Feeding device and cutting equipment

Abstract

The utility model relates to the technical field of silicon rod machining equipment, in particular to a feeding device and cutting equipment. The feeding device aims at solving the problem that an existing feeding device often cannot smoothly take down silicon rods on a conveying trolley. Therefore, the feeding device comprises a supporting component, a material taking assembly installed on the supporting component, a detection mechanism installed on the material taking assembly and a positioning mechanism located below the material taking assembly, the positioning mechanism is used for positioning a conveying trolley for conveying the silicon rods, and the material taking assembly is used for taking down the silicon rods on the conveying trolley. The detection mechanism is used for detecting the positions of the silicon rods on the conveying trolley so as to determine whether the positions of the silicon rods meet the material taking requirement or not. The conveying trolley is positioned through the positioning mechanism, then the position of the silicon rod is detected through the detection mechanism, it can be better guaranteed that the silicon rod is located at the accurate material taking position, and therefore the silicon rod on the conveying trolley can be taken down smoothly through the material taking assembly, and the working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon rod processing equipment technical field, concretely relates to a feeding device and cutting equipment. BACKGROUND

[0002] Silicon is a typical semiconductor material, its content on the earth's surface is only second to oxygen, is widely used in diode, triode, thyristor, field effect transistor and various integrated circuits, aerospace, optical fiber and many other fields, is very important material.

[0003] In the specific application, need to cut silicon rod into silicon wafer, and generally need to cut silicon rod through the wire cutting machine in the prior art. In the processing of silicon rod, generally need to use a feeding device, the feeding device is used to take down the silicon rod on the transport trolley, then is connected with the subsequent device, completes the feeding of silicon rod.

[0004] However, the existing feeding device often cannot smoothly take down the silicon rod on the transport trolley, thereby affecting work efficiency.

[0005] Correspondingly, the prior art needs a new technical scheme to solve the above problems. UTILITY MODEL CONTENT

[0006] In order to solve at least one of the above problems in the prior art, that is, to solve the problem that the existing feeding device often cannot smoothly take down the silicon rod on the transport trolley, thereby affecting work efficiency.

[0007] In a first aspect, the application provides a feeding device, the feeding device comprising a support member, a material taking assembly mounted on the support member, a detection mechanism mounted on the material taking assembly and a positioning mechanism located below the material taking assembly, the positioning mechanism is used for positioning the transport trolley transporting silicon rod, the material taking assembly is used for taking down the silicon rod on the transport trolley, and the detection mechanism is used for detecting the position of the silicon rod on the transport trolley so as to determine whether the position of the silicon rod meets the material taking requirement.

[0008] The feeding device of the application can first position the transport trolley through the positioning mechanism, and then detect the position of the silicon rod through the detection mechanism, which can better ensure that the silicon rod is in the accurate material taking position, so that the material taking assembly can smoothly take down the silicon rod on the transport trolley, improve work efficiency, and also be beneficial to avoid the situation that the silicon rod falls off, improve safety.

[0009] In the preferred technical scheme of the above feeding device, the detection mechanism comprises a first distance sensor, a second distance sensor and a third distance sensor, the first distance sensor and the second distance sensor are located on the same side of the width direction of the silicon rod and are spaced apart along the length direction of the silicon rod, and the third distance sensor is located on one side of the length direction of the silicon rod.

[0010] The detection mechanism of the present application detects the side surface of the silicon rod through the first distance sensor and the second distance sensor, which facilitates accurate determination of the position of the center line of the silicon rod and the angle of the silicon rod inclination, and the end surface of the silicon rod is detected through the third distance sensor, which facilitates accurate determination of the offset of the silicon rod in the length direction thereof, so that the position of the silicon rod can be more accurately determined to meet the requirements of the material taking, in addition, compared with the visual detection mechanism such as the visual camera, the detection mechanism composed of the three distance sensors has lower cost, and is convenient for on-site debugging, in addition, is not affected by the structure of the transport trolley, the dirty environment and other foreign matters, and the detection is more accurate.

[0011] In the preferred technical scheme of the above feeding device, the material taking assembly comprises a cross beam extending along a first horizontal direction, and a clamp, a first driving mechanism and a second driving mechanism mounted on the cross beam, the clamp is used for clamping the silicon rod on the transport trolley, the first driving mechanism is used for driving the clamp and the second driving mechanism to move along the length direction of the cross beam, the second driving mechanism is used for driving the clamp to move along the vertical direction, and the detection mechanism is mounted on the clamp.

[0012] In the preferred technical scheme of the above feeding device, the first driving mechanism comprises a translation member, a first motor mounted on the translation member, a first gear connected with the first motor, and a first rack engaged with the first gear, the first motor can drive the first gear to rotate, the first rack is mounted on the cross beam and extends along the first horizontal direction, the clamp and the second driving mechanism are mounted on the translation member, and the material taking assembly further comprises a first guide mechanism mounted between the cross beam and the translation member to enable the translation member to move relative to the cross beam only along the first horizontal direction.

[0013] The feeding device of the present application can improve the accuracy of the movement of the clamp by setting the first driving mechanism into the structure of motor+gear rack, and cooperating with the guide mechanism, thereby improving the reliability of the material taking assembly.

[0014] In the preferred technical scheme of the above feeding device, the second driving mechanism comprises a second motor installed on the translation member, a second gear connected with the second motor, and a second rack engaged with the second gear, the second motor is capable of driving the second gear to rotate, the second rack is installed on the clamp and extends along the vertical direction, and the feeding assembly further comprises a second guide mechanism installed between the translation member and the clamp to enable the clamp to move relative to the translation member only along the vertical direction.

[0015] In the preferred technical scheme of the above feeding device, the clamp comprises a base body, and a first clamping jaw, a second clamping jaw, and a third driving mechanism installed on the base body, the first clamping jaw and the second clamping jaw are distributed along a second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the third driving mechanism is used to drive the first clamping jaw and the second clamping jaw to move relative to the base body along the second horizontal direction to clamp the silicon rod on the transport trolley, and the detection mechanism is installed on the base body.

[0016] In the preferred technical scheme of the above feeding device, the third driving mechanism comprises a third motor installed on the base body, and a lead screw connected with the third motor, the lead screw extends along the second horizontal direction, the third motor is used to drive the lead screw to rotate, a first threaded hole is arranged on the first clamping jaw, a second threaded hole is arranged on the second clamping jaw, the lead screw penetrates into the first threaded hole and the second threaded hole, and the thread direction in the first threaded hole is opposite to the thread direction in the second threaded hole; or

[0017] The third driving mechanism comprises a third motor installed on the base body, and a lead screw connected with the third motor, the lead screw extends along the second horizontal direction, the third motor is used to drive the lead screw to rotate, the lead screw comprises a first threaded section and a second threaded section distributed along the length direction of the lead screw, a first threaded hole is arranged on the first clamping jaw, a second threaded hole is arranged on the second clamping jaw, the first threaded section and the second threaded section penetrate into the first threaded hole and the second threaded hole respectively, and the thread direction of the first threaded section is opposite to the thread direction of the second threaded section.

[0018] The feeding device of the present application can reduce the number of parts, has lower cost and is convenient to arrange by setting the third driving mechanism to enable the first clamping jaw and the second clamping jaw to move simultaneously, and is convenient to control.

[0019] In the preferred technical scheme of the above feeding device, the positioning mechanism comprises first positioning members and second positioning members, the number of the first positioning members is two and the first positioning members are spaced apart along the Y direction, a positioning guide channel extending along the X direction is formed between the two first positioning members, a first end of the positioning guide channel is an entrance, the second positioning members are located at a second end of the positioning guide channel, the transport trolley can enter the positioning guide channel from the entrance, and the second positioning members are used for blocking the transport trolley entering the positioning guide channel to realize positioning of the transport trolley in the X direction, and the positioning guide channel is used for positioning the transport trolley in the Y direction.

[0020] The feeding device of the application can position the transport trolley in the Y direction through the positioning guide channel, and the positioning accuracy is higher.

[0021] In the preferred technical scheme of the above feeding device, the first positioning members are provided with guide structures at positions close to the entrance, a guide opening is formed between the two guide structures, and the opening size of the guide opening gradually decreases along the direction in which the transport trolley enters.

[0022] The first positioning members comprise a frame body and rollers rotatably installed on the frame body, the frame body extends along the X direction, the number of the rollers is multiple and the rollers are distributed along the length direction of the frame body, and the rollers are in contact with the side wall of the transport trolley entering the positioning guide channel.

[0023] The feeding device of the application is provided with the guide opening at the position close to the entrance, the size of the guide opening is greater than the size of the transport trolley in the Y direction, so that the transport trolley can easily enter the guide opening, and then the transport trolley is guided through the guide opening, so that the transport trolley can smoothly enter the positioning guide channel. In addition, the multiple rotatable rollers are arranged on the frame body, the rollers are in contact with the side wall of the transport trolley, the friction can be reduced, and the transport trolley can move more smoothly in the positioning guide channel.

[0024] The second aspect of the application also provides a cutting device comprising the feeding device of the above technical scheme. BRIEF DESCRIPTION OF DRAWINGS

[0025] The feeding device of the application will be described below with reference to the accompanying drawings. In the drawings:

[0026] Figure 1 is a structural schematic view of the feeding device of the application;

[0027] Figure 2 is Figure 1 is a partial enlarged schematic view of position A in FIG. 6;

[0028] Figure 3 Structure diagram of the taking component of the feeding device of the present application;

[0029] Figure 4 Structure diagram of the clamp of the taking component of the present application;

[0030] Figure 5 Structure diagram of the clamp and the detection mechanism of the present application;

[0031] Figure 6 Structure diagram of the taking component of the present application; Figure 5 Sectional view at B-B.

[0032] List of reference signs

[0033] 1, support member;

[0034] 2, taking component; 21, crossbeam; 22, clamp; 23, first driving mechanism; 24, second driving mechanism; 25, first guiding mechanism; 26, second guiding mechanism;

[0035] 221, base body; 222, first clamping jaw; 223, second clamping jaw; 224, third driving mechanism; 2221, first connecting part; 2231, second connecting part;

[0036] 2211, vertical part; 2212, horizontal part; 2241, third motor; 2242, lead screw; 2243, transmission belt;

[0037] 231, translation member; 232, first motor; 233, first rack;

[0038] 241, second motor;

[0039] 251, first guide rail; 252, first guiding block;

[0040] 261, second guide rail; 262, second guiding block;

[0041] 3, detection mechanism; 31, first distance sensor; 32, second distance sensor; 33, third distance sensor;

[0042] 4, positioning mechanism; 41, first positioning member; 42, second positioning member;

[0043] 411, frame body; 412, roller; 413, guiding structure; 414, first mounting base;

[0044] 421, fixed beam; 422, positioning stopper; 423, second mounting base;

[0045] 5, transport trolley;

[0046] 6, silicon rod;

[0047] 7. Crystal. DETAILED DESCRIPTION

[0048] The preferred embodiments of the present application will be described below with reference to the drawings. It should be understood by those skilled in the art that the embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.

[0049] It should be noted that, in the description of the present application, the terms indicating the direction or positional relationship of "left", "right", "front", "back" and the like are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only for the purpose of description and cannot be understood as indicating or implying relative importance.

[0050] In addition, it should also be noted that, in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "setting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. Those skilled in the art can understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0051] Specifically, the present application provides a feeding device, as shown in the drawings, the feeding device of the present application comprises a supporting member 1, a material taking assembly 2 mounted on the supporting member 1, a detection mechanism 3 mounted on the material taking assembly 2 and a positioning mechanism 4 located below the material taking assembly 2. Figures 1 to 3

[0052] Among them, the positioning mechanism 4 is used for positioning the transport trolley 5 transporting the silicon rod 6, the material taking assembly 2 is used for taking down the silicon rod 6 on the transport trolley 5, and the detection mechanism 3 is used for detecting the position of the silicon rod 6 on the transport trolley 5, so as to determine whether the position of the silicon rod 6 meets the material taking requirement.

[0053] In a specific application, the silicon rod 6 to be cut is placed on the transport trolley 5, and the transport trolley 5 transports the silicon rod 6 to the lower side of the material taking assembly 2. First, the positioning mechanism 4 is used to position the transport trolley 5 to ensure that the transport trolley 5 is accurately parked at the set position, and then the detection mechanism 3 is used to detect the position of the silicon rod 6 on the transport trolley 5. The detection mechanism 3 sends the detected position information to the controller, and the controller judges whether the position of the silicon rod 6 meets the material taking requirement. If it is determined that the position of the silicon rod 6 meets the material taking requirement, the material taking assembly 2 is controlled to act to take down the silicon rod 6 on the transport trolley 5.​

[0054] The positioning mechanism 4 is used to position the transport trolley 5 first, and then the detection mechanism 3 is used to detect the position of the silicon rod 6, which can better ensure that the silicon rod 6 is at an accurate material taking position, so that the material taking assembly 2 can smoothly take down the silicon rod 6 on the transport trolley 5, improve work efficiency, and also help to avoid the situation that the silicon rod 6 falls off, thereby improving safety.

[0055] It should be noted that the transport trolley 5 can be a manual trolley, or an automatic guided vehicle (AGV), and the specific type of the transport trolley 5 is adjusted and changed, which does not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.

[0056] In addition, it should be noted that the structure of the support member 1 is not limited by those skilled in the art, for example, the support member 1 can be set as a support frame, a support plate or a plurality of support columns, etc.

[0057] Preferably, as shown in Figure 1 and Figure 2 The positioning mechanism 4 of the present application includes a first positioning member 41 and a second positioning member 42, the number of the first positioning member 41 is two and is spaced along the Y direction, and a positioning guide channel extending along the X direction is formed between the two first positioning members 41, the first end of the positioning guide channel is the entrance, the second positioning member 42 is located at the second end of the positioning guide channel, the transport trolley 5 can enter the positioning guide channel from the entrance, and the second positioning member 42 is used to block the transport trolley 5 entering the positioning guide channel, so as to realize the positioning of the transport trolley 5 in the X direction, and the positioning guide channel is used to position the transport trolley 5 in the Y direction.

[0058] In specific applications, the transport trolley 5 enters the positioning guide channel from the first end of the positioning guide channel, and then continues to move forward along the positioning guide channel, when the front end of the transport trolley 5 abuts against the second positioning member 42, the transport trolley 5 stops moving, and the position where the transport trolley 5 stops at this time is the set position, the positioning of the transport trolley 5 in the Y direction is realized through the cooperation of the two first positioning members 41, and the positioning of the transport trolley 5 in the X direction is realized through the second positioning member 42, thereby realizing the accurate positioning of the transport trolley 5.

[0059] It should be noted that those skilled in the art can set the first positioning member 41 as a strip-shaped positioning plate, a strip-shaped positioning block or a plurality of spaced positioning columns in actual application, and the specific structure of the first positioning member 41 is adjusted and changed, which does not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.

[0060] In addition, it should be noted that the second positioning member 42 can be set as a baffle, a block or a column in actual application by those skilled in the art, and the adjustment and change of the specific structure of the second positioning member 42 do not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.

[0061] Preferably, as shown in Figure 1 and Figure 2 , the first positioning member 41 comprises a frame body 411 extending along the X direction and a plurality of rollers 412 rotatably mounted on the frame body 411, the rollers 412 are distributed along the length direction of the frame body 411 and contact the side wall of the transport trolley 5 entering the positioning guide channel.

[0062] By setting a plurality of rotatable rollers 412 on the frame body 411, the rollers 412 contact the side wall of the transport trolley 5, which can reduce the friction and make the transport trolley 5 move more smoothly in the positioning guide channel.

[0063] Exemplarily, as shown in Figure 1 and Figure 2 , the first positioning member 41 further comprises a first mounting base 414, the frame body 411 is mounted on the top of the first mounting base 414, the middle of the frame body 411 has a strip-shaped accommodating groove extending along the length direction thereof, the rollers 412 are mounted in the strip-shaped accommodating groove, and the top end and the bottom end of each roller 412 are respectively provided with a rotating shaft, and the roller 412 is pivotally connected with the frame body 411 through the rotating shaft.

[0064] It should be noted that the first mounting base 414 is not necessary, and those skilled in the art can also cancel the first mounting base 414 in actual application, and in this case, the first positioning member 41 can be fixedly connected with the supporting member 1 of the feeding device.

[0065] Preferably, as shown in Figure 1 and Figure 2 , the first positioning member 41 is provided with a guide structure 413 at a position close to the entrance, and the guide structures 413 on the two first positioning members 41 form a guide opening therebetween, and the opening size of the guide opening gradually decreases along the direction in which the transport trolley 5 enters.

[0066] By setting the guide opening at a position close to the entrance of the positioning guide channel, the size of the guide opening is greater than the size of the transport trolley 5 in the Y direction, so that the transport trolley 5 can easily enter the guide opening, and then the transport trolley 5 is guided through the guide opening, so that the transport trolley 5 can smoothly enter the positioning guide channel.

[0067] Exemplarily, as shown in Figure 1 and Figure 2As shown in the figure, the end of the frame body 411 of the first positioning member 41 has an outwardly inclined portion, which constitutes a guide structure 413.

[0068] Preferably, as shown in the figure, Figure 1 and Figure 2 As shown in the figure, the second positioning member 42 includes a fixed beam 421 extending along the Y direction and positioning blocks 422 arranged on the fixed beam 421, the number of the positioning blocks 422 is at least two and they are distributed along the length direction of the fixed beam 421, and the positioning blocks 422 are used to abut against the transport trolley 5.

[0069] Exemplarily, the second positioning member 42 further includes second mounting bases 423, the number of the second mounting bases 423 is two and they are distributed along the length direction of the fixed beam 421, the fixed beam 421 is mounted on the second mounting bases 423, and the fixed beam 421 is provided with two positioning blocks 422 on the side facing the entrance of the positioning guide channel, the two positioning blocks 422 are respectively arranged near the two ends of the fixed beam 421, and the front end of the transport trolley 5 entering the positioning guide channel stops advancing after abutting against the two positioning blocks 422.

[0070] It should be noted that the person skilled in the art can cancel the positioning blocks 422 arranged on the fixed beam 421 in actual application, and directly block and position the transport trolley 5 through the fixed beam 421, or replace the fixed beam 421 with a fixed plate or a fixed frame, etc., and such adjustment and change of the specific structure form of the second positioning member 42 does not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.

[0071] In addition, it should be noted that the person skilled in the art can cancel the second mounting bases 423 in actual application, and in this case, the fixed beam 421 can be fixedly connected with the support member 1.

[0072] Preferably, as shown in the figure, Figures 1 to 4 The taking assembly 2 includes a cross beam 21 extending along the first horizontal direction and a clamp 22, a first driving mechanism 23 and a second driving mechanism 24 mounted on the cross beam 21, the clamp 22 is used to clamp the silicon rod 6 on the transport trolley 5, the first driving mechanism 23 is used to drive the clamp 22 and the second driving mechanism 24 to move along the length direction of the cross beam 21, the second driving mechanism 24 is used to drive the clamp 22 to move along the vertical direction, and the detection mechanism 3 is mounted on the clamp 22.

[0073] The transport trolley 5 can generally place a plurality of silicon rods 6 arranged along the first horizontal direction, exemplarily, as shown in the figure, Figure 1As shown, two silicon rods 6 are placed on the transport trolley 5. The two silicon rods 6 are spaced apart along the X direction (i.e., the first horizontal direction). Both silicon rods 6 extend along the Y direction. The crossbeam 21 extends along the X direction. When the transport trolley 5 is parked in the set position, the first drive mechanism 23 drives the clamp 22 and the second drive mechanism 24 to move from the initial position along the X direction by a first set distance (the specific value of the first set distance is set in advance by the operator) until they move above one of the silicon rods 6. Then, the second drive mechanism 24 drives the clamp 22 to move downward by a second set distance (the specific value of the second set distance is set in advance by the operator). Then, the position of the silicon rod 6 is detected by the detection mechanism 3 on the clamp 22. If the position of the silicon rod 6 meets the material picking requirements, the clamp 22 is controlled to pick up the silicon rod 6.

[0074] It should be noted that although the entry direction of the transport trolley 5 (the extension direction of the positioning guide channel) and the extension direction of the crossbeam 21 are the same in the figure, both being the X direction, that is, the first horizontal direction is the X direction, in practical applications, those skilled in the art can also set the first horizontal direction to the Y direction, that is, make the entry direction of the transport trolley 5 (the extension direction of the positioning guide channel) perpendicular to the extension direction of the crossbeam 21. Such flexible adjustments and changes do not deviate from the principles and scope of this application and should be limited to the protection scope of this application.

[0075] Furthermore, it should be noted that this application does not limit the specific structural form of the first drive mechanism 23 and the second drive mechanism 24. For example, it can be configured as a hydraulic drive mechanism, or as a pneumatic drive mechanism, or as an electric drive mechanism (e.g., motor + gear rack or motor + lead screw nut, etc.). Such adjustments and changes to the specific structural form of the first drive mechanism 23 and the second drive mechanism 24 do not deviate from the principles and scope of this application and should all be limited to the protection scope of this application.

[0076] Preferably, such as Figure 3 As shown, the first drive mechanism 23 of this application includes a translation member 231, a first motor 232 mounted on the translation member 231, a first gear (not shown in the figure) connected to the first motor 232, and a first rack 233 meshing with the first gear. The first motor 232 can drive the first gear to rotate, and the first rack 233 is mounted on the crossbeam 21 and along the first horizontal direction (i.e., Figure 3 Extending in the X direction, the clamp 22 and the second drive mechanism 24 are mounted on the translation member 231. The material handling assembly 2 also includes a first guide mechanism 25 mounted between the crossbeam 21 and the translation member 231 so that the translation member 231 can only move relative to the crossbeam 21 in the first horizontal direction.

[0077] For example, such asFigure 3 As shown, the translation component 231 is a vertically arranged translation plate. The first motor 232 is fixedly connected to the translation plate. The first rack 233 is installed on the side wall of the crossbeam 21 and extends along the X direction. The first guide mechanism 25 includes a first guide rail 251 and a first guide block 252 installed on the first guide rail 251. The first guide block 252 can only move along the length direction of the first guide rail 251. The first guide rail 251 is also installed on the side wall of the crossbeam 21 and is arranged parallel to the first rack 233. There are two first guide rails 251, which are spaced apart in the vertical direction. The first guide 233 is located between the two first guide rails 251. The first guide block 252 is fixedly connected to the side of the translation plate facing the crossbeam 21. There are also two first guide blocks 252, which are respectively installed on the two first guide rails 251. The clamp 22 and the second drive mechanism 24 are installed on the other side of the translation plate. When the clamp 22 needs to move in the X direction, the first motor 232 drives the first gear to rotate. The first gear moves along the first rack 233, which in turn drives the first motor 232, the translation plate, and the clamp 22 and the second drive mechanism 24 installed on the translation plate to move.

[0078] It should be noted that the translation component 231 is not limited to the translation plate mentioned above. For example, the translation component 231 can also be set as a mounting frame or mounting base. Such adjustments and changes to the specific structural form of the translation component 231 do not deviate from the principles and scope of this application and should be limited to the protection scope of this application.

[0079] Furthermore, it should be noted that the first guiding mechanism 25 is not limited to the above-mentioned guiding structure in which the guide rail and the guide block cooperate. For example, it can also be configured to cooperate with the guide rod and the guide block, or to cooperate with the guide groove and the guide plate, etc. Such adjustments and changes to the specific structural form of the first guiding mechanism 25 do not deviate from the principles and scope of this application and should be limited to the protection scope of this application.

[0080] Preferably, such as Figure 3 As shown, the second drive mechanism 24 includes a second motor 241 mounted on the translation member 231, a second gear (not shown) connected to the second motor 241, and a second rack (not shown) meshing with the second gear. The second motor 241 can drive the second gear to rotate. The second rack is mounted on the clamp 22 and extends in the vertical direction. The material handling assembly 2 also includes a second guide mechanism 26 installed between the translation member 231 and the clamp 22 so that the clamp 22 can only move in the vertical direction relative to the translation member 231.

[0081] Exemplarily, the second guide mechanism 26 comprises a second guide rail 261 and a second guide block 262 mounted on the second guide rail 261, the second guide block 262 is only capable of moving along the length direction of the second guide rail 261, the second guide rail 261 is mounted on the clamp 22 and arranged in parallel with the second rack, the second guide block 262 is fixedly connected with the side of the translation member 231 towards the clamp 22, when it is needed to move the clamp 22 up and down along the vertical direction, the second motor 241 drives the second gear to rotate, the second rack moves up and down along with the rotation of the second gear, and simultaneously drives the clamp 22 to move up and down.

[0082] It should be noted that the second guide mechanism 26 is not limited to the guide structure of the guide rail and the guide block as described above, for example, it can also be arranged in cooperation with a guide rod and a guide block, or arranged in cooperation with a guide groove and a guide plate, etc., and the adjustment and change of the specific structure form of the second guide mechanism 26 does not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.

[0083] Preferably, as shown in Figure 3 and Figure 4 , the clamp 22 comprises a base body 221 and a first clamping jaw 222, a second clamping jaw 223 and a third driving mechanism 224 mounted on the base body 221, the first clamping jaw 222 and the second clamping jaw 223 are distributed in the second horizontal direction (i.e. the Y direction in Figure 3 ), the second horizontal direction is perpendicular to the first horizontal direction, the third driving mechanism 224 is used to drive the first clamping jaw 222 and the second clamping jaw 223 to move relative to the base body 221 along the second horizontal direction to clamp the silicon rod 6 on the transport trolley 5, and the detection mechanism 3 is mounted on the base body 221.

[0084] Exemplarily, the base body 221 comprises a vertical part 2211 and a horizontal part 2212, the bottom end of the vertical part 2211 is fixedly connected or integrally arranged with the horizontal part 2212, the horizontal part 2212 extends along the Y direction, the second rack and the second guide rail 261 are both mounted on the vertical part 2211, the first clamping jaw 222, the second clamping jaw 223, the third driving mechanism 224 and the detection mechanism 3 are all mounted on the horizontal part 2212, when it is needed to clamp the silicon rod 6 on the transport trolley 5, the third driving mechanism 224 is driven to move the first clamping jaw 222 and the second clamping jaw 223 towards each other, i.e. to make the first clamping jaw 222 and the second clamping jaw 223 close to each other, so that the first clamping jaw 222 and the second clamping jaw 223 respectively abut against the two end faces of the silicon rod 6, thereby clamping the silicon rod 6.

[0085] It should be noted that the top surface of the silicon rod 6 to be cut is generally provided with a wafer 7, in order to avoid damage to the silicon rod 6 when the silicon rod 6 is clamped, the clamp 22 is preferably arranged to clamp the wafer 7 instead of directly contacting the silicon rod 6, that is, the first clamping jaw 222 and the second clamping jaw 223 are respectively abutted against two ends of the wafer 7.

[0086] In addition, it should be further noted that the third driving mechanism 224 can be arranged as a hydraulic driving mechanism, a pneumatic driving mechanism or a motor driving mechanism by those skilled in the art in actual application, in addition, the third driving mechanism 224 can be arranged as an integrated driving mechanism, that is, the first clamping jaw 222 and the second clamping jaw 223 can be driven to move simultaneously, or the third driving mechanism 224 can be arranged as two independent driving units to independently drive the first clamping jaw 222 and the second clamping jaw 223 to move, and the like, and such adjustment and change of the specific structure of the third driving mechanism 224 does not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.

[0087] Preferably, as shown in Figure 3 and Figure 4 , the third driving mechanism 224 of the present application comprises a third motor 2241 arranged on the base body 221 and a lead screw 2242 connected with the third motor 2241, the lead screw 2242 extends along the second horizontal direction (that is, the Y direction in Figure 3 , and the third motor 2241 is used to drive the lead screw 2242 to rotate, the first clamping jaw 222 is provided with a first threaded hole, the second clamping jaw 223 is provided with a second threaded hole, the lead screw 2242 penetrates into the first threaded hole and the second threaded hole, and the thread direction in the first threaded hole is opposite to the thread direction in the second threaded hole.

[0088] That is, the first clamping jaw 222 and the second clamping jaw 223 are respectively connected with the lead screw 2242 through the first threaded hole and the second threaded hole, which is similar to a lead screw nut mechanism, and since the thread direction in the first threaded hole is opposite to the thread direction in the second threaded hole, when the lead screw 2242 rotates, the moving directions of the first clamping jaw 222 and the second clamping jaw 223 are opposite, specifically, when the third motor 2241 drives the lead screw 2242 to rotate forward, the first clamping jaw 222 and the second clamping jaw 223 move towards each other, that is, the first clamping jaw 222 and the second clamping jaw 223 move close to each other, and when the third motor 2241 drives the lead screw 2242 to rotate reversely, the first clamping jaw 222 and the second clamping jaw 223 move away from each other, that is, the first clamping jaw 222 and the second clamping jaw 223 move away from each other.

[0089] Exemplarily, as shown in Figure 4As shown, the third motor 2241 is installed on the horizontal part 2212 of the base 221, the driving shaft of the third motor 2241 extends along the length direction of the horizontal part 2212, the lead screw 2242 also extends along the length direction of the horizontal part 2212, the third motor 2241 is drivingly connected with the lead screw 2242 through a belt transmission set, specifically, the belt transmission set includes a driving pulley installed on the driving shaft of the third motor 2241, a driven pulley installed on the lead screw 2242, and a transmission belt 2243 connecting the driving pulley and the driven pulley, the third motor 2241 drives the lead screw 2242 to rotate through the belt transmission set, the upper part of the first clamping jaw 222 has a first connecting part 2221, a first threaded hole is arranged on the first connecting part 2221, the upper part of the second clamping jaw 223 has a second connecting part 2231, a second threaded hole is arranged on the second connecting part 2231, the lead screw 2242 passes through the first threaded hole and the second threaded hole in sequence, when the third motor 2241 drives the lead screw 2242 to rotate through the belt transmission set, the first clamping jaw 222 and the second clamping jaw 223 move towards or away from each other with the rotation of the lead screw 2242.

[0090] It should be noted that the belt transmission set can be replaced by a gear transmission set, or the third motor 2241 can be directly connected with the lead screw 2242 through a speed reducer, etc. in actual application by those skilled in the art, and the adjustment and change of the specific connection form between the third motor 2241 and the lead screw 2242 do not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.

[0091] In addition, it should be further noted that the lead screw 2242 can be arranged to include a first threaded section and a second threaded section distributed along the length direction thereof in actual application by those skilled in the art, the first threaded section and the second threaded section pass into the first threaded hole and the second threaded hole respectively, the thread direction of the first threaded section is opposite to the thread direction of the second threaded section, the thread direction of the first threaded hole on the first clamping jaw 222 is the same as the thread direction of the second threaded hole on the second clamping jaw 223, in this way, when the lead screw 2242 rotates, the first clamping jaw 222 and the second clamping jaw 223 can also move towards or away from each other.

[0092] Preferably, as shown, Figures 3 to 6 The detection mechanism 3 of the present application includes a first distance sensor 31, a second distance sensor 32 and a third distance sensor 33, the first distance sensor 31 and the second distance sensor 32 are located on the same side of the width direction of the silicon rod 6 and are spaced apart along the length direction of the silicon rod 6, and the third distance sensor 33 is located on one side of the length direction of the silicon rod 6.

[0093] A crystal drag 7 is installed on the top surface of the silicon rod 6. The first distance sensor 31, the second distance sensor 32 and the third distance sensor 33 are all at the same height as the crystal drag 7. The first distance sensor 31 and the second distance sensor 32 are used to detect the distance of the side of the crystal drag 7 to determine whether the position and angle of the center line of the silicon rod 6 meet the material picking requirements. The third distance sensor 33 is used to detect the distance of the end of the crystal drag 7 to determine whether the crystal drag 7 is within the gripping range of the first gripper 222 and the second gripper 223.

[0094] For example, such as Figure 1 As shown, silicon rod 6 is along the second horizontal direction (from Figure 1 Extending from the top (Y direction), the angle of silicon rod 6 refers to the angle between the centerline of silicon rod 6 and the Y direction. If the centerline of silicon rod 6 is parallel to the Y direction, the angle of silicon rod 6 is zero. Specifically, it can be determined by the difference between the distances detected by the first distance sensor 31 and the second distance sensor 32. If the difference does not exceed the preset value, it means that the angle of silicon rod 6 is relatively small and meets the material picking requirements. If the difference exceeds the preset value, it means that the angle of silicon rod 6 is too large and is not suitable for clamping.

[0095] It should be noted that, in practical applications, those skilled in the art may also make the first distance sensor 31 and the second distance sensor 32 directly detect the distance to the side of the silicon rod 6, and the third distance sensor 33 directly detect the distance to the end face of the silicon rod 6, etc. Such flexible adjustments and changes do not deviate from the principles and scope of this application and should all be limited to the protection scope of this application.

[0096] Furthermore, it should be noted that this application does not limit the specific types of the first distance sensor 31, the second distance sensor 32, and the third distance sensor 33. For example, they can be set as laser distance sensors or radar distance sensors, etc.

[0097] This utility model also provides a cutting device, which includes the above-mentioned feeding device.

[0098] For example, in addition to the above-mentioned feeding device, the cutting equipment of this utility model also includes a wire cutting machine, wherein the wire cutting machine includes a cutting mechanism and a feeding robot. The cutting mechanism can cut the silicon rod into multiple silicon wafers. After the feeding device removes the silicon rod from the transport trolley, it docks with the feeding robot to transfer the silicon rod to the feeding robot.

[0099] Furthermore, those skilled in the art will recognize that, while certain embodiments described herein include certain features that are not included in other embodiments, combinations of features of the different embodiments are to be construed as being within the scope of the present application and forming different embodiments by themselves. For example, in the claims, any of the claimed embodiments can be used in any combination.

[0100] So far, the technical solution of the present application has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the present application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without departing from the principles of the present application, and the technical solutions after the changes or replacements will all fall within the protection scope of the present application.

Claims

1. A feeding device, characterized in that, The feeding device comprises a support member (1), a material taking assembly (2) installed on the support member (1), a detection mechanism (3) installed on the material taking assembly (2), and a positioning mechanism (4) located below the material taking assembly (2), The positioning mechanism (4) is used for positioning a transport trolley (5) for transporting silicon rods (6), the material taking assembly (2) is used for taking the silicon rods (6) on the transport trolley (5), and the detection mechanism (3) is used for detecting the positions of the silicon rods (6) on the transport trolley (5) so as to determine whether the positions of the silicon rods (6) meet the material taking requirements.

2. The feeding device according to claim 1, characterized in that The detection mechanism (3) comprises a first distance sensor (31), a second distance sensor (32) and a third distance sensor (33), the first distance sensor (31) and the second distance sensor (32) are located on the same side of the width direction of the silicon rods (6) and are spaced apart along the length direction of the silicon rods (6), and the third distance sensor (33) is located on one side of the length direction of the silicon rods (6).

3. The feeding device according to claim 1, characterized in that, The material taking assembly (2) comprises a cross beam (21) extending in a first horizontal direction, a clamp (22), a first driving mechanism (23) and a second driving mechanism (24) installed on the cross beam (21), the clamp (22) is used for clamping the silicon rods (6) on the transport trolley (5), the first driving mechanism (23) is used for driving the clamp (22) and the second driving mechanism (24) to move along the length direction of the cross beam (21), the second driving mechanism (24) is used for driving the clamp (22) to move in a vertical direction, and the detection mechanism (3) is installed on the clamp (22).

4. The feeding device according to claim 3, characterized in that The first driving mechanism (23) comprises a translation member (231), a first motor (232) installed on the translation member (231), a first gear connected with the first motor (232), and a first rack (233) engaged with the first gear, the first motor (232) can drive the first gear to rotate, the first rack (233) is installed on the cross beam (21) and extends in the first horizontal direction, the clamp (22) and the second driving mechanism (24) are installed on the translation member (231), and the material taking assembly (2) further comprises a first guide mechanism (25) installed between the cross beam (21) and the translation member (231) so that the translation member (231) can only move relative to the cross beam (21) in the first horizontal direction.

5. The feeding device according to claim 4, characterized in that The second driving mechanism (24) comprises a second motor (241) mounted on the translation member (231), a second gear connected with the second motor (241), and a second rack engaged with the second gear, the second motor (241) being capable of driving the second gear to rotate, the second rack being mounted on the clamp (22) and extending in the vertical direction, and the material taking assembly (2) further comprising a second guide mechanism (26) mounted between the translation member (231) and the clamp (22) to enable the clamp (22) to move relative to the translation member (231) only in the vertical direction.

6. The feeding device according to claim 3, wherein The clamp (22) comprises a base body (221), and a first clamping jaw (222), a second clamping jaw (223), and a third driving mechanism (224) mounted on the base body (221), the first clamping jaw (222) and the second clamping jaw (223) being spaced apart in a second horizontal direction perpendicular to the first horizontal direction, and the third driving mechanism (224) being configured to drive the first clamping jaw (222) and the second clamping jaw (223) to move relative to the base body (221) in the second horizontal direction to clamp the silicon rod (6) on the transport trolley (5), and the detection mechanism (3) being mounted on the base body (221).

7. The loading device of claim 6, wherein, The third driving mechanism (224) comprises a third motor (2241) mounted on the base body (221), and a lead screw (2242) connected with the third motor (2241), the lead screw (2242) extending in the second horizontal direction, and the third motor (2241) being configured to drive the lead screw (2242) to rotate, and the first clamping jaw (222) being provided with a first threaded hole, the second clamping jaw (223) being provided with a second threaded hole, the lead screw (2242) penetrating into the first threaded hole and the second threaded hole, and the thread direction in the first threaded hole being opposite to the thread direction in the second threaded hole; or The third driving mechanism (224) comprises a third motor (2241) mounted on the base body (221), and a lead screw (2242) connected with the third motor (2241), the lead screw (2242) extending in the second horizontal direction, and the third motor (2241) being configured to drive the lead screw (2242) to rotate, and the lead screw (2242) comprising a first threaded section and a second threaded section distributed along the length direction thereof, the first clamping jaw (222) being provided with a first threaded hole, the second clamping jaw (223) being provided with a second threaded hole, the first threaded section and the second threaded section penetrating into the first threaded hole and the second threaded hole respectively, and the thread direction of the first threaded section being opposite to the thread direction of the second threaded section.

8. The feeding device according to any one of claims 1 to 7, characterized in that, The positioning mechanism (4) comprises first positioning members (41) and second positioning members (42), the number of the first positioning members (41) is two and the first positioning members (41) are spaced apart along the Y direction, a positioning guide channel extending along the X direction is formed between the two first positioning members (41), a first end of the positioning guide channel is an entrance, the second positioning members (42) are located at a second end of the positioning guide channel, the transport trolley (5) can enter the positioning guide channel from the entrance, the second positioning members (42) are used for blocking the transport trolley (5) entering the positioning guide channel to realize positioning of the transport trolley (5) in the X direction, and the positioning guide channel is used for positioning the transport trolley (5) in the Y direction.

9. The loading device of claim 8, wherein, The first positioning members (41) are provided with guide structures (413) at positions close to the entrance, a guide opening is formed between the two guide structures (413), and the opening size of the guide opening gradually decreases in the direction in which the transport trolley (5) enters; and / or The first positioning members (41) comprise a frame body (411) and rollers (412) rotatably installed on the frame body (411), the frame body (411) extends along the X direction, the number of the rollers (412) is multiple and the rollers (412) are distributed along the length direction of the frame body (411), and the rollers (412) are in contact with the side wall of the transport trolley (5) entering the positioning guide channel.

10. A cutting apparatus characterized by, The cutting equipment comprises the feeding device according to any one of claims 1 to 9.

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