Air floating rotary table and wafer detection equipment

Abstract

The utility model relates to the technical field of rotary table equipment, in particular to an air floating rotary table and wafer detection equipment. The air floating rotary table comprises a rotary table assembly which comprises a rotary table driving mechanism and a rotary table mover, and the rotary table driving mechanism is connected with the rotary table mover and used for driving the rotary table mover to rotate around a rotating axis; the displacement assembly comprises a displacement driving mechanism and a displacement mover, and the displacement driving mechanism is connected with the displacement mover and used for driving the displacement mover to move along the rotating axis; wherein the rotary table mover is provided with a guide cavity, and the guide cavity is used for installing and guiding the movable mover; a gap is formed between the displacement mover and the cavity wall of the guide cavity, a plurality of air holes and pressure equalizing grooves are formed in the cavity wall, all the air holes are used for being connected with a high-pressure air source, and the pressure equalizing grooves correspond to the air holes in a one-to-one mode and surround the corresponding air holes. The wafer detection equipment comprises the air floating rotary table. The air floating rotary table and the wafer detection equipment provided by the utility model are relatively high in precision and stability.

Description

TECHNICAL FIELD

[0001] The utility model relates to a rotary table equipment technical field, specifically, a kind of air floatation rotary table and wafer detection equipment. BACKGROUND

[0002] Rotary table equipment has been widely used in precision instrument manufacturing, and the existing air floatation rotary table is usually driven by servo motor and shaft coupling. The air floatation bearing used in the air floatation rotary table introduces high-pressure air into the bearing cavity, and forms an air film between the bearing cavity and the rotating spindle through a pressure relief slit, so that the spindle is suspended in the air, and the rotating resistance is greatly reduced. The rotary table of this structure has the advantages of high speed, high precision, no noise, no friction, no wear and no need for lubrication.

[0003] However, the air floatation structure of the existing air floatation rotary table is not reasonable, which causes the mover part to shake horizontally during rotation, and the pitch and yaw are also large, which affects the precision and stability of the air floatation rotary table. SUMMARY

[0004] The utility model aims at providing an air floatation rotary table and wafer detection equipment to alleviate the technical problem of poor precision and stability of the existing air floatation rotary table.

[0005] The air floatation rotary table provided by the utility model comprises:

[0006] The rotary table assembly comprises a rotary table driving mechanism and a rotary table mover, the rotary table driving mechanism is connected with the rotary table mover, and is used for driving the rotary table mover to rotate around a rotation axis;

[0007] The displacement assembly comprises a displacement driving mechanism and a displacement mover, the displacement driving mechanism is connected with the displacement mover, and is used for driving the displacement mover to move along the rotation axis;

[0008] The rotary table mover has a guide cavity, the guide cavity is used for mounting and guiding the displacement mover; there is a gap between the displacement mover and the cavity wall of the guide cavity, the cavity wall is provided with a plurality of air holes and pressure equalizing grooves, each air hole is used for being connected with a high-pressure gas source, the pressure equalizing grooves correspond to the air holes one by one, and the pressure equalizing grooves are arranged around the corresponding air holes.

[0009] Preferably, as an implementable mode, the pressure equalizing grooves are cross-shaped, and the air holes are arranged at the cross center position of the pressure equalizing grooves.

[0010] Preferably, as an implementable mode, the rotation axis is vertically arranged, the pressure equalizing grooves have vertical grooves and horizontal grooves, and the length ratio of the horizontal grooves to the vertical grooves ranges from 2 to 3.

[0011] Preferably, as an implementation manner, the plurality of air holes in each of the cavity walls can enclose a rectangle, the edges of the rectangle are parallel to the edges of the cavity wall, the center of the rectangle is close to the center of the cavity wall, and the center positions of the four edges of the rectangle correspond to one air hole respectively.

[0012] The rotation axis is vertically arranged, the wide edge of the rectangle is parallel to the wide edge of the cavity wall, the long edge of the rectangle is parallel to the height of the cavity wall, the width of the cavity wall ranges from 50mm to 80mm, the height of the cavity wall ranges from 70mm to 100mm, the width of the rectangle ranges from 38mm to 45mm, and the length of the rectangle ranges from 55mm to 60mm.

[0013] Preferably, as an implementation manner, the air floating turntable further comprises a feedback element, the feedback element is used for detecting the movement amount of the moving element, and the feedback element is arranged at a modal node of the air floating turntable.

[0014] Preferably, as an implementation manner, the air floating turntable further comprises a base, the turntable assembly is mounted on the base, and the base can be placed on a bearing plane.

[0015] Preferably, as an implementation manner, the rotation axis is vertically arranged, the top of the moving element is provided with a mounting portion for mounting a load, and the mounting portion is arranged uniformly around the rotation axis.

[0016] Preferably, as an implementation manner, the top of the moving element is further provided with an annular reinforcing rib and a radial reinforcing rib, the center of the annular reinforcing rib coincides with the rotation axis, and the radial reinforcing rib is connected between the mounting portion and the annular reinforcing rib.

[0017] Preferably, as an implementation manner, the turntable driving mechanism is mounted on the periphery of the turntable element.

[0018] The wafer detection equipment provided by the utility model has the advantages that the air floating turntable is used as a carrier for mounting a wafer, the wafer can be rotated and moved in a stable and smooth manner, and the wafer can be rotated and moved in a stable and smooth manner.

[0019] Compared with the prior art, the wafer detection equipment provided by the utility model has the advantages that the air floating turntable is used as a carrier for mounting a wafer, the wafer can be rotated and moved in a stable and smooth manner, and the wafer can be rotated and moved in a stable and smooth manner.

[0020] In work, high pressure gas is delivered to each gas hole on the cavity wall of the guide cavity by a high pressure gas source, the high pressure gas can enter the gap between the guide cavity and the moving element after being sprayed out of each gas hole, and the gas film around the moving element is formed in the gap between the guide cavity and the moving element, the flexible connection between the rotating table element and the moving element can be realized by the gas film. On this basis, the rotating table element is driven to rotate around the rotation axis by the rotating table driving mechanism, the moving element in the guide cavity of the rotating table element can be driven to rotate under the action of the gas film, and the moving element can be driven to move along the rotation axis in the guide cavity by the displacement driving mechanism, so that the rotation movement of the air floating rotating table around the rotation axis and the displacement movement of the air floating rotating table along the rotation axis can be realized.

[0021] It should be noted that after the high pressure gas is sprayed out of the gas hole, the pressure equalizing groove arranged around the gas hole can improve the uniformity of the distribution of the high pressure gas, thereby improving the air floating stiffness, making the force on the moving element more balanced, relieving the shaking problem, reducing the pitch amplitude and yaw amplitude, and improving the precision and stability of the air floating rotating table.

[0022] The wafer detection equipment provided by the utility model has all the advantages of the air floating rotating table, and has high precision and stability. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description, and obviously, the drawings in the following description are only the embodiments of the utility model, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative labor.

[0024] Figure 1 The sectional structure of the air floating rotating table and the local enlarged structure schematic view thereof provided by the utility model embodiment are shown in the drawings.

[0025] Figure 2 The rotating table element structure in the air floating rotating table and the local enlarged structure schematic view thereof provided by the utility model embodiment are shown in the drawings.

[0026] Figure 3 The structure schematic view of the air floating rotating table provided by the utility model embodiment is shown in the drawings.

[0027] Figure 4 The structure schematic view of the moving element in the air floating rotating table provided by the utility model embodiment is shown in the drawings.

[0028] EXPLANATION OF REFERENCE NUMERALS:

[0029] 100 - turntable assembly; 110 - turntable driving mechanism; 111 - first stator yoke; 112 - first stator coil; 120 - turntable mover; 121 - guide cavity; 122 - air hole; 123 - pressure equalizing groove; 124 - throttling piece; 130 - turntable support plate; 140 - motor adapter plate; 150 - motor support plate;

[0030] 200 - displacement assembly; 210 - displacement driving mechanism; 211 - second stator yoke; 212 - second stator coil; 220 - displacement mover; 221 - mounting portion; 222 - annular reinforcing rib; 223 - radial reinforcing rib; 230 - displacement support plate;

[0031] 300 - feedback piece;

[0032] 400 - base. DETAILED DESCRIPTION

[0033] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0034] The present application will be described in further detail below through specific examples and in conjunction with the drawings.

[0035] Referring to Figures 1-3 The present embodiment provides a gas bearing turntable, which comprises:

[0036] The turntable assembly 100 comprises a turntable driving mechanism 110 and a turntable mover 120, the turntable driving mechanism 110 is connected with the turntable mover 120, and is used for driving the turntable mover 120 to rotate around a rotation axis;

[0037] The displacement assembly 200 comprises a displacement driving mechanism 210 and a displacement mover 220, the displacement driving mechanism 210 is connected with the displacement mover 220, and is used for driving the displacement mover 220 to move along the rotation axis;

[0038] The turntable mover 120 has a guide cavity 121, the guide cavity 121 is used for mounting and guiding the displacement mover 220; there is a gap between the displacement mover 220 and the cavity wall of the guide cavity 121, the cavity wall is provided with a plurality of air holes 122 and pressure equalizing grooves 123, each air hole 122 is used for being connected with a high-pressure gas source, the pressure equalizing grooves 123 correspond to the air holes 122 one by one, and the pressure equalizing grooves 123 are arranged around the corresponding air holes 122.

[0039] In operation, high-pressure gas is supplied to each gas hole 122 on the cavity wall of the guide cavity 121 by a high-pressure gas source, and the high-pressure gas is sprayed from each gas hole 122 into the gap between the guide cavity 121 and the moving element 220, and a gas film is formed around the moving element 220 in the gap between the guide cavity 121 and the moving element 220, which can achieve flexible connection between the turntable element 120 and the moving element 220. On this basis, the turntable driving mechanism 110 is used to drive the turntable element 120 to rotate around the rotation axis, and under the action of the gas film, the rotation of the turntable element 120 can drive the moving element 220 located in the guide cavity 121 to rotate, and the displacement driving mechanism 210 can drive the moving element 220 to move along the rotation axis in the guide cavity 121, so as to realize the rotation movement of the air-floating turntable around the rotation axis and the displacement movement along the rotation axis.

[0040] It should be noted that after the high-pressure gas is sprayed from the gas hole 122, the uniform pressure groove 123 arranged around the gas hole 122 can improve the uniformity of the distribution of the high-pressure gas, thereby improving the air-floating stiffness, making the force on the moving element 220 more balanced, and alleviating the shaking problem, reducing the pitch amplitude and yaw amplitude, and improving the precision and stability of the air-floating turntable.

[0041] Preferably, the uniform pressure groove 123 can be arranged in a cross-shaped structure, and the above-mentioned gas hole 122 can be arranged at the cross center position of the uniform pressure groove 123, and such arrangement can obtain a better uniform pressure effect, and under this condition, the spacing between adjacent gas holes 122 can be increased, thereby increasing the area of the cavity wall of the guide cavity 121 under the condition that the number of gas holes 122 remains unchanged, and further, the air-floating stiffness can be increased, and the stability of the air-floating turntable during operation can be improved. Correspondingly, the increase of the area of the cavity wall of the guide cavity 121 will make the moving element 220 become elongated.

[0042] The rotation axis is arranged vertically, the groove body corresponding to the vertical line of the cross of the uniform pressure groove 123 is defined as a vertical groove, the groove body corresponding to the horizontal line of the cross of the uniform pressure groove 123 is defined as a horizontal groove, and the length ratio of the horizontal groove to the vertical groove is set to be in the range of 2-3, and under this ratio, the uniform pressure effect of the uniform pressure groove 123 is better. Specifically, the length ratio of the horizontal groove to the vertical groove can be set to be 2.5.

[0043] In the specific structure of the guide cavity 121, a plurality of cavity walls uniformly arranged around the moving element 220 can be arranged, so that the forces in each direction on the moving element 220 are more balanced, and the pitch amplitude and yaw amplitude can be further reduced, and the precision and stability of the air-floating turntable can be improved.

[0044] Specifically, the plurality of air holes 122 in each cavity wall can enclose a rectangle, wherein the edges of the rectangle are parallel to the edges of the cavity wall, and the center of the rectangle is close to the center of the cavity wall, so that the force balance of the moving element 220 at different positions along the rotation axis direction can be improved, and the pitch amplitude and the yaw amplitude can be reduced.

[0045] Preferably, the center positions of the four edges of the rectangle correspond to the air holes 122 respectively, so that the force balance of the moving element 220 is better. Specifically, eight air holes 122 can be arranged on each cavity wall, so that the structure is not deformed due to too many air holes 122, and the support performance of the air film to the moving element 220 is not affected due to too few air holes 122.

[0046] Under the premise that the rotation axis is vertically arranged, the wide edge of the rectangle is arranged to be parallel to the wide edge of the cavity wall, and the long edge of the rectangle is arranged to be parallel to the height of the cavity wall. The width of the cavity wall is arranged to be in the range of 50-80 mm, and the height of the cavity wall is arranged to be in the range of 70-100 mm. Correspondingly, the width of the rectangle is arranged to be in the range of 38-45 mm, and the length of the rectangle is arranged to be in the range of 55-60 mm, so that better air floating stiffness can be obtained, and the stability of the air floating turntable during operation can be improved. Specifically, the width of the cavity wall can be about 70 mm, and the height can be about 84 mm. The width of the rectangle can be about 38 mm, and the length can be about 58 mm.

[0047] The feedback member 300 can also be arranged to detect the movement amount of the moving element 220 by using the feedback member 300 to realize closed-loop control. The feedback member 300 is arranged at the modal node of the air floating turntable to improve the bandwidth of the control performance and reduce the influence of pitch, yaw and lateral shaking.

[0048] The base 400 can also be arranged in the specific structure of the air floating turntable, and the turntable assembly 100 is mounted on the base 400. The base 400 can be placed on the bearing plane. When the air floating turntable is tilted as a whole, a gasket can be inserted under the base 400 to adjust the levelness of the entire air floating turntable, which is convenient to adjust.

[0049] In addition, during installation, the base 400 can be mounted on the target structure by using the adhesive or threaded connection method, without damaging the structural integrity of the main structure “turntable assembly 100 and displacement assembly 200” in the air floating turntable.

[0050] Referring to Figure 3 and Figure 4In the case of vertical arrangement of the rotation axis, the mounting portion 221 for mounting the load is arranged on the top of the displacement element 220, the mounting portion 221 is arranged in multiple, and the multiple mounting portions 221 are arranged uniformly around the rotation axis, so that the center of mass of the load is close to or coincides with the central rotation axis of the displacement element 220, which is beneficial to improve the overall stability.

[0051] Preferably, a reinforcing rib can be arranged on the top of the displacement element 220 to improve the structural strength of the displacement element 220 and improve the overall rigidity.

[0052] Further, the top of the displacement element 220 can be provided with an annular reinforcing rib 222 and a radial reinforcing rib 223, the center of the annular reinforcing rib 222 is arranged to coincide with the rotation axis, and the radial reinforcing rib 223 is connected between the mounting portion 221 and the annular reinforcing rib 222, so that the displacement element 220 has higher structural strength.

[0053] Preferably, referring to Figure 1 The turntable driving mechanism 110 can be mounted to the periphery of the turntable element 120, which is convenient for maintenance of the rotation driving mechanism 110.

[0054] The throttle 124 can be arranged in the air hole 122 to increase the gas pressure.

[0055] In the specific structure of the turntable assembly 100, a turntable support plate 130 can also be arranged, the turntable support plate 130 is mounted on the base 400, and the turntable element 120 is rotationally connected with the turntable support plate 130, so that the turntable support plate 130 supports the turntable element 120.

[0056] In the specific structure of the displacement assembly 200, a displacement support plate 230 can also be arranged, the displacement support plate 230 is mounted on the base 400, and the displacement driving mechanism 210 is connected with the displacement support plate 230, so that the displacement support plate 230 supports the displacement driving mechanism 210.

[0057] The above-mentioned turntable driving mechanism 110 can include a first stator yoke 111 and a first stator coil 112; the above-mentioned displacement driving mechanism 210 can include a second stator yoke 211 and a second stator coil 212.

[0058] In the specific structure of the turntable assembly 100, a motor adapter plate 140 and a motor support plate 150 can also be arranged.

[0059] The embodiment also provides a wafer detection device, which includes the above-mentioned air floating turntable.

[0060] The wafer detection device provided by the embodiment has all the advantages of the above-mentioned air floating turntable, and has high precision and stability.

[0061] In the description of the utility model, it is necessary to explain that the orientation or positional relation indicated by the terms "vertical", "horizontal" and the like is based on the orientation or positional relation shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0062] In the description of the utility model, it is necessary to explain that, unless otherwise explicitly specified and limited, the terms "mounting", "connection" should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0063] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical scheme of the utility model, and not to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical scheme recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical scheme deviate from the scope of the technical scheme of the embodiments of the utility model.

Claims

1. An air flotation turntable, characterized in that, include: A turntable assembly (100) includes a turntable drive mechanism (110) and a turntable mover (120), wherein the turntable drive mechanism (110) is connected to the turntable mover (120) and is used to drive the turntable mover (120) to rotate about a rotation axis; The displacement assembly (200) includes a displacement driving mechanism (210) and a position mover (220), wherein the displacement driving mechanism (210) is connected to the position mover (220) and is used to drive the position mover (220) to move along the rotation axis; The turntable mover (120) has a guide cavity (121) for mounting and guiding the position mover (220). There is a gap between the position mover (220) and the cavity wall of the guide cavity (121). The cavity wall is provided with a plurality of air holes (122) and pressure equalization grooves (123). Each air hole (122) is used to connect to a high-pressure air source. The pressure equalization grooves (123) correspond one-to-one with the air holes (122) and are arranged around the corresponding air holes (122).

2. The air flotation turntable according to claim 1, characterized in that, The equalizing groove (123) is cross-shaped, and the air hole (122) is located at the center of the cross of the equalizing groove (123).

3. The air flotation turntable according to claim 2, characterized in that, The rotation axis is set vertically, and the pressure equalization groove (123) has a vertical groove and a horizontal groove. The length ratio of the horizontal groove to the vertical groove is in the range of 2 to 3.

4. The air flotation turntable according to claim 1, characterized in that, The plurality of air holes (122) in each cavity wall can form a rectangle, the sides of the rectangle are parallel to the sides of the cavity wall, and the center of the rectangle is close to the center of the cavity wall. The center positions of the four sides of the rectangle correspond to an air hole (122). The rotation axis is vertically oriented; the wide side of the rectangle is parallel to the wide side of the cavity wall, and the long side of the rectangle is parallel to the height of the cavity wall; the width of the cavity wall ranges from 50 to 80 mm, and the height of the cavity wall ranges from 70 to 100 mm; the width of the rectangle ranges from 38 to 45 mm, and the length of the rectangle ranges from 55 to 60 mm.

5. The air flotation turntable according to claim 1, characterized in that, The air-bearing turntable also includes a feedback element (300), which is used to detect the amount of motion of the position mover (220). The feedback element (300) is located at the modal node of the air-bearing turntable.

6. The air flotation turntable according to claim 1, characterized in that, The air flotation turntable also includes a base (400), the turntable assembly (100) is mounted on the base (400), and the base (400) can be placed flat on the bearing plane.

7. The air flotation turntable according to claim 1, characterized in that, The rotation axis is vertically arranged, and the top of the displacement element (220) is provided with a mounting part (221) for mounting a load. There are multiple mounting parts (221) and they are evenly arranged around the rotation axis.

8. The air flotation turntable according to claim 7, characterized in that, The top of the position mover (220) is provided with an annular reinforcing rib (222) and a radial reinforcing rib (223). The center of the annular reinforcing rib (222) coincides with the rotation axis, and the radial reinforcing rib (223) is connected between the mounting part (221) and the annular reinforcing rib (222).

9. The air flotation turntable according to any one of claims 1-8, characterized in that, The turntable drive mechanism (110) is mounted on the periphery of the turntable mover (120).

10. A wafer inspection device, characterized in that, Includes the air-float turntable as described in any one of claims 1-9.

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