Wafer detection fixing clamp convenient to adjust
By introducing a motor-driven gear transmission and bidirectional lead screw adjustment structure into the wafer inspection fixture, the problem that existing wafer inspection equipment cannot be adjusted to a suitable tilt angle is solved, achieving clearer image acquisition and more stable positioning.
Patent Information
- Application Number
- CN202423086336.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2034-12-13
AI Technical Summary
Existing adjustable wafer inspection fixtures cannot adjust the wafer to a suitable tilt angle when it is necessary to observe the wafer from a tilt angle, resulting in unclear images acquired by the inspection equipment, insufficient flexibility, and poor positional stability.
The design incorporates a fixed stage and a worktable, combined with adjustment and fixing components. Through motor-driven gear transmission and bidirectional lead screw adjustment, it achieves stable wafer fixation and worktable tilt adjustment, ensuring precise positioning during tilting.
This technology enables stable fixation of wafers at tilt angles, improves the clarity and comprehensiveness of images acquired by the inspection equipment, reduces inspection errors, and enhances the flexibility and stability of the fixture.
Smart Images
Figure CN223651388U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer inspection technology, and in particular to an easily adjustable wafer inspection fixture. Background Technology
[0002] Wafer inspection refers to the process of checking and measuring various aspects of a wafer (usually a silicon wafer) during semiconductor manufacturing, including its physical, electrical, material properties, and surface quality. Its purpose is to ensure that wafers meet the quality requirements of chip manufacturing, screen out defective wafers, and prevent problematic wafers from being used in subsequent chip manufacturing processes, thereby improving chip yield and quality. Existing easily adjustable wafer inspection fixtures cannot adjust the wafer to a suitable tilt angle when viewing it from a tilt angle. This hinders the acquisition of clearer and more comprehensive images by the inspection equipment and lacks flexibility. Furthermore, the wafer position is prone to change during tilt adjustment, leading to inspection errors and low stability. Utility Model Content
[0003] The purpose of this invention is to address the shortcomings of existing technologies by proposing an easily adjustable wafer inspection fixture.
[0004] To achieve the above objectives, the present invention adopts the following technical solution: an easily adjustable wafer inspection fixture, comprising a fixed stage and a worktable, wherein a fixing component is connected to the top of the worktable and an adjustment component is connected to the top of the fixed stage;
[0005] The adjustment assembly includes a fixed frame, one end of which is fixedly connected to the top of the fixed platform. A motor is fixedly connected to the outside of the fixed frame, and the output shaft of the motor passes through the fixed frame and is fixedly connected to a fixed shaft. One end of the fixed shaft rotates on the inner wall of the fixed frame. A drive gear is fixedly sleeved on the outside of the fixed shaft, and a driven gear is meshed with the bottom of the drive gear. A drive rod is fixedly sleeved inside the driven gear, and both ends of the drive rod pass through the fixed frame and are fixedly connected to driven plates. One end of the driven plate is rotatably connected to the side of the worktable. Limiting plates are rotatably connected to both sides of one end of the worktable. A connecting plate is fixedly connected to the bottom of the limiting plate, and a guide plate is fixedly connected to the bottom of the connecting plate. A guide groove is opened inside the guide plate, and a guide block is slidably connected inside the guide groove. The bottom of the guide block is fixedly connected to the top of the fixed platform.
[0006] As a further description of the above technical solution:
[0007] The fixing component includes a connecting frame, which is provided in two sets. The bottom of both sets of connecting frames is fixedly connected to the top of the workbench. A bidirectional lead screw is rotatably connected inside one set of connecting frames, and a limit rod is fixedly connected to the inner wall of the other set of connecting frames. One end of the bidirectional lead screw passes through the connecting frame and is fixedly connected to a throttle handle. A connecting block is threaded to the outside of the bidirectional lead screw, and a fixing plate is fixedly connected to the top of the connecting block.
[0008] As a further description of the above technical solution:
[0009] A limiting block is fixedly connected to the bottom of the fixed plate, and one end of the limiting block slides outside the limiting rod.
[0010] As a further description of the above technical solution:
[0011] The bottom of the fixed platform is fixedly connected to two sets of support frames.
[0012] As a further description of the above technical solution:
[0013] The driven plate is L-shaped.
[0014] As a further description of the above technical solution:
[0015] The fixed plate is provided in two sets, and the two sets of fixed plates are symmetrical.
[0016] As a further description of the above technical solution:
[0017] The fixed platform and the worktable are parallel.
[0018] This utility model has the following beneficial effects:
[0019] 1. In this utility model, by adjusting the tilt of the worktable through the adjustment component, the wafer can be adjusted to a suitable tilt angle when it is necessary to observe the wafer from a tilt angle, which helps the inspection equipment to obtain clearer and more comprehensive images, thereby improving the flexibility of the easily adjustable wafer inspection fixture.
[0020] 2. In this utility model, the wafer can be firmly fixed by the fixing component, ensuring its accurate position during tilt adjustment, avoiding detection errors caused by position changes, and improving the stability of the easily adjustable wafer detection fixing fixture. Attached Figure Description
[0021] Figure 1 This invention provides a schematic diagram of the overall structure of an easily adjustable wafer inspection fixture. Figure 1 ;
[0022] Figure 2This invention provides a schematic diagram of the overall structure of an easily adjustable wafer inspection fixture. Figure 2 ;
[0023] Figure 3 This is a front view of an easily adjustable wafer inspection fixture proposed in this utility model;
[0024] Figure 4 for Figure 2 A magnified structural diagram of part A in the middle.
[0025] Legend:
[0026] 1. Fixed platform; 2. Workbench; 3. Adjustment assembly; 4. Fixed frame; 5. Motor; 6. Fixed shaft; 7. Driving gear; 8. Driven gear; 9. Driving rod; 10. Driven plate; 11. Limiting plate; 12. Connecting plate; 13. Guide plate; 14. Guide groove; 15. Guide block; 16. Fixed assembly; 17. Connecting frame; 18. Two-way lead screw; 19. Limiting rod; 20. Throttle; 21. Connecting block; 22. Fixed plate; 23. Limiting block; 24. Support frame. Detailed Implementation
[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0028] Reference Figures 1-4 One embodiment of this utility model is a wafer inspection fixture that is easy to adjust, including a fixed platform 1 and a worktable 2. A fixing component 16 is connected to the top of the worktable 2, and an adjustment component 3 is connected to the top of the fixed platform 1.
[0029] The adjustment assembly 3 includes a fixed frame 4. One end of the fixed frame 4 is fixedly connected to the top of the fixed platform 1. A motor 5 is fixedly connected to the outside of the fixed frame 4. The output shaft of the motor 5 passes through the fixed frame 4 and is fixedly connected to a fixed shaft 6. One end of the fixed shaft 6 rotates on the inner wall of the fixed frame 4. A drive gear 7 is fixedly sleeved on the outside of the fixed shaft 6. A driven gear 8 is meshed with the bottom of the drive gear 7. A drive rod 9 is fixedly sleeved inside the driven gear 8. Both ends of the drive rod 9 pass through the fixed frame 4 and are fixedly connected to driven plates 10. One end of the driven plate 10 is rotatably connected to the side of the worktable 2. Limiting plates 11 are rotatably connected to both sides of one end of the worktable 2. A connecting plate 12 is fixedly connected to the bottom of the limiting plate 11. A guide plate 13 is fixedly connected to the bottom of the connecting plate 12. A guide groove 14 is opened inside the guide groove 14. A guide block 15 is slidably connected inside the guide groove 14. The bottom of the guide block 15 is fixedly connected to the top of the fixed platform 1.
[0030] The fixed assembly 16 includes a connecting frame 17, which has two sets. The bottom of both sets of connecting frames 17 is fixedly connected to the top of the worktable 2. One set of connecting frames 17 is rotatably connected to a bidirectional lead screw 18, and the inner wall of the other set of connecting frames 17 is fixedly connected to a limit rod 19. One end of the bidirectional lead screw 18 passes through the connecting frame 17 and is fixedly connected to a handle 20. The external thread of the bidirectional lead screw 18 is connected to a connecting block 21. The top of the connecting block 21 is fixedly connected to a fixed plate 22, and the bottom of the fixed plate 22 is fixedly connected to a limit block 23. One end of the limit block 23 slides outside the limit rod 19, which improves the stability of the fixed plate 22 during movement. The bottom of the fixed platform 1 is fixedly connected to two sets of support frames 24 to ensure stability. The driven plate 10 is L-shaped. There are two sets of fixed plates 22, which are symmetrical. The fixed platform 1 and the worktable 2 are parallel.
[0031] Working principle: The wafer is placed on the fixed disk 22. The throttle 20 is rotated, which drives the bidirectional lead screw 18 to rotate. The bidirectional lead screw 18 rotates, which drives the connecting block 21 to move. The connecting block 21 drives the fixed disk 22 to move closer together. The fixed disk 22 drives the limiting block 23 to slide outside the limiting rod 19, thereby fixing the wafer on the fixed disk 22 and improving stability. Then, the motor 5 is started. The motor 5 drives the fixed shaft 6 to rotate. The fixed shaft 6 drives the drive gear 7 to rotate. The drive gear 7 drives the driven gear 8 to rotate. The driven gear 8 drives the driven plate 10 to rotate through the drive rod 9. The driven plate 10 drives the worktable 2 to move. At the same time, the worktable 2 drives the connecting plate 12 to move through the limiting plate 11. The connecting plate 12 drives the guide plate 13 to slide outside the guide block 15, thereby tilting one end of the worktable 2 and adjusting the wafer to a suitable tilt angle, improving flexibility.
[0032] All electrical components mentioned in this article are connected to an external main controller and 220V AC mains power. The main controller can be a conventional known device such as a computer for control. The detailed description of known functions and components is omitted in the specific implementation of this disclosure. To ensure the compatibility of the device, the operating methods used are consistent with the parameters of commercially available instruments.
[0033] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. An easily adjustable wafer inspection fixture, comprising a fixed stage (1) and a worktable (2), characterized in that: The top of the workbench (2) is provided with a fixing component (16), and the top of the fixing table (1) is provided with an adjustment component (3); The adjustment assembly (3) includes a fixed frame (4), one end of which is fixedly connected to the top of the fixed platform (1). A motor (5) is fixedly connected to the outside of the fixed frame (4). The output shaft of the motor (5) passes through the fixed frame (4) and is fixedly connected to a fixed shaft (6). One end of the fixed shaft (6) rotates on the inner wall of the fixed frame (4). A drive gear (7) is fixedly sleeved on the outside of the fixed shaft (6). A driven gear (8) is meshed with the bottom of the drive gear (7). A drive rod (9) is fixedly sleeved inside the driven gear (8). Both ends are fixedly connected to the driven plate (10) through the fixed frame (4). One end of the driven plate (10) is rotatably connected to the side of the worktable (2). Both sides of one end of the worktable (2) are rotatably connected to the limiting plate (11). The bottom of the limiting plate (11) is fixedly connected to the connecting plate (12). The bottom of the connecting plate (12) is fixedly connected to the guide plate (13). The guide plate (13) has a guide groove (14) inside. The guide groove (14) is slidably connected to the guide block (15). The bottom of the guide block (15) is fixedly connected to the top of the fixed platform (1).
2. The easily adjustable wafer inspection fixture according to claim 1, characterized in that: The fixing component (16) includes a connecting frame (17), which has two sets. The bottom of both sets of the connecting frames (17) is fixedly connected to the top of the workbench (2). One set of the connecting frames (17) is rotatably connected to a bidirectional lead screw (18), and the inner wall of the other set of the connecting frames (17) is fixedly connected to a limit rod (19). One end of the bidirectional lead screw (18) passes through the connecting frame (17) and is fixedly connected to a throttle (20). The bidirectional lead screw (18) is threadedly connected to a connecting block (21), and a fixing plate (22) is fixedly connected to the top of the connecting block (21).
3. The easily adjustable wafer inspection fixture according to claim 2, characterized in that: The bottom of the fixed plate (22) is fixedly connected to a limiting block (23), and one end of the limiting block (23) slides outside the limiting rod (19).
4. The easily adjustable wafer inspection fixture according to claim 1, characterized in that: The bottom of the fixed platform (1) is fixedly connected to two sets of support frames (24).
5. The easily adjustable wafer inspection fixture according to claim 1, characterized in that: The driven plate (10) is L-shaped.
6. The easily adjustable wafer inspection fixture according to claim 2, characterized in that: The fixed disk (22) is provided in two sets, and the two sets of fixed disks (22) are symmetrical.
7. The easily adjustable wafer inspection fixture according to claim 1, characterized in that: The fixed platform (1) and the worktable (2) are parallel.