Sample fixing workpiece rack for vacuum magnetron sputtering coating machine

Abstract

The utility model discloses a sample fixing workpiece frame for a vacuum magnetron sputtering coating machine. The elastic check ring or the spring buckle is matched with the fixed net disc to fix the sample, so that the number of the sample in one experiment can be increased, and the to-be-coated surface of the sample can be fixed without blocking.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of sample fixed workpiece racks for vacuum magnetron sputtering coating machine. BACKGROUND

[0002] When using vacuum magnetron sputtering coating machine to carry out experimental sample coating, the experimental sample needs to be placed on the sample disc, and then the sample is clamped with a tablet press. On the one hand, the tablet press occupies part of the area of the sample disc, resulting in a limited number of samples that can be coated in one experiment. On the other hand, the tablet press will occupy part of the surface of the sample, causing gaps in the coating on the sample. SUMMARY

[0003] The utility model provides a kind of sample fixed workpiece racks for vacuum magnetron sputtering coating machine, which improves the number of samples in one experiment and ensures the integrity of the coating on the sample surface.

[0004] The first type of technical solution of the utility model is as follows: a sample fixed workpiece rack for a vacuum magnetron sputtering coating machine, comprising: a bottom plate, a fixed net disc, a plurality of elastic stop rings, and a plurality of screws.

[0005] The bottom plate is flat, with a plurality of assembly holes on it, and is arranged on the sample disc of the vacuum magnetron sputtering coating machine.

[0006] The fixed net disc is flat, with a plurality of assembly holes and a plurality of sample holes on it, and the sample holes are used to place samples.

[0007] The plurality of elastic stop rings are closed rings or rings with notches.

[0008] The assembly holes on the bottom plate and the assembly holes on the fixed net disc are arranged one-to-one. The elastic stop rings and the sample holes are arranged one-to-one, the elastic stop rings are located between the bottom plate and the fixed net disc, the elastic stop rings surround and clamp the samples, and the elastic stop rings surround and exceed the corresponding sample holes in the outer contour of the orthographic projection of the fixed net disc.

[0009] The plurality of screws and the assembly holes on the fixed net disc are arranged one-to-one, the screws pass through the corresponding assembly holes on the fixed net disc and the corresponding assembly holes on the bottom plate, the free end of the screw is screwed into the threaded hole or threaded groove on the sample disc, and the tail of the screw presses the fixed net disc so that the fixed net disc is in extrusion contact with the elastic stop rings and the elastic stop rings are in extrusion contact with the bottom plate.

[0010] The bottom plate, the fixing net plate, the plurality of elastic stop rings and the plurality of screws are initially in a separated part state. In use, the elastic stop ring is sleeved on one end of a sample (for example, a cylindrical, cubic or any required shape), the other end of the sample is inserted into a sample hole of the fixing net plate, the bottom plate is placed on a sample plate of a vacuum magnetron sputtering coating machine, and then the elastic stop ring, the sample and the fixing net plate are placed on the bottom plate. The assembly holes on the bottom plate and the fixing net plate are opposite to the threaded holes or threaded grooves on the sample plate (the sample plate is usually provided with threaded holes or threaded grooves). The screws are inserted into the threaded holes or threaded grooves on the sample plate through the fixing net plate and the bottom plate, and the tails of the screws press against the fixing net plate, so that the sample, the fixing net plate and the bottom plate are fixed.

[0011] Since the sample is fastened by the elastic stop ring, the surface of the sample opposite to the sample plate is not shielded, so that the sample surface coating is complete.

[0012] Further, the distribution density of the sample is determined by the density of the sample holes. Since there is a spacing between the sample holes, the outer contour of the elastic stop ring only needs to fall into the gap between adjacent sample holes. The elastic stop ring does not affect the distribution density of the sample, and the sample holes can be closely arranged, so that the number of samples in one experiment can be as large as possible.

[0013] The assembly holes can be distributed in the middle or the edge of the fixing net plate, and the position and the number thereof can be flexibly set according to the number and distribution of the threaded holes or threaded grooves on the sample plate of the vacuum magnetron sputtering coating machine.

[0014] In some embodiments, the outer contour shapes of the bottom plate and the fixing net plate are the same and the sizes thereof are equal. In this way, the shape of the sample fixing workpiece frame is more regular.

[0015] In some embodiments, the bottom plate is circular or regular polygonal, and the fixing net plate is circular or regular polygonal. In this way, the shape of the sample fixing workpiece frame is more matched with the shape of the sample plate.

[0016] In some embodiments, the center distance between two adjacent sample holes is greater than twice the outer ring radius of the elastic stop ring and less than three times the outer ring radius of the elastic stop ring. The size of the specific elastic stop ring refers to the size of the elastic stop ring in a natural state. In this way, the number of sample holes is as large as possible.

[0017] In some embodiments, the sample holes are arranged in concentric circles. The environment of the sample holes located on the same circle is closer, and the obtained coating effect is also closer, which is more conducive to analyzing the coating effect.

[0018] In some embodiments, the sample holes are arranged in a rectangular array. In this way, the density of the sample holes is larger.

[0019] The material of the fixed net disc and the base plate can be selected from stainless steel, high-temperature-resistant polytetrafluoroethylene (PTFE), polyether ether ketone (PEEK), or polyimide (PI).

[0020] The elastic stop ring can be made of stainless steel or rubber material.

[0021] The sample fixing workpiece frame is suitable for samples with a thickness of greater than or equal to 2 mm.

[0022] The second type of technical solution of the utility model is as follows: a sample fixing workpiece frame for a vacuum magnetron sputtering coating machine, comprising: a fixed net disc, a plurality of screws, and a plurality of elastic stop rings.

[0023] The fixed net disc is in a flat plate shape, a plurality of assembly holes and a plurality of sample holes are formed in the fixed net disc, and the sample holes are used to place samples.

[0024] The elastic stop ring is in a closed ring shape or a ring shape with a notch.

[0025] Each sample hole corresponds to two elastic stop rings, and the two elastic stop rings are arranged at two openings of the corresponding sample hole to clamp the fixed net disc, the elastic stop ring surrounds and clamps the sample, and the elastic stop ring surrounds and exceeds the corresponding sample hole in the outer contour of the orthographic projection of the fixed net disc.

[0026] The screws pass through the assembly holes on the fixed net disc one by one, the free end of the screw is screwed into the threaded groove or threaded hole on the sample disc of the vacuum magnetron sputtering coating machine, and the tail of the screw presses the fixed net disc.

[0027] The fixed net disc, the plurality of screws, and the plurality of elastic stop rings are initially in a dispersed part state. In use, the sample is passed through the sample hole on the fixed net disc, the elastic stop ring is sleeved on the outer circumferential surface of the sample and abuts against the upper and lower surfaces of the fixed net disc. The lower surface of the sample is placed on the sample disc, the screw passes through the assembly hole on the fixed net disc, the free end of the screw is screwed into the threaded hole or threaded groove on the sample disc, and the tail of the screw presses the upper surface of the fixed net disc. Thus, the sample and the fixed net disc are fixed.

[0028] Since the sample is fastened by the elastic stop ring, the surface of the sample opposite to the sample disc is not blocked, which makes the sample surface coating complete.

[0029] Further, the distribution density of the sample is determined by the density of the sample hole. Since there must be a gap between the sample holes, the outer contour of the elastic stop ring only needs to fall into the gap between the adjacent sample holes. The elastic stop ring does not affect the distribution density of the sample, and the sample holes can be closely arranged, so that the number of samples in one experiment can be as large as possible.

[0030] The assembly holes can be distributed in the middle or the edge of the fixed net disc, and the positions and the number thereof can be flexibly set.

[0031] In some embodiments, the center distance between two adjacent sample holes is greater than twice the outer radius of the elastic stop ring and less than three times the outer radius of the elastic stop ring. The size of the specific elastic stop ring refers to the size of the elastic stop ring in the natural state. In this way, the number of sample holes is as large as possible.

[0032] In some embodiments, the fixed net disc is circular or regular polygonal. In this way, the shape of the sample fixing workpiece frame is more matched with the shape of the sample disc.

[0033] In some embodiments, the sample holes are arranged in concentric circles. The environment of the sample holes located on the same circle is more similar, and the obtained film coating effect is also more similar, which is more conducive to analyzing the film coating effect.

[0034] In some embodiments, the sample holes are arranged in a rectangular array. In this way, the density of the sample holes is higher.

[0035] Since the height of the fixed net disc can be flexibly adjusted (as long as the threads of the screw can be screwed into the threaded holes or threaded grooves of the sample disc), the fixed net disc can be fixed at the middle height or the bottom of the sample.

[0036] The material of the fixed net disc can be stainless steel, high-temperature-resistant polytetrafluoroethylene (PTFE), polyether ether ketone (PEEK), or polyimide (PI).

[0037] The elastic stop ring can be made of stainless steel or rubber material.

[0038] The third type of technical solution of the utility model is as follows: a sample fixing workpiece frame for a vacuum magnetron sputtering film coating machine, comprising: two fixed net discs, a plurality of elastic stop rings, a plurality of screws, and a plurality of nuts.

[0039] The two fixed net discs are both flat, and a plurality of assembly holes and a plurality of sample holes are formed in each of the two fixed net discs, the sample holes are used for placing samples, the assembly holes of the two fixed net discs are one-to-one correspondingly arranged, and the sample holes of the two fixed net discs are one-to-one correspondingly arranged.

[0040] The plurality of elastic stop rings are in the shape of a closed ring or a ring with a notch, and the plurality of elastic stop rings are one-to-one correspondingly arranged with the sample holes of the fixed net disc.

[0041] The elastic stop ring surrounds and clamps the sample in the corresponding sample hole, the elastic stop ring is located between the two fixed net discs, and the elastic stop ring surrounds and exceeds the corresponding sample hole in the outer contour of the orthogonal projection of the fixed net disc.

[0042] The nut is arranged in one-to-one correspondence with the screw, the plurality of screws are arranged in one-to-one correspondence with the plurality of assembly holes on any one fixing net disc, the screw passes through the corresponding assembly hole, the free end of the screw is screwed into the threaded hole or threaded groove on the sample disc of the vacuum magnetron sputtering coating machine, the nut surrounds the corresponding screw and is located between the lower fixing net disc and the sample disc, and the tail of the screw presses the upper fixing net disc so that the upper fixing net disc, the elastic stop ring and the lower fixing net disc, and the lower fixing net disc and the nut are in close contact.

[0043] The two fixing net discs, the plurality of elastic stop rings, the plurality of screws and the plurality of nuts are initially in a dispersed part state. In use, the elastic stop ring is sleeved on the sample, the two fixing net discs are sleeved on the sample from the upper and lower ends of the sample respectively, the lower fixing net disc is raised by the nut, the nut is placed on the sample disc in correspondence with the assembly hole on the fixing net disc, and the screw is used to pass through the assembly holes of the two fixing net discs and pass through the nut and then be screwed into the threaded hole or threaded groove on the sample disc. The tail of the screw presses the uppermost fixing net disc, thereby fixing the sample and the fixing net disc.

[0044] Since the sample is fastened by the elastic stop ring, the surface of the sample opposite to the sample disc is not blocked, which makes the coating of the sample surface complete.

[0045] Further, the distribution density of the sample is determined by the density of the sample hole. Since there must be a gap between the sample holes, the outer contour of the elastic stop ring only needs to fall into the gap between the adjacent sample holes. The elastic stop ring does not affect the distribution density of the sample, and the sample holes can be closely arranged, so that the number of samples in one experiment can be as large as possible.

[0046] In some embodiments, the center distance between two adjacent sample holes is greater than twice the outer radius of the elastic stop ring and less than three times the outer radius of the elastic stop ring. The size of the specific elastic stop ring refers to the size of the elastic stop ring in the natural state. In this way, the number of sample holes is as large as possible.

[0047] In some embodiments, the fixing net disc is circular or regular polygonal. In this way, the shape of the sample fixing workpiece frame is more matched with the shape of the sample disc.

[0048] In some embodiments, the sample holes are arranged in concentric circles. The environment of the sample holes located on the same circle is more similar, and the obtained coating effect is also more similar, which is easier to analyze the coating effect.

[0049] In some embodiments, the sample holes are arranged in a rectangular array. Then the density of the sample holes is larger.

[0050] The height of the fixed net disc can be flexibly adjusted (as long as the screw thread can be screwed into the threaded hole or threaded groove of the sample disc). The fixed net disc can be fixed at the middle height or the bottom of the sample.

[0051] The material of the fixed net disc can be stainless steel, high-temperature-resistant polytetrafluoroethylene (PTFE), polyether ether ketone (PEEK), or polyimide (PI).

[0052] The elastic stop ring can be made of stainless steel or rubber material.

[0053] The fourth type of technical solution of the utility model is as follows: a sample fixing workpiece frame for a vacuum magnetron sputtering coating machine, comprising: a fixed net disc, a plurality of elastic stop rings, and a plurality of screws.

[0054] The fixed net disc is in a flat plate shape, and a plurality of assembly holes and a plurality of sample holes are formed in the fixed net disc.

[0055] The plurality of elastic stop rings are arranged one by one corresponding to the plurality of sample holes and are arranged on the inner circumferential surface of the corresponding sample hole.

[0056] The sample hole is used for the sample to pass through, and the elastic stop ring is used for surrounding and clamping the sample.

[0057] The plurality of screws are arranged one by one corresponding to the plurality of assembly holes, the screw passes through the corresponding assembly hole, the free end of the screw is screwed into the threaded hole or threaded groove on the sample disc of the vacuum magnetron sputtering coating machine, and the tail of the screw contacts the upper surface of the fixed net disc.

[0058] The fixed net disc, the plurality of elastic stop rings, and the plurality of screws are initially in a dispersed part state. In use, the sample passes through the elastic stop ring, the sample is placed on the sample disc, the screw is screwed into the threaded hole or threaded groove on the sample disc after passing through the assembly hole, and the tail of the screw presses the fixed net disc, so that the sample and the fixed net disc are fixed.

[0059] Since the sample is fastened by the elastic stop ring, the surface of the sample opposite to the sample disc is not blocked, which makes the sample surface coating complete.

[0060] Further, the distribution density of the sample is determined by the density of the sample hole. Although the elastic stop ring occupies a part of the surface area, the surface area occupied by the elastic stop ring is smaller than that occupied by the tablet press, the sample holes can be closely arranged, and the number of samples in one experiment can be as large as possible.

[0061] In some embodiments, the fixed net disc is circular or regular polygonal. In this way, the shape of the sample fixing workpiece frame is more matched with the shape of the sample disc.

[0062] In some embodiments, the sample holes are arranged in concentric circles. The environment of the sample holes in the same circle is closer, and the obtained film effect is closer, which is easier to analyze the film effect.

[0063] In some embodiments, the sample holes are arranged in a rectangular array. Then the density of the sample holes is larger.

[0064] The material of the fixed net disc can be selected from stainless steel, high-temperature-resistant polytetrafluoroethylene (PTFE), polyether ether ketone (PEEK), or polyimide (PI).

[0065] The elastic stop ring can be made of stainless steel or rubber material.

[0066] The fifth type of technical solution of the utility model is as follows: a sample fixing workpiece frame for a vacuum magnetron sputtering coating machine, comprising: a fixed net disc, a plurality of spring buckles, and a plurality of screws.

[0067] The fixed net disc is in a flat plate shape, and a plurality of assembly holes and a plurality of sample holes are formed on the fixed net disc.

[0068] The plurality of spring buckles are arranged on the inner circumferential surface of the sample hole in one-to-one correspondence with the plurality of sample holes.

[0069] The sample hole is used for the sample to pass through, and the spring buckle is used to fix the sample by relying on the elastic transverse extrusion of the sample.

[0070] The plurality of screws are arranged in one-to-one correspondence with the plurality of assembly holes. The screw passes through the corresponding assembly hole, the free end of the screw is screwed into the threaded hole or threaded groove on the sample disc of the vacuum magnetron sputtering coating machine, and the tail of the screw contacts the upper surface of the fixed net disc.

[0071] The spring buckle specifically comprises a spring and a head block. The first end of the spring is fixed on the inner circumferential surface of the sample hole, and a groove can be formed on the inner circumferential surface of the sample hole. The head block is connected to the second end of the spring. In the natural state, the head block enters the sample hole.

[0072] The fixed net disc, the plurality of spring buckles, and the plurality of screws are initially in a dispersed part state. In use, the sample is inserted into the sample hole of the fixed net disc, the spring buckle extrudes the sample transversely, thereby fixing the sample. After the screw passes through the assembly hole, it is screwed into the threaded hole or threaded groove on the sample disc, and the tail of the screw presses the fixed net disc, thereby realizing the fixation of the sample.

[0073] Since the sample is fastened by the spring buckle, the surface of the sample opposite to the sample disc is not blocked, which makes the surface of the sample complete.

[0074] The distribution density of the further sample is determined by the density of the sample holes, and since the spring buckle is embedded in the inner circumferential surface of the sample hole, the spring buckle does not affect the distribution density of the sample, the sample holes can be closely arranged, and the number of samples in one experiment can be as large as possible.

[0075] In some embodiments, the fixing net disc is circular or regular polygonal. In this way, the shape of the sample fixing workpiece frame is more matched with the shape of the sample disc.

[0076] In some embodiments, the sample holes are arranged in concentric circles. The environment of the sample holes located on the same circle is closer, and the obtained film coating effect is also closer, which is easier to analyze the film coating effect.

[0077] In some embodiments, the sample holes are arranged in a rectangular array. Then the density of the sample holes is larger.

[0078] The material of the fixing net disc can be selected from stainless steel, high-temperature-resistant polytetrafluoroethylene (PTFE), polyether ether ketone (PEEK), or polyimide (PI).

[0079] It should be noted that the sample fixing workpiece frame of the above five types of technical solutions can be upward or downward when in use, and both can ensure that the sample is stably fixed on the sample disc.

[0080] It should be noted that the sample fixing workpiece frame of the above five types of technical solutions can be upward or downward when in use, and both can ensure that the sample is stably fixed on the sample disc.

[0081] By adopting the above technical solutions, on the one hand, the number of samples in one experiment is increased, and on the other hand, the film coating on the surface of the sample is ensured to be complete. BRIEF DESCRIPTION OF DRAWINGS

[0082] Figure 1 is a top view of the sample fixing workpiece frame for the vacuum magnetron sputtering coating machine in the unused state of the embodiment 1 of the utility model.

[0083] Figure 2 is Figure 1 is a sectional view of the sample fixing workpiece frame for the vacuum magnetron sputtering coating machine in the used state, which schematically shows one assembly hole and one sample hole.

[0084] Figure 3 is a sectional view of the sample fixing workpiece frame for the vacuum magnetron sputtering coating machine in the used state of the embodiment 2 of the utility model, which schematically shows one assembly hole and one sample hole.

[0085] Figure 4It is the sectional view of the sample fixing workpiece frame for the vacuum magnetron sputtering coating machine in the embodiment 3 of the utility model in use state, and one assembly hole and one sample hole are schematically shown.

[0086] Figure 5 It is the sectional view of the sample fixing workpiece frame for the vacuum magnetron sputtering coating machine in the embodiment 4 of the utility model in use state, and one assembly hole and one sample hole are schematically shown.

[0087] Figure 6 It is the sectional view of the sample fixing workpiece frame for the vacuum magnetron sputtering coating machine in the embodiment 5 of the utility model in use state, and one assembly hole and one sample hole are schematically shown.

[0088] The figure mark is: 1, bottom plate;H1, assembly hole;2, fixed net disc;H2, sample hole;3, elastic stop ring;4, screw;5, sample disc;6, spring buckle;7, sample;8, nut. DETAILED DESCRIPTION

[0089] The utility model will be further described below in combination with specific embodiment, but the protection scope of the utility model is not limited to this.

[0090] Note: the upper and lower relationship described in the utility model refers to the spatial positional relationship when the sample disc is located below the sample fixing workpiece frame and the sample disc is horizontally placed.

[0091] Example 1

[0092] Reference Figure 1 And Figure 2 The sample fixing workpiece frame for the vacuum magnetron sputtering coating machine provided in the embodiment 1 includes a bottom plate 1, a fixed net disc 2, a plurality of elastic stop rings 3 and a plurality of screws 4.

[0093] The bottom plate 1 is flat, and a plurality of assembly holes H1 are formed on the bottom plate 1, and the bottom plate 1 is arranged on the sample disc 5 of the vacuum magnetron sputtering coating machine.

[0094] The fixed net disc 2 is flat, and a plurality of assembly holes H1 and a plurality of sample holes H2 are formed on the fixed net disc 2, and the sample holes H2 are used for placing samples 7.

[0095] The plurality of elastic stop rings 3 are annular with notches.

[0096] The assembly holes H1 on the bottom plate 1 and the assembly holes H1 on the fixed net disc 2 are arranged one by one in correspondence; the elastic stop rings 3 are arranged one by one in correspondence with the sample holes H2, the elastic stop rings 3 are located between the bottom plate 1 and the fixed net disc 2, the elastic stop rings 3 surround and clamp the samples 7, and the elastic stop rings 3 surround and exceed the corresponding sample holes H2 in the outer contour of the orthographic projection of the fixed net disc 2.

[0097] A plurality of screws 4 are arranged one-to-one with the assembly holes H1 on the fixed net disc 2, the screws 4 pass through the corresponding assembly holes H1 on the fixed net disc 2 and the corresponding assembly holes H1 on the bottom plate 1, the free end of the screw 4 is screwed into the threaded hole or threaded groove on the sample disc 5, and the tail of the screw 4 is pressed against the fixed net disc 2 so that the fixed net disc 2 is in extrusion contact with the elastic stop ring 3 and the elastic stop ring 3 is in extrusion contact with the bottom plate 1.

[0098] In use, the elastic stop ring 3 is sleeved on one end of the sample (for example, cylindrical, cubic or any desired shape), the other end of the sample passes through the sample hole H2 of the fixed net disc 2, the bottom plate 1 is placed on the sample disc 5 of the vacuum magnetron sputtering coating machine, and then the elastic stop ring 3, the sample and the fixed net disc 2 are placed on the bottom plate 1. The assembly holes H1 on the bottom plate 1 and the fixed net disc 2 are all opposite to the threaded holes or threaded grooves on the sample disc 5 (the sample disc 5 usually has threaded holes). The screw 4 passes through the fixed net disc 2 and the bottom plate 1 and is screwed into the threaded hole or threaded groove on the sample disc 5, and the tail of the screw 4 presses against the fixed net disc 2, thereby achieving the fixation of the sample.

[0099] Since the sample is fastened by the elastic stop ring 3, the surface of the sample opposite to the sample disc 5 is not blocked, which makes the coating of the sample surface complete.

[0100] Further, the distribution density of the sample is determined by the density of the sample hole H2. Since there must be a gap between the sample holes H2, the outer contour of the elastic stop ring 3 only needs to fall into the gap between the adjacent sample holes H2. The sample holes H2 can be closely arranged, so that the number of samples 7 in one experiment can be as large as possible.

[0101] The assembly holes H1 are distributed in the middle of the fixed net disc 2 and are in equilateral triangle distribution.

[0102] The outer contours of the bottom plate 1 and the fixed net disc 2 are the same and have the same size. The bottom plate 1 is circular; the fixed net disc 2 is circular. The sample holes H2 are in concentric circle distribution.

[0103] Example 2

[0104] Reference Figure 3 and combine Figure 1 , embodiment 2 provides a sample fixing workpiece frame for a vacuum magnetron sputtering coating machine, comprising: a fixed net disc 2, a plurality of screws 4 and a plurality of elastic stop rings 3;

[0105] The fixed net disc 2 is in the form of a flat plate, a plurality of assembly holes H1 and a plurality of sample holes H2 are formed on the fixed net disc 2, the sample holes H2 are used for placing samples 7;

[0106] The elastic stop ring 3 is in the form of an annular ring with a notch;

[0107] Each test hole H2 corresponds to two elastic retaining rings 3, which are respectively arranged at the two openings of the corresponding test hole H2 to clamp and fix the mesh disc 2, the elastic retaining ring 3 surrounds and clamps the test sample 7, and the elastic retaining ring 3 surrounds and exceeds the corresponding test hole H2 in the outer contour of the orthographic projection of the fixed mesh disc 2;

[0108] The screw 4 passes through the assembly hole H1 on the fixed mesh disc 2 one by one, the free end of the screw 4 is screwed into the threaded groove or threaded hole on the test sample disc 5 of the vacuum magnetron sputtering coating machine, and the tail of the screw 4 presses the fixed mesh disc 2.

[0109] In use, the test sample 7 passes through the test hole H2 on the fixed mesh disc 2, and the elastic retaining ring 3 is sleeved on the outer circumferential surface of the test sample and abuts against the upper and lower surfaces of the fixed mesh disc 2. The lower surface of the test sample is placed on the test sample disc 5, the screw 4 passes through the assembly hole H1 on the fixed mesh disc 2, the free end of the screw 4 is screwed into the threaded hole or threaded groove on the test sample disc 5, and the tail of the screw 4 presses the upper surface of the fixed mesh disc 2. Thus, the test sample 7 is fixed.

[0110] Since the test sample is fastened by the elastic retaining ring 3, the surface of the test sample opposite to the test sample disc 5 is not blocked, which makes the test sample surface coating complete.

[0111] Further, the distribution density of the test sample is determined by the density of the test hole H2. Since there must be a gap between the test hole H2 and the test hole H2, the outer contour of the elastic retaining ring 3 only needs to fall into the gap between the adjacent test holes H2. The test holes H2 can be closely arranged, so that the number of test samples 7 in one experiment can be as large as possible.

[0112] The assembly holes H1 are distributed in the middle of the fixed mesh disc 2 and are distributed in a regular triangle.

[0113] Example 3

[0114] Reference Figure 4 and in combination Figure 1 , embodiment 3 provides a test sample fixing workpiece frame for a vacuum magnetron sputtering coating machine, comprising: two fixed mesh discs 2, a plurality of elastic retaining rings 3, a plurality of screws 4 and a plurality of nuts 8;

[0115] Both of the two fixed mesh discs 2 are flat, and a plurality of assembly holes H1 and a plurality of test holes H2 are formed on each of the two fixed mesh discs 2, the test hole H2 is used for placing the test sample 7, the assembly holes H1 on the two fixed mesh discs 2 are arranged one by one, and the test holes H2 on the two fixed mesh discs 2 are arranged one by one.

[0116] The plurality of elastic retaining rings 3 are in the form of a closed ring, and the plurality of elastic retaining rings 3 are arranged one by one corresponding to the test holes H2 on the fixed mesh disc 2.

[0117] The elastic stop ring 3 surrounds and clamps the sample 7 in the corresponding sample hole H2, and the elastic stop ring 3 is located between the two fixed mesh plates 2. The elastic stop ring 3 surrounds and exceeds the outer contour of the orthographic projection of the fixed mesh plate 2, and exceeds the corresponding sample hole H2.

[0118] The nut 8 is arranged one-to-one with the screw 4. The plurality of screws 4 are arranged one-to-one with the plurality of assembly holes H1 on any one fixed mesh plate 2. The screw 4 passes through the corresponding assembly hole H1. The free end of the screw 4 is screwed into the threaded hole or threaded groove on the sample plate 5 of the vacuum magnetron sputtering coating machine. The nut 8 surrounds the corresponding screw 4 and is located between the lower fixed mesh plate 2 and the sample plate 5. The tail of the screw 4 presses the upper fixed mesh plate 2 so that the upper fixed mesh plate 2 and the elastic stop ring 3, the elastic stop ring 3 and the lower fixed mesh plate 2, and the lower fixed mesh plate 2 and the nut are in close contact.

[0119] In use, the elastic stop ring 3 is sleeved on the sample. The two fixed mesh plates 2 are sleeved on the sample from the upper and lower ends of the sample. The nut 8 is used to raise the lower fixed mesh plate 2. The nut 8 is opposite to the assembly hole H1 on the fixed mesh plate 2 and is placed on the sample plate 5. The screw 4 passes through the assembly holes H1 of the two fixed mesh plates 2 and passes through the nut 8 and is screwed into the threaded hole or threaded groove on the sample plate 5. The tail of the screw 4 presses the uppermost fixed mesh plate 2, thereby realizing the fixation of the sample 7.

[0120] Since the sample is fastened by the elastic stop ring 3, the surface of the sample opposite to the sample plate 5 is not blocked, which makes the sample surface coating complete.

[0121] Further, the distribution density of the sample is determined by the density of the sample hole H2. Since there must be a gap between the sample hole H2 and the sample hole H2, the outer contour of the elastic stop ring 3 only needs to fall into the gap between the adjacent sample holes H2. The elastic stop ring 3 does not affect the distribution density of the sample. The sample holes H2 can be closely arranged, so that the number of samples 7 in one experiment can be as large as possible.

[0122] Since the height of the fixed mesh plate 2 can be flexibly adjusted (as long as the screw thread of the screw 4 can be screwed into the threaded hole or threaded groove of the sample plate 5), in this embodiment, the fixed mesh plate 2 is fixed at the middle height of the sample.

[0123] Example 4

[0124] Reference Figure 5 In combination with Figure 1 , embodiment 4 provides a sample fixing workpiece frame for a vacuum magnetron sputtering coating machine, comprising: a fixed mesh plate 2, a plurality of elastic stop rings 3, and a plurality of screws 4.

[0125] The fixed net disk 2 is flat, and a plurality of assembly holes H1 and a plurality of sample holes H2 are formed on the fixed net disk 2;

[0126] A plurality of elastic stop rings 3 are arranged in one-to-one correspondence with the plurality of sample holes H2 and are arranged on the inner circumferential surface of the corresponding sample hole H2;

[0127] The sample hole H2 is used for the sample 7 to pass through, and the elastic stop ring 3 is used to surround and clamp the sample 7;

[0128] A plurality of screws 4 are arranged in one-to-one correspondence with the plurality of assembly holes H1, the screw 4 passes through the corresponding assembly hole H1, the free end of the screw 4 is screwed into the threaded hole or threaded groove on the sample disc 5 of the vacuum magnetron sputtering coating machine, and the tail of the screw 4 contacts the upper surface of the fixed net disk 2.

[0129] The elastic stop ring 3 can be pasted on the inner circumferential surface of the sample hole H2 or extruded into the sample hole H2.

[0130] In use, the sample passes through the elastic stop ring 3, the sample 7 is placed on the sample disc 5, the screw 4 passes through the assembly hole H1 and is screwed into the threaded hole or threaded groove on the sample disc 5, and the tail of the screw 4 presses the fixed net disk 2, so as to realize the fixation of the sample 7.

[0131] Since the sample is fastened by the elastic stop ring 3, the surface of the sample opposite to the sample disc 5 is not blocked, which makes the sample surface coating complete.

[0132] Further, the distribution density of the sample is determined by the density of the sample hole H2. Although the elastic stop ring 3 occupies a part of the surface area, compared with the surface area occupied by the tablet clamp, the sample hole H2 can be closely arranged, so that the number of samples 7 in one experiment can be as large as possible.

[0133] Example 5

[0134] Reference Figure 6 , embodiment 6 provides a sample fixing workpiece frame for a vacuum magnetron sputtering coating machine, comprising: a fixed net disk 2, a plurality of spring buckles 6 and a plurality of screws 4;

[0135] The fixed net disk 2 is flat, and a plurality of assembly holes H1 and a plurality of sample holes H2 are formed on the fixed net disk 2;

[0136] A plurality of spring buckles 6 are arranged in one-to-one correspondence with the plurality of sample holes H2 on the inner circumferential surface of the sample hole H2;

[0137] The sample hole H2 is used for the sample 7 to pass through, and the elastic stop ring 3 is used to surround and clamp the sample 7;

[0138] The plurality of screws 4 are arranged one-to-one with the plurality of assembly holes H1, the screw 4 passes through the corresponding assembly hole H1, the free end of the screw 4 is screwed into the threaded hole or threaded groove on the sample disc 5 of the vacuum magnetron sputtering coating machine, and the tail of the screw 4 contacts the upper surface of the fixed mesh disc 2.

[0139] The spring buckle 6 specifically includes a spring and a head block, the first end of the spring is fixed on the inner circumferential surface of the sample hole H2, and specifically, a groove can be formed on the inner circumferential surface of the sample hole H2. The head block is connected with the second end of the spring. In the natural state, the head block enters the sample hole H2.

[0140] In use, the sample is inserted into the sample hole H2 of the fixed mesh disc 2, and the spring buckle 6 laterally presses the sample, thereby fixing the sample. After the screw 4 passes through the assembly hole H1, it is screwed into the threaded hole or threaded groove on the sample disc 5, and the tail of the screw 4 presses the fixed mesh disc 2, thereby realizing the fixation of the sample 7.

[0141] Since the sample is fastened by the spring buckle 6, the surface of the sample opposite to the sample disc 5 is not blocked, which makes the sample surface coating complete.

[0142] Further, the distribution density of the sample 7 is determined by the density of the sample hole H2. Since the spring buckle 6 can be embedded in the inner circumferential surface of the sample hole H2, the surface area occupied by the spring buckle 6 is smaller than that of the tablet press, and the sample holes H2 can be closely arranged, so that the number of samples 7 in one experiment can be as large as possible.

[0143] Example 6

[0144] The difference from example 1 is that the sample hole H2 is rectangular and arranged in a rectangular array; the assembly hole H1 is distributed on the edge of the fixed mesh disc 2.

[0145] Example 7

[0146] The difference from example 1 is that the assembly hole H1 is distributed in the middle and on the edge of the fixed mesh disc 2.

[0147] Example 9

[0148] The difference from example 4 is that the screw 4 is surrounded by a nut 8, the upper surface of the nut 8 contacts the lower surface of the fixed mesh disc 2, and the lower surface of the nut 8 contacts the sample disc 5.

[0149] Example 10

[0150] The difference from example 5 is that the screw 4 is surrounded by a nut 8, the upper surface of the nut 8 contacts the lower surface of the fixed mesh disc 2, and the lower surface of the nut 8 contacts the sample disc 5.

[0151] The utility model discloses not limited to above-mentioned embodiment, under not deviating from the essential content of the application, any deformation, improvement, replacement that the person skilled in the art can think of all fall into the range of the application.

Claims

1. A sample holder for a vacuum magnetron sputtering coating machine, characterized in that, include: Base plate, fixed mesh plate, multiple elastic retaining rings and multiple screws; The base plate is flat and has multiple assembly holes, and is placed on the sample tray of the vacuum magnetron sputtering coating machine; The fixed mesh tray is flat and has multiple assembly holes and multiple sample holes, the sample holes being used to place the sample. The plurality of elastic stop rings are either closed rings or rings with gaps; The assembly holes on the base plate are configured one-to-one with the assembly holes on the fixed mesh disk; the elastic stop ring is configured one-to-one with the sample hole, the elastic stop ring is located between the base plate and the fixed mesh disk, the elastic stop ring surrounds and clamps the sample, and the outer contour of the elastic stop ring of the orthographic projection of the fixed mesh disk surrounds and extends beyond the corresponding sample hole. The plurality of screws are configured one-to-one with the assembly holes on the fixed mesh disk. The screws pass through the corresponding assembly holes on the fixed mesh disk and the corresponding assembly holes on the base plate. The free end of the screw is screwed into the threaded hole or threaded groove on the sample disk. The tail of the screw presses the fixed mesh disk so that the fixed mesh disk is pressed into contact with the elastic stop ring and the elastic stop ring is pressed into contact with the base plate.

2. The sample fixing workpiece holder according to claim 1, characterized in that, The base plate and the fixed mesh plate have the same outer contour shape and the same size.

3. The sample fixing workpiece holder according to claim 1, characterized in that, The base plate is circular or a regular polygon; the fixed mesh plate is circular or a regular polygon.

4. A sample holder for a vacuum magnetron sputtering coating machine, characterized in that, include: The fixed mesh disk consists of multiple screws and multiple elastic retaining rings. The fixed mesh tray is flat and has multiple assembly holes and multiple sample holes, the sample holes being used to place the sample. The elastic stop ring is a closed ring or a ring with a gap; Each of the sample holes corresponds to two elastic stop rings. The two elastic stop rings are respectively set at the two openings of the corresponding sample hole to clamp the fixed mesh disk. The elastic stop rings surround and clamp the sample. The outer contour of the elastic stop rings of the orthographic projection of the fixed mesh disk surrounds and extends beyond the corresponding sample hole. The screws pass through the assembly holes on the fixed mesh disk one by one, the free end of the screws is screwed into the threaded groove or threaded hole on the sample tray of the vacuum magnetron sputtering coating machine, and the tail of the screws presses against the fixed mesh disk.

5. A sample holder for a vacuum magnetron sputtering coating machine, characterized in that, include: Two fixed mesh discs, multiple elastic retaining rings, multiple screws, and multiple nuts; Both fixed mesh trays are flat and have multiple assembly holes and multiple sample holes. The sample holes are used to place the sample. The assembly holes on the two fixed mesh trays are set one-to-one, and the sample holes on the two fixed mesh trays are set one-to-one. The plurality of elastic stop rings are closed rings or rings with notches, and the plurality of elastic stop rings are set one-to-one with the sample holes on the fixed mesh disk; The elastic stop ring surrounds and clamps the sample in the corresponding sample hole. The elastic stop ring is located between the two fixed mesh disks. The outer contour of the elastic stop ring, which is the orthographic projection of the fixed mesh disk, surrounds and extends beyond the corresponding sample hole. The nuts and screws are arranged in a one-to-one correspondence. The screws are arranged in a one-to-one correspondence with the assembly holes on any one of the fixed screens. The screws pass through the corresponding assembly holes. The free end of the screws is screwed into the threaded holes or threaded grooves on the sample tray of the vacuum magnetron sputtering coating machine. The nuts surround the corresponding screws and are located between the lower fixed screen and the sample tray. The tail of the screws presses against the upper fixed screen so that there is tight contact between the upper fixed screen and the elastic stop ring, between the elastic stop ring and the lower fixed screen, and between the lower fixed screen and the nut.

6. The sample holder for fixing workpieces according to any one of claims 1 to 5, characterized in that, The center distance between two adjacent sample holes is greater than twice the outer radius of the elastic stop ring and less than three times the outer radius of the elastic stop ring.

7. A sample holder for a vacuum magnetron sputtering coating machine, characterized in that, include: The system consists of a fixed mesh tray, multiple flexible retaining rings, and multiple screws. The fixed mesh plate is flat and has multiple assembly holes and multiple sample holes. The plurality of elastic stop rings are provided one-to-one with the plurality of sample holes and are disposed on the inner circumferential surface of the corresponding sample holes. The sample hole is used for the sample to pass through, and the elastic stop ring is used to surround and clamp the sample. The plurality of screws are provided in a one-to-one correspondence with the plurality of assembly holes. The screws pass through the corresponding assembly holes, and the free end of the screws is screwed into the threaded holes or threaded grooves on the sample tray of the vacuum magnetron sputtering coating machine. The tail of the screws contacts the upper surface of the fixed mesh tray.

8. A sample holder for a vacuum magnetron sputtering coating machine, characterized in that, include: The wire mesh is secured by multiple spring clips and multiple screws. The fixed mesh plate is flat and has multiple assembly holes and multiple sample holes. The plurality of spring clips are disposed on the inner circumferential surface of the sample holes in a one-to-one correspondence with the plurality of sample holes. The sample hole is used for the sample to pass through, and the spring clip is used to fix the sample by laterally squeezing it with elastic force. The plurality of screws are provided in a one-to-one correspondence with the plurality of assembly holes. The screws pass through the corresponding assembly holes, and the free end of the screws is screwed into the threaded holes or threaded grooves on the sample tray of the vacuum magnetron sputtering coating machine. The tail of the screws contacts the upper surface of the fixed mesh tray.

9. The sample holder for fixing workpieces according to any one of claims 4, 5, 7 and 8, characterized in that, The fixed mesh disk is circular or a regular polygon.

10. The sample holder for fixing workpieces according to any one of claims 1, 4, 5, 7 and 8, characterized in that, The sample holes are arranged in concentric circles or in a rectangular array.

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