Tail gas treatment device and vapor phase growth system

Abstract

The utility model discloses a tail gas treatment device and a vapor phase growth system, the tail gas treatment device comprises a treatment cavity, the top of the treatment cavity is open, the treatment cavity is provided with a gas inlet pipe and a gas outlet pipe, the gas inlet pipe is arranged at the bottom of the treatment cavity, and the gas outlet pipe is arranged on the side wall of the top of the treatment cavity; the filtering device is arranged in the treatment cavity, the bottom of the filtering device communicates with an air inlet pipe, and the top side wall of the filtering device communicates with an exhaust pipe; the cooling device is arranged between the inner wall of the treatment cavity and the outer wall of the filtering device so as to reduce the temperature of the tail gas; the cover body is detachably arranged at the top of the processing cavity in a sealing manner, so that the top opening of the processing cavity is shielded or exposed by operating the cover body; the connecting cavity is arranged around the top of the processing cavity, an opening is formed in the top of the connecting cavity, the cover body is contained in the connecting cavity and communicated with the outside through the opening in the top of the connecting cavity, and the exhaust pipe is located below the connecting cavity. The utility model has good adsorption performance and sealing performance, and is beneficial to the safety of subsequent disassembly, assembly and maintenance.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor equipment technical field especially relates to tail gas treatment device and gas phase growth system. BACKGROUND

[0002] Gas phase growth system refers to in material science and semiconductor manufacturing field, for through gas phase reaction process growth material's equipment. This kind of equipment can utilize gaseous chemical reaction and deposit a layer of thin film on substrate material or grow crystal structure. Gas phase growth technology is widely used in preparation various semiconductor materials, nanometer materials, thin film and crystal etc.

[0003] In prior art, in gas phase growth system, for example MOCVD equipment, gas is reacted in reaction chamber, most of which is thermally decomposed to participate in reaction and form film, but part of harmful gas remains, so tail gas must be treated. Because in MOCVD equipment, most of the gas source used is flammable and explosive, and the hydride source therein is also toxic, so the tail gas treatment device not only needs high adsorption efficiency, but also needs to ensure sealing performance and safety of subsequent disassembly and maintenance.

[0004] Therefore, it is necessary to provide a new tail gas treatment device and gas phase growth system to solve the above problems existing in the prior art. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of tail gas treatment device and gas phase growth system, with good adsorption performance, sealing performance and safety of subsequent disassembly and maintenance.

[0006] To achieve the above object, the technical scheme of the utility model is as follows:

[0007] A kind of tail gas treatment device, comprising:

[0008] Processing cavity, top opening, with gas inlet pipe and exhaust pipe, the gas inlet pipe is located at the bottom of the processing cavity, the exhaust pipe is located at the top side wall of the processing cavity;

[0009] Filtering device, set in the processing cavity, the filtering device bottom is communicated with the gas inlet pipe, the filtering device top side wall is communicated with the exhaust pipe;

[0010] Cooling device, set between the inner wall of the processing cavity and the outer wall of the filtering device, to reduce the temperature of tail gas;

[0011] Cover body, detachable sealing is located at the top of the processing cavity, to shield or expose the top opening of the processing cavity by operating the cover body;

[0012] A connecting cavity is arranged around the top of the processing cavity, the top of the connecting cavity is open, the cover is accommodated in the connecting cavity and communicates with the outside through the top opening of the connecting cavity, and the exhaust pipe is located below the connecting cavity.

[0013] The utility model discloses still provided gas phase growth system, including process chamber, processing equipment and tail gas treatment device, tail gas treatment device includes processing cavity and connecting cavity, connecting cavity surrounds the top of processing cavity arrangement, process chamber is provided with exhaust pipeline, exhaust pipeline with processing cavity bottom connects to communicate inside processing cavity, connecting cavity is located processing equipment bottom, and with processing equipment communicates.

[0014] Through adopt above -mentioned technical scheme, the beneficial effect of tail gas treatment device and gas phase growth system of the utility model is all in: filter device is located in processing cavity, and the cooling device between processing cavity inner wall and filter device outer wall can reduce the temperature of tail gas and improve the adsorption performance, the cover is detachably sealed in the top of processing cavity, and the top opening of processing cavity is shielded or exposed by operating the cover, the exhaust pipe is located below the connecting cavity, which can prevent the tail gas from being discharged from the top of the processing cavity, the connecting cavity with the top opening is arranged around the top of the processing cavity, the top opening of the connecting cavity is beneficial to the subsequent processing of the processing cavity in the processing device through the connecting cavity, and the cover is operated through the top opening of the processing device and the connecting cavity to disassemble and maintain, so that the trapped particles or residual tail gas in the tail gas treatment device is not directly discharged into the environment, but discharged into the processing device, improving the safety.

[0015] Optionally, the number of filter devices is at least 2, the processing cavity includes a receiving cavity having an opening at one end, the gas inlet pipe is arranged at the bottom of the receiving cavity and communicates with the interiors of the filter devices one by one, and the exhaust pipe is arranged at the top side wall of the receiving cavity and communicates with the interiors of the filter devices one by one.

[0016] The cover is detachably arranged in the receiving cavity to shield or expose the opening of the receiving cavity by operating the cover.

[0017] Optionally, the filter device includes:

[0018] A first pipe body is arranged in the receiving cavity.

[0019] A filter body is detachably arranged in the interior of the first pipe body, the outer wall of the filter body is fitted with the inner wall of the first pipe body to relatively move with respect to the first pipe body, and the gas inlet pipe communicates with the interior of the filter body through the bottom of the first pipe body.

[0020] Optionally, the filter device further includes:

[0021] a second tube body, disposed in the first tube body, located above the filter body, connected with the filter body and communicated with the filter body internally;

[0022] a plurality of exhaust holes are formed in the top side wall of the second tube body; a ring-shaped cavity is formed between the outer wall of the second tube body and the inner wall of the top of the first tube body, and the exhaust pipe is communicated with the ring-shaped cavity through the top side wall of the second tube body.

[0023] Optionally, a pressing plate is arranged on the top of the second tube body, and the pressing plate, the first tube body, the second tube body and the filter body form the ring-shaped cavity, and the pressing plate is located in the first tube body.

[0024] Optionally, the cover body is provided with a locking device, one end of the locking device is provided with a sensing member, and the top of the processing cavity is provided with a responding member; when the cover body covers the top opening of the processing cavity, the responding member is arranged opposite to the sensing member, and the responding member is used for detecting the relative position of the sensing member to assist in judging the sealing relationship between the cover body and the processing cavity.

[0025] Optionally, the locking device comprises:

[0026] a handle, movably arranged on the cover body, so as to realize sealing or unsealing between the cover body and the processing cavity by operating the handle;

[0027] a second connecting member, fixedly arranged on the cover body, a second connecting hole is formed in the second connecting member; a first connecting member, fixedly arranged on the handle, a first connecting hole is formed in the first connecting member, so that when the cover body and the processing cavity are sealed by operating the handle, the first connecting hole is opposite to the second connecting hole, and when the cover body and the processing cavity are unsealed by operating the handle, the first connecting hole and the second connecting hole are away from each other;

[0028] a locking device, arranged on the cover body, the locking device comprises a telescopic rod body arranged opposite to the second connecting hole, so that after the cover body and the processing cavity are sealed by operating the handle, the telescopic rod body penetrates the first connecting hole and the second connecting hole by controlling the locking device.

[0029] Optionally, the locking device is a needle type air cylinder, the sensing member is a metal block, and the responding member is a proximity switch.

[0030] Optionally, the processing device is a glove box. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1A main body structure schematic view of a tail gas treatment device according to an embodiment of the present application;

[0032] Figure 2 A sectional view of a tail gas treatment device according to an embodiment of the present application;

[0033] Figure 3 Another sectional view of a tail gas treatment device according to an embodiment of the present application;

[0034] Figure 4 An assembly structure schematic view of a locking device of a tail gas treatment device according to an embodiment of the present application on a cover body;

[0035] Figure 5 For Figure 2 An enlarged view of part A;

[0036] Figure 6 An assembly schematic view of a tail gas treatment device and a processing equipment of a gas phase growth system according to an embodiment of the present application.

[0037] Reference signs:

[0038] 100, processing cavity; 101, gas inlet pipe; 102, exhaust pipe; 110, containing cavity; 120, cover body; 121, handle; 130, locking device; 131, first connecting piece; 132, first connecting hole; 133, second connecting piece; 134, second connecting hole; 135, locking device; 140, detection device; 141, inductive piece; 142, response piece; 200, filtering device; 210, first pipe body; 211, gas inlet; 212, gas outlet; 220, filter body; 230, second pipe body; 231, exhaust hole; 240, pressing plate; 300, cooling device; 400, connecting cavity; 410, connecting end; 420, fixed end; 430, cover body; 500, process chamber; 600, processing equipment. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meanings understood by those skilled in the art. The words such as “include” and similar words used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, without excluding other elements or objects.

[0040] The specific embodiments of the utility model are further explained in detail below with reference to the drawings.

[0041] Embodiments of the utility model provide a tail gas treatment device and a gas phase growth system for processing of wafers.

[0042] Referring to Figure 1 , Figure 2 and Figure 3 , the tail gas treatment device comprises a treatment cavity 100, a top opening, an air inlet pipe 101 and an exhaust pipe 102, the air inlet pipe 101 is arranged at the bottom of the treatment cavity 100, and the exhaust pipe 102 is arranged at the top side wall of the treatment cavity 100. In some embodiments, the inside of the treatment cavity 100 is hollowly arranged, and the treatment cavity 100 is provided with the air inlet pipe 101 and the exhaust pipe 102; the tail gas enters the treatment cavity 100 from the air inlet pipe 101 through the exhaust pipe (not shown in the figure) of the process chamber 500, and is discharged from the exhaust pipe 102 after filtration.

[0043] The filter device 200 is arranged in the treatment cavity 100, the bottom of the filter device 200 is communicated with the air inlet pipe 101, and the top side wall of the filter device 200 is communicated with the exhaust pipe 102. In some embodiments, the filter device 200 is arranged in the treatment cavity 100, and in the application, the filter device 200 is provided with a plurality of filter devices, wherein the plurality of filter devices refers to at least two filter devices, and in the embodiment, two filter devices 200 are taken as examples.

[0044] The number of filter devices 200 is at least two, the treatment cavity 100 comprises a containing cavity 110 having an opening at one end, the air inlet pipe 101 is arranged at the bottom of the containing cavity 110 and communicated with the inside of each filter device 200 one by one, and the exhaust pipe 102 is arranged at the top side wall of the containing cavity 110 and communicated with the inside of each filter device 200 one by one; the cover 120 is detachably arranged in the containing cavity 110, so as to shield or expose the opening of the containing cavity 110 by operating the cover 120.

[0045] In some embodiments, referring to Figure 2 , the cover 120 is detachably and sealingly arranged at the top of the treatment cavity 100, so as to shield or expose the top opening of the treatment cavity 100 by operating the cover 120. In some embodiments, the cover 120 is arranged at the top of the treatment cavity 100 in a clamping manner. In some embodiments, the cover 120 is arranged at the top of the treatment cavity 100 in a bolt fixing manner.

[0046] In some embodiments, the cover 120 is sealingly connected with the accommodating cavity 110. In the present embodiment, a sealing strip is used to seal the space between the cover 120 and the accommodating cavity 110. Specifically, the sealing strip is fixed on the end face of the cover 120 by adhesion or clamping. When the cover 120 moves, the sealing strip moves synchronously. When the cover 120 is connected with the accommodating cavity 110, one end of the sealing strip abuts against the cover 120 and the other end abuts against the accommodating cavity 110, thereby sealing the cover 120 and the accommodating cavity 110. In some embodiments, a sealing ring is used to seal the space between the cover 120 and the accommodating cavity 110.

[0047] In some embodiments, referring to Figure 2 , the accommodating cavity 110 is hollow and has an opening at one end. The gas inlet pipe 101 and the gas outlet pipe 102 are fixed on the side wall of the accommodating cavity 110. The fixing methods can be adhesion, welding or integral molding. In the present embodiment, the gas inlet pipe 101 and the gas outlet pipe 102 are fixed on the side wall of the accommodating cavity 110 by welding.

[0048] In some embodiments, the gas inlet pipe 101 is arranged on the bottom wall of the accommodating cavity 110 and the gas outlet pipe 102 is arranged on the top side wall of the accommodating cavity 110.

[0049] In some embodiments, referring to Figure 2 and Figure 3 , the plurality of filtering devices 200 can be arranged in parallel or in series. In the present embodiment, the plurality of filtering devices 200 are arranged in parallel inside the processing cavity 100, and the number of the filtering devices 200 corresponds to the number of the gas inlet pipes 101.

[0050] In some embodiments, the position of each filtering device 200 matches the position of the corresponding gas inlet pipe 101, and the two are in communication, so that the gas in the gas inlet pipe 101 enters the gas outlet pipe 102 after being filtered by the filtering device 200. The plurality of filtering devices 200 are arranged in parallel, one end of each gas inlet pipe 101 converges and communicates with the exhaust pipe of the process cavity 500, and the exhaust gas can enter different filtering devices 200 for filtering at the same time, thereby improving the processing efficiency.

[0051] Referring to Figure 2 , the cooling device 300 is arranged between the inner wall of the processing cavity 100 and the outer wall of the filtering device 200 to reduce the temperature of the exhaust gas. In some embodiments, the cooling device 300 is arranged between the inner wall of the processing cavity 100 and the outer wall of the filtering device 200 to cool the filtering device 200, thereby cooling the exhaust gas and facilitating the filtering process of the exhaust gas. The cooling device 300 can be an air cooler, a water cooler or an oil cooler, etc. In actual use, different cooling devices 300 can be selected according to different use requirements.

[0052] In some embodiments, the filtering device 200 and the cooling device 300 are both arranged inside the accommodating cavity 110. During operation, the exhaust gas enters the accommodating cavity 110 through the gas inlet pipe 101, passes through the filtering device 200, and is cooled by the cooling device 300. In this process, the exhaust gas is filtered by the filtering device 200, and the filtered exhaust gas is discharged through the gas outlet pipe 102.

[0053] Referring to Figure 1 and Figure 2 , the connecting cavity 400 is arranged around the top of the processing cavity 100. The top of the connecting cavity 400 is open, and the cover 120 is accommodated in the connecting cavity 400 and communicates with the outside through the top opening of the connecting cavity 400. The gas outlet pipe 102 is located below the connecting cavity 400.

[0054] In some embodiments, the connecting cavity 400 has a connecting end 410 with a top opening, and a fixed end 420 at the bottom. The fixed end 420 is connected to the top of the accommodating cavity 110, so that the cover 120 is arranged inside the connecting cavity 400. The connecting end 410 of the connecting cavity 400 is used to connect with a processing device, such as a glove box, to open the cover 120 in the processing device, so as to disassemble, maintain and repair the filtering device 200 in the processing cavity 100. The connection mode can be selected from clamping or bolt fixing, etc. In this embodiment, the side wall of the connecting cavity 400 is fixedly arranged on the processing device by bolt fixing, so that the accommodating cavity 110 can be communicated with the inside of the processing device through the connecting cavity 400. The connecting end 410 is movably provided with a top cover 430. When the connecting cavity 400 is arranged at the bottom of the processing device, the top cover 430 is opened by a glove operation of the processing device, such as a glove box, so that the connecting cavity 400 is communicated with the processing device. In some embodiments, the top cover 430 can also not be arranged.

[0055] Referring to Figure 2 and Figure 3 , the filtering device 200 comprises a first pipe body 210 arranged in the accommodating cavity 110. In some embodiments, the first pipe body 210 is in a tubular shape and arranged in the accommodating cavity 110.

[0056] In some embodiments, the first pipe body 210 has a gas inlet 211 and a gas outlet 212. The gas inlet 211 is communicated with the gas inlet pipe 101, and the gas outlet 212 is communicated with the gas outlet pipe 102.

[0057] In some more specific embodiments, one end of the first pipe body 210 is the air inlet 211, which can be coaxially arranged with the air inlet pipe 101 or arranged non-coaxially with the air inlet pipe 101. In the present embodiment, the coaxial arrangement is preferred. The air outlet 212 is arranged on the side wall of the first pipe body 210, and a plurality of air outlets 212 are evenly distributed around the axis of the first pipe body 210.

[0058] The filter body 220 is detachably arranged inside the first pipe body 210, and the outer wall of the filter body 220 is in close contact with the inner wall of the first pipe body 210 to move relatively to the first pipe body 210. The air inlet pipe 101 is in communication with the inside of the filter body 220 through the bottom of the first pipe body 210.

[0059] In some embodiments, the filter body 220 is arranged inside the first pipe body 210 and separates the air inlet 211 and the air outlet 212, so that the exhaust gas at the air inlet 211 can be discharged through the air outlet 212 after passing through the filter body 220.

[0060] In some embodiments, the cooling device 300 is arranged between the outer wall of the filter device 200 and the inner wall of the containing cavity 110, i.e., the cooling device 300 is arranged between the outer wall of the first pipe body 210 and the inner wall of the containing cavity 110. In order to facilitate the discharge of exhaust gas, the cooling device 300 arranged at the air outlet 212 has a passage, and the passage is in communication with the air outlet pipe 102, so that the plurality of air outlets 212 are in communication with the air outlet pipe 102 through the passage. In the working process, the exhaust gas enters the inside of the first pipe body 210 through the air inlet pipe 101 and the air inlet 211, and then enters the passage from the air outlet 212 after being filtered by the filter body 220, and is discharged into the air outlet pipe 102 through the passage.

[0061] In some embodiments, the top surface of the filter body 220 is provided with a handle to facilitate the replacement of the filter body 220. In this process, the filter body 220 and the first pipe body 210 are taken out, and the process of replacing the filter body 220 is convenient.

[0062] The filter device 200 further comprises a second pipe body 230 arranged in the first pipe body 210 and located above the filter body 220, which is connected with the filter body 220 and in communication with the inside of the filter body 220. In some embodiments, the second pipe body 230 is arranged in the first pipe body 210 and coaxially arranged with the first pipe body 210, and one end of the second pipe body 230 is connected with the filter body 220.

[0063] The second tube body 230 has a plurality of exhaust holes 231 on the top side wall. The second tube body 230 and the first tube body 210 form an annular cavity between the outer wall of the second tube body 230 and the inner wall of the first tube body 210. The exhaust pipe 102 is in communication with the annular cavity through the top side wall of the second tube body 230. Compared with the scheme that the second tube body 230 is in communication with the exhaust pipe 102 for exhaust, the scheme that the exhaust gas is discharged from the exhaust pipe 102 through the annular cavity and the exhaust holes 231 on the outer wall of the second tube body 230 is more conducive to heat dissipation.

[0064] In some embodiments, the plurality of exhaust holes 231 are uniformly distributed around the axis of the second tube body 230 on the side wall of the second tube body 230.

[0065] In some embodiments, the diameter of the second tube body 230 is smaller than that of the first tube body 210, so that the outer wall of the second tube body 230 and the inner wall of the first tube body 210 have a spacing, i.e., form an annular cavity, so that the exhaust holes 231 and the exhaust port 212 are in communication through the annular cavity.

[0066] In some embodiments, the spacing between the first tube body 210 and the second tube body 230 forms an annular cavity, which is conducive to heat dissipation of the high-temperature exhaust gas. In addition, the inner wall of the first tube body 210 is attached to the filter body 220, which is conducive to preventing the gas from flowing back to the filter body 220.

[0067] The second tube body 230 has a pressing plate 240 placed on the top. The pressing plate 240, the first tube body 210, the second tube body 230 and the filter body 220 form an annular cavity, and the pressing plate 240 is located in the first tube body 210. In some embodiments, the pressing plate 240 is placed at the end of the first tube body 210, and the other end of the second tube body 230 abuts against the pressing plate 240, i.e., one end of the second tube body 230 abuts against the filter body 220, and the other end abuts against the pressing plate 240, so as to position the filter body 220 and prevent the filter body 220 from shaking in the first tube body 210, thereby stabilizing the filter body 220.

[0068] Referring to Figure 2 , Figure 4 and Figure 5 , the cover 120 is provided with a locking device 130. One end of the locking device 130 is provided with a sensing part 141, and the top of the processing cavity 100 is provided with a responding part 142. When the cover 120 covers the top opening of the processing cavity 100, the responding part 142 is arranged opposite to the sensing part 141. The responding part 142 is used to detect the relative position of the sensing part 141 to assist in judging the sealing relationship between the cover 120 and the processing cavity 100.

[0069] In some embodiments, the inductor 141 is fixedly arranged on the cover 120, and the arrangement mode can be adhesion, clamping or bolt fixation, etc. In the embodiment, the inductor 141 is fixedly arranged on the cover 120 by clamping.

[0070] In some embodiments, the inductor 141 and the response element 142 are in corresponding positions. In the embodiment, the inductor 141 is a metal induction block, and the response element 142 is a proximity switch. When the inductor 141 is close to the response element 142, the response element 142 can feed back to determine the locking and sealing between the cover 120 and the accommodating cavity 110.

[0071] In some embodiments, the cover 120 drives the inductor 141 to move. When the cover 120 is locked with the accommodating cavity 110, the inductor 141 falls into the induction range of the response element 142. The response element 142 senses the inductor 141 and sends a command to detect the locking degree between the accommodating cavity 110 and the cover 120, so as to detect the sealing property therebetween. When the response sends the command, the locking between the accommodating cavity 110 and the cover 120 is in place, and the sealing property between the accommodating cavity 110 and the cover 120 is good.

[0072] The locking device 130 comprises a handle 121 movably arranged on the cover 120 to realize sealing or unsealing between the cover 120 and the processing cavity 100 by operating the handle 121.

[0073] In some embodiments, the handle 121 is fixedly arranged on the end face of the cover 120 away from the accommodating cavity 110, and the fixing mode can be adhesion, welding or bolt fixation, etc. In the embodiment, the handle 121 is fixedly arranged on the end face of the cover 120 by bolt fixation, and the movement of the cover 120 can be controlled by controlling the handle 121.

[0074] The second connecting element 133 is fixedly arranged on the cover 120, and the second connecting hole 134 is arranged on the second connecting element 133. The first connecting element 131 is fixedly arranged on the handle 121, and the first connecting hole 132 is arranged on the first connecting element 131. When the cover 120 is sealed with the processing cavity 100 by operating the handle 121, the first connecting hole 132 is opposite to the second connecting hole 134. When the cover 120 is unsealed with the processing cavity 100 by operating the handle 121, the first connecting hole 132 and the second connecting hole 134 are away from each other.

[0075] In some embodiments, the first connecting member 131 is fixedly arranged on the handle 121, so that the first connecting member 131 is fixedly arranged on the cover 120. The fixing manner can be adhesion, welding or bolt fixation, etc. In the present embodiment, the first connecting member 131 is fixedly arranged on the handle 121 by bolt fixation.

[0076] In some embodiments, the first connecting member 131 is plate-shaped, and a first connecting hole 132 is formed in the first connecting member 131, which penetrates the first connecting member 131 along the thickness direction of the first connecting member 131.

[0077] In some embodiments, the second connecting member 133 is fixedly arranged in the accommodating cavity 110 and extends to the outside of the accommodating cavity 110. Specifically, the second connecting member 133 is fixedly arranged on the top side wall of the accommodating cavity 110. The fixing manner can be adhesion, welding or bolt fixation, etc. In the present embodiment, the second connecting member 133 is fixedly arranged in the accommodating cavity 110 by bolt fixation.

[0078] In some embodiments, the second connecting member 133 is plate-shaped, and a second connecting hole 134 is formed in the second connecting member 133, which penetrates the second connecting member 133 along the thickness direction of the second connecting member 133. Meanwhile, the axes of the first connecting hole 132 and the second connecting hole 134 are parallel to each other.

[0079] The locking device 135 is arranged on the cover 120. The locking device 135 includes an extension rod body arranged opposite to the second connecting hole 134. After the cover 120 and the processing cavity 100 are sealed by operating the handle 121, the extension rod body is controlled to penetrate the first connecting hole 132 and the second connecting hole 134 by controlling the locking device 135.

[0080] In some embodiments, the locking device 135 is arranged on the cover 120. In the present embodiment, the locking device 135 is a needle type cylinder. In the working process, the cover 120 is controlled to move, and the first connecting member 131 on the cover 120 is driven to move. When the first connecting hole 132 on the first connecting member 131 coincides with the second connecting hole 134 on the second connecting member 133, the locking device 135 moves to penetrate the first connecting hole 132 and the second connecting hole 134, so as to lock the cover 120 and the accommodating cavity 110. That is, the needle type cylinder is started, and the piston rod of the needle type cylinder penetrates the first connecting hole 132 and the second connecting hole 134 to lock the cover 120 and the accommodating cavity 110.

[0081] In some embodiments, the locking device 135 is a needle type cylinder, the sensing member 141 is a metal block, and the responding member 142 is a proximity switch.

[0082] The present application also discloses a vapor phase growth system, which is described with reference toFigure 6 The gas phase growth system comprises a process chamber 500, a processing device 600 and a tail gas treatment device, the tail gas treatment device comprises a treatment cavity 100 and a connecting cavity 400, the connecting cavity 400 is arranged around the top of the treatment cavity 100; the process chamber 500 is provided with an exhaust pipeline, the exhaust pipeline is connected with the bottom of the treatment cavity 100 to communicate the inside of the treatment cavity 100; the connecting cavity 400 is arranged at the bottom of the processing device 600 and communicates with the processing device 600.

[0083] In some embodiments, referring to Figure 2 and Figure 6 The device inside the gas phase growth system can be taken and placed by the processing device 600, when the filter 220 needs to be replaced, the connecting cavity 400 is communicated with the processing device 600 by opening the top cover 430 (if the top cover 430 is arranged) through the operation of the processing device 600, the filter device 200 is taken out by continuously operating the processing device 600 to open the cover 120 and make the inside of the containing cavity 110 communicated with the processing device 600, so that the filter device 200 is conveniently replaced, the safety of the filter cartridge replacement operation process is improved; there are still residual tail gas and dust in the filter device 200 in this process, the tail gas treatment device is arranged on the processing device 600, so that the operation can be carried out in a sealed environment, thereby preventing the tail gas and dust from being released into the environment; further, the filter device can be inert gas purged by the processing device 600.

[0084] In some embodiments, the processing device 600 is a glove box.

[0085] The implementation principle of the tail gas treatment device and the gas phase growth system is that the tail gas generated in the process chamber 500 enters the containing cavity 110 through the exhaust pipeline, the gas inlet 101, the first pipe body 210 and the filter 220, and then sequentially passes through the exhaust hole 231 of the second pipe body 230, the exhaust port 212 of the first pipe body 210 and the exhaust pipe 102, in this process, the cooling device 300 cools the tail gas to ensure the filtering effect of the tail gas.

[0086] Although the embodiments of the present application have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes all belong to the scope and spirit of the present application described in the claims. Moreover, the present application described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A tail gas treatment device, characterized in that, include: The processing chamber (100) has an opening at the top and has an air inlet pipe (101) and an exhaust pipe (102). The air inlet pipe (101) is located at the bottom of the processing chamber (100), and the exhaust pipe (102) is located on the top side wall of the processing chamber (100). A filter device (200) is disposed inside the processing chamber (100). The bottom of the filter device (200) is connected to the air inlet pipe (101), and the top side wall of the filter device (200) is connected to the exhaust pipe (102). A cooling device (300) is disposed between the inner wall of the processing chamber (100) and the outer wall of the filter device (200) to reduce the exhaust gas temperature; A cover (120) is detachably and sealingly disposed on the top of the processing cavity (100) so as to cover or expose the top opening of the processing cavity (100) by operating the cover (120); A connecting cavity (400) is provided around the top of the processing cavity (100), the top opening of the connecting cavity (400) is provided, the cover (120) is housed in the connecting cavity (400) and communicates with the outside through the top opening of the connecting cavity (400), and the exhaust pipe (102) is located below the connecting cavity (400).

2. The exhaust gas treatment device according to claim 1, characterized in that, The number of the filter devices (200) is at least 2. The processing chamber (100) includes a receiving chamber (110) with an opening at one end. The air inlet pipe (101) is located at the bottom of the receiving chamber (110) and communicates with the interior of each of the filter devices (200). The exhaust pipe (102) is located on the top side wall of the receiving chamber (110) and communicates with the interior of each of the filter devices (200). The cover (120) is detachably disposed in the receiving cavity (110) so as to cover or expose the opening of the receiving cavity (110) by operating the cover (120).

3. The exhaust gas treatment device according to claim 2, characterized in that, The filter device (200) includes: The first tube (210) is disposed within the receiving cavity (110); The filter body (220) is detachably disposed inside the first tube (210). The outer wall of the filter body (220) is attached to the inner wall of the first tube (210) so as to move relative to the first tube (210). The air inlet pipe (101) communicates with the interior of the filter body (220) through the bottom of the first tube (210).

4. The exhaust gas treatment device according to claim 3, characterized in that, The filter device (200) further includes: The second tube (230) is disposed inside the first tube (210), located above the filter body (220), connected to the filter body (220) and internally communicating with it; The second pipe (230) has several exhaust holes (231) on its top sidewall; an annular cavity is formed between the outer wall of the second pipe (230) and the top inner wall of the first pipe (210), and the exhaust pipe (102) communicates with the annular cavity through the top sidewall of the second pipe (230).

5. The exhaust gas treatment device according to claim 4, characterized in that, A pressure plate (240) is placed on the top of the second tube (230). The pressure plate (240), the first tube (210), the second tube (230) and the filter (220) form an annular cavity. The pressure plate (240) is located inside the first tube (210).

6. The exhaust gas treatment device according to claim 1, characterized in that, The cover (120) is provided with a locking device (130), and a sensor (141) is provided at one end of the locking device (130). A response element (142) is provided at the top of the processing cavity (100). When the cover (120) covers the top opening of the processing cavity (100), the response element (142) is positioned opposite to the sensor (141). The response element (142) is used to detect the relative position of the sensor (141) to help determine the sealing relationship between the cover (120) and the processing cavity (100).

7. The exhaust gas treatment device according to claim 6, characterized in that, The locking device (130) includes: A handle is movably disposed on the cover (120) to seal or release the seal between the cover (120) and the processing cavity (100) by operating the handle; A second connector (133) is fixedly disposed on the cover (120), and a second connecting hole (134) is provided on the second connector (133). A first connector (131) is fixedly disposed on the handle, and a first connecting hole (132) is provided on the first connector (131). When the cover (120) and the processing cavity (100) are sealed by operating the handle, the first connecting hole (132) and the second connecting hole (134) are opposite to each other. When the cover (120) and the processing cavity (100) are unsealed by operating the handle, the first connecting hole (132) and the second connecting hole (134) are far apart from each other. A locking device (135) is provided on the cover (120). The locking device (135) includes a telescopic rod body disposed opposite to the second connecting hole (134). After the cover (120) and the processing cavity (100) are sealed by operating the handle, the telescopic rod body is controlled by controlling the locking device (135) to pass through the first connecting hole (132) and the second connecting hole (134).

8. The exhaust gas treatment device according to claim 7, characterized in that, The locking device (135) is a needle cylinder, the sensing element (141) is a metal block, and the responding element (142) is a proximity switch.

9. A vapor-phase growth system, characterized in that, The device includes a process chamber (500), a processing device (600), and an exhaust gas treatment apparatus according to any one of claims 1-8, wherein the exhaust gas treatment apparatus includes a processing chamber (100) and a connecting chamber (400), the connecting chamber (400) being disposed around the top of the processing chamber (100); The process chamber (500) is provided with an exhaust pipe, which is connected to the bottom of the processing chamber (100) to communicate with the interior of the processing chamber (100); The connecting cavity (400) is located at the bottom of the processing device (600) and communicates with the processing device (600).

10. The vapor-phase growth system according to claim 9, characterized in that, The processing device (600) is a glove box.

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