Wafer detection assembly and wafer loading system

Abstract

The utility model discloses a wafer detection assembly, comprising a detection support having at least two groups of installation parts and a connection part, each group of installation parts comprising two installation grooves oppositely arranged along a left-right direction, and a detection member comprising a transmitting terminal and a receiving terminal which are respectively arranged in the two installation grooves of one group of installation parts; the transition plate is provided with a mounting area; the translation part is arranged in the mounting area and horizontally drives the detection support to move in the direction close to or away from the wafer conveying box, the translation part comprises an electric cylinder and a push plate, the telescopic end of the electric cylinder is fixedly connected with one end of the push plate, the electric cylinder is mounted on the transition plate, and the push plate is fixedly connected with the transition plate. One end of the push plate is fixedly connected with the telescopic end, the other end of the push plate is fixedly connected with the connecting part, a sliding rail is arranged on the electric cylinder in the moving direction of the telescopic end, a sliding plate is slidably connected to the sliding rail, and the push plate is fixedly connected with the sliding plate. According to the scheme, the wafer detection safety is improved, and detection errors are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor equipment technical field especially relates to a wafer detection subassembly and wafer loading and detection integrated system. BACKGROUND

[0002] In the semiconductor production process, the wafer needs to be frequently converted between clean and super-clean environment, and in the conversion process, in order to ensure that the wafer is not attached to the particle, the wafer loading device is used as the input and output of the environment conversion, that is to say, the wafer loading device is the external equipment of the wafer, which is installed in front of the front-end module and used as the window of the wafer into and out of the wafer transmission equipment, realizing the wafer carrying between the track of the production workshop and the processing equipment. The loading port is the medium between the front-end module and the internal wharf, and the operation of the automatic material handling system in the semiconductor factory is to assist the wafer to shuttle between different operation areas according to its processing path. After the wafer operation is completed in a certain operation area, the wafer is transmitted to the internal wharf handling system through the loading port in front of the front-end module, and then the transmission destination is determined according to the next operation area. If the destination is in a different operation area, the wafer box is first stored in the storage, then transmitted to the storage of the destination through the intermediate wharf system, and finally the internal wharf system of the destination transmits the wafer box to the loading port of the front-end module of the semiconductor equipment, so that the wafer can smoothly enter the process cavity for processing.

[0003] The wafer loading port is used for loading, and the front opening wafer transfer box is a front opening wafer transfer box. The specific working steps of the wafer box loading and unloading of the loading port are as follows: the automatic handling system or manual handling wafer box to the loading platform, the clamping mechanism on the loading platform locks the wafer box, the box opening device adsorbs or clamps the wafer box door, the wafer box door is separated from the wafer box, the detection mechanism moves along the vertical direction and scans and detects the wafer in the box, the wafer is carried by the transport manipulator, the wafer box door and the wafer box are combined by the box opening device after the wafer in the box is carried, the wafer box is unlocked by the clamping mechanism, and the wafer box is manually or automatically carried away by the automatic handling system.

[0004] However, in the prior art, the support of the reflection sensor is usually driven by a cylinder to swing around a rotation center, so that the reflection sensor swings towards the wafer box, extends into the wafer box, and detects the wafer placement information in the wafer box. The cylinder drives in the form of a lever, but the cylinder beat is uncontrollable, so the linear output cannot be controlled. In addition, since the force arm of the reflection sensor support is relatively long, the tail of the reflection sensor support is prone to shake violently under the condition of the limit output or the fast output of the cylinder, resulting in detection error, and even causing damage to the reflection sensor.

[0005] Therefore, it is necessary to provide a wafer detection subassembly and a wafer loading system to solve the above problems existing in the prior art. UTILITY MODEL CONTENT

[0006] The utility model discloses a wafer detection assembly and wafer loading system improve the security of wafer detection, avoid the appearance detection error.

[0007] In order to realize above-mentioned purpose, the technical scheme of the utility model is as follows:

[0008] A wafer detection assembly detects the wafer in the wafer conveying box, comprising:

[0009] Detection support has at least two groups of installation parts and a connecting part, and each group of installation parts includes two installation grooves oppositely arranged along the left and right directions,

[0010] Detection piece includes the emission end and the receiving end and is arranged in the two installation grooves of one group of installation parts respectively;

[0011] Transition plate has at least one installation area;

[0012] Translation piece is arranged in the installation area, and the detection support is driven to move in the direction of approaching or moving away from the wafer conveying box in horizontal mode, and the translation piece includes an electric cylinder and a push plate, one end of the push plate is fixedly connected with the telescopic end of the electric cylinder, the electric cylinder is installed on the transition plate, the other end of the push plate is fixedly connected with the connecting part, a slide rail is arranged on the electric cylinder along the moving direction of the telescopic end, a sliding plate is slidably connected on the slide rail, and the push plate is fixedly connected with the sliding plate;

[0013] Lifting piece has lifting end, and the lifting end is fixedly connected with the transition plate, and the lifting piece is used to drive the lifting end to move along the height direction.

[0014] The utility model discloses a wafer detection assembly has the beneficial effect that: through adopting electric cylinder drive detection support and carrying out translation operation, avoid the problem of shaking and vibration caused by long force arm or uncontrollable beat in traditional cylinder drive.Electric cylinder linear output characteristic ensures that the motion path of the ultrasonic sensor support is kept stable and has no deviation when moving along the thickness direction, thereby reducing the risk of shaking of the tail of the detection support and significantly improving the detection accuracy.The lifting end of the lifting piece can drive the transition plate to move along the height direction, so that the position of the detection piece is adjustable, and then the wafers of different placement heights in the wafer conveying box can be inspected.In addition, compared with the swing mode motion of the ultrasonic sensor support driven by the cylinder in the traditional technology, the sensor detection position is easy to deviate or have detection error due to the too large swing amplitude during detection.The electric cylinder drive support translation of the utility model makes the sensor detection direction more accurate and reliable, effectively improves the detection accuracy.In addition, two groups of installation parts are arranged on the detection support, and two groups of installation grooves are adaptively arranged, so that the distance between the emission end and the receiving end can be adjusted, and then the wafers of different diameters can be detected.

[0015] Further, the detection member comprises a pair of emitting and receiving ends for emitting and receiving light beams, respectively, and the emitting and receiving ends extend out of the detection bracket.

[0016] Further, the lifting member comprises a driving motor, a transmission member and a screw-nut pair mechanism, the driving motor is in transmission connection with the transmission member, the transmission member is used for transmitting kinetic energy of the driving motor to the screw-nut pair mechanism, the screw-nut pair mechanism has a screw nut seat and a screw rod, the screw nut seat is connected with the transition plate, and the screw-nut pair mechanism can drive the screw nut seat to move along the length direction of the screw rod.

[0017] Further, the driving motor is located at one end of the transition plate, the screw-nut pair mechanism is located at the other end of the transition plate, the transmission member comprises a driving wheel, a driven wheel and a synchronous belt, the driving wheel is coaxially arranged with the rotating shaft of the driving motor, and the synchronous belt is in transmission cooperation with the driving wheel and the driven wheel.

[0018] Further, the screw-nut pair mechanism further comprises a fixing seat, a supporting seat and a screw nut, both ends of the screw rod are rotationally connected with the fixing seat and the supporting seat, respectively, the screw rod is in threaded connection with the screw nut, and the screw nut is fixedly connected with the screw nut seat.

[0019] Further, one side of the transition plate is further provided with a shielding plate, the shielding plate partially extends out of the transition plate, further comprises a first limit position sensor and a second limit position sensor, the first limit position sensor and the second limit position sensor are arranged in parallel to the extension direction of the screw rod, and the shielding plate can shield light beams emitted by the first limit position sensor and the second limit position sensor.

[0020] Further, further comprises a first deceleration position sensor and a second deceleration position sensor, the first deceleration position sensor and the second deceleration position sensor are arranged in parallel to the extension direction of the screw rod, the first deceleration position sensor and the second deceleration position sensor are located between the first limit position sensor and the second limit position sensor, respectively, and the shielding plate can shield light beams emitted by the first deceleration position sensor and the second deceleration position sensor.

[0021] In the second aspect, the utility model provides a wafer loading system, including above -mentioned one kind of wafer detection subassembly, including main part and frame, the frame has the transmission port that can pass through the wafer in wafer transmission box, the frame is installed on the main part.

[0022] Further, an activity door is arranged close to the detection support, the activity door comprises a power component capable of driving the activity door to move, and the power component is installed on the transition plate.

[0023] Further, the frame is provided with a track along the length direction, and the track is in sliding connection with the transition plate. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a structure schematic view of the detection assembly of the embodiment of the utility model;

[0025] Figure 2 It is a schematic view of the wafer loading system of the embodiment of the utility model

[0026] Figure 3 It is a structure schematic view of the lifting component of the embodiment of the utility model;

[0027] Figure 4 It is a structure schematic view of the screw nut pair of the embodiment of the utility model;

[0028] Figure 5 It is a structure schematic view of the activity door and the detection assembly of the embodiment of the utility model;

[0029] Figure 6 It is a structure schematic view of the back of the activity door of the embodiment of the utility model;

[0030] Figure 7 It is a structure schematic view of the transition plate of the embodiment of the utility model;

[0031] Figure 8 It is a multi-region schematic view of the transition plate of the embodiment of the utility model.

[0032] Sign meaning: 1, detection support; 11, opposite type sensor; 111, transmitting end; 112, receiving end; 12, connecting portion; 13, installation slot; 2, translation component; 21, electric cylinder; 22, push plate; 23, transition plate; 24, moving seat; 231, first region; 232, second region; 233, third region; 234, fourth region; 24, slide rail; 25, slide plate; 3, lifting component; 31, driving motor; 32, screw nut seat; 33, screw rod; 34, driving wheel; 35, driven wheel; 36, synchronous belt; 37, fixed seat; 38, support seat; 39, track; 4, shielding plate; 41, first limit position sensor; 42, second limit position sensor; 43, first deceleration position sensor; 44, second deceleration position sensor; 5, main body; 51, frame; 6, activity door; 7, power component; 8, operation table. DETAILED DESCRIPTION

[0033] For the purpose, technical scheme and advantages of the embodiments of the present application to be clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning understood by those skilled in the art to which the present application belongs. The "comprising" and similar words used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, without excluding other elements or objects.

[0034] The technical scheme of the present application will be described below with reference to the accompanying drawings Figure 1 - The accompanying drawings Figure 8 The specific embodiments of the present application will be further described in detail.

[0035] In a first aspect, with reference to Figures 1-3 The present application provides a wafer detection assembly, which comprises a detection support 1, a translation member 2 and a lifting member 3.

[0036] With reference to Figure 1 The upper end of the detection support 1 is provided with a detection member, which is used to detect the wafer in the wafer transfer box. The detection support 1 is in an upside-down "convex" shape, and the detection member is located at one end of the detection support 1 with a larger width. In particular, the detection member adopts a reflection type sensor 11, which is installed at the bottom of the upper end of the detection support 1. The reflection type sensor 11 comprises a transmitting end 111 and a receiving end 112, which are respectively used to transmit and receive light beams. Both the transmitting end 111 and the receiving end 112 extend out of the detection support 1. The space between the transmitting end 111 and the receiving end 112 is a detection space. When the edge of the wafer is located in the detection space, the edge of the wafer will block the light beam emitted by the transmitting end 111, thereby causing the receiving end 112 to be unable to receive the light beam. At this time, it is proved that the wafer is in place. If the light beam emitted by the transmitting end 111 is not blocked, and the receiving end 112 receives the light beam, it means that the wafer in this area is not in place.

[0037] With reference to Figure 1 The detection support 1 has at least two groups of mounting portions and a connecting portion 12. Each group of mounting portions comprises two mounting grooves 13 arranged opposite to each other in the left-right direction. By opening two groups of mounting portions and two groups of mounting grooves 13 on the detection support 1, the distance between the transmitting end 111 and the receiving end 112 can be adjusted, thereby adapting to the detection of wafers with different diameters.

[0038] The translation member 2 is used for driving the detection support 1 to move along the thickness direction, that is, to move in the front-back direction. The translation member 2 comprises an electric cylinder 21, a push plate 22 and a transition plate 23, the telescopic end of the electric cylinder 21 is fixedly connected with one end of the push plate 22, the electric cylinder 21 is installed on the transition plate 23, the other end of the push plate 22 is fixedly connected with the detection support 1, a sliding rail 24 is arranged on the electric cylinder 21 along the moving direction of the telescopic end, a sliding plate 25 is slidably connected with the sliding rail 24, and the push plate 22 is fixedly connected with the sliding plate 25. In the embodiment, a moving seat 24 is connected with the push plate 22, and the moving seat 24 is fixedly connected with the detection support 1. The design of the connecting portion 12 facilitates the push plate 22 to connect the detection support 1 through the connecting portion 12, and improves the translation stability.

[0039] The lifting member 3 has a lifting end, the lifting end is fixedly connected with the transition plate 23, and the lifting member 3 is used for driving the lifting end to move along the height direction. The lifting end of the lifting member 3 can drive the transition plate 23 to move along the height direction, so that the position of the detection member is adjustable, and then the wafers with different placing heights in the wafer transfer box can be detected.

[0040] With reference to Figures 3-8 Specifically, during work, the box body of the wafer transfer box is separated from the box door, after the wafer transfer box is opened, first, the transmission sensor 11 of the detection assembly is driven by the lifting member 3 to move downward to the same height as the wafer transfer box, then the sliding plate 25 is driven by the electric cylinder 21 to slide along the track 39. The sliding plate 25 drives the moving seat 24 to move in the front-back direction through the push plate 22, and the transmission sensor 11 is driven by the detection support 1 to move in the front-back direction through the moving seat 24. Since the transmission sensor 11 extends from the detection support 1, the detection support 1 moves forward to drive the transmission end 111 and the receiving end 112 to extend into the wafer transfer box. Then, the transmission sensor 11 is driven by the lifting member 3 to move downward to detect the wafers in the wafer transfer box, and the wafer placing information in the wafer box is detected. After all the wafers in the wafer transfer box are detected, the transmission sensor 11 on the detection support 1 is driven by the electric cylinder 21 to move backward to drive the wafer transfer box, and then the detection assembly is driven by the lifting assembly to move downward to complete the detection action.

[0041] The electric cylinder 21 is used for driving the transmission sensor support to move in translation, and the shaking and vibration problems caused by the long force arm or uncontrollable beat in the traditional cylinder driving are avoided. The linear output characteristics of the electric cylinder 21 ensure that the transmission sensor support keeps a stable and non-deviated movement path when moving along the thickness direction. Compared with the traditional technology that the transmission sensor support is driven by the cylinder to move in a swing manner, the sensor detection direction is more accurate and reliable, and the detection precision is effectively improved.

[0042] In some other embodiments of the utility model, the lifting piece 3 includes driving motor 31, transmission part and screw nut pair mechanism. Driving motor 31 adopts servo motor, driving motor 31 is connected with transmission part transmission, and transmission part is used to transmit the kinetic energy of driving motor 31 to screw nut pair mechanism. Screw nut pair mechanism has screw nut seat 32 and screw rod 33, and screw nut seat 32 is connected with transition plate 23, and screw nut pair mechanism can drive screw nut seat 32 to move along the length direction of screw rod 33. Specifically, driving motor 31 is located at one end of transition plate 23, screw nut pair mechanism is located at the other end of transition plate 23, transmission part includes driving wheel 34, driven wheel 35 and synchronous belt 36, driving wheel 34 is coaxially arranged with the rotating shaft of driving motor 31, and synchronous belt 36 is used for driving wheel 34 and driven wheel 35 transmission cooperation.

[0043] In the embodiments of the utility model, screw nut pair mechanism further includes fixed seat 37, support seat 38 and screw nut, both ends of screw rod 33 are rotationally connected with fixed seat 37 and support seat 38 respectively, screw rod 33 is screw threadedly connected with screw nut, and screw nut is fixedly connected with screw nut seat 32. Specifically, the rotor end of driving motor 31 drives driving wheel 34 to rotate, driving wheel 34 drives from the belt wheel to rotate through synchronous belt 36, driven wheel 35 drives screw rod 33 to rotate through shaft coupling, screw nut is screw threadedly connected with screw rod 33, and screw nut is lifted or lowered along screw rod 33 under the action of screw threadedly connected with screw rod 33, further drives transition plate 23 to be lifted or lowered, and the lifting of the detection assembly on transition plate 23 is realized.

[0044] The side of transition plate 23 is further provided with shielding plate 4, shielding plate 4 partially extends transition plate 23, further includes first limit position sensor 41 and second limit position sensor 42, first limit position sensor 41 and second limit position sensor 42 are arranged parallel to the extension direction of screw rod 33, and shielding plate 4 can shield the light beams emitted by first limit position sensor 41 and second limit position sensor 42. When shielding plate 4 further moves to first limit position sensor 41 or second limit position sensor 42, the light beam is shielded, and the external control system triggers stop logic immediately. Through this design, it is ensured that lifting piece 3 stops lifting action quickly when reaching the boundary position, thereby preventing overshoot, avoiding border crossing or collision.

[0045] In some embodiments of the utility model, still include first deceleration position sensor 43 and second deceleration position sensor 44, first deceleration position sensor 43 and second deceleration position sensor 44 are arranged in parallel with the extension direction of screw rod 33, first deceleration position sensor 43 and second deceleration position sensor 44 are located between first limit position sensor 41 and second limit position sensor 42 respectively, and the light beam emitted by first deceleration position sensor 43 and second deceleration position sensor 44 can be shielded by shielding plate 4.Shielding plate 4 is installed on one side of transition plate 23 and moves along with the movement of the lifting part.When approaching the end of the preset movement range, when shielding plate 4 passes through first deceleration position sensor 43 or second deceleration position sensor 44, the sensor detects that the light beam is shielded, and the control system triggers the deceleration logic.At this time, the speed of lifting part 3 can be controlled to reduce, to prepare for approaching the limit position and avoid impact caused by movement inertia.During the whole lifting process, shielding plate 4 protects the stable operation of opposite type sensor 11 in a non-contact manner, and reduces the collision risk of mechanical parts and the damage possibility of the sensor.

[0046] In the second aspect, the utility model provides a wafer loading system, including above -mentioned one kind of wafer detection subassembly, including main part 5 and frame 51, frame 51 has the transmission port that can pass through the wafer in wafer conveying box, frame 51 is installed on main part 5.Frame 51 is installed with track 39, and track 39 is slidably connected with transition plate 23, and the design of track 39 further ensures the lifting balance of lifting part 3.

[0047] In some embodiments of the utility model, movable door 6 is arranged close to detection support 1, movable door 6 includes power part 7 capable of driving movable door 6 to move, and power part 7 is installed on transition plate 23.The cooperation of movable door 6 and power part 7 can unlock the door of wafer conveying box and remove the door, which facilitates the detection end of the subsequent detection subassembly to extend into the box and detect the placement of wafers in the wafer conveying box.

[0048] In some embodiments of the utility model, the driving source of the detection subassembly, such as electric cylinder 21 of the detection subassembly and power part 7 of movable door 6, are integrated on the same transition plate 23 and rise or fall along with lifting part 3.Specifically, transition plate 23 includes first area 231, second area 232, third area 233 and fourth area 234, first area 231 is used for fixing and accommodating power part 7 of movable door 6, second area 232 accommodates the driving source electric cylinder 21 of the detection subassembly, third area 233 is the fixing area of the sliding block during the lifting process of transition plate 23 and lifting part 3, and fourth area 234 is the fixed area between transition plate 23 and nut seat 32.The integration of the four parts greatly improves the space utilization of the equipment.

[0049] In summary, the utility model discloses a detection support 1 with a pair of sensors is driven by electric cylinder 21, realizes stable, linear translation movement, replaces the detection error problem of traditional cylinder drive that is easy to cause by swing or shake. The linear output characteristic of electric cylinder 21 ensures the controllability of working rhythm, greatly improves the precision and reliability of detection process. The pair of sensors 11 pass through non-contact optical detection mode, cooperate the accurate detection of transmitting end 111 and receiving end 112, can efficiently, accurately identify the in-place state of wafer. Meanwhile, through the collaborative control of multistage sensor layout, shielding plate 4, deceleration sensor and limit position sensor, realize the dynamic protection in the lifting and translation process, avoid the overshoot and collision of mechanical parts, improve the safety of system and the service life of sensor. Lifting piece 3 adopts screw nut pair mechanism and servo motor drive, action is stable and adapts multiple wafer transfer box height demand, further strengthens the applicability of equipment. The whole system passes through the height integrated design of transition plate 23, will detect the component, movable door 6 power piece 7 and drive source modular layout, effectively promotes the space utilization and automation degree of equipment.

[0050] Although the embodiments of the utility model have been described in detail above, it is obvious for those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes all belong to the scope and spirit of the utility model described in the claims. Moreover, the utility model described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. A wafer inspection assembly for inspecting wafers in a wafer transport box, characterized in that, The utility model relates to a detection device for wafer carrier, which comprises a detection support (1) with at least two groups of mounting parts and a connecting part (12), each group of mounting parts comprising two mounting grooves (13) arranged oppositely along the left-right direction, a detection piece comprising a transmitting end (111) and a receiving end arranged in the two mounting grooves (13) of one group of mounting parts respectively, a transition plate (23) with at least one mounting area, a translation piece (2) arranged in the mounting area to drive the detection support (1) to move in the horizontal way towards the direction of approaching or moving away from the wafer carrier, the translation piece (2) comprising an electric cylinder (21) and a push plate (22), the telescopic end of the electric cylinder (21) being fixedly connected with one end of the push plate (22), the electric cylinder (21) being mounted on the transition plate (23), the other end of the push plate (22) being fixedly connected with the connecting part (12), a sliding rail (24) being arranged on the electric cylinder (21) along the moving direction of the telescopic end, a sliding plate (25) being slidably connected with the sliding rail (24), the push plate (22) being fixedly connected with the sliding plate (25), a lifting piece (3) with a lifting end, the lifting end being fixedly connected with the transition plate (23), the lifting piece (3) being used to drive the lifting end to move along the height direction. The detection piece comprises a pair of sensors (11), the transmitting end (111) and the receiving end (112) being used to transmit and receive light beams respectively, the transmitting end (111) and the receiving end (112) extending out of the detection support (1). The lifting piece (3) comprises a driving motor (31), a transmission piece and a screw-nut pair mechanism, the driving motor (31) being in transmission connection with the transmission piece, the transmission piece being used to transmit the kinetic energy of the driving motor (31) to the screw-nut pair mechanism, the screw-nut pair mechanism having a nut seat (32) and a screw rod (33), the nut seat (32) being connected with the transition plate (23), the screw-nut pair mechanism being capable of driving the nut seat (32) to move along the length direction of the screw rod (33). The driving motor (31) is located at one end of the transition plate (23), the screw-nut pair mechanism is located at the other end of the transition plate (23), the transmission piece comprising a driving wheel (34), a driven wheel (35) and a synchronous belt (36), the driving wheel (34) being coaxially arranged with the rotating shaft of the driving motor (31), the synchronous belt (36) being provided for the transmission cooperation of the driving wheel (34) and the driven wheel (35). The screw-nut pair mechanism further comprises a fixing seat (37), a supporting seat (38) and a nut, both ends of the screw rod (33) being rotatably connected with the fixing seat (37) and the supporting seat (38) respectively, the screw rod (33) being in screw connection with the nut, the nut being fixedly connected with the nut seat (32). ​ 2. The wafer inspection assembly of claim 1, wherein ​ 3. The wafer inspection assembly of claim 1, wherein, ​ 4. The wafer inspection assembly of claim 3, wherein, ​ 5. The wafer inspection assembly of claim 4, wherein, ​ 6. The wafer inspection assembly of claim 3, wherein The transition plate (23) is further provided with a shielding plate (4) partially extending from the transition plate (23), and further comprises a first limit position sensor (41) and a second limit position sensor (42), which are arranged parallel to the extension direction of the lead screw (33), and the shielding plate (4) can shield the light beams emitted by the first limit position sensor (41) and the second limit position sensor (42).

7. A wafer inspection assembly according to claim 6, wherein, Further comprising a first deceleration position sensor (43) and a second deceleration position sensor (44), which are arranged parallel to the extension direction of the lead screw (33), and the first deceleration position sensor (43) and the second deceleration position sensor (44) are respectively located between the first limit position sensor (41) and the second limit position sensor (42), and the shielding plate (4) can shield the light beams emitted by the first deceleration position sensor (43) and the second deceleration position sensor (44).

8. A wafer loading system, characterized by, The wafer detection assembly comprises the wafer detection assembly according to any one of claims 1-7, and further comprises a main body (5) and a frame (51), wherein the frame (51) has a transmission port through which a wafer in a wafer transmission box can pass, and the frame (51) is installed on the main body (5).

9. The wafer loading system of claim 8, wherein Further comprising a movable door (6) arranged close to the detection support (1), wherein the movable door (6) comprises a power member (7) capable of driving the movable door (6) to move, and the power member (7) is installed on the transition plate (23).

10. The wafer loading system of claim 8, wherein The frame (51) is installed with a track (39) along the length direction, and the track (39) is in sliding connection with the transition plate (23).

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