Purging structure for replacing source bottle

Abstract

The utility model discloses a source bottle replacement purging structure which comprises a source bottle, a control valve, a ventilation pipeline, an exhaust pipeline, a carrier gas pipeline and a mixed gas pipeline, an air inlet hand valve and an air outlet hand valve are arranged on the source bottle, a third valve is arranged at the air inlet end of the exhaust pipeline, and a first valve is arranged at the air outlet end of the exhaust pipeline; a second valve is arranged at the gas inlet end of the carrier gas pipeline, and the gas outlet end of the carrier gas pipeline is connected with a gas inlet hand valve; one end of the mixed gas pipeline is connected with the gas outlet hand valve; a fifth valve is arranged on the ventilation pipeline connected with the exhaust pipeline; the control valve comprises a normally open first valve port and a second valve port which can be opened and closed, the first valve port is arranged on the mixed gas pipeline, and the second valve port is connected with the carrier gas pipeline and the mixed gas pipeline. The pipelines of the structure are communicated, gas continuously flows during purging, purging efficiency is improved, purging times are reduced, branches of the carrier gas pipeline are greatly shortened, and pipeline cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to pipeline purging technical field especially, it is a kind of replacement source bottle purging structure. BACKGROUND

[0002] With the development of technology, there are more and more organic sources as reaction gas. They are different from general special gas, such as hydrogen argon gas, which can be directly introduced into the cavity through gas pipeline. At normal temperature, they can be solid or liquid, and cannot be used in general way to enter the reactor for reaction. It needs to be bubbled by carrier gas, and converted from liquid state to saturated vapor state, and then enter the reaction cavity with carrier gas. When the organic source in the source bottle is used for a certain amount, the source bottle needs to be replaced, and air will enter the pipeline during this process. Dust and water vapor in the air are easy to affect the original gas atmosphere. If there is residual gas in the pipeline, the source reacts with air, pollutes the pipeline, and may seriously harm people. SUMMARY

[0003] In view of the above technical problems, the utility model aims at providing a source bottle purging structure for purging the pipeline after replacing the source bottle.

[0004] To achieve the above purpose, the utility model provides the following technical scheme:

[0005] A source bottle purging structure, comprising a source bottle, a control valve, an air pipeline, an exhaust pipeline, a carrier gas pipeline and a mixed gas pipeline, the source bottle is provided with an air inlet hand valve and an air outlet hand valve, the air inlet end of the exhaust pipeline is provided with a third valve, and the air outlet end of the exhaust pipeline is provided with a first valve; The air inlet end of the carrier gas pipeline is provided with a second valve, and the air outlet end of the carrier gas pipeline is connected with the air inlet hand valve; One end of the mixed gas pipeline is connected with the air outlet hand valve, and the other end is communicated with the exhaust pipeline; The air pipeline connected with the exhaust pipeline is provided with a fifth valve; The control valve comprises a normally open first valve port and a second valve port that can be opened and closed, the first valve port is arranged on the mixed gas pipeline, the second valve port is connected with the carrier gas pipeline and the mixed gas pipeline, the second valve port is closed when the control valve is in closed state, and the second valve port is opened when the control valve is in open state.

[0006] Preferably, a first purge state, a second purge state and a third purge state are included, in the first purge state, the first valve is kept open, the control valve is kept open, the second valve is kept closed, the third valve is kept closed, and the outlet hand valve and the inlet hand valve are kept closed; in the second purge state, the first valve is kept closed, the control valve is kept open, the second valve is kept open, the third valve is kept closed, and the outlet hand valve and the inlet hand valve are kept closed; in the third purge state, the first valve is kept open, the control valve is kept open, the second valve is kept open, the third valve is kept closed, and the outlet hand valve and the inlet hand valve are kept closed.

[0007] Preferably, a vacuum device is connected to the outlet end of the exhaust pipeline.

[0008] Preferably, a first flow controller is arranged at the end of the exhaust pipeline close to the third valve, and a second flow controller is arranged at the end of the carrier gas pipeline close to the second valve.

[0009] Preferably, a purge gas pipeline connected to the carrier gas pipeline is arranged at the front end of the second valve.

[0010] Thanks to the technical scheme, the present application has the following advantages over the prior art:

[0011] The present application provides a source bottle purge structure, which comprises a source bottle, a control valve, an air pipeline, an exhaust pipeline, a carrier gas pipeline and a mixed gas pipeline, the source bottle is provided with an inlet hand valve and an outlet hand valve, the exhaust pipeline is provided with a third valve at the inlet end, and the exhaust pipeline is provided with a first valve at the outlet end; the carrier gas pipeline is provided with a second valve at the inlet end, and the outlet end of the carrier gas pipeline is connected to the inlet hand valve; one end of the mixed gas pipeline is connected to the outlet hand valve, and the other end of the mixed gas pipeline is connected to the exhaust pipeline; the air pipeline connected to the exhaust pipeline is provided with a fifth valve; the control valve comprises a first valve port which is always open and a second valve port which can be opened and closed, the first valve port is arranged on the mixed gas pipeline, the second valve port is connected to the carrier gas pipeline and the mixed gas pipeline, the second valve port is closed when the control valve is in a closed state, and the second valve port is opened when the control valve is in an open state, the pipelines of the source bottle purge structure are connected, so that there is no gas dead zone, the gas continuously flows when purging, the purging efficiency is improved, the purging frequency is reduced, the branches of the carrier gas pipeline are greatly shortened, the pipeline cost is reduced, and the bubbling efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0012] The technical scheme of the present application will be further described below with reference to the drawings:

[0013] ATTACHED Figure 1 The present application provides a source bottle purge structure, which comprises a source bottle, a control valve, an air pipeline, an exhaust pipeline, a carrier gas pipeline and a mixed gas pipeline, the source bottle is provided with an inlet hand valve and an outlet hand valve, the exhaust pipeline is provided with a third valve at the inlet end, and the exhaust pipeline is provided with a first valve at the outlet end; the carrier gas pipeline is provided with a second valve at the inlet end, and the outlet end of the carrier gas pipeline is connected to the inlet hand valve; one end of the mixed gas pipeline is connected to the outlet hand valve, and the other end of the mixed gas pipeline is connected to the exhaust pipeline; the air pipeline connected to the exhaust pipeline is provided with a fifth valve; the control valve comprises a first valve port which is always open and a second valve port which can be opened and closed, the first valve port is arranged on the mixed gas pipeline, the second valve port is connected to the carrier gas pipeline and the mixed gas pipeline, the second valve port is closed when the control valve is in a closed state, and the second valve port is opened when the control valve is in an open state, the pipelines of the source bottle purge structure are connected, so that there is no gas dead zone, the gas continuously flows when purging, the purging efficiency is improved, the purging frequency is reduced, the branches of the carrier gas pipeline are greatly shortened, the pipeline cost is reduced, and the bubbling efficiency is improved.

[0014] Appendix Figure 2 This is a schematic diagram of another embodiment of the source bottle replacement purging structure of this utility model.

[0015] The components are: 1. Source bottle; 2. Control valve; 3. Exhaust pipe; 4. Carrier gas pipe; 5. Mixed gas pipe; 6. Inlet manual valve; 7. Outlet manual valve; 8. Third valve; 9. First valve; 10. Second valve; 11. Ventilation pipe; 12. Fifth valve; 13. Flow controller; 14. Purge gas pipe; 15. Second flow controller. Detailed Implementation

[0016] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0017] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0018] As attached Figure 1 The diagram shows the replacement source bottle purging structure of this utility model, including a source bottle 1, a control valve 2, a ventilation pipe 11, an exhaust pipe 3, a carrier gas pipe 4, and a mixed gas pipe 5. The source bottle 1 is equipped with an inlet manual valve 6 and an outlet manual valve 7. A third valve 8 is installed at the inlet end of the exhaust pipe 3, and a first valve 9 is installed at the outlet end. A second valve 10 is installed at the inlet end of the carrier gas pipe 4, and the outlet end of the carrier gas pipe 4 is connected to the inlet manual valve 6. One end of the mixed gas pipe 5 is connected to the outlet manual valve 7, and the other end is connected to the exhaust pipe 3. A fifth valve 12 is installed on the ventilation pipe 11 connected to the exhaust pipe 3. The control valve 2 includes a normally open first valve port and an openable / closable second valve port. The first valve port is located on the mixed gas pipe 5, and the second valve port connects the carrier gas pipe 4 and the mixed gas pipe 5. When the control valve 2 is in the closed state, the second valve port is closed; when the control valve 2 is in the open state, the second valve port is open. Among them, the first valve 9, the second valve 10, the third valve 8, and the fifth valve 12 are all pneumatic valves, while the control valve 2 is a manual valve.

[0019] The purge structure includes a first purge state, a second purge state and a third purge state. In the first purge state, the first valve 9 is kept open, the control valve 2 is kept open, the second valve 10 is kept closed, the third valve 8 is kept closed, the outlet hand valve 7 and the inlet hand valve 6 are kept closed; in the second purge state, the first valve 9 is kept closed, the control valve 2 is kept open, the second valve 10 is kept open, the third valve 8 is kept closed, the outlet hand valve 7 and the inlet hand valve 6 are kept closed; in the third purge state, the first valve 9 is kept open, the control valve 2 is kept open, the second valve 10 is kept open, the third valve 8 is kept closed, the outlet hand valve 7 and the inlet hand valve 6 are kept closed.

[0020] The outlet end of the exhaust pipeline 3 is connected with a vacuum device, which keeps the mixed gas pipeline 5 and the carrier gas pipeline 4 in vacuum in the first state.

[0021] The purge structure further includes a ventilation pipeline 11, which is communicated with the exhaust pipeline 3, and the fifth valve 12 is installed on the ventilation pipeline 11.

[0022] The first flow controller 13 is installed on the exhaust pipeline 3 near the third valve 8, and the second flow controller 15 is installed on the carrier gas pipeline 4 near the second valve 10, so as to adjust the gas flow to keep it in a set range.

[0023] In the embodiment, the gas in the carrier gas pipeline 4 is hydrogen, and in other embodiments, other suitable gases can also be introduced into the carrier gas pipeline 4.

[0024] As shown in the accompanying drawings, Figure 2 the front end of the second valve 10 has a purge gas pipeline 14 connected with the carrier gas pipeline 4, and other gases can be introduced instead of the carrier gas for purging, so as to save cost.

[0025] The purge process is as follows:

[0026] S1. Open the first valve 9, open the control valve 2, close the second valve 10, close the third valve 8, close the fifth valve 12, close the outlet hand valve 7 of the source bottle 1, close the inlet hand valve 6 of the source bottle 1, so that the mixed gas pipeline 5 and the carrier gas pipeline 4 are communicated and in vacuum;

[0027] S2. Close the first valve 9, open the control valve 2, open the second valve 10, the first flow controller 13 provides flow, close the third valve 8, close the fifth valve 12, close the outlet hand valve 7 of the source bottle 1, close the inlet hand valve 6 of the source bottle 1, stop after the gas is introduced and the pressure rises to the working pressure;

[0028] S3. Repeat S1 and S2 for 25 times;

[0029] S4. open the first valve 9, open the control valve 2, open the second valve 10, the second flow controller 15 provides flow, close the third valve 8, close the fifth valve 12, close the gas outlet hand valve 7 of the source bottle 1, close the gas inlet hand valve 6 of the source bottle 1, stop after blowing for 10 minutes;

[0030] S5. Repeat S1, S2 steps 20 times.

[0031] The pipeline of the source bottle blowing structure is connected, and there is no gas dead zone, the use instrument detection is converted into current value through the moisture value, the moisture removal rate is improved by 3 times, the gas continuously flows during blowing, the blowing efficiency is improved by 5 times, the blowing frequency is reduced, the branch of the carrier gas pipeline is greatly shortened, the pipeline cost is reduced, and the bubbling efficiency is improved.

[0032] The above is only an embodiment of the utility model, and does not limit the patent range of the utility model, and equivalent structures or equivalent process transformations using the utility model specification content, or direct or indirect application in other related technical fields, are also included in the patent protection range of the utility model.

Claims

1. A changeover source bottle purge structure, characterized by: The source bottle is provided with an air inlet hand valve and an air outlet hand valve, the air inlet end of the exhaust pipeline is provided with a third valve, and the air outlet end of the exhaust pipeline is provided with a first valve; the air inlet end of the carrier gas pipeline is provided with a second valve, and the air outlet end of the carrier gas pipeline is connected with the air inlet hand valve; one end of the mixed gas pipeline is connected with the air outlet hand valve, and the other end is communicated with the exhaust pipeline; the ventilation pipeline connected with the exhaust pipeline is provided with a fifth valve; the control valve includes a first valve port which is always open and a second valve port which can be opened and closed, the first valve port is arranged on the mixed gas pipeline, the second valve port is connected with the carrier gas pipeline and the mixed gas pipeline, the second valve port is closed when the control valve is in a closed state, and the second valve port is opened when the control valve is in an open state.

2. The change source bottle purge structure of claim 1, wherein: The first valve is kept open, the control valve is kept open, the second valve is kept closed, the third valve is kept closed, and the air outlet hand valve and the air inlet hand valve are kept closed in the first purge state; the first valve is kept closed, the control valve is kept open, the second valve is kept open, the third valve is kept closed, and the air outlet hand valve and the air inlet hand valve are kept closed in the second purge state; the first valve is kept open, the control valve is kept open, the second valve is kept open, the third valve is kept closed, and the air outlet hand valve and the air inlet hand valve are kept closed in the third purge state.

3. The change source bottle purge structure of claim 1, wherein: The air outlet end of the exhaust pipeline is connected with a vacuum device.

4. The change source bottle purge structure of claim 1, wherein: The exhaust pipeline is provided with a first flow controller at one end close to the third valve, and the carrier gas pipeline is provided with a second flow controller at one end close to the second valve.

5. The change source bottle purge structure of claim 1, wherein: The front end of the second valve is provided with a purge gas pipeline connected with the carrier gas pipeline.

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