8-inch-to-6-inch wafer clamp

Abstract

The utility model provides an 8-inch-to-6-inch wafer clamp comprising an outer substrate and an inner substrate which are arranged separately and used cooperatively, the middle position of the outer substrate is provided with an 8-inch circular hole, and the middle position of the inner substrate is provided with a 6-inch circular hole; two positioning bodies and two movable clamping bodies are arranged at the positions, close to the four corners, of the surface of the outer base plate, the two positioning bodies and the two movable clamping bodies are arranged in a bilateral symmetry mode through the vertical center line of the outer base plate, and a first notch and a second notch are formed in the two sides of the outer side edge of the upper portion of the outer base plate and the two sides of the outer side edge of the upper portion of the inner base plate respectively. The two positioning bodies act on the two second notches respectively, and the two movable clamping bodies act on the two sides of the outer side edge of the lower portion of the inner base plate respectively. According to the utility model, a general fixture of an 8-inch wafer model can be quickly converted into a specific fixture which can be adaptive to a 6-inch wafer model, one fixture has two use states, wafers of two sizes can be clamped and fixed, the operation is convenient and practical, the production cost is reduced, and the functionality is good.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection technology, specifically, it demonstrates an 8-inch to 6-inch wafer fixture. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits; its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seed crystals, and then slowly pulled out to form a cylindrical single-crystal silicon wafer. After grinding, polishing, and slicing, the silicon crystal ingot forms a silicon wafer. During wafer processing, it needs to be tested, and fixtures are used to fix it in place to ensure its stability.

[0003] For example, Chinese patent CN219873484U discloses a wafer fixing carrier, including a main panel with a groove for matching wafers, an open slot extending to the panel on either side of the groove; and a matching fastening structure at the open slot; the fastening structure includes a tongue horizontally placed in the open slot, the two sides of the tongue being clamped by baffles respectively, the end face of the tongue near the groove being arc-shaped, the end face away from the groove being connected to one end of a spring, and the other end of the spring abutting against a fixing plate.

[0004] The market typically offers wafers with diameters of 8 inches and 6 inches. While standard fixtures on testing equipment can hold and test 8-inch wafers, testing equipment cannot hold 6-inch wafers. Custom fixtures are required to accommodate 6-inch wafers, increasing manufacturing costs and wasting resources. Utility Model Content

[0005] The purpose of this invention is to provide an 8-inch to 6-inch wafer fixture, which has the advantages of reducing resource waste and improving efficiency.

[0006] The technical solution is as follows:

[0007] An 8-inch to 6-inch wafer fixture includes an outer substrate and an inner substrate that are separately set and used together. An 8-inch circular hole is opened in the middle of the outer substrate, and a 6-inch circular hole is opened in the middle of the inner substrate.

[0008] Two positioning bodies and two movable clamping bodies are provided on the surface of the outer substrate near the four corners. The two positioning bodies and two movable clamping bodies are symmetrically arranged on the left and right sides of the vertical center line of the outer substrate. A first notch and a second notch are respectively provided on both sides of the upper outer side of the outer substrate and on both sides of the upper outer side of the inner substrate.

[0009] The two positioning bodies act on the two second notches respectively, and the two movable clamping bodies act on the lower outer sides of the inner substrate respectively. When the inner substrate is fixed between the two positioning bodies and the two movable clamping bodies, the 6-inch round hole and the 8-inch round hole are concentric.

[0010] Furthermore, the positioning body includes a rod and a circular limiting part. One end of the rod is fixed downward to the surface of the outer substrate, and the other end of the rod is connected upward to the circular limiting part. In this way, the combination of the rod and the circular limiting part can be used to achieve the positioning and limiting effect on the second notch on the inner substrate, ensuring the fixation of the front position of the inner substrate.

[0011] Furthermore, a gap is left between the circular limiting part and the outer substrate, and the gap between the bottom surface of the circular limiting part and the surface of the outer substrate is not less than the thickness of the inner substrate. Preferably, the gap between the bottom surface of the circular limiting part and the surface of the outer substrate is just enough to accommodate the insertion of the edge of the inner substrate, ensuring that the inner substrate will not loosen vertically after being placed on the surface of the outer substrate, and ensuring the firmness of the inner substrate and the outer substrate after combination.

[0012] Furthermore, the movable clamp includes a base, a movable shaft, a compression spring, and a clamping part. The base is fixed to the surface of the outer substrate, the movable shaft is movably inserted into the base, and a locking body is provided at the tail end of the movable shaft. The clamping part is connected to the head end of the movable shaft, and the compression spring is movably sleeved on the front part of the movable shaft, with the compression spring positioned between the base and the clamping part. The clamping part, capable of elastic clamping, achieves a clamping effect on the lower side of the inner substrate, which not only facilitates clamping operations but also allows for easy removal of the inner substrate without causing pressure damage or deformation to the side of the inner substrate.

[0013] Furthermore, the bottom end of the front wall of the clamping part is provided with an obtuse-angled notch. This allows the lower side of the inner substrate to be easily inserted into the bottom end of one side of the clamping part. This obtuse-angled notch not only facilitates the passage of the edge of the inner substrate, but also provides a limiting effect on the edge of the inner substrate.

[0014] Furthermore, the top center of the base is recessed inward to form a groove, from which the movable shaft can be exposed. An auxiliary body is provided on the surface of the base, in which a positioning pin is movably inserted vertically. A positioning slot is provided in the middle of the movable shaft, and the positioning slot can engage with the positioning pin. This design facilitates the assembly of the inner and outer substrates. Before assembly, the movable shaft is pressed inward until the positioning slot on the movable shaft stops directly below the positioning pin, allowing the positioning pin to be inserted downward into the positioning slot to achieve the positioning effect of the movable shaft. After the inner substrate is placed between the two positioning bodies and the two movable clamping bodies, and the position of the inner substrate is basically determined, the positioning pin is pulled upward to disengage it from the positioning slot. The movable shaft extends outward under the elastic action of the compression spring until the clamping part clamps the edge of the inner substrate.

[0015] Compared with the prior art, the advantages of this utility model are: simple structure and reasonable design; by using an 8-inch to 6-inch fixture, the time for re-matching 6-inch wafer adapter fixtures is reduced, and it can quickly transform from a general fixture for 8-inch wafer models to a specific fixture that can also adapt to 6-inch wafer models. One fixture has two usage states, high adaptability, and can meet the needs of clamping and fixing wafers of two sizes. It is convenient and practical to operate, reduces production costs, and has good functionality. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of an 8-inch to 6-inch wafer fixture according to an embodiment of the present invention;

[0017] Figure 2 This is a schematic diagram of the outer substrate according to an embodiment of the present invention;

[0018] Figure 3 This is a schematic diagram of the inner substrate according to an embodiment of the present invention;

[0019] Figure 4 This is a schematic diagram of the positioning body according to an embodiment of the present invention;

[0020] Figure 5 This is a schematic diagram of the movable clamp in an embodiment of the present invention;

[0021] The relevant markings in the attached drawings are: 1-outer substrate, 2-inner substrate, 3-positioning body, 4-movable clamping body, 11-first notch, 12-8-inch round hole, 21-second notch, 22-6-inch round hole, 31-rod, 32-circular limiting part, 41-base, 42-movable shaft, 43-compression spring, 44-clamping part, 45-auxiliary body, 411-groove, 421-clamping body, 422-positioning slot, 441-obtuse angled bayonet, 451-positioning pin. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] This utility model provides an 8-inch to 6-inch wafer fixture to solve the technical problems mentioned in the background art.

[0024] like Figures 1 to 5 As shown. The wafer fixture includes an outer substrate 1 and an inner substrate 2 that are separately set and used together. The outer substrate 1 and the inner substrate 2 can be made of stainless steel. An 8-inch round hole 12 is opened in the middle of the outer substrate 1. The 8-inch round hole can be used to insert an 8-inch wafer and surround and fix it. A 6-inch round hole 22 is opened in the middle of the inner substrate 2. The 6-inch round hole can be used to insert a 6-inch wafer and surround and fix it.

[0025] Two positioning bodies 3 and two movable clamping bodies 4 are provided on the surface of the outer substrate 1 near the four corners. That is, the two positioning bodies and two movable clamping bodies are arranged on the surface of the outer substrate in a four-corner distribution manner. Furthermore, the two positioning bodies 3 and two movable clamping bodies 4 are arranged symmetrically on the left and right sides of the vertical center line of the outer substrate 1. A first notch 11 and a second notch 21 are respectively provided on both sides of the upper outer side of the outer substrate 1 and on both sides of the upper outer side of the inner substrate 2. The two first notches 11 on the outer substrate 1 are for fixing the outer substrate 1 to the machine equipment.

[0026] The two positioning bodies 3 act inward at the positions of the two second notches 21 respectively, and the two movable clamping bodies 4 act inward at the lower outer sides of the inner substrate 2 respectively. When the inner substrate 2 is fixed between the two positioning bodies 3 and the two movable clamping bodies 4, the 6-inch round hole 22 on the inner substrate 2 is concentric with the 8-inch round hole 12 on the outer substrate 1.

[0027] Based on the above solution, it is possible to quickly transform a general-purpose fixture for 8-inch wafers into a specific fixture that can also be adapted to 6-inch wafers. One fixture has two usage modes, high adaptability, and can meet the needs of clamping and fixing wafers of two sizes.

[0028] The positioning body 3 includes a rod 31 and a circular limiting part 32. One end of the rod 31 is fixed downward to the surface of the outer substrate 1, and the other end of the rod 31 is connected upward to the circular limiting part 32. In this way, the combination of the rod and the circular limiting part can be used to achieve the positioning and limiting effect on the second notch on the inner substrate, ensuring the fixation of the front position of the inner substrate.

[0029] Furthermore, a gap is left between the circular limiting part 32 and the outer substrate 1, and the gap between the bottom surface of the circular limiting part 32 and the surface of the outer substrate 1 is not less than the thickness of the inner substrate 2. Preferably, the gap between the bottom surface of the circular limiting part and the surface of the outer substrate is just enough to accommodate the insertion of the edge of the inner substrate, ensuring that the inner substrate will not experience slight vertical loosening after being placed on the surface of the outer substrate, and ensuring the firmness of the inner substrate and the outer substrate after being combined.

[0030] The movable clamp 4 includes a base 41, a movable shaft 42, a compression spring 43, and a clamping part 44. The base 41 is fixed to the surface of the outer substrate 1. The movable shaft 42 is movably inserted into the base 41, and a locking body 421 is provided at the tail end of the movable shaft 42. The clamping part 44 is connected to the head end of the movable shaft 42. The compression spring 43 is movably sleeved on the front part of the movable shaft 42 and is located between the base 41 and the clamping part 44. The clamping part, which can achieve elastic clamping, achieves a clamping effect on the lower side of the inner substrate. This not only makes the clamping operation convenient but also makes it easy to remove the inner substrate without causing pressure damage or deformation to the side of the inner substrate.

[0031] Furthermore, an obtuse-angled notch 441 is provided at the bottom of the front wall of the clamping part 44. This allows the lower side of the inner substrate to be easily inserted into the bottom of one side of the clamping part. This obtuse-angled notch not only facilitates the passage of the edge of the inner substrate, but also creates a limiting effect on the edge of the inner substrate.

[0032] In other embodiments, a groove 411 is formed by recessing inward in the middle of the top of the base 41, through which the movable shaft 42 can be exposed. An auxiliary body 45 is provided on the surface of the base 41, and a positioning pin 451 is movably inserted into the auxiliary body 45. A positioning slot 422 is provided in the middle of the movable shaft 42, which can be inserted and engaged with the positioning pin 451. This design facilitates the assembly of the inner and outer substrates. Before assembly, the movable shaft is pressed inward until the positioning slot on the movable shaft stops directly below the positioning pin, so that the positioning pin is inserted downward into the positioning slot to achieve the positioning effect of the movable shaft. After the inner substrate is placed between the two positioning bodies and the two movable clamping bodies and the position of the inner substrate is basically determined, the positioning pin is pulled upward to disengage it from the positioning slot. The movable shaft extends outward under the elastic action of the compression spring until the clamping part clamps the edge of the inner substrate.

[0033] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. An 8-inch to 6-inch wafer fixture, characterized in that, It includes an outer substrate and an inner substrate that are set separately and used together. An 8-inch round hole is opened in the middle of the outer substrate, and a 6-inch round hole is opened in the middle of the inner substrate. Two positioning bodies and two movable clamping bodies are provided on the surface of the outer substrate near the four corners. The two positioning bodies and two movable clamping bodies are symmetrically arranged on the left and right sides of the vertical center line of the outer substrate. A first notch and a second notch are respectively provided on both sides of the upper outer side of the outer substrate and on both sides of the upper outer side of the inner substrate. The two positioning bodies act on the two second notches respectively, and the two movable clamping bodies act on the lower outer sides of the inner substrate respectively. When the inner substrate is fixed between the two positioning bodies and the two movable clamping bodies, the 6-inch round hole and the 8-inch round hole are concentric.

2. The 8-inch to 6-inch wafer fixture according to claim 1, characterized in that, The positioning body includes a rod and a circular limiting part. One end of the rod is fixed downward to the surface of the outer substrate, and the other end of the rod is connected upward to the circular limiting part.

3. The 8-inch to 6-inch wafer fixture according to claim 2, characterized in that, There is a gap between the circular limiting part and the outer substrate, and the gap between the bottom surface of the circular limiting part and the surface of the outer substrate is not less than the thickness of the inner substrate.

4. The 8-inch to 6-inch wafer fixture according to claim 1, characterized in that, The movable clamp includes a base, a movable shaft, a compression spring, and a clamping part. The base is fixed to the surface of the outer substrate. The movable shaft is movably inserted into the base, and a locking body is provided at the tail end of the movable shaft. The clamping part is connected to the head end of the movable shaft. The compression spring is movably sleeved on the front part of the movable shaft and is located between the base and the clamping part.

5. An 8-inch to 6-inch wafer fixture according to claim 4, characterized in that, The bottom of the front wall of the clamping part is provided with an obtuse-angled bayonet.

6. An 8-inch to 6-inch wafer fixture according to claim 4, characterized in that, The top center of the base is recessed inward to form a groove, from which the movable shaft can be exposed. An auxiliary body is provided on the surface of the base, in which a positioning pin is inserted vertically, and a positioning slot is provided in the middle of the movable shaft, which can be inserted and engaged with the positioning pin.

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