Trace water measuring device and system
By setting up a first chamber and a second chamber in the trace water measuring device, and combining them with a constant temperature and moisture stabilization mechanism, the problem of background signal being affected by external factors is solved, and higher sensitivity and stability are achieved.
Patent Information
- Application Number
- CN202422743424.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-11
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2034-11-11
AI Technical Summary
During trace water determination, the background signal is affected by the instrument's internal circuitry, environmental noise, or other external factors, resulting in reduced sensitivity, reduced consistency, larger errors, and poor long-term stability.
By setting up a first cavity and a second cavity, the optical module is isolated from the environment and from the gas to be measured. Combined with a constant temperature mechanism and a moisture stabilization mechanism, the stability of the test laser is ensured.
It improves the sensitivity and consistency of trace water determination, reduces errors, and enhances long-term stability.
Smart Images
Figure CN223664500U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of trace water determination technology, specifically to a trace water determination device and system. Background Technology
[0002] Laser-based trace water detection plays a crucial role in many fields, including the semiconductor industry, high-purity gas preparation, and lead-acid battery production. However, during the detection process, the background signal is often affected by internal instrument circuitry, environmental noise, or other external factors, leading to reduced sensitivity, lower consistency, larger errors, and poor long-term stability in trace water measurements. Utility Model Content
[0003] The technical problem this invention aims to solve is that during trace water measurement, the background signal is often affected by the instrument's internal circuitry, environmental noise, or other external factors, leading to reduced sensitivity, lower consistency, larger errors, and poor long-term stability in trace water measurement. This solution aims to provide a trace water measurement device and system. Based on traditional measurement techniques, the structure of the trace water measurement device is improved by setting up a first chamber and a second chamber to isolate the optical module from the environment and from the gas to be measured. Simultaneously, the constant temperature mechanism and moisture stabilization mechanism within the first chamber ensure the stability of the test laser (background signal).
[0004] This utility model is achieved through the following technical solution:
[0005] This solution provides a trace water determination device, comprising:
[0006] Optical module, used to generate test laser;
[0007] The first cavity is used to stabilize the moisture and temperature of the test laser to generate a background signal; the optical module is disposed in the first cavity, the first cavity is sealed to the second cavity, and the test laser can pass through the first cavity to enter the second cavity; the first cavity includes a temperature control mechanism and a moisture stabilization mechanism.
[0008] The second chamber is used to fill the gas to be measured and to measure the background signal of the gas to be measured.
[0009] Working principle of this solution: During the determination of trace water, the background signal is often affected by the internal circuit of the instrument, environmental noise or other external factors, resulting in reduced sensitivity, reduced consistency, large error and poor long-term stability of trace water measurement. The purpose of this solution is to provide a trace water determination device and system. Based on the traditional determination technology, the structure of the trace water determination device is improved. By setting up a first chamber and a second chamber, the optical module is isolated from the environment and from the gas to be measured. At the same time, the stability of the test laser (background signal) is ensured by the constant temperature mechanism and the moisture stabilization mechanism in the first chamber.
[0010] A further optimized solution is that the first cavity includes a first air inlet and a first air outlet; both the first air inlet and the first air outlet are sealable air ports.
[0011] The first air inlet is located at the bottom of the first cavity; the first air outlet is located at the top of the first cavity.
[0012] A further optimization is that the first cavity also includes a laser receiver for receiving the test laser reflected back from the second cavity.
[0013] A further optimized solution is that the second cavity includes a first lens and a second lens; the first lens is disposed at the beginning of the optical path of the second cavity, and the second lens is disposed at the end of the optical path of the second cavity to reflect the test laser back to the first lens.
[0014] A further optimized solution is that the second cavity includes a second air inlet and a second air outlet; both the second air inlet and the second air outlet are sealable air ports.
[0015] The second air inlet and the second air outlet are both located at the top of the second cavity; the second air inlet and the second air outlet are respectively located at the top two ends of the second cavity.
[0016] A further optimized solution is that the sealable vent includes a sealing ring and a welded cap.
[0017] A further optimized solution is that the constant temperature mechanism includes a temperature acquisition device and a heater; the temperature acquisition device is used to acquire the temperature inside the first cavity; the heater is used to raise the temperature inside the first cavity when the temperature is lower than a preset temperature.
[0018] A further optimized solution is that the moisture stabilizing mechanism includes a moisture stabilizer; the moisture stabilizer comprises one material or a mixture of multiple materials, and the material has the ability to absorb or release moisture.
[0019] A further optimized solution is that the moisture stabilizer has a specific shape, including granules, flakes, or strips; and the material includes CaO or Al2O3.
[0020] This solution also provides a trace water determination system, including the trace water determination device described above.
[0021] Compared with the prior art, this utility model has the following advantages and beneficial effects:
[0022] This solution provides a trace water determination device and system. Based on traditional determination techniques, the structure of the trace water determination device is improved. By setting up a first chamber and a second chamber, the optical module is isolated from the environment and from the gas to be measured. At the same time, the stability of the test laser (background signal) is ensured by the constant temperature mechanism and the moisture stabilization mechanism in the first chamber. Attached Figure Description
[0023] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:
[0024] Figure 1 This is a schematic diagram of a trace water determination device.
[0025] The attached diagram shows the markings and corresponding component names:
[0026] 1-First cavity, 2-Second cavity, 3-Optical module, 4-Laser receiver, 5-Heater, 6-Temperature collector, 7-Moisture stabilizer, 8-First air inlet, 9-First air outlet, 10-Second air inlet, 11-Second air outlet, 12-First lens, 13-Optical path, 14-Second lens. Detailed Implementation
[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.
[0028] Laser-based trace water detection plays a crucial role in many fields, including the semiconductor industry, high-purity gas preparation, and lead-acid battery production. During the detection process, the background signal is often affected by internal instrument circuitry, environmental noise, or other external factors, leading to reduced sensitivity, lower consistency, larger errors, and poor long-term stability in trace water measurements. Therefore, this solution provides the following embodiments to address the aforementioned technical problems:
[0029] Example 1
[0030] This embodiment provides a trace water determination device, such as... Figure 1 As shown, it includes:
[0031] Optical module 3 is used to generate the test laser; in this solution, optical module 3 is mainly a laser emitter.
[0032] The first cavity 1 is used to stabilize the moisture and temperature of the test laser to generate a background signal; the optical module is disposed in the first cavity, the first cavity is sealed to the second cavity, and the test laser can pass through the first cavity to enter the second cavity; the first cavity includes a temperature control mechanism and a moisture stabilization mechanism.
[0033] The second chamber 2 is used to fill the gas to be measured and to achieve the background signal test of the gas to be measured.
[0034] The first cavity 2 includes a first air inlet 8 and a first air outlet 9; both the first air inlet 8 and the first air outlet 9 are sealable air inlets;
[0035] The first air inlet 8 is located at the bottom of the first cavity; the first air outlet 9 is located at the top of the first cavity.
[0036] The first cavity also includes a laser receiver 4 for receiving test laser reflected back from the second cavity.
[0037] The second cavity 2 includes a first lens 12 and a second lens 14; the first lens 12 is disposed at the beginning of the optical path 13 of the second cavity 2, and the second lens 14 is disposed at the end of the optical path 13 of the second cavity 2 to reflect the test laser back to the first lens 12.
[0038] The second cavity 2 includes a second air inlet 10 and a second air outlet 11; both the second air inlet 10 and the second air outlet 11 are sealable air inlets; they are sealed using sealant, soldering, argon arc welding, laser welding, metal gaskets, plastic or rubber sealing rings.
[0039] The second air inlet 10 and the second air outlet 11 are both located at the top of the second cavity 2; the second air inlet 10 and the second air outlet 11 are respectively located at the top two ends of the second cavity 2.
[0040] The sealable vent includes a sealing ring and a welded cap.
[0041] The temperature control mechanism includes a temperature acquisition unit 6 and a heater 5. The temperature acquisition unit 6 is used to acquire the temperature inside the first cavity. The heater 5 is used to raise the temperature inside the first cavity when it is lower than a preset temperature. The heater 5 is used to control the temperature inside the first cavity, i.e., the operating temperature of the optical module, so that the laser operates at a specific wavelength.
[0042] The moisture stabilizing mechanism includes a moisture stabilizer 7; the moisture stabilizer comprises one material or a mixture of multiple materials, the material having the ability to absorb or release moisture.
[0043] The moisture stabilizer is in a specific shape, including granules, flakes, or strips; the material includes CaO or Al2O3. The material includes chemical reagents, such as CaO, or physical stabilizers, such as Al2O3, and the stabilizer shape can be selected as granules, flakes, or strips as needed.
[0044] At a certain temperature, the water stabilizer naturally decomposes or adsorbs to eventually reach an equilibrium state, ensuring that the water content in the light source module is present and has a stable content over a long period of time as a background signal, greatly reducing interference caused by environmental changes during instrument measurement.
[0045] In this embodiment, the connection between the first cavity and the second cavity is sealed using sealant, soldering, argon arc welding, laser welding, metal gaskets, plastic or rubber sealing rings to isolate the optical module from the external environment, isolate the second cavity from the external environment, and isolate the optical module from the second cavity.
[0046] This embodiment improves the structure of the trace water measuring device based on traditional measurement techniques. By setting up a first chamber and a second chamber, the optical module is isolated from the environment and from the gas to be measured. Simultaneously, the temperature control mechanism and moisture stabilization mechanism within the first chamber ensure the stability of the test laser (background signal). The first chamber is used to reduce interference from internal circuitry, environmental noise, or other external factors, keeping the background signal at a stable level.
[0047] Example 2
[0048] This embodiment provides a trace water determination system, including the trace water determination device described in Embodiment 1.
[0049] Obtain the water vapor concentration attribute of the gas to be measured;
[0050] Based on the aforementioned water vapor concentration properties, the fixed parameters of the trace water measuring device are configured, and the adjustable parameters of the trace water measuring device are adjusted according to the fixed parameters to generate a local signal of the gas to be measured; this step specifically includes the following method:
[0051] Based on the water vapor concentration properties, the fixed parameters of the trace water measuring device are determined. The fixed parameters include the composition of the filling gas, the moisture content of the filling gas, and the recognition degree of the test laser in the first cavity.
[0052] Adjust the adjustable parameters of the trace water measuring device to meet the fixed parameters; the adjustable parameters include: the holding temperature of the first chamber and the moisture stabilizer composition;
[0053] Once the fixed parameters are met, standard gas is filled into the second cavity. The optical module generates a test laser, which is reflected back into the first cavity by the first and second lenses and collected by the laser receiver to obtain the local signal of the gas to be measured.
[0054] Keep the first cavity sealed.
[0055] The gas to be measured is filled into the second cavity. The optical module generates a test laser, which is reflected back into the first cavity by the first and second lenses and collected by the laser receiver to obtain the test signal of the gas to be measured.
[0056] This solution reduces noise signals caused by environmental changes by isolating and sealing the optical module in the first and second cavities, ensuring the instrument signal is always in optimal measurement condition. The light source module can be kept at a constant temperature according to the device's measurement range. This constant temperature environment ensures the water content stabilizer in the light source module is in a state of adsorption and desorption equilibrium, preventing external environmental changes from affecting the background signal and ensuring the stability of the trace water determination device.
[0057] Through the constant temperature mechanism and moisture stabilization mechanism in the first chamber, the trace water determination device can have the best signal-to-noise ratio in different concentration ranges. In particular, the trace water determination has significant advantages in terms of accuracy, detection limit, and long-term stability in the challenging field of trace moisture measurement.
[0058] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.
Claims
1. A trace water determination device, characterized in that, include: Optical module, used to generate test laser; The first cavity is used to stabilize the moisture and temperature of the test laser to generate a background signal; the optical module is disposed in the first cavity, the first cavity is sealed to the second cavity, and the test laser can pass through the first cavity to enter the second cavity; the first cavity includes a temperature control mechanism and a moisture stabilization mechanism. The second chamber is used to fill the gas to be measured and to measure the background signal of the gas to be measured.
2. The trace water determination device according to claim 1, characterized in that, The first cavity includes a first air inlet and a first air outlet; both the first air inlet and the first air outlet are sealable air inlets. The first air inlet is located at the bottom of the first cavity; the first air outlet is located at the top of the first cavity.
3. The trace water determination device according to claim 1, characterized in that, The first cavity also includes a laser receiver for receiving test laser reflected back from the second cavity.
4. The trace water determination device according to claim 3, characterized in that, The second cavity includes a first lens and a second lens; the first lens is disposed at the beginning of the optical path of the second cavity, and the second lens is disposed at the end of the optical path of the second cavity to reflect the test laser back to the first lens.
5. The trace water determination device according to claim 4, characterized in that, The second cavity includes a second air inlet and a second air outlet; both the second air inlet and the second air outlet are sealable air ports. The second air inlet and the second air outlet are both located at the top of the second cavity; the second air inlet and the second air outlet are respectively located at the top two ends of the second cavity.
6. A trace water determination device according to claim 2 or 5, characterized in that, The sealable vent includes a sealing ring and a welded cap.
7. The trace water determination device according to claim 1, characterized in that, The constant temperature mechanism includes a temperature acquisition device and a heater; the temperature acquisition device is used to acquire the temperature inside the first cavity; the heater is used to raise the temperature inside the first cavity when the temperature is lower than a preset temperature.
8. The trace water determination device according to claim 1, characterized in that, The moisture stabilizing mechanism includes a moisture stabilizer, which has a specific shape, including granules, flakes, or strips.
9. A trace water determination system, characterized in that, The device includes a trace water measuring apparatus as described in any one of claims 1-8.