Semiconductor mask box opening device

Abstract

The utility model discloses a semiconductor mask box opening device which comprises a base, a supporting assembly, a box body adsorption fixing assembly, a rotating mechanism and an upper cover clamping mechanism, the base comprises an upper mounting table top and a lower containing space, and a plurality of through holes penetrating through the containing space are formed in the mounting table top; the supporting assembly is fixedly installed on the installation table top of the base, and a limiting area suitable for containing and limiting a box body is arranged on the supporting assembly; the box body adsorption fixing assembly is arranged in the containing space of the base, the box body adsorption fixing assembly is provided with an adsorption end, and the adsorption end of the box body adsorption fixing assembly penetrates through the through hole of the mounting table top and extends into the limiting area; and the rotating mechanism is fixedly mounted on the mounting table surface of the base. The mask box can be automatically opened and closed, pollution caused by manual operation is avoided, the hidden danger of static electricity is eliminated, and meanwhile the mask box is suitable for a box body with a rotating shaft structure.

Description

Technical Field

[0001] This utility model relates to a semiconductor mask box opening device, belonging to the field of semiconductor manufacturing technology. Background Technology

[0002] In semiconductor manufacturing processes, photomasks are an indispensable key tool in the photolithography process. During production, photomasks are usually stored in a photomask box (also known as a crystal box) for protection and transport, which effectively protects them from the influence of the external environment.

[0003] As semiconductor manufacturing processes advance to smaller nodes, the cleanliness requirements for photomasks are constantly increasing. Traditional manual opening of crystal boxes has several problems: operators are prone to introducing contaminants; static electricity may be generated during the opening process; manual operation is inefficient and poses safety hazards.

[0004] After searching the existing technology, it was found that Chinese patent CN117506819A discloses an automated opener for desktop photomask boxes. This patent uses a lifting mechanism to lift the lid of the photomask box. However, this device is only applicable to box structures that open and close from top to bottom and cannot be applied to boxes with a rotating shaft structure, so its scope of application is limited. Summary of the Invention

[0005] The technical problem to be solved by this utility model is to overcome the defects of the prior art and provide a semiconductor mask box opening device that can realize the automatic opening and closing of the mask box, avoid the pollution caused by manual operation, eliminate the hidden danger of static electricity, and is also suitable for boxes with a rotating shaft structure.

[0006] To solve the above-mentioned technical problems, the technical solution of this utility model is: a semiconductor mask box opening device, comprising:

[0007] The base includes an upper mounting surface and a lower receiving space, and the mounting surface is provided with a plurality of through holes extending into the receiving space;

[0008] A support assembly is fixedly mounted on the mounting platform of the base, and the support assembly is provided with a limiting area suitable for placing and limiting the box body;

[0009] A box-body adsorption and fixing assembly is disposed within the accommodating space of the base. The box-body adsorption and fixing assembly is provided with an adsorption end, which passes through the through hole of the mounting platform and extends into the limiting area.

[0010] A rotating mechanism is fixedly installed on the mounting platform of the base. The rotating mechanism is provided with a swinging rotating end, which has a starting position and an opening position. The swinging rotating end is adapted to swing back and forth between the starting position and the opening position.

[0011] A top cover clamping mechanism is installed on the swinging rotating end of the rotating mechanism. The top cover clamping mechanism is adapted to clamp the top cover of the box body when the swinging rotating end of the rotating mechanism is in the starting position, and rotate to the opening position under the drive of the rotating mechanism to open the box body.

[0012] Furthermore, a specific structure of a rotating mechanism is provided, the rotating mechanism comprising:

[0013] A base, which is fixedly mounted on the mounting platform of the base;

[0014] A rotary drive source, which is fixedly mounted on the base, is provided with a rotary drive end;

[0015] A rotating swing arm, one end of which is fixedly connected to the rotating drive end of the rotating drive source, and the other end of which is a swinging rotating end. The rotating swing arm is adapted to swing back and forth between a starting position in a horizontal state and an opening position in a vertical state under the drive of the rotating drive source.

[0016] Furthermore, a specific type of rotary drive source is provided, wherein the rotary drive source is an electric motor.

[0017] Furthermore, a specific structure for a cover clamping mechanism is provided, the cover clamping mechanism comprising:

[0018] A horizontal plate, which is fixedly installed on the swinging rotating end of the rotating mechanism;

[0019] A guide rail is mounted on the horizontal plate along the length of the horizontal plate;

[0020] A pair of clamping mechanisms are disposed at both ends of the horizontal plate along its length, each clamping mechanism comprising:

[0021] A telescopic drive source fixing base is mounted on the horizontal plate;

[0022] A telescopic drive source, wherein the telescopic drive source is fixedly installed on the telescopic drive source mounting base, and the telescopic drive source is provided with a telescopic rod that reciprocates in the horizontal direction;

[0023] A clamping plate is slidably connected to the guide rail via a slider, and the clamping plate is fixedly connected to the telescopic rod of the telescopic drive source.

[0024] Furthermore, a specific type of telescopic drive source is provided, wherein the telescopic drive source is a pen-shaped cylinder.

[0025] Furthermore, a specific structure for a box-type adsorption and fixation assembly is provided, the box-type adsorption and fixation assembly comprising:

[0026] A fixing frame is fixedly installed in the receiving space of the base, and the fixing frame is provided with a plurality of mounting holes corresponding to the through holes of the mounting platform;

[0027] Multiple vacuum suction cups are arranged in an array and installed on the mounting holes of the fixing frame. Each vacuum suction cup is provided with a negative pressure port, which is an adsorption end. The adsorption end passes through the through hole of the mounting platform and extends into the limiting area.

[0028] Furthermore, a specific structure for a support component is provided, the support component comprising:

[0029] Four support blocks are rectangular and fixedly installed on the mounting platform of the base. The upper surface of each support block is provided with a stepped groove. The stepped grooves of the four support blocks together enclose a limiting area suitable for supporting and positioning the box.

[0030] Furthermore, the semiconductor mask box opening device also includes an unlocking mechanism, which includes:

[0031] A linear guide rail is fixedly installed within the receiving space of the base, and the linear guide rail is arranged in a horizontal direction;

[0032] A pair of latching drive assemblies, the latching drive assembly comprising:

[0033] A fixed base is fixedly installed at the end of the linear guide rail;

[0034] A rotary drive component is fixedly mounted on the fixed base, and the rotary drive component is provided with a rotary output shaft;

[0035] A lead screw, one end of which is coaxially and fixedly connected to the rotary output shaft of the rotary drive component;

[0036] A nut seat is slidably connected to the linear guide rail via a slider, and the nut seat is threadedly connected to the lead screw;

[0037] A toggle block is fixedly mounted on the nut seat. The toggle block has an action end that extends through the through hole of the base to the mounting platform.

[0038] The rotary drive component is adapted to drive the lead screw to rotate, thereby causing the nut seat and the actuating block on it to reciprocate along the linear guide rail.

[0039] Furthermore, a specific type of rotary drive is provided, wherein the rotary drive is a rotary motor.

[0040] Furthermore, the semiconductor mask box opening device also includes a mask box in-situ detection sensor, which is fixedly installed in the receiving space of the base, and the detection end of the mask box in-situ detection sensor passes through the through hole of the base and faces the mounting platform.

[0041] By adopting the above technical solution, this utility model has the following beneficial effects:

[0042] In this invention, during operation, the mask box is placed within the limiting area of ​​the support assembly. The vacuum suction cup of the box body adsorption and fixing assembly extends through the through hole of the mounting platform and adsorbs and fixes the box body, ensuring stability during the opening process. Subsequently, the rotating mechanism drives the rotating arm to swing through the rotation drive source, causing the upper cover clamping mechanism to clamp the upper cover of the box body. As the arm rotates, it swings from the starting position to the open position, thereby opening the upper cover of the box body. This achieves stable opening of the mask box, avoiding the instability of manual operation and improving the reliability and efficiency of opening the box.

[0043] Furthermore, the top cover clamping mechanism uses guide rails and a pen-shaped cylinder to drive the clamping plate, ensuring a smooth and controllable clamping process and guaranteeing reliable clamping and smooth opening of the mask box top cover. The box body adsorption and fixing assembly provides uniform adsorption force through an array of vacuum suction cups, preventing displacement of the box body during opening. Additionally, the support assembly uses four support blocks with stepped grooves to restrict and position the box body. A mask box in-place detection sensor is used to detect whether the box body is correctly placed, preventing misoperation.

[0044] In summary, this invention achieves stable and efficient mask box opening. It reduces manual intervention, improves the automation level of mask box opening, and enhances production efficiency and reliability in the semiconductor manufacturing process. Attached Figure Description

[0045] Figure 1 This is a three-dimensional structural diagram of the semiconductor mask box opening device of this utility model. Figure 1 ;

[0046] Figure 2 This is a three-dimensional structural diagram of the semiconductor mask box opening device of this utility model. Figure 2 ;

[0047] Figure 3 This is a three-dimensional structural diagram of the semiconductor mask box opening device of this utility model. Figure 3 ;

[0048] Figure 4 This is a three-dimensional structural diagram of the rotating mechanism of the semiconductor mask box opening device of this utility model;

[0049] Figure 5 This is a three-dimensional structural diagram of the upper cover clamping mechanism of the semiconductor mask box opening device of this utility model;

[0050] Figure 6 This is a three-dimensional structural diagram of the unlocking mechanism of the semiconductor mask box opening device of this utility model;

[0051] Figure 7 This is a three-dimensional structural diagram of the box body adsorption and fixing component of the semiconductor mask box opening device of this utility model. Detailed Implementation

[0052] To make the contents of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0053] like Figure 1-7 As shown, a semiconductor mask box opening device includes:

[0054] The base 1 includes an upper mounting platform and a lower receiving space. The mounting platform is provided with multiple through holes that extend into the receiving space.

[0055] The support assembly is fixedly installed on the mounting platform of the base 1, and the support assembly is provided with a limiting area suitable for placing and limiting the box body;

[0056] The box body adsorption and fixing component is set in the accommodating space of the base 1. The box body adsorption and fixing component is provided with an adsorption end. The adsorption end of the box body adsorption and fixing component passes through the through hole of the mounting platform and extends into the limiting area.

[0057] The rotating mechanism is fixedly installed on the mounting platform of the base 1. The rotating mechanism is provided with a swinging rotating end, which has a starting position and an opening position. The swinging rotating end is adapted to swing back and forth between the starting position and the opening position.

[0058] The top cover clamping mechanism is installed on the swinging rotating end of the rotating mechanism. The top cover clamping mechanism is adapted to clamp the top cover of the box when the swinging rotating end of the rotating mechanism is in the starting position, and rotate to the opening position under the drive of the rotating mechanism to open the box.

[0059] In this embodiment, as Figure 4 and Figure 7As shown, during operation, the mask box is placed within the limiting area of ​​the support assembly. The vacuum suction cup 21 of the box body adsorption and fixing assembly extends through the through hole of the mounting platform and adsorbs and fixes the box body to ensure that the box body remains stable during the opening process. Subsequently, the rotation mechanism drives the rotating swing arm 7 to swing through the rotation drive source 6, so that the clamping plate 10 of the upper cover clamping mechanism clamps the upper cover of the box body and swings from the starting position to the opening position as the swing arm 7 rotates, thereby realizing the opening of the upper cover of the box body. This achieves stable opening operation of the mask box, avoids the instability of manual operation, and improves the reliability and efficiency of opening the box.

[0060] Specifically, such as Figure 1-4 As shown, the rotating mechanism includes:

[0061] Base 5 is fixedly installed on the mounting platform of base 1;

[0062] Rotary drive source 6 is fixedly mounted on base 5 and has a rotary drive end.

[0063] The rotating arm 7 has one end fixedly connected to the rotating drive end of the rotating drive source 6, and the other end of the rotating arm 7 is a swinging rotating end. The rotating arm 7 is adapted to swing back and forth between the starting position in the horizontal state and the opening position in the vertical state under the drive of the rotating drive source 6.

[0064] Specifically, such as Figure 4 As shown, the rotary drive source 6 is a motor.

[0065] In this embodiment, as Figure 1-5 As shown, the rotation axis of the rotary drive end of the rotary drive source 6 is collinear with the rotation axis of the box body placed in the limiting area. The base 5 is fixed to the mounting platform of the base 1 by bolts, and the base 5 has a horizontal through hole. The rotary drive end of the rotary drive source 6 passes through the horizontal through hole of the base 5. The rotary swing arm 7 is L-shaped, with one end fixedly connected to the rotary drive end of the rotary drive source 6, and the other end provided with a clamping mechanism for mounting the top cover.

[0066] During operation, the rotary drive source 6 starts and drives the rotary swing arm 7 to rotate around its axis. When the rotary swing arm 7 is in a horizontal position, it is in the initial position, at which point the upper cover clamping mechanism clamps the mask box upper cover via the clamping plate 10. The rotary drive source 6 continues to rotate, causing the rotary swing arm 7 to swing upwards until it reaches the vertical open position, at which point the mask box upper cover opens. When it is necessary to close the mask box, the rotary drive source 6 rotates in the opposite direction, causing the rotary swing arm 7 to return from the open position to the initial position.

[0067] The rotary drive source 6 can use a motor with an encoder.

[0068] Specifically, such as Figure 5As shown, the top cover clamping mechanism includes:

[0069] A horizontal plate 11 is fixedly installed on the swinging rotating end of the rotating mechanism;

[0070] Guide rail 12 is installed on the horizontal plate 11 along the length of the horizontal plate 11;

[0071] A pair of clamping mechanisms are disposed at both ends of the horizontal plate 11 along its length, and each clamping mechanism includes:

[0072] Telescopic drive source fixing base 9 is installed on the horizontal plate 11;

[0073] Telescopic drive source 8 is fixedly installed on telescopic drive source mounting base 9. The telescopic drive source 8 is provided with a telescopic rod that reciprocates in the horizontal direction.

[0074] The clamping plate 10 is slidably connected to the guide rail 12 via a slider, and the clamping plate 10 is fixedly connected to the telescopic rod of the telescopic drive source 8.

[0075] Specifically, such as Figure 5 As shown, the telescopic drive source 8 is a pen-shaped cylinder.

[0076] In this embodiment, as Figure 4-5 As shown, one end of the horizontal plate 11 is fixedly mounted on the swinging end of the rotating arm 7 by bolts. The guide rail 12 is a linear guide rail, which is mounted on the upper surface of the horizontal plate 11 along its length by bolts. A pair of clamping mechanisms are respectively mounted at both ends of the horizontal plate 11 along its length to clamp the two sides of the mask box cover. The telescopic drive source fixing seat 9 is fixed to the horizontal plate 11 by bolts, and the telescopic drive source 8 is fixed to the telescopic drive source fixing seat 9 by bolts. The telescopic rod of the telescopic drive source 8 is set in the horizontal direction.

[0077] During operation, the telescopic rods of the telescopic drive source 8 at both ends of the horizontal plate 11 extend, driving the clamping plate 10, which is fixedly connected to it, to slide inward along the guide rail 12. The clamping plate 10 is provided with a clamping surface that mates with the mask box cover. When both clamping plates 10 move inward simultaneously, their clamping surfaces contact and clamp the sides of the mask box cover. When it is necessary to release the mask box cover, the telescopic drive source 8 drives the clamping plate 10 to slide outward along the guide rail 12, causing the clamping plate 10 to separate from the mask box cover.

[0078] The pen-shaped cylinder 8 is a compact pneumatic actuator, with a slender, pen-like shape. It drives a piston to perform linear reciprocating motion using compressed air.

[0079] In some embodiments, rubber pads may be installed on the contact surfaces of the clamping plate 10 to increase friction with the top cover. The clamping plate 10 includes a left clamping plate and a right clamping plate 13.

[0080] Specifically, such as Figure 7 As shown, the box adsorption and fixing assembly includes:

[0081] The fixing bracket 20 is fixedly installed in the receiving space of the base 1. The fixing bracket has four mounting holes corresponding to the through holes of the mounting platform.

[0082] Four vacuum suction cups 21 are arranged in an array and installed on the mounting holes of the fixing frame 20. Each vacuum suction cup 21 has a negative pressure port, which is the adsorption end. The adsorption end passes through the through hole of the mounting platform and extends into the limiting area.

[0083] In this embodiment, as Figure 7 As shown, the mounting bracket 20 is fixedly installed in the receiving space of the base 1 by bolts. The mounting bracket 20 has a plate-like structure with three fixing holes in the middle. Screws pass through these fixing holes and the base 1 to fix the mounting bracket 20 to the base 1. The vacuum suction cup 21 is provided with mounting studs. The mounting studs pass through the mounting holes and are then set with nuts to fix the vacuum suction cup 21. The suction end of the vacuum suction cup 21 passes through the through hole of the mounting platform and extends upward into the limiting area.

[0084] During operation, four vacuum suction cups 21 generate negative pressure through an external vacuum system. When the mask box is placed within the limiting area, the suction end of the vacuum suction cup 21 contacts the bottom of the mask box, and the mask box is adsorbed and fixed under the action of negative pressure. The negative pressure of the vacuum suction cups 21 is provided by a vacuum pump, which is connected to the negative pressure port of the vacuum suction cup 21 through a vacuum pipeline. Each vacuum suction cup 21 has an independent control valve for controlling the start and stop of the vacuum suction cup 21.

[0085] Specifically, such as Figure 1-3 As shown, the supporting components include:

[0086] Four support blocks are rectangular and fixedly installed on the mounting platform of the base 1. The upper surface of the support blocks is provided with stepped grooves. The stepped grooves of the four support blocks together enclose a limiting area suitable for supporting and positioning the box.

[0087] In this embodiment, as Figure 1-3 As shown, four support blocks are fixedly installed on the four sides of the mounting platform of the base 1 by bolts. Each support block has a cuboid structure. The stepped grooves of the four support blocks are arranged facing the center, forming a rectangular limiting area. The size of the limiting area matches the bottom outer contour of the mask box. The four support blocks are divided into two types, including long support block 2 and short support block 3.

[0088] During operation, the mask box is placed within the limiting area formed by four support blocks, with the bottom edge of the mask box overlapping the stepped grooves of the support blocks. This prevents the mask box from shifting during opening. The installation position of the support blocks can be adjusted according to the size of the mask box to accommodate the placement requirements of mask boxes of different sizes.

[0089] Specifically, such as Figure 1-3 and Figure 6 As shown, the semiconductor mask box opening device also includes an unlocking mechanism, which includes:

[0090] Linear guide 17 is fixedly installed in the receiving space of base 1, and linear guide 17 is arranged in the horizontal direction.

[0091] A pair of latch drive assemblies, the latch drive assemblies including:

[0092] The fixed base 15 is fixedly installed at the end of the linear guide rail 17;

[0093] Rotary drive component 14 is fixedly mounted on fixed base 15, and rotary drive component 14 is provided with a rotary output shaft;

[0094] The lead screw has one end fixedly connected coaxially to the rotary output shaft of the rotary drive component 14;

[0095] Nut seat 19 is slidably connected to linear guide rail 17 via slider, and nut seat 19 is threadedly connected to lead screw.

[0096] A toggle block 16 is fixedly installed on a nut seat 19. The toggle block 16 has an action end that extends through the through hole of the base 1 to the mounting surface.

[0097] The rotary drive component 14 is adapted to drive the lead screw to rotate, thereby causing the nut seat 19 and the actuating block 16 on it to reciprocate along the linear guide rail 17.

[0098] Specifically, such as Figure 6 As shown, the rotary drive component 14 is a rotary motor.

[0099] In this embodiment, as Figure 1-3 and Figure 6 As shown, the linear guide rail 17 is fixedly mounted in the receiving space of the base 1 by bolts. A pair of latch drive assemblies are arranged on both sides of the linear guide rail 17 for simultaneously driving the latches on both sides of the mask box. The actuating block 16 includes a left actuating block and a right actuating block 18.

[0100] During operation, the rotary drive 14 activates, causing the lead screw to rotate. The lead screw and nut seat 19 convert the rotational motion into linear motion. The nut seat 19 is slidably connected to the linear guide rail 17 via a slider, and reciprocates along the linear guide rail 17 under the drive of the lead screw. The actuating block 16 is fixed to the nut seat 19, and its actuating end extends through the through hole of the base 1 to the mounting surface, used to trigger the locking mechanism of the mask box. When the actuating block 16 moves, its actuating end contacts the lock of the mask box and moves it to the unlocked position.

[0101] Specifically, such as Figure 1-3 As shown, the semiconductor mask box opening device also includes a mask box in-situ detection sensor 4, which is fixedly installed in the receiving space of the base 1. The detection end of the mask box in-situ detection sensor 4 passes through the through hole of the base 1 and faces the mounting surface.

[0102] In this embodiment, as Figure 1-7 As shown, the mask box presence detection sensor 4 can be a photoelectric sensor, with its detection end maintained at a certain distance from the bottom of the mask box. When the detection end extends through the through hole on the base 1, it is flush with the mounting surface to avoid interfering with the placement of the mask box. The semiconductor mask box opening device also includes a PLC, and the mask box presence detection sensor 4 is electrically connected to the PLC.

[0103] The working process of the semiconductor mask box opening device includes the following steps:

[0104] First, the mask box is placed in the limiting area of ​​the support component in the correct direction. After the mask box is detected by the in-place detection sensor 4, it sends an in-place signal. The PLC receives the in-place signal sent by the mask box in-place detection sensor 4. Then, the PLC controls the four vacuum suction cups 21 of the box adsorption and fixing component to adsorb and fix the bottom of the mask box.

[0105] Next, the unlocking mechanism located at the mask box latch is activated. The rotation drive component 14 of a pair of latch drive assemblies drives the lead screw to rotate, causing the actuating block 16 to move along the linear guide rail 17, thus opening the latch of the mask box. The rotation drive source 6 of the rotation mechanism drives the rotating swing arm 7 to rotate to the designated position, and the telescopic drive source 8 of the upper cover clamping mechanism drives the clamping plate 10 to align with the upper cover of the mask box and clamp it.

[0106] Then, the rotary drive source 6 continues to drive the rotary swing arm 7 to rotate to the open position, which in turn drives the upper cover clamping mechanism to open the upper cover of the mask box to a vertical position. After the robot on the production line takes out or puts the mask sheet into the mask box, the rotary drive source 6 rotates in the opposite direction, causing the rotary swing arm 7 to return to the starting position.

[0107] Finally, the telescopic drive source 8 drives the clamping plate 10 to release the mask box cover, and the toggle block 16 of the unlocking mechanism moves to the latch closed position, releasing the vacuum suction cup 21 of the box body adsorption fixing component. The rotation drive source 6 then drives the rotating arm 7 to rotate to the open position, at which point the completed mask box can be removed.

[0108] The specific embodiments described above further illustrate the technical problems, technical solutions, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A semiconductor mask box opening device, characterized in that, include: The base (1) includes an upper mounting surface and a lower receiving space, and the mounting surface is provided with a plurality of through holes extending into the receiving space; A support assembly is fixedly installed on the mounting platform of the base (1), and the support assembly is provided with a limiting area suitable for placing and limiting the box body; The box body adsorption and fixing assembly is disposed in the accommodating space of the base (1). The box body adsorption and fixing assembly is provided with an adsorption end. The adsorption end of the box body adsorption and fixing assembly passes through the through hole of the mounting platform and extends into the limiting area. A rotating mechanism is fixedly installed on the mounting platform of the base (1). The rotating mechanism is provided with a swinging rotating end, which is provided with a starting position and an opening position. The swinging rotating end is adapted to swing back and forth between the starting position and the opening position. A top cover clamping mechanism is installed on the swinging rotating end of the rotating mechanism. The top cover clamping mechanism is adapted to clamp the top cover of the box body when the swinging rotating end of the rotating mechanism is in the starting position, and rotate to the opening position under the drive of the rotating mechanism to open the box body.

2. The semiconductor mask box opening device according to claim 1, characterized in that, The rotating mechanism includes: The base (5) is fixedly installed on the mounting platform of the base (1); A rotary drive source (6) is fixedly mounted on the base (5), and the rotary drive source (6) is provided with a rotary drive end; A rotating swing arm (7) is provided. One end of the rotating swing arm (7) is fixedly connected to the rotating drive end of the rotating drive source (6). The other end of the rotating swing arm (7) is a swinging rotation end. The rotating swing arm (7) is adapted to swing back and forth between the starting position in the horizontal state and the opening position in the vertical state under the drive of the rotating drive source (6).

3. The semiconductor mask box opening device according to claim 2, characterized in that, The rotary drive source (6) is a motor.

4. The semiconductor mask box opening device according to claim 1, characterized in that, The upper cover clamping mechanism includes: A horizontal plate (11) is fixedly installed on the swinging rotating end of the rotating mechanism; A guide rail (12) is mounted on the horizontal plate (11) along the length direction of the horizontal plate (11); A pair of clamping mechanisms are disposed at both ends of the horizontal plate (11) along its length, each clamping mechanism comprising: Telescopic drive source fixing seat (9), the telescopic drive source fixing seat (9) is installed on the horizontal plate (11); Telescopic drive source (8), the telescopic drive source (8) is fixedly installed on the telescopic drive source mounting base (9), the telescopic drive source (8) is provided with a telescopic rod that reciprocates in the horizontal direction; The clamping plate (10) is slidably connected to the guide rail (12) via a slider, and the clamping plate (10) is fixedly connected to the telescopic rod of the telescopic drive source (8).

5. The semiconductor mask box opening device according to claim 4, characterized in that, The telescopic drive source (8) is a pen-shaped cylinder.

6. The semiconductor mask box opening device according to claim 1, characterized in that, The box-body adsorption and fixation assembly includes: A fixing frame (20) is fixedly installed in the accommodating space of the base (1), and the fixing frame is provided with a plurality of mounting holes corresponding to the through holes of the mounting platform; Multiple vacuum suction cups (21) are arranged in an array and installed on the mounting holes of the fixing frame (20). Each vacuum suction cup (21) is provided with a negative pressure port, which is an adsorption end. The adsorption end passes through the through hole of the mounting platform and extends into the limiting area.

7. The semiconductor mask box opening device according to claim 1, characterized in that, The support components include: Four support blocks are fixedly mounted on the mounting platform of the base (1) in a rectangular shape. The upper surface of the support blocks is provided with stepped grooves. The stepped grooves of the four support blocks together enclose a limiting area suitable for bearing and positioning the box.

8. The semiconductor mask box opening device according to claim 1, characterized in that, It also includes an unlocking mechanism, which comprises: Linear guide (17), the linear guide (17) is fixedly installed in the receiving space of the base (1), and the linear guide (17) is arranged in the horizontal direction; A pair of latching drive assemblies, the latching drive assembly comprising: A fixed base (15) is fixedly installed at the end of the linear guide rail (17); A rotary drive (14) is fixedly mounted on the fixed base (15), and the rotary drive (14) is provided with a rotary output shaft; A lead screw, one end of which is coaxially and fixedly connected to the rotary output shaft of the rotary drive (14); Nut seat (19), the nut seat (19) is slidably connected to the linear guide rail (17) by a slider, and the nut seat (19) is threadedly connected to the lead screw; A toggle block (16) is fixedly installed on the nut seat (19). The toggle block (16) has an action end that extends through the through hole of the base (1) to the mounting surface. The rotary drive (14) is adapted to drive the lead screw to rotate, thereby causing the nut seat (19) and the actuating block (16) on it to reciprocate along the linear guide (17).

9. The semiconductor mask box opening device according to claim 8, characterized in that, The rotary drive component (14) is a rotary motor.

10. The semiconductor mask box opening device according to claim 1, characterized in that, It also includes a mask box in-situ detection sensor (4), which is fixedly installed in the accommodating space of the base (1), and the detection end of the mask box in-situ detection sensor (4) passes through the through hole of the base (1) and faces the mounting surface.

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