Multifunctional electric spark multi-wire cutting auxiliary device

Abstract

The utility model provides a multifunctional electric spark multi-wire cutting auxiliary device, which belongs to the technical field of material cutting and comprises two guide wheel mechanisms. The guide wheel mechanisms are detachably fixed to the machine frame, the two guide wheel mechanisms are symmetrically arranged up and down, each guide wheel mechanism comprises a support fixedly connected to the machine frame, a plurality of guide wheels are rotationally arranged on the supports, and the guide wheels are linearly and obliquely arranged, that is, the guide wheels on the support close to the upper wire frame sequentially deflect towards the wire storage cylinder from top to bottom. Meanwhile, the guide wheels sequentially incline towards one side of the rack from top to bottom, and a plurality of wire ring grooves are formed in the outer side walls of the guide wheels; the transition mechanism comprises a transition roller which is rotationally arranged, and the lines are transited through the transition roller when wound among the multiple guide wheels; according to the utility model, one line can form a plurality of cutting line channels, so that the material consumption caused by cutting can be effectively reduced.

Description

Technical Field

[0001] This utility model relates to the field of material cutting equipment technology, specifically to a multi-functional electric spark multi-wire cutting auxiliary device. Background Technology

[0002] Electrical discharge machining (EDM) technology, with its unique principle of removing materials through electrical erosion, has shown great potential in processing hard and brittle semiconductor materials, and is especially suitable for processing large-size, ultra-thin silicon wafers.

[0003] However, traditional wire EDM machines are limited by the design of a single electrode wire, and can only cut one silicon wafer at a time, resulting in relatively low processing efficiency.

[0004] A search revealed that application number 201510738070.1 discloses a parallel discharge multi-electrode wire feeding mechanism and a balanced discharge control method. Although this technology can be used to cut materials, when the number of slices and grooves increases, resulting in an increase in the number of electrode wires, the pulse power supply cannot provide sufficient pulse discharge energy to the discharge gap, thus reducing its cutting efficiency. Utility Model Content

[0005] In view of this, the present invention provides a multifunctional EDM multi-wire cutting auxiliary device. The present invention enables a single wire to form multiple cutting paths. When the number of electrode wires increases, the molybdenum wire is replaced with electroplated diamond wire, thereby effectively reducing the material consumption generated during cutting.

[0006] To solve the above-mentioned technical problems, this utility model provides a multifunctional electric spark multi-wire cutting auxiliary device, comprising,

[0007] Two guide wheel mechanisms; the guide wheel mechanisms are detachably fixed on the frame, and the two guide wheel mechanisms are symmetrically arranged vertically. The guide wheel mechanism includes a bracket fixedly connected to the frame. The bracket has an L-shaped structure and multiple guide wheels are rotatably mounted on the bracket. The guide wheels can rotate on the bracket. The multiple guide wheels are arranged in a linear inclined manner. That is, the multiple guide wheels on the bracket near the upper wire frame are inclined towards the wire storage drum from top to bottom. At the same time, the multiple guide wheels are also inclined towards one side of the frame from top to bottom. Several wire ring grooves are provided on the outer wall of the guide wheel.

[0008] The transition mechanism includes a rotating transition roller. When the line is wound between multiple guide rollers, it passes through the transition roller to transition, that is, a line can be wound into multiple cutting lines by passing through the transition roller.

[0009] The first threaded hole is provided through the bracket corresponding to the guide wheel, a first threaded rod matched with the first threaded hole is arranged in the first threaded hole, the first threaded rod can rotate in the first threaded hole, the guide wheel is rotationally arranged at the end of the first threaded rod, and the distance between the guide wheel and the side of the rack can be adjusted through the first threaded rod.

[0010] The first threaded rod coaxially further has a sleeve at the end close to the guide wheel, the first threaded rod can drive the sleeve to rotate, the guide wheel side wall corresponding to the sleeve further coaxially has an optical shaft, the guide wheel and the optical shaft can rotate together, the optical shaft is rotationally arranged in the bushing, the optical shaft can rotate in the bushing, the bushing is tightly fitted in the sleeve, and the sleeve can support the bushing.

[0011] The optical shaft is tightly fitted in the bearing inner ring of the bushing, the optical shaft can be taken out of the bushing, and a nut is further fixed at the end of the optical shaft away from the guide wheel to reinforce the optical shaft.

[0012] The bracket corresponding to the sleeve has a storage groove, the sleeve is installed in the storage groove, and the bracket further has a positioning hole corresponding to the sleeve and penetrating through the bracket, the positioning hole is in communication with the storage groove, a jack screw is threadedly and matchingly installed in the positioning hole, the jack screw can rotate in the positioning hole, and the jack screw is used for reinforcing the sleeve.

[0013] The bushing further has a plug at the end away from the optical shaft, and the plug can prevent external liquid from entering the optical shaft.

[0014] The bracket is fixed on the rack through bolts, and the bracket can be conveniently disassembled and assembled through the bolts.

[0015] The support base comprises two fixed plates arranged in parallel, a second threaded hole is provided through one of the fixed plates, a second threaded rod matched with the second threaded hole is arranged in the second threaded hole, the second threaded rod can rotate in the second threaded hole, a clamping plate is arranged at the end of the second threaded rod close to the other fixed plate, the second threaded rod can drive the clamping plate to move, and the fixed plate opposite to the clamping plate can be fixed through the clamping plate.

[0016] The bracket is provided with three guide wheels, and each guide wheel is provided with five wire ring grooves.

[0017] Compared with the prior art, the present application has at least one of the following beneficial technical effects:

[0018] 1、When the number of slices and slots is large, the number of electrode wires increases, and the pulse power supply cannot provide sufficient pulse discharge energy to the discharge gap, which reduces the cutting efficiency. The device cooperates with the transition mechanism through the guide wheel mechanism, and one line can form multiple cutting lines, so that the pulse power supply can discharge multiple cutting lines. When thin silicon wafers need to be cut or the number of slices and slots is large, the auxiliary structure can be installed on the rack, and the molybdenum wire can be replaced with electroplated diamond wire. The abrasive particles on the electroplated diamond wire can make up for the lack of pulse discharge energy. When ordinary silicon wafers or line slots with large spacing need to be cut, the auxiliary structure can be removed and replaced with the original cutting structure.

[0019] 2、Improve cutting efficiency: Through the design of the guide wheel mechanism and the transition mechanism, one line can form multiple cutting lines, achieving the function of cutting multiple silicon wafers at the same time, greatly improving the cutting efficiency. This improvement is particularly important for processing large-size, ultra-thin silicon wafers, which can significantly shorten the processing cycle and improve production efficiency.

[0020] 3、Reduce material consumption: Compared with traditional single-line cutting, the present application can effectively reduce the material consumption generated during cutting. This is undoubtedly an effective means of saving resources in the face of limited silicon material resources.

[0021] 4、Strong adaptability: The guide wheel mechanism and the transition mechanism of the present application can be fixed on the rack, which means they can be flexibly adjusted according to different processing needs and machine tool types. This design makes the present application widely applicable to various machine tools that are already on the market, without the need for major modifications to the machine tool, reducing the difficulty of popularization and application.

[0022] 5、Stable structure: The guide wheel mechanism is reinforced by multiple layers of first threaded rods, sleeves, bushings and top wires, ensuring the stability and precision of the guide wheel during rotation. At the same time, the transition mechanism is also supported stably by the cooperation of the clamping plate and the fixed plate. These designs enable the present application to maintain good working condition during long-term use, prolonging the service life.

[0023] 6、Easy to maintain: The components of the present application are connected tightly and easily disassembled, which makes it easy to check and replace worn parts during maintenance, reducing maintenance costs and time. In addition, the plug inside the bushing can effectively prevent external liquids from entering the optical axis, further extending the service life of the equipment.

[0024] 7. Cost-effectiveness is remarkable: although the utility model increases some new mechanisms and components in design, compared with the traditional single-wire cutting equipment and the multi-wire cutting technology which needs to be greatly transformed, the cost-effectiveness is still remarkable. Through improving the cutting efficiency and reducing the material consumption, the utility model can bring considerable economic benefits to users in a short time. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a structure schematic view of a multifunctional electric spark multi-wire cutting auxiliary device of the utility model;

[0026] Figure 2 It is a structure schematic view of a main view of two guide wheel mechanisms of the utility model; Figure 1

[0027] Figure 3 It is a structure schematic view of a bracket of the utility model embodiment two;

[0028] Figure 4 It is a structure schematic view of a guide wheel section view of the utility model;

[0029] Figure 5 It is a structure schematic view of a bushing explosion view of the utility model;

[0030] Figure 6 It is a structure schematic view of a transition mechanism of the utility model;

[0031] Figure 7 It is a structure schematic view of a line running of the utility model embodiment one;

[0032] Figure 8 It is a structure schematic view of a main view of two guide wheel mechanisms of the utility model; Figure 7

[0033] Figure 9 It is a structure schematic view of a bracket of the utility model embodiment one.

[0034] BRIEF DESCRIPTION OF DRAWINGS:

[0035] 100, guide wheel mechanism; 101, bracket; 102, first threaded hole; 103, storage groove; 104, positioning hole; 105, jackscrew; 106, sleeve; 107, first threaded rod; 108, bushing; 109, optical axis; 110, nut; 111, guide wheel; 112, wire ring groove; 113, plug; 200, wire storage cylinder; 201, upper wire frame; 202, lower wire frame; 300, transition mechanism; 301, support seat; 302, transition roller; 303, fixed plate; 304, second threaded hole; 305, second threaded rod; 306, clamping plate. DETAILED DESCRIPTION

[0036] ​​To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the following will be described in conjunction with the appendices of the embodiments of this utility model. Figures 1-9 The technical solutions of the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model are within the protection scope of this utility model.

[0037] The frame of the electrical discharge cutting device includes an upper wire frame, a lower wire frame, a wire storage drum, and an electrical pulse mechanism. Several wires are wound on the frame, and the wires can cut materials when they rotate on the frame.

[0038] Example 1;

[0039] This utility model includes a multifunctional electric spark multi-wire cutting auxiliary device, such as... Figures 4-9 As shown, the machine includes two guide wheel mechanisms 100 mounted on the frame facing the workpiece. The two guide wheel mechanisms 100 are fixed to the upper and lower ends of the frame, respectively, and are symmetrically arranged. Specifically, each guide wheel mechanism 100 includes an L-shaped bracket 101 connected to the frame. The corner end of the L-shaped bracket 101 is connected to the frame. Two guide wheels 111 are rotatably mounted on the bracket 101, and can rotate on the bracket 101. The two guide wheels 111 are located on the same side of the bracket 101. Corresponding to the guide wheel mechanism 100, a transition mechanism 300 is also provided on the frame. The transition mechanism 300 includes a rotatably mounted transition roller 302, so that when the line is wound, it can pass through the transition roller 302 to form a triangle, and one line can present two cutting lines. The line winding method is as follows... Figure 1 As shown.

[0040] At the same time, the two guide wheels 111 are also arranged at an angle, such as Figure 7 , 8 As shown in Figure 9, multiple guide wheels 111 on the support 101 near the upper wire frame 201 are tilted towards the wire storage drum 200 from top to bottom, so that the wire will not collide with the guide wheels 111 below when it rotates, thus allowing the wire to cut the object normally. In addition, the multiple guide wheels 111 are also tilted towards one side of the frame from top to bottom, so that the two wire tracks are not located on the same plane, thus the two wire tracks can cut two grooves on the material.

[0041] The guide wheel 111 is also provided with a wire ring groove 112. The wire ring groove 112 is arranged in a ring structure on the outer surface of the guide wheel 111. When the wire is wound on the guide wheel 111, it can be located in the wire ring groove 112. That is, the wire ring groove 112 can limit the wire and prevent the wire from slipping off the guide wheel 111 during rotation.

[0042] Specifically, as shown in Figure 4 , 5 , the guide wheel 111 is also coaxially connected with a first threaded rod 107, and the guide wheel 111 is rotationally connected with the first threaded rod 107, that is, the guide wheel 111 can rotate on the first threaded rod 107. A first threaded hole 102 is also provided through the support 101 corresponding to the first threaded rod 107, and the first threaded rod 107 can rotate in the first threaded hole 102. The rotation of the first threaded rod 107 in the first threaded hole 102 can move the first threaded rod 107 in the first threaded hole 102, and the first threaded rod 107 can drive the position of the guide wheel 111 to be adjusted, that is, the problem of adjusting the distance between the guide wheel 111 and the rack is solved. Therefore, when the distance between the cutting grooves on the material needs to be adjusted, rotating the first threaded rod 107 can increase or decrease the inclination angle between the two guide wheels 111, thereby changing the distance between the two lines.

[0043] On the basis of the above structure, as shown in Figure 4 , 5 , the end of the first threaded rod 107 close to the guide wheel 111 is also connected with a sleeve 106, one end of the sleeve 106 has an open mouth, and the open mouth of the sleeve 106 is arranged towards the guide wheel 111. The sleeve 106 is coaxially connected with the first threaded rod 107, and the first threaded rod 107 can drive the sleeve 106 to rotate and move when rotating and moving. Meanwhile, the side of the guide wheel 111 close to the first threaded rod 107 is also coaxially connected with a light shaft 109, and a bushing 108 is also provided corresponding to the light shaft 109. The bushing 108 has a through hole, and the light shaft 109 is rotationally connected in the bushing 108. The bushing 108 is coaxially connected with the light shaft 109, and the bushing 108 is tightly fitted in the sleeve 106. When the sleeve 106 rotates and moves, it can drive the bushing 108 to rotate and move. That is, the connection between the bushing 108 and the sleeve 106 through the tight fit can facilitate the disassembly and maintenance of the parts such as the guide wheel 111, the light shaft 109, the bushing 108, the sleeve 106, and the first threaded rod 107.

[0044] Specifically, the bushing 108 can be fixedly provided with a roller bearing inside, as shown in Figure 4 , 5 , the light shaft 109 is fixed in the inner ring of the roller bearing through tight fit, so that the light shaft 109 can rotate in the bushing 108. A nut 110 is also provided corresponding to the light shaft 109. The nut 110 is inserted into the bushing 108 through the other end of the bushing 108 and is screwed on the light shaft 109, so as to reinforce the position of the light shaft 109. In this way, the light shaft 109 can be prevented from falling off the roller bearing during rotation.

[0045] Moreover, a plug 113 is arranged in the bushing 108, and the plug 113 is arranged at an end of the bushing 108 away from the optical axis 109. The plug 113 is arranged after the nut 110 is arranged, so that the plug 113 can prevent oil or coolant from entering the bushing 108.

[0046] As shown in Figure 3 , 4 , the bracket 101 is provided with a storage groove 103 corresponding to the sleeve 106. The storage groove 103 is in communication with the first threaded hole 102 and is located on the same axis as the first threaded hole 102. The sleeve 106 can be embedded in the storage groove 103, so that the space utilization can be improved and the space occupied by the sleeve 106 can be reduced.

[0047] It is worth mentioning that the bracket 101 is also provided with a positioning hole 104 corresponding to the sleeve 106. The positioning hole 104 is in communication with the storage groove 103. A jackscrew 105 is fixed in the positioning hole 104 by thread cooperation. The jackscrew 105 can rotate and move in the positioning hole 104, so that the end of the jackscrew 105 can abut against the outer surface of the sleeve 106, so that the sleeve 106 can be further reinforced, and the position of the sleeve 106 can be more stable. When the position of the guide wheel 111 needs to be adjusted, the position of the jackscrew 105 needs to be adjusted first, and then the first threaded rod 107 can be rotated to adjust the position.

[0048] The bracket 101 is also fixed on the rack by bolts, that is, the bracket 101 can be quickly disassembled and assembled by bolts, so that the mode switching process in the production process can be quickly realized.

[0049] The transition mechanism 300 comprises a support seat 301, and a transition roller 302 is rotatably arranged on the support seat 301. The support seat 301 comprises two fixed plates 303. Figure 6 As shown in the figure, the two fixed plates 303 are arranged in parallel, and a second threaded hole 304 is arranged through one of the fixed plates 303. A second threaded rod 305 is arranged in the second threaded hole 304 in cooperation with the second threaded hole 304. The second threaded rod 305 can rotate and move in the second threaded hole 304. A clamping plate 306 is arranged at the end of the second threaded rod 305. The second threaded rod 305 can drive the clamping plate 306 to move when the second threaded rod 305 moves. After the clamping plate 306 moves, the clamping plate 306 and the opposite fixed plate 303 can clamp the rack, so that the support seat 301 can be fixed, and the support seat 301 can be quickly disassembled and assembled, so that the support seat 301 can be conveniently maintained, and the mode switching process in the production process can be quickly realized.

[0050] Furthermore, traditional wire EDM machines use a conductive block for power supply, where a tungsten carbide conductive block contacts the electrode wire to connect the electrode wire to the pulse power supply and discharge energy. Another technical solution in this application is to replace the conductive device with a U-shaped conductive wheel. This allows the electrode wire (usually molybdenum wire) to be replaced with diamond wire, unaffected by the type of cutting wire. During processing, even with a pulse power supply system, processing efficiency will not be reduced (because traditional wire EDM uses pulse discharge to remove material, while with diamond wire, if the pulse discharge energy is insufficient, abrasive particles coated on the diamond wire surface can be used for grinding to remove material).

[0051] Example 2;

[0052] The difference from Example 1 is that, as Figure 1 , 2 As shown in Figure 3, the bracket 101 is provided with three guide wheels 111 at an angle, so that each line can form three cutting lines after being wound by the two guide wheel mechanisms 100 and the transition mechanism 300. Each guide wheel 111 is provided with five wire ring grooves 112, so that five lines can be placed on the frame. In this way, after winding, 15 cutting lines can be formed to cut the object at the same time.

[0053] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0054] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A multifunctional electric spark multi-wire saw auxiliary device, characterized by: The utility model relates to a yarn winding device, including, Two guide pulley mechanisms (100), the guide pulley mechanism (100) is detachably fixed on the frame, and two guide pulley mechanisms (100) are symmetrically arranged up and down, the guide pulley mechanism (100) includes the support (101) fixedly connected on the frame, a plurality of guide pulleys (111) are rotationally arranged on the support (101), a plurality of guide pulleys (111) are arranged in line and are inclined, that is, a plurality of guide pulleys (111) on the support (101) close to the upper wire frame (201) are inclined to the yarn storage cylinder (200) from top to bottom, and a plurality of guide pulleys (111) are also sequentially inclined to one side of the frame from top to bottom, a plurality of guide pulleys (111) are rotationally arranged on the outer side wall of the guide pulley (111), and a plurality of guide pulleys (111) are rotationally arranged on the outer side wall of the guide pulley (111). A transition mechanism (300) is arranged, the transition mechanism (300) includes a transition roller (302) rotationally arranged, and the yarn is transitioned through the transition roller (302) when winding between a plurality of guide pulleys (111).

2. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 1, characterized in that: A first threaded hole (102) is arranged through the support (101) corresponding to the guide pulley (111), a first threaded rod (107) matched with the first threaded hole (102) is arranged in the first threaded hole (102), and the guide pulley (111) is rotationally arranged at the end of the first threaded rod (107).

3. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 2, characterized in that: One end of the first threaded rod (107) close to the guide pulley (111) is also coaxially provided with a sleeve (106), a light shaft (109) is also coaxially arranged on the side wall of the guide pulley (111) corresponding to the sleeve (106), the light shaft (109) is rotationally arranged in the bushing (108), and the bushing (108) is tightly fitted in the sleeve (106).

4. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 3, characterized in that: The light shaft (109) is tightly fitted in the bearing inner ring of the bushing (108), and a nut (110) is arranged at the end of the light shaft (109) away from the guide pulley (111) to reinforce the light shaft (109).

5. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 4, characterized in that: A storage groove (103) is arranged on the support (101) corresponding to the sleeve (106), the sleeve (106) is arranged in the storage groove (103), a positioning hole (104) is also arranged through the support (101) corresponding to the sleeve (106), a jack screw (105) is arranged in the positioning hole (104) through threaded cooperation, and the jack screw (105) is used for reinforcing the sleeve (106).

6. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 5, characterized in that: A plug (113) is arranged at the end of the bushing (108) away from the light shaft (109).

7. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 1, characterized in that: The support (101) is fixed on the frame through bolts.

8. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 1, characterized in that: The transition mechanism (300) includes a support seat (301), the transition roller (302) is rotationally arranged on the support seat (301), and the support seat (301) is detachably fixed on the frame.

9. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 8, characterized in that: The support seat (301) comprises two fixed plates (303), one of the fixed plates (303) is provided with a second threaded hole (304) penetrating through, the second threaded hole (304) is provided with a second threaded rod (305) matched therewith, and the second threaded rod (305) is provided with a clamping plate (306) close to one end of the other fixed plate (303), and the fixed plate (303) opposite to the clamping plate (306) can realize the fixation of the support seat (301).

10. The multifunctional electric discharge multi-wire saw auxiliary device according to claim 1, characterized in that: The support (101) is provided with three guide wheels (111), and each guide wheel is provided with five wire guide ring grooves (112).

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