Height difference measuring tool

Abstract

The utility model discloses a height difference measuring tool, which comprises a measuring main body, a measuring head and ruby supporting legs, the measuring main body comprises a rectangular main body and a triangular clamping body, threaded holes are triangularly distributed in the rectangular main body, ruby supporting legs are in threaded connection with the interiors of the threaded holes, a mounting round hole is formed in the central axis of the triangular clamping body, a measuring head is placed in the mounting round hole, and an adjusting seam is formed in the side face of the mounting round hole; the adjusting seam extends to the outside of the triangular clamping body, and an adjusting bolt is arranged on the adjusting seam for adjustment. According to the utility model, most height differences can be measured, the universality is good, the measuring heads with different precisions can be replaced according to needs, and the application scene is wide. The highest precision can reach 1 [mu] m; the ruby supporting legs are adopted, so that metal pollution is avoided, direct contact between the measuring main body and the wafer is avoided, and the wafer is prevented from being scrapped.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field, concretely relates to a height difference measuring tool. BACKGROUND

[0002] The laser annealing machine needs to control the height difference of the wafer pin, and the height difference of the wafer and the peripheral skirt (skirt) also needs to be controlled.

[0003] 1, pin height difference is measured by vernier caliper, because the precision of the caliper is 20um, so it is difficult to achieve 30um error, but the precision of the vernier caliper is not high when measuring the pin height difference.

[0004] 2, the height difference between the wafer and the skirt is measured by the standard block of 850um, which is placed between the two, close to the skirt, and the height difference between the skirt and the block is measured by the vernier caliper, and because the wafer and the skirt height difference is measured every time, the metal standard block is used to contact the wafer, which will cause a wafer to be scrapped. UTILITY MODEL CONTENTS

[0005] The utility model discloses a height difference measuring tool.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the technical scheme of a height difference measuring tool, which is characterized by comprising a measuring main body, a measuring head and a ruby support leg.

[0007] Further, the total height of the measuring tool is less than 8cm.

[0008] Further, the distance from the measuring head to the nearest ruby support leg is 31.75mm.

[0009] Further, a handle is arranged on the measuring main body.

[0010] Further, the ruby support leg is composed of a ruby and a support leg, and the ruby is located at the bottom of the support leg.

[0011] After adopting the above structure, the utility model has the beneficial effects that:

[0012] The utility model discloses can measure most height difference, and the versatility is good, can change the measuring head of different precision according to need, and the use scene is extensive, and the highest precision can be to 1um, adopt ruby support foot, do not cause metal pollution, avoid the direct contact of measuring main part and wafer, avoid the scrap wafer. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 It is the structural diagram of the utility model;

[0014] Fig. 2 It is the structural diagram of the measuring main body in the utility model.

[0015] BRIEF DESCRIPTION OF DRAWINGS:

[0016] 1 measuring main body, 11 rectangle main body, 12 triangle clamping body, 13 threaded hole, 14 installation round hole, 15 adjusting gap, 16 adjusting bolt, 17 handle, 2 measuring head, 3 ruby support foot. DETAILED DESCRIPTION

[0017] The utility model will be further explained in combination with the drawings.

[0018] In order to make the utility model's purpose, technical scheme and advantage more clear and clear, the following combines the drawing and specific embodiment, and the utility model is further detailedly explained.It should be understood that the specific embodiment described here is only used to explain the utility model, and is not used to limit the utility model.

[0019] Reference Figs. 1-2 A height difference measuring tool, including measuring main body 1, measuring head 2 and ruby support foot 3, measuring main body 1 includes rectangle main body 11 and triangle clamping body 12, rectangle main body 11 is set up threaded hole 13 in triangle distribution, threaded hole 13 is internally threadedly connected ruby support foot 3, installation round hole 14 is set up on the central axis of triangle clamping body 12, measuring head 2 is placed inside installation round hole 14, adjusting gap 15 is set up on the side of installation round hole 14, adjusting gap 15 extends to the outside of triangle clamping body 12, and adjusting screw 16 is set up on adjusting gap 15 and is adjusted.Specifically, the minimum distance of measuring head 2 to measuring tool support foot is greater than the gap between wafer and baffle, can place measuring tool on wafer, and measuring head measures the height of baffle.Ruby support foot 3 of measuring tool does not have metal pollution, and wafer is not scrapped.The same method can measure the height difference of pin, and measuring tool is placed on wafer platform, and measuring head 2 is pressed on pin, and the height difference can be measured;Installation round hole 14 and adjusting gap 15 can change the measuring head of different precision according to need, and the use scene is extensive, and the highest precision can be to 1um.

[0020] In the embodiment, the total height of the measuring tool is less than 8cm, which can be used in narrow space.

[0021] In this embodiment, the distance from the measuring head 2 to the nearest ruby support foot 3 is 31.75 mm, and the height difference of two planes within 30 mm apart can be measured.

[0022] In this embodiment, a handle 17 is provided on the measuring body 1 to facilitate carrying and use.

[0023] In this embodiment, the ruby support foot 3 is composed of a ruby and a support leg, and the ruby is located at the bottom of the support leg.

[0024] The above description is only to illustrate the technical solutions of the present application and not to limit it, and other modifications or equivalent replacements to the technical solutions of the present application made by those skilled in the art shall be covered in the scope of the claims of the present application as long as they do not deviate from the spirit and scope of the technical solutions of the present application.

Claims

1. A height difference measuring tool, characterized by: Including measuring body, measuring head and ruby support leg; the measuring body includes rectangular body and triangular clamping body, the rectangular body is distributed on the triangular screw hole, the screw hole is internally threaded ruby support leg, the middle axis of the triangular clamping body is provided with installation round hole, the installation round hole is internally placed measuring head, the side of the installation round hole is provided with adjusting slot, the adjusting slot extends to the outside of the triangular clamping body, and adjusting bolt is arranged on the adjusting slot for adjustment.

2. A height difference measuring tool according to claim 1, characterized in that: The total height of the measuring tool is less than 8 cm.

3. A height difference measuring tool according to claim 1, characterized in that: The distance from the measuring head to the nearest ruby support leg is 31.75 mm.

4. The height difference measuring tool according to claim 1, characterized in that: A handle is arranged on the measuring body.

5. The height difference measuring tool according to claim 1, characterized in that: The ruby support leg is composed of ruby and support leg, and the ruby is located at the bottom of the support leg.

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