Displacement and rotation integrated platform and wafer detection equipment

Abstract

The utility model relates to the technical field of motion platforms, in particular to a displacement and rotation integrated platform and wafer detection equipment. The displacement and rotation integrated platform comprises a shell, a displacement driver, a rotation driver and a rotor assembly. The shell is provided with a cylindrical guide cavity, and the rotor assembly is matched with the guide cavity; a plurality of air holes are formed in the cavity wall of the guide cavity and used for being connected with a high-pressure air source. The displacement driver is connected with the rotor assembly and used for driving the rotor assembly to move in the axial direction of the guide cavity. The rotary driver is connected with the rotor assembly and used for driving the rotor assembly to rotate around the central axis of the guide cavity. The wafer detection equipment comprises the displacement and rotation integrated platform. The displacement and rotation integrated platform and the wafer detection equipment provided by the utility model have relatively high precision and movement efficiency and relatively strong stability.

Description

TECHNICAL FIELD

[0001] The utility model relates to motion platform technical field, specifically, relates to a displacement rotation integrated platform and wafer detection equipment. BACKGROUND

[0002] The displacement rotation integrated platform is a motion platform integrating displacement and rotation, which has been widely applied in semiconductor manufacturing equipment.

[0003] The displacement Z axis and the rotation T axis of the traditional displacement rotation integrated platform are arranged in an up-down mode, and each works, which leads to excessive load of the displacement Z axis or the rotation T axis, inconvenient processing, long response time, low focusing accuracy and low efficiency. In addition, due to the structure of the up-down arrangement of the traditional displacement Z axis and the rotation T axis, the displacement Z axis air floating surface arrangement space is small, which leads to small displacement Z axis stiffness, weak anti-interference ability, poor overall stability and difficulty in application to complex stage systems. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a displacement rotation integrated platform and wafer detection equipment to alleviate the technical problems of low precision and poor stability of the displacement rotation integrated platform in the prior art.

[0005] The displacement rotation integrated platform provided by the utility model comprises a shell, a displacement driver, a rotation driver and a mover assembly.

[0006] The shell is provided with a cylindrical guide cavity, and the mover assembly is matched with the guide cavity; the cavity wall of the guide cavity is provided with a plurality of air holes, and the air holes are used for being connected with a high-pressure gas source; the displacement driver is connected with the mover assembly and is used for driving the mover assembly to move along the axial direction of the guide cavity; and the rotation driver is connected with the mover assembly and is used for driving the mover assembly to rotate around the central axis of the guide cavity.

[0007] Preferably, as an implementable mode, the displacement driver and the rotation driver are relatively fixed with the shell, the displacement mover of the displacement driver can rotate around the central axis of the guide cavity along with the mover assembly, and the rotation mover of the rotation driver can move along the axial direction of the guide cavity along with the mover assembly.

[0008] Preferably, as an implementable mode, the displacement driver comprises a linear voice coil motor, the stator of the linear voice coil motor is installed on the shell, the displacement mover of the linear voice coil motor is fixedly connected with the mover assembly and is used for driving the mover assembly to move along the axial direction of the guide cavity;

[0009] And / or, the mover assembly includes a stage, the rotary driver includes a flat voice coil motor, the stator of the flat voice coil motor is fixed relative to the housing, and the rotating mover of the flat voice coil motor is connected to the stage for driving the stage to rotate about the central axis of the guide cavity.

[0010] Preferably, as one possible implementation, the moving part assembly is connected to the housing via a gravity balancing device, which is used to balance the gravity of the moving part assembly.

[0011] Preferably, as one possible implementation, the gravity balancing device includes an upper bearing, a lower bearing, and an elastic element. The lower bearing is installed on the housing, the upper bearing is installed on the moving part assembly, the upper bearing and the lower bearing are both coaxially arranged with the guide cavity, the upper bearing is located above the lower bearing, and the elastic element is disposed between the upper bearing and the lower bearing.

[0012] Preferably, as one possible implementation, the mover assembly includes a hollow mover, and the upper bearing, the lower bearing, and the elastic element are all disposed within the hollow cavity of the hollow mover; the housing is provided with a support frame, the top of the support frame extending into the hollow cavity of the hollow mover, and the lower bearing is mounted on the top of the support frame.

[0013] Preferably, as one possible implementation, the gravity balancing device further includes an upper bearing seat, the upper bearing is installed on the upper bearing seat, a plurality of gaskets are pressed between the upper bearing seat and the top of the hollow mover, and the upper bearing seat, the gaskets and the hollow mover are detachably connected;

[0014] And / or, the elastic element is a spring.

[0015] Preferably, as one possible implementation, the integrated displacement-rotation platform further includes a displacement detection element, which is used to detect the displacement of the moving part assembly. Both the displacement detection element and the displacement driver are communicatively connected to the controller.

[0016] And / or, the displacement-rotation integrated platform further includes a rotation detection element, which is used to detect the rotation angle of the moving part assembly. Both the rotation detection element and the rotation driver are communicatively connected to the controller.

[0017] Preferably, as one possible implementation, the displacement detection element includes a linear differential sensor and / or an eddy current sensor;

[0018] And / or, the rotation detection element includes a grating ruler system.

[0019] The wafer inspection equipment provided by this utility model includes the aforementioned integrated displacement and rotation platform.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] The displacement-rotation integrated platform provided by this utility model allows high-pressure gas to enter the guide cavity through the air hole after a high-pressure gas source supplies high-pressure gas. An air-bearing guide rail is formed between the guide cavity and the moving part assembly. Since the guide cavity of the shell is cylindrical, the air-bearing guide rail is cylindrical. Under the constraint and guidance of the air-bearing guide rail, the displacement actuator can drive the moving part assembly to move axially along the guide cavity, and the rotation actuator can drive the moving part assembly to rotate around the center of the guide cavity. In other words, the displacement axis and the rotation axis are coupled together and both rely on the air-bearing guide rail for guidance. On the one hand, this reduces the load, facilitates processing, shortens the response time, and improves accuracy and efficiency. On the other hand, it increases the arrangement space of the air-bearing guide rail, making the motion stiffness of the air-bearing guide rail greater, thereby improving the anti-interference ability and overall stability, making it suitable for complex platform systems.

[0022] Therefore, the displacement-rotation integrated platform provided by this utility model has high precision, motion efficiency, and strong stability.

[0023] The wafer inspection equipment provided by this utility model includes the aforementioned integrated displacement and rotation platform, and therefore possesses all the advantages of the aforementioned integrated displacement and rotation platform, which will not be elaborated further here. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0025] Fig. 1 A cross-sectional view of the integrated displacement and rotation platform provided in this embodiment of the utility model;

[0026] Fig. 2 A cross-sectional view of the assembly structure of the gravity balancing device and the support frame in the displacement-rotation integrated platform provided in this embodiment of the utility model;

[0027] Fig. 3 A schematic diagram of the structure of the integrated displacement and rotation platform provided in the embodiment of this utility model.

[0028] Explanation of reference numerals in the attached figures:

[0029] 100 - Housing; 110 - Support frame;

[0030] 200 - Linear voice coil motor; 210 - Motor adapter board;

[0031] 300-flat panel voice coil motor;

[0032] 400 - Mover assembly; 410 - Hollow mover; 420 - Stage;

[0033] 500 - Gravity balancing device; 510 - Upper bearing; 520 - Lower bearing; 530 - Spring; 540 - Upper bearing housing; 550 - Lower bearing housing;

[0034] 600-gasket;

[0035] 700-Linear Differential Sensor;

[0036] 800-Reading head. Detailed Implementation

[0037] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0038] The present invention will be further described in detail below through specific embodiments and in conjunction with the accompanying drawings.

[0039] See Figs. 1-3 This embodiment provides a displacement-rotation integrated platform, which includes a housing 100, a displacement driver, a rotation driver, and a mover assembly 400. The housing 100 is provided with a cylindrical guide cavity, and the mover assembly 400 cooperates with the guide cavity. The cavity wall of the guide cavity is provided with a plurality of air holes for connecting to a high-pressure air source. The displacement driver is connected to the mover assembly 400 and is used to drive the mover assembly 400 to move axially along the guide cavity. The rotation driver is connected to the mover assembly 400 and is used to drive the mover assembly 400 to rotate around the central axis of the guide cavity.

[0040] The displacement-rotation integrated platform provided in this embodiment, after high-pressure gas is supplied to the air hole by the high-pressure gas source, can enter the guide cavity through the air hole. An air-bearing guide rail is formed between the guide cavity and the mover assembly 400. Since the guide cavity of the housing 100 is cylindrical, the air-bearing guide rail is cylindrical. Under the restriction and guidance of the air-bearing guide rail, the displacement actuator can drive the mover assembly 400 to move axially along the guide cavity, and the rotation actuator can drive the mover assembly 400 to rotate around the center of the guide cavity. That is to say, the displacement axis and the rotation axis are coupled together and both rely on the air-bearing guide rail for guidance. On the one hand, it can reduce the load, facilitate processing, shorten the response time, and improve accuracy and efficiency; on the other hand, it can increase the arrangement space of the air-bearing guide rail, so that the motion stiffness of the air-bearing guide rail is larger, thereby improving the anti-interference ability, the overall stability is stronger, and it can be applied to complex platform systems.

[0041] Therefore, the integrated displacement and rotation platform provided in this embodiment has high precision, motion efficiency, and strong stability.

[0042] Specifically, both the displacement actuator and the rotary actuator can be fixed relative to the housing 100. Based on this, the displacement actuator is configured such that its displacement mover can rotate with the mover assembly 400 around the central axis of the guide cavity. Thus, the displacement actuator can not only drive the mover assembly 400 to move axially along the guide cavity, but also adapt to the rotational movement of the mover assembly 400 when the rotary actuator drives it to rotate around the central axis of the guide cavity. Correspondingly, the rotary actuator is configured such that its rotation mover can move with the mover assembly 400 along the axial direction of the guide cavity. Thus, the rotary actuator can not only drive the mover assembly 400 to rotate around the central axis of the guide cavity, but also adapt to the displacement movement of the mover assembly 400 when the displacement actuator drives it to move axially along the guide cavity. In this way, the mover assembly 400 can smoothly achieve both displacement and rotational movements. Of course, as an alternative, the displacement driver can be mounted on the rotary actuator of the rotary driver, and the actuator assembly 400 can be connected to the position locator of the displacement driver; as another alternative, the rotary driver can be mounted on the position locator of the displacement driver, and the actuator assembly 400 can be connected to the rotary actuator of the rotary driver.

[0043] A linear voice coil motor 200 can be used as the aforementioned displacement actuator. The stator of the linear voice coil motor 200 is mounted on the housing 100, and the positioner of the linear voice coil motor 200 is fixedly connected to the mover assembly 400. This allows the linear voice coil motor 200 to drive the mover assembly 400 to move axially along the guide cavity. The positioner of the linear voice coil motor 200 can rotate around the central axis of the guide cavity with the mover assembly 400, thus meeting the requirements of the displacement actuator. Specifically, the linear voice coil motor 200 can be mounted at the bottom of the housing 100. A motor adapter plate 210 can be provided between the positioner of the linear voice coil motor 200 and the mover assembly 400 to achieve an indirect connection between the positioner and the mover assembly 400.

[0044] The mover assembly 400 includes a stage 420. A flat voice coil motor 300 is used as the rotary driver. The stator of the flat voice coil motor 300 is fixedly disposed relative to the housing 100 (specifically, a fixed frame can be provided and fixedly disposed relative to the housing 100, and the stator of the flat voice coil motor 300 is mounted on the fixed frame). The rotating mover of the flat voice coil motor 300 is connected to the stage 420 so that the mover assembly 400 can be driven to rotate around the central axis of the guide cavity by the flat voice coil motor 300. The rotating mover of the flat voice coil motor 300 can also move axially along the guide cavity with the mover assembly 400, thus meeting the requirements of the rotary driver.

[0045] In fact, the central axis of the guide cavity is set vertically.

[0046] Specifically, the mover assembly 400 is connected to the housing 100 via a gravity balancing device 500, so that the gravity of the mover assembly 400 can be balanced by the gravity balancing device 500. In this way, the influence of the mover assembly 400's own weight on its balance can be reduced, the smoothness of the mover assembly 400's movement can be improved, and the load on the displacement actuator can be reduced, the power requirement of the displacement actuator can be reduced, the cost can be reduced, and space can be saved.

[0047] In the specific structure of the gravity balancing device 500, an upper bearing 510, a lower bearing 520, and an elastic element can be provided. The lower bearing 520 is installed on the housing 100, and the upper bearing 510 is installed on the mover assembly 400. Both the upper bearing 510 and the lower bearing 520 are arranged coaxially with the guide cavity, with the upper bearing 510 positioned above the lower bearing 520. The elastic element is installed between the upper bearing 510 and the lower bearing 520. The presence of the elastic element provides elastic support for the mover assembly 400, accommodating its displacement while bearing its load. The presence of the upper bearing 510 and the lower bearing 520 reduces the resistance during rotation of the mover assembly 400, improving motion efficiency and stability. The upper bearing 510 and the lower bearing 520 can be thrust ball bearings.

[0048] In the specific structure of the mover assembly 400, a hollow mover 410 can be provided, and the upper bearing 510, lower bearing 520, and elastic element are all installed in the hollow cavity of the hollow mover 410. A support frame 110 can be provided on the housing 100, with the top of the support frame 110 extending into the hollow cavity of the hollow mover 410, so that the lower bearing 520 can be installed on the top of the support frame 110. Thus, the support frame 110 can provide gravity support for the mover assembly 400, improving the structural compactness. The support frame 110 can pass through the center hole of the linear voice coil motor 200; the support frame 110 can be a cylindrical structure.

[0049] In the specific structure of the gravity balancing device 500, an upper bearing housing 540 can be provided, and an upper bearing 510 can be installed on the upper bearing housing 540. Several shims 600 are pressed between the top of the upper bearing housing 540 and the hollow mover 410. The upper bearing housing 540, shims 600 and hollow mover 410 are connected in a detachable manner. In this way, the number of shims 600 can be selected as needed to allow the elastic element to better perform the gravity balancing effect. Specifically, a threaded connection assembly can be used to connect the upper bearing housing 540, shims 600 and hollow mover 410.

[0050] In the specific structure of the gravity balancing device 500, a lower bearing seat 550 can also be provided, the lower bearing 520 is installed on the lower bearing seat 550, and the lower bearing seat 550 is installed on the top of the support frame 110.

[0051] Preferably, spring 530 can be used as the above-mentioned elastic element.

[0052] In the specific structure of the displacement-rotation integrated platform provided in this embodiment, a displacement detection element can also be set to detect the displacement of the mover assembly 400. Both the displacement detection element and the displacement driver are connected to the controller for communication. In this way, the controller can realize closed-loop control of the displacement driver based on the displacement of the mover assembly 400 detected by the displacement detection element, which can improve the displacement accuracy.

[0053] The displacement detection element mentioned above may include either or both of a linear differential sensor 700 and an eddy current sensor, preferably both of which are provided simultaneously. When the mover assembly 400 moves a large stroke, the controller can control the displacement driver based on the displacement signal detected by the linear differential sensor 700. When the mover assembly 400 moves to the vicinity of the target position, the controller can control the displacement driver based on the displacement signal detected by the eddy current sensor. In this way, both large stroke displacement detection and high detection accuracy can be achieved.

[0054] The linear differential sensor 700 has a straight rod portion, which is coaxially arranged with the guide cavity, and the aforementioned spring 530 can be sleeved onto the straight rod portion of the linear differential sensor 700.

[0055] In the specific structure of the displacement-rotation integrated platform provided in this embodiment, a rotation detection element can also be set to detect the rotation angle of the mover assembly 400. Both the rotation detection element and the rotation driver are connected to the controller for communication. In this way, the controller can realize closed-loop control of the rotation driver based on the rotation angle of the mover assembly 400 detected by the rotation detection element, which can improve the rotation accuracy.

[0056] The aforementioned rotation detection element can be a grating ruler system. The reading head 800 in the grating ruler system can be mounted on the loading tray 420.

[0057] This embodiment also provides a wafer inspection device, which includes the above-mentioned displacement and rotation integrated platform.

[0058] The wafer inspection equipment provided in this embodiment includes the aforementioned integrated displacement and rotation platform, and therefore possesses all the advantages of such an integrated displacement and rotation platform, exhibiting high precision, high motion efficiency, and strong stability.

[0059] In the description of this utility model, it should be noted that the terms "upper", "lower", "vertical", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0060] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A displacement and rotation integrated platform, characterized in that, Includes a housing (100), a displacement actuator, a rotary actuator, and a mover assembly (400); The housing (100) is provided with a cylindrical guide cavity, and the mover assembly (400) cooperates with the guide cavity; the cavity wall of the guide cavity is provided with a plurality of air holes, which are used to connect to a high-pressure air source; the displacement actuator is connected to the mover assembly (400) and is used to drive the mover assembly (400) to move along the axial direction of the guide cavity; the rotary actuator is connected to the mover assembly (400) and is used to drive the mover assembly (400) to rotate around the central axis of the guide cavity.

2. The integrated displacement and rotation platform according to claim 1, characterized in that, Both the displacement actuator and the rotary actuator are fixed relative to the housing (100). The displacement actuator's moving part can rotate around the central axis of the guide cavity with the moving part assembly (400), and the rotary actuator's rotating moving part can move along the axial direction of the guide cavity with the moving part assembly (400).

3. The integrated displacement and rotation platform according to claim 2, characterized in that, The displacement driver includes a linear voice coil motor (200), the stator of which is mounted on the housing (100), and the displacement actuator of which is fixedly connected to the mover assembly (400) for driving the mover assembly (400) to move axially along the guide cavity; And / or, the mover assembly (400) includes a stage (420), the rotary driver includes a flat voice coil motor (300), the stator of the flat voice coil motor (300) is fixed relative to the housing (100), and the rotating mover of the flat voice coil motor (300) is connected to the stage (420) for driving the stage (420) to rotate about the central axis of the guide cavity.

4. The integrated displacement and rotation platform according to claim 1, characterized in that, The mover assembly (400) is connected to the housing (100) via a gravity balancing device (500), which is used to balance the gravity of the mover assembly (400).

5. The integrated displacement and rotation platform according to claim 4, characterized in that, The gravity balancing device (500) includes an upper bearing (510), a lower bearing (520), and an elastic element. The lower bearing (520) is installed on the housing (100), and the upper bearing (510) is installed on the mover assembly (400). The upper bearing (510) and the lower bearing (520) are both coaxially arranged with the guide cavity. The upper bearing (510) is located above the lower bearing (520), and the elastic element is disposed between the upper bearing (510) and the lower bearing (520).

6. The integrated displacement and rotation platform according to claim 5, characterized in that, The mover assembly (400) includes a hollow mover (410), the upper bearing (510), the lower bearing (520) and the elastic element are all disposed in the hollow cavity of the hollow mover (410); the housing (100) is provided with a support frame (110), the top of the support frame (110) extends into the hollow cavity of the hollow mover (410), and the lower bearing (520) is mounted on the top of the support frame (110).

7. The integrated displacement and rotation platform according to claim 6, characterized in that, The gravity balancing device (500) further includes an upper bearing seat (540), the upper bearing (510) is installed on the upper bearing seat (540), and a plurality of gaskets (600) are pressed between the upper bearing seat (540) and the top of the hollow mover (410), and the upper bearing seat (540), the gaskets (600) and the hollow mover (410) are detachably connected; And / or, the elastic element is a spring (530).

8. The integrated displacement and rotation platform according to any one of claims 1-7, characterized in that, The displacement-rotation integrated platform also includes a displacement detection element, which is used to detect the displacement of the moving part assembly (400). Both the displacement detection element and the displacement driver are communicatively connected to the controller. And / or, the displacement-rotation integrated platform further includes a rotation detection element, which is used to detect the rotation angle of the mover assembly (400), and both the rotation detection element and the rotation driver are communicatively connected to the controller.

9. The integrated displacement and rotation platform according to claim 8, characterized in that, The displacement detection element includes a linear differential sensor (700) and / or an eddy current sensor; And / or, the rotation detection element includes a grating ruler system.

10. A wafer inspection device, characterized in that, The displacement and rotation integrated platform as described in any one of claims 1-9.

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