second through hole 35 and the second vent 42. This facilitates the rapid exit of the gas after reaction from the furnace body 10, avoiding the gas after reaction from remaining in the furnace body 10 and diluting the purity of nitrogen. This ensures the continuous progress of the reaction and thus helps to improve the efficiency and yield of aluminum nitride powder manufacturing.

[0060] Optionally, the third branch pipe 31 and the fourth branch pipe 32 both extend along the first direction, so that the position of each second through hole 35 corresponds to the position of the second vent 42. This helps to reduce the movement distance of the gas after reaction between the second through hole 35 and the second vent 42, and the gas after reaction leaves the furnace body 10 quickly. This avoids the gas after reaction remaining in the furnace body 10 and diluting the purity of nitrogen, thereby ensuring the continuous reaction and thus improving the efficiency and yield of aluminum nitride powder manufacturing.

[0061] The number of second through holes 35 is at least two. The projection of at least two second through holes 35 in the opposite direction of the second direction coincides with a single second vent 42, which increases the number of second through holes 35. This increases the area on which the gas after reaction can enter the exhaust pipe 30 from the cavity 11, further accelerating the gas after reaction to leave the furnace body 10 quickly. This avoids the gas after reaction remaining in the furnace body 10 and diluting the purity of nitrogen, thus ensuring the continuous progress of the reaction. This is beneficial to improving the efficiency and yield of aluminum nitride powder manufacturing.

[0062] Preferably, the number of first through holes 25 and the number of second through holes 35 are equal. In the second direction, the projections of the first through holes 25 and the second through holes 35 coincide, and the projections of the first vent 41 and the second vent 42 coincide. That is, the number and area of ​​the first through holes 25 and the number and area of ​​the second through holes 35 are equal, and the area of ​​the first vent 41 and the area of ​​the second vent 42 are equal. This ensures that the flow rate and volume of nitrogen entering the cavity 11 are equal to the flow rate and volume of the gas leaving the cavity 11 after the reaction. This helps to maintain the pressure balance within the furnace body 10 and does not affect the reaction conditions. Furthermore, nitrogen can escape in a straight line from the first through hole 25 and directly enter the first vent 41, and push the gas after the reaction in a straight line from the second vent 42 directly into the second through hole 35. This helps to accelerate the rapid exit of the gas after the reaction from the furnace body 10, avoiding the dilution of nitrogen purity by the gas remaining in the furnace body 10. This ensures the continuous progress of the reaction and improves the efficiency and yield of aluminum nitride powder manufacturing.

[0063] Optionally, the exhaust port 34 and the air inlet 24 are located on opposite sides of the furnace body 10, which reduces the circulation of nitrogen and post-reaction gases within the furnace body 10, allowing more nitrogen and less post-reaction gases to leave the furnace body 10 through the exhaust pipe 30. This helps to improve the utilization rate of nitrogen and increase the efficiency and yield of aluminum nitride powder manufacturing.

[0064] For preferred options, please refer to [link / reference]. Figure 1 and Figure 2 The exhaust port 34 and the air inlet 24 are located on both sides of the furnace body 10 in the first direction. Since the air inlet pipe 20 and the exhaust pipe 30 both bend back and forth in the first direction, setting the exhaust port 34 and the air inlet 24 on both sides of the furnace body 10 in the first direction is beneficial to save the material of the air inlet pipe 20 and the exhaust pipe 30 and simplify the design of the air inlet pipe 20 and the exhaust pipe 30.

[0065] Although the embodiments of this application have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for this application. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by the claims and their equivalents, this application is not limited to the specific details and embodiments shown and described herein.

Claims

1. An aluminum nitride manufacturing apparatus, characterized in that, include: The furnace body has a cavity; An air intake pipe is at least partially housed within the cavity. The air intake pipe has an air inlet and a first through hole. The air inlet is located outside the furnace body and communicates with the interior of the air intake pipe. The first through hole communicates with the interior of the air intake pipe and the cavity. The air intake pipe housed within the cavity includes a first branch pipe, a second branch pipe, and a first connecting pipe. The first connecting pipe communicates with the first branch pipe and the second branch pipe. The first through hole is disposed on the first connecting pipe. An exhaust pipe, at least partially housed within the cavity, has an exhaust port and a second through hole. The exhaust port is located outside the furnace body and communicates with the interior of the exhaust pipe, while the second through hole communicates with the interior of the exhaust pipe and the cavity.

2. The aluminum nitride manufacturing apparatus as described in claim 1, characterized in that, The first branch pipe and the second branch pipe are parallel, and the extension direction of the first connecting pipe is perpendicular to or inclined to the extension direction of the first branch pipe.

3. The aluminum nitride manufacturing apparatus as described in claim 2, characterized in that, The aluminum nitride manufacturing apparatus further includes at least two crucibles, which are stacked sequentially along a first direction. The first branch pipe and the second branch pipe both extend along the first direction. A first vent is provided between two adjacent crucibles. The first vent connects the interior of the crucible and the cavity. The projection of the first through hole along a second direction coincides with the first vent. The second direction is perpendicular to the first direction.

4. The aluminum nitride manufacturing apparatus as described in claim 3, characterized in that, The number of first connecting pipes is at least two, the number of first through holes is at least two, each of the first connecting pipes has a first through hole, and the projection of each first vent along the second direction coincides with the projection of at least one first through hole along the second direction.

5. The aluminum nitride manufacturing apparatus as described in claim 4, characterized in that, The extension direction of the first connecting pipe is perpendicular to the extension direction of the first branch pipe. Each first connecting pipe has at least two first through holes, and the projection of the at least two first through holes in the second direction coincides with the projection of the single first vent.

6. The aluminum nitride manufacturing apparatus as described in claim 5, characterized in that, In the second direction, the sum of the areas of at least two first through holes projected onto a single first vent is S1; the area of ​​a single first vent is S2, and 60% of S2 ≤ S1.

7. The aluminum nitride manufacturing apparatus according to any one of claims 3-6, characterized in that, The inner cross-sectional area of ​​the first branch pipe is S3, 0.015m. 2 ≥S3≥0.005m 2 On the air intake pipe, the distance from the air intake port to the first through hole is L, where L ≥ 2m.

8. The aluminum nitride manufacturing apparatus according to any one of claims 3-6, characterized in that, The exhaust pipe includes a third branch pipe, a fourth branch pipe, and a second connecting pipe. The second connecting pipe connects the third branch pipe and the fourth branch pipe. The second through hole is provided on the second connecting pipe. The third branch pipe and the fourth branch pipe are parallel. A second vent is provided between two adjacent crucibles, the second vent connecting the interior of the crucible and the cavity. The first vent and the second vent are respectively located on opposite sides of the crucible in the second direction. The exhaust pipe and the intake pipe are respectively provided on opposite sides of the crucible in the second direction.

9. The aluminum nitride manufacturing apparatus as described in claim 8, characterized in that, In the second direction, the projection of the first through hole coincides with the projection of the first vent, and the projection of the second through hole coincides with the projection of the second vent.

10. The aluminum nitride manufacturing apparatus as described in claim 8, characterized in that, Both the third and fourth branch pipes extend along the first direction, and the number of the second through holes is at least two. The projections of the at least two second through holes in the opposite direction of the second direction coincide with a single second vent.

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