Wafer counting device for wafer basket

Abstract

The utility model discloses a wafer counting device for wafer baskets, and relates to the technical field of semiconductor manufacturing. The back plate is arranged on the main rack; a control system is arranged at the lower end of the wafer basket, the control system is used for controlling the wafer basket to ascend and descend, and the control system comprises a lead screw mechanism; a photoelectric sensor is arranged at the working position of the wafer basket; the photoelectric reflecting plate is matched with the photoelectric reflecting plate arranged oppositely through the photoelectric sensor arranged at the working position of the wafer basket, the number of wafers in the wafer basket is detected, and the photoelectric sensor detects reflected signals of light beams, so that the error problem caused by manual detection or insufficient equipment precision is avoided; the control system enables the wafer basket to move, provides detection conditions for the photoelectric sensor, guarantees the detection accuracy, solves a problem that the number of wafers in the wafer basket cannot be accurately detected, and affects the operation efficiency, can accurately detect the number of wafers in the wafer basket, and improves the operation efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a wafer basket counting device. Background Technology

[0002] Currently, vacuum coating technology has been widely applied in many industries, mainly divided into four common coating processes: vacuum evaporation coating, vacuum sputtering coating, vacuum ion plating, and chemical vapor deposition (CVD). Among them, vacuum evaporation coating is widely used in surface treatment of architectural hardware, bathroom hardware, watches, and stainless steel profiles; vacuum sputtering coating technology is mostly used in optoelectronics and microelectronics; vacuum ion plating, due to its excellent film performance, is widely used in high-end fields such as mechanical parts and high-speed rotating parts; while CVD technology is mainly used to improve the surface properties of materials and is widely used in fields such as superconductivity and optical fiber communication. All of these vacuum coating equipment require the use of wafer baskets.

[0003] Existing equipment typically requires the use of wafer baskets, but existing wafer basket systems generally have a problem: most equipment does not have wafer count detection capabilities. In traditional equipment, wafer baskets rely on manual loading, and without effective detection, it is impossible to accurately know how many wafers are actually placed in the basket. This inaccurate operation can easily lead to the robotic arm grabbing empty materials, affecting the overall operating efficiency of the equipment.

[0004] Therefore, we need a wafer basket counting device to solve the problem of inaccurate detection of the number of wafers in the wafer basket, which affects operating efficiency. Accurate detection of the number of wafers in the wafer basket improves operating efficiency. Utility Model Content

[0005] The purpose of this application is to solve the problem that the inability to accurately detect the number of wafers in a wafer basket affects operating efficiency. In order to solve the above problem, this application provides a wafer basket counting device that can accurately detect the number of wafers in a wafer basket and improve operating efficiency.

[0006] To achieve the above objectives, the embodiments of this application adopt the following technical solution: a main frame; a backplate, the backplate being mounted on the main frame; a wafer basket, the wafer basket being connected to the backplate, a control system being provided at the lower end of the wafer basket, the control system being used to control the lifting and lowering of the wafer basket, the control system including: a lead screw mechanism, the lead screw mechanism including a lead screw and a servo motor connected thereto, the lead screw being vertically mounted below the wafer basket for driving the wafer basket; a photoelectric sensor being provided at the working position of the wafer basket, the photoelectric sensor being used to detect the number of wafers in the wafer basket; a photoelectric reflector, the photoelectric reflector being mounted at a position opposite to the photoelectric sensor, the photoelectric reflector being fixed to the frame of the main frame, the photoelectric reflector being used to reflect a light beam to the photoelectric sensor.

[0007] In the above technical solution, the embodiment of this application uses a photoelectric sensor installed at the working position of the wafer basket, which cooperates with a photoelectric reflector installed opposite to it to detect the number of wafers in the wafer basket. The photoelectric sensor detects the reflected signal of the light beam, avoiding the error problem caused by manual detection or insufficient equipment precision. The control system moves the wafer basket to provide detection conditions for the photoelectric sensor, ensuring the accuracy of detection. This solves the problem of the inability to accurately detect the number of wafers in the wafer basket, which affects the operating efficiency. It can accurately detect the number of wafers in the wafer basket and improve the operating efficiency.

[0008] Furthermore, according to an embodiment of this application, the control system further includes a cylinder disposed on one side of the back plate, the cylinder being used to drive the wafer basket to move horizontally.

[0009] Furthermore, according to an embodiment of this application, a transverse guide rail and a longitudinal guide rail are provided on the back plate.

[0010] Furthermore, according to an embodiment of this application, the wafer basket is mounted on the horizontal guide rail and the vertical guide rail.

[0011] Furthermore, according to an embodiment of this application, the photoelectric sensor is a reflective photoelectric sensor.

[0012] Furthermore, according to an embodiment of this application, the photoelectric sensor is mounted on a back plate via a bracket.

[0013] Furthermore, according to an embodiment of this application, the bracket is arranged in an "L" shape.

[0014] Furthermore, according to an embodiment of this application, the bracket is fixed to the back plate through multiple bolt fixing holes.

[0015] Furthermore, according to an embodiment of this application, the photoelectric sensor is fixed to the bracket through a bolt.

[0016] Furthermore, according to an embodiment of this application, the servo motor is connected to the lead screw via a coupling.

[0017] Compared with the prior art, this application has the following beneficial effects: This application uses a photoelectric sensor set at the working position of the wafer basket, in conjunction with a photoelectric reflector installed opposite to it, to detect the number of wafers in the wafer basket. The photoelectric sensor detects the reflected signal of the light beam, avoiding the error problems caused by manual detection or insufficient equipment precision. The control system moves the wafer basket to provide detection conditions for the photoelectric sensor, ensuring the accuracy of detection and solving the problem of inaccurate detection of the number of wafers in the wafer basket, which affects the operating efficiency. It can accurately detect the number of wafers in the wafer basket and improve the operating efficiency. Attached Figure Description

[0018] The present application will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This refers to the current technology without the addition of photoelectric sensors.

[0020] Figure 2 Axonometric view of a wafer basket counting device Figure 1 .

[0021] Figure 3 This is a front view of a wafer basket counting device.

[0022] Figure 4 Axonometric view of a wafer basket counting device Figure 2 .

[0023] Figure 5 yes Figure 4 A magnified view of part 6 of the support structure, "I".

[0024] Figure 6 Axonometric view of a wafer basket counting device Figure 3 .

[0025] In the attached diagram

[0026] 1. Main unit frame; 2. Back panel; 21. Horizontal guide rail.

[0027] 22. Vertical guide rail; 3. Wafer basket; 4. Control system

[0028] 41. Lead screw; 42. Servo motor; 43. Coupling

[0029] 44. Cylinder; 51. Photoelectric sensor; 52. Photoelectric reflector.

[0030] 6. Bracket Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this utility model clear and complete, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of this utility model, and are merely used to explain the embodiments of this utility model. They are not intended to limit the embodiments of this utility model. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0032] In the description of this utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," and "horizontal," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "a," "first," "second," "third," "fourth," "fifth," and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] For purposes of simplicity and illustration, the principles of the embodiments are described primarily by way of example. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and apparatus have not been described in detail to avoid unnecessarily obscuring these embodiments. Furthermore, all embodiments can be used in combination with each other.

[0035] Example 1: As Figure 1-6 As shown, a wafer basket counting device includes:

[0036] The system comprises a main frame 1 and a backplate 2 mounted on the main frame 1, with the backplate 2 fixedly installed on the main frame 1. A wafer basket 3 is fixed to the backplate 2 via connectors. The wafer basket 3 carries the wafers to be inspected. A control system 4 is located at the lower end of the wafer basket 3. The control system 4 includes a lead screw 41 mechanism and a servo motor 42. The lead screw 41 is vertically mounted below the wafer basket 3. The servo motor 42 is connected to the lead screw 41 via a coupling 43. The servo motor 42 controls the rotation of the lead screw 41 to raise and lower the wafer basket 3. The lead screw 41 stabilizes the raising and lowering movement of the wafer basket 3, avoiding inspection errors caused by inaccurate positioning and improving the accuracy of wafer quantity detection.

[0037] A photoelectric sensor 51 is installed at the working position of the wafer basket 3. The photoelectric sensor 51 is a reflective photoelectric sensor used to detect the number of wafers in the wafer basket 3. A photoelectric reflector 52 is installed directly opposite the photoelectric sensor 51. The photoelectric reflector 52 is fixed to the frame of the main frame 1 and is used to reflect the light beam to the photoelectric sensor 51. Through the cooperation of the photoelectric sensor 51 and the photoelectric reflector 52, the number of wafers in the wafer basket 3 can be detected.

[0038] The photoelectric sensor 51 is mounted on the back plate 2 via a bracket 6. The bracket 6 has an "L" shaped structure and is fixed to the back plate 2 via multiple bolt holes. The photoelectric sensor 51 is fixed to the bracket 6 via bolts. The bracket 6 ensures that the photoelectric sensor 51 is stably installed and that it is accurately aligned with the photoelectric reflector 52, thereby avoiding displacement caused by external forces and ensuring the accuracy of the multiple sensors.

[0039] The control system 4 also includes a cylinder 44, which is located on one side of the back plate 2 and connected to the wafer basket 3. The cylinder 44 is used to drive the wafer basket 3 to move horizontally. The cylinder 44 can adjust the detection position of the wafer basket 3, and at the same time facilitate the loading and unloading of wafers, improving the flexibility of detection. The back plate 2 is provided with a horizontal guide rail 21 and a vertical guide rail 22. The wafer basket 3 is installed on the horizontal guide rail 21 and the vertical guide rail 22. The horizontal guide rail 21 and the vertical guide rail 22 are perpendicular to each other. The lead screw 41 and the cylinder 44 can move the wafer basket 3 to the designated position through the horizontal guide rail 21 and the vertical guide rail 22.

[0040] The photoelectric sensor 51, positioned at the working position of the wafer basket 3, works in conjunction with the correspondingly mounted photoelectric reflector 52 to detect the number of wafers within the wafer basket 3. By detecting the reflected signal of the light beam, the photoelectric sensor 51 avoids errors caused by manual detection or insufficient equipment precision. The control system 4 moves the wafer basket 3, providing the detection conditions for the photoelectric sensor 51 and ensuring the accuracy of the detection. This solves the problem of inaccurate detection of the number of wafers in the wafer basket 3, which affects operating efficiency. The ability to accurately detect the number of wafers in the wafer basket 3 improves operating efficiency.

[0041] Example 2: Figure 1-6 As shown, based on Embodiment 1, this embodiment also provides a method for using a wafer counting device, including:

[0042] Start cylinder 44 and lead screw 41 to push wafer basket 3 to move along horizontal guide rail 21 and vertical guide rail 22, adjust wafer basket 3 to the working position of photoelectric sensor 51, ensure that wafer basket 3 and photoelectric sensor 51 are properly aligned, and avoid detection error due to position deviation.

[0043] When the wafer basket 3 reaches the designated detection position, the photoelectric sensor 51 is activated for detection. The photoelectric sensor 51 emits a light beam, which is reflected back to the sensor by the photoelectric reflector 52. The equipment determines the number of wafers in the wafer basket 3 based on the extent to which the light beam is blocked by the wafers. During the detection process, the servo motor 42 drives the lead screw 41 mechanism to gradually raise and lower the wafer basket 3, ensuring that the photoelectric sensor 51 can scan each wafer in the wafer basket 3.

[0044] Although the illustrative specific embodiments of this application have been described above to enable those skilled in the art to understand this application, this application is not limited to the scope of the specific embodiments. For those skilled in the art, all applications utilizing the concept of this application are protected as long as various variations are within the spirit and scope of this application as defined and determined by the appended claims.

Claims

1. A wafer basket counting device, characterized in that, include: Mainframe rack; Backplate, the backplate being mounted on the mainframe; A wafer basket, connected to the backplate, has a control system at its lower end for controlling the raising and lowering of the wafer basket. The control system includes: A lead screw mechanism, comprising a lead screw and a servo motor connected thereto, wherein the lead screw is vertically mounted below the wafer basket for driving the wafer basket; A photoelectric sensor is installed at the working position of the wafer basket, and the photoelectric sensor is used to detect the number of wafers in the wafer basket. A photoelectric reflector is installed at a position opposite to the photoelectric sensor and is fixed to the frame of the main unit. The photoelectric reflector is used to reflect a light beam to the photoelectric sensor.

2. The wafer basket counting device according to claim 1, characterized in that, The control system further includes a cylinder disposed on one side of the back plate, the cylinder being used to drive the wafer basket to move horizontally.

3. The wafer basket counting device according to claim 1, characterized in that, The back plate is equipped with transverse guide rails and longitudinal guide rails.

4. A wafer basket counting device according to claim 3, characterized in that, The wafer basket is mounted on the horizontal guide rail and the vertical guide rail.

5. A wafer basket counting device according to claim 1, characterized in that, The photoelectric sensor is a reflective photoelectric sensor.

6. A wafer basket counting device according to claim 1, characterized in that, The photoelectric sensor is mounted on the back plate via a bracket.

7. A wafer basket counting device according to claim 6, characterized in that, The bracket is arranged in an "L" shape.

8. A wafer basket counting device according to claim 7, characterized in that, The bracket is fixed to the back plate by multiple bolt holes.

9. A wafer basket counting device according to claim 7, characterized in that, The photoelectric sensor is fixed to the bracket through by bolts.

10. A wafer basket counting device according to claim 1, characterized in that, The servo motor is connected to the lead screw via a coupling.

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