Ceramic mask plate device for optical coating

Abstract

The utility model relates to the technical field of optical coating, and discloses a ceramic mask plate device for optical coating, which comprises a protective shell, one side of the outer wall of the protective shell is fixedly connected with a connecting shell, the inner wall of the connecting shell is provided with an ion fan, and the top of the outer wall of the connecting shell penetrates through and is in sliding connection with a first filter screen. A second conveying pipe penetrates through and is fixedly connected to one side of the ion fan, air outlet boxes penetrate through and are fixedly connected to the two ends of the second conveying pipe, a supporting plate is fixedly connected to the right side of the outer wall of the protective shell, a filtering box is fixedly connected to the top of the supporting plate, and a fan penetrates through and is fixedly connected to one side of the outer wall of the filtering box. And the top of the filter box is fixedly connected with a second fixed plate. According to the mask plate cleaning device, through the ion fan, the filter box, the belt, the air outlet box and the second filter screen, when the mask plate is cleaned, the ion fan is started to work, and then the connecting shell can filter entering air.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical coating technology field, concretely is a kind of ceramic mask plate device for optical coating. BACKGROUND

[0002] Optical coating refers to the process of coating a thin layer of metal film on the surface of optical parts, and the purpose of coating on the surface of optical parts is to reduce or increase the reflection of light, beam splitting, color separation, light filtering and polarization requirements. Common coating methods include vacuum coating and chemical coating.

[0003] The existing ceramic mask plate device will have some dust attached to the mask plate during coating. During the cleaning process, the front of the mask plate is usually cleaned, and the coating work is carried out.

[0004] However, when using the existing ceramic mask plate device, some dust will be attached to the mask plate, and the back of the mask plate is often ignored during cleaning, which affects the coating effect. To solve the above problems, a ceramic mask plate device for optical coating is proposed. UTILITY MODEL CONTENT

[0005] The utility model aims to provide a kind of ceramic mask plate device for optical coating, solve the problem that some dust will be attached to the mask plate in the background art, and the back of the mask plate is often ignored during cleaning, which affects the coating effect.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a kind of ceramic mask plate device for optical coating, including protective shell, the outer wall of the protective shell is fixedly connected with connecting shell on one side, the inner wall of the connecting shell is provided with ion fan, the outer wall of the connecting shell is penetrated and slidably connected with first filter screen on top, the side of the ion fan is penetrated and fixedly connected with second conveying pipe, the two ends of the second conveying pipe are penetrated and fixedly connected with air outlet box, the right side of the outer wall of the protective shell is fixedly connected with support plate, the top of the support plate is fixedly connected with filter box, the outer wall of the filter box is penetrated and fixedly connected with fan on one side, the top of the filter box is fixedly connected with second fixed plate, the top of the second fixed plate is penetrated and slidably connected with second filter screen, the outer wall of the filter box is penetrated and fixedly connected with third conveying pipe on the left side, the outer circle of the third conveying pipe is penetrated and fixedly connected with branch pipe that is evenly distributed on one side, the top of the inner wall of the protective shell is fixedly connected with second cylinder, the output end of the second cylinder is provided with laser direct writing instrument body, the front side of the outer wall of the protective shell is provided with conveying assembly.

[0007] By adopting the above technical scheme, when cleaning the mask plate, start the ion fan, then the connecting shell can filter the entering gas, and then spray the gas from the air outlet box while removing static electricity from the front and back of the mask plate.

[0008] As a further description of the above technical solution: the conveying assembly includes a motor, the motor is fixedly connected between the protective shell, the motor output end penetrates the shell and is fixedly connected with a belt pulley, the inner wall of the protective shell is fixedly connected with a shell, the inner wall of the shell is rotatably connected with a belt pulley on one side, a belt is arranged between the two belt pulleys, the belt is fixedly connected with two moving plates on one side, the first connecting plate is fixedly connected on one side of the two moving plates, the vacuum pump is fixedly connected on the outer wall of the protective shell on the front right side, the three-way pipe is fixedly connected on one side of the vacuum pump, the electromagnetic valve is fixedly connected at both ends of the three-way pipe, the first conveying pipe is fixedly connected at the other end of the two electromagnetic valves, the suction cup is fixedly connected at the other end of the two first conveying pipes, and the first fixed plate is fixedly connected on one side of the shell.

[0009] By adopting the above technical scheme, the conveying assembly can make two ceramic mask plates work alternately.

[0010] As a further description of the above technical solution: the protective shell is fixedly connected with two guide rails on the back side, and the transparent door is slidably connected between the two guide rails.

[0011] By adopting the above technical scheme, the transparent door facilitates the observation of the interior of the protective shell.

[0012] As a further description of the above technical solution: the second filter screen is slidably connected between the inner walls of the filter box.

[0013] By adopting the above technical scheme, the second filter screen can be replaced by sliding upwards.

[0014] As a further description of the above technical solution: the second fixed plate is rotatably connected with a lid on one side.

[0015] By adopting the above technical scheme, the lid can be opened by rotating.

[0016] As a further description of the above technical solution: the outer wall of the two air outlet boxes is fixedly connected with two second connecting plates, and the second connecting plate is fixedly connected with the third conveying pipe.

[0017] By adopting the above technical scheme, the second connecting plate supports the third conveying pipe.

[0018] As a further description of the above technical solution: the inner wall of the protective shell is fixedly connected with two first air cylinders at the bottom, the first air cylinders are fixedly connected with a placing table at the top, the placing table is fixedly connected with telescopic rods at the bottom of the four corner positions, and the telescopic rods are fixedly connected between the protective shell.

[0019] Through adoption of the above technical scheme, the telescopic rod moves along with the first cylinder when the placement table is driven to move.

[0020] As a further description of the above technical scheme: two first connecting plates are internally penetrated and fixedly connected with suction cups, the top of the moving plate is connected with a limiting plate, the inner wall of the limiting plate is slidably connected with a first conveying pipe, two limiting grooves are formed in one side of the first fixed plate, and the inner wall of the limiting groove is slidably connected with a moving plate.

[0021] Through adoption of the above technical scheme, the suction cup is connected to the first connecting plate, then the suction cup is connected to the first conveying pipe, and the limiting groove limits the first connecting pipe.

[0022] Compared with the prior art, the utility model has the advantages that:

[0023] 1. The ceramic mask plate device for optical coating provided by the utility model realizes double-side cleaning of the mask plate and improves the coating effect through the ion fan, the filter box, the belt, the air outlet box and the second filter screen.

[0024] 2. The ceramic mask plate device for optical coating provided by the utility model realizes continuous work and improves the work efficiency through the belt pulley, the second fixed plate, the suction cup and the vacuum pump. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a perspective view of the overall structure of the utility model;

[0026] Figure 2 It is a schematic view of the internal structure of the protective shell of the utility model;

[0027] Figure 3 It is a front view of the overall structure of the utility model;

[0028] Figure 4 It is a schematic view of the air outlet box structure of the utility model;

[0029] Figure 5 It is an exploded view of the filter box structure of the utility model;

[0030] Figure 6 It is the exploded view of the connecting shell structure of the utility model;

[0031] Figure 7 It is the schematic view of the suction disc structure of the utility model;

[0032] Figure 8 It is the exploded view of the shell structure of the utility model.

[0033] In the drawing: 1, protective shell; 2, guide rail; 3, transparent door; 4, support plate; 5, first cylinder; 6, telescopic rod; 7, placing table; 8, shell; 9, motor; 10, first fixed plate; 11, limit slot; 12, moving plate; 13, filter box; 14, limit plate; 15, suction disc; 16, first connecting plate; 17, vacuum pump; 18, first conveying pipe; 19, electromagnetic valve; 20, tee; 21, belt; 22, pulley; 23, second fixed plate; 24, lid; 25, ion fan; 26, first filter screen; 27, connecting shell; 28, air outlet box; 29, second connecting plate; 30, third conveying pipe; 31, branch pipe; 32, second cylinder; 33, laser direct writing instrument body; 34, second conveying pipe; 35, second filter screen; 36, fan. DETAILED DESCRIPTION

[0034] The technical scheme in the embodiments of the utility model will be described clearly and completely below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0035] In order to further understand the content of the utility model, the utility model will be described in detail with reference to the drawings.

[0036] In combination with Figure 1 - Figure 3The utility model discloses a kind of ceramic mask plates for optical coating, including protective shell 1, protective shell 1 outer wall one side is fixedly connected with connecting shell 27, connecting shell 27 protects work environment, reduces dust, ion fan 25 is provided in connecting shell 27 inner wall, when ion fan 25 works, just can remove static electricity on ceramic mask plate dust, protective shell 1 rear side is fixedly connected with two guide rails 2, slidingly connected with transparent door 3 between the two guide rails 2, transparent door 3 is convenient to observe inside, slidingly connected with second filter screen 35 between filter box 13 inner wall, second filter screen 35 can filter conveying dust, reduce pollution to environment, second fixed plate 23 one side is rotatably connected with lid 24, two air outlet boxes 28 outer walls are fixedly connected with two second connecting plates 29, air outlet box 28 is connected with ion fan 25, then dust is removed static electricity, second connecting plate 29 is fixedly connected between third conveying pipe 30, the bottom of protective shell 1 inner wall is fixedly connected with two first air cylinders 5, when first air cylinder 5 works, just can make height adjustment of placing table 7, simultaneously pull telescopic link 6 and adjust, the top of two first air cylinders 5 is fixedly connected with placing table 7, the bottom of placing table 7 four corner positions is fixedly connected with telescopic link 6, and telescopic link 6 is fixedly connected between protective shell 1.

[0037] In combination Figure 4 - Figure 6 Connecting shell 27 outer wall top is fixedly connected with first filter screen 26, and ion fan 25 one side is fixedly connected with second conveying pipe 34, and second conveying pipe 34 conveys gas generated by ion fan 25, and both ends of second conveying pipe 34 are fixedly connected with air outlet box 28, and the right side of the outer wall of protective shell 1 is fixedly connected with support plate 4, and support plate 4 supports filter box 13, and the top of support plate 4 is fixedly connected with filter box 13, and the outer wall of filter box 13 one side is fixedly connected with fan 36, when fan 36 works, just can suck dust that removes static electricity into filter box 13 inside, and the top of filter box 13 is fixedly connected with second fixed plate 23, and the top of second fixed plate 23 is fixedly connected with second filter screen 35, and the left side of the outer wall of filter box 13 is fixedly connected with third conveying pipe 30, and third conveying pipe 30 conveys input dust, and the side of the outer ring of third conveying pipe 30 is fixedly connected with evenly distributed branch pipe 31, and multiple branch pipes 31 can make dust quickly enter filter box 13, and the top of the inner wall of protective shell 1 is fixedly connected with second air cylinder 32, and the output end of second air cylinder 32 is provided with laser direct writing instrument body 33, and the front side of the outer wall of protective shell 1 is provided with conveying assembly.

[0038] In combination Figure 7 And Figure 8The conveying assembly comprises a motor 9 fixedly connected between the protective shell 1, and a belt pulley 22 fixedly connected at the output end of the motor 9 and penetrating through the shell 8. When the motor 9 works, it drives the left belt pulley 22 to rotate, and then drives the belt 21 to rotate. The shell 8 is fixedly connected between the inner walls of the protective shell 1, and the belt pulley 22 is rotatably connected to one side of the inner wall of the shell 8. The belt 21 is arranged between the two belt pulleys 22. When the belt 21 rotates, it can drive the two moving plates 12 to move. The belt 21 is fixedly connected with two moving plates 12 on one side. The two moving plates 12 are fixedly connected with the first connecting plates 16 on one side. The vacuum pump 17 is fixedly connected to the outer wall of the protective shell 1 on the right side of the front end. The three-way pipe 20 is fixedly connected to one side of the vacuum pump 17 and penetrates through the three-way pipe 20. The electromagnetic valve 19 is fixedly connected to both ends of the three-way pipe 20 and controls the three-way pipe 20. The suction cup 15 is used reasonably. The other end of the two electromagnetic valves 19 penetrates through and is fixedly connected with the first conveying pipe 18. The other end of the two first conveying pipes 18 penetrates through and is fixedly connected with the suction cup 15. The first fixed plate 10 is fixedly connected to one side of the shell 8. The suction cup 15 penetrates through and is fixedly connected to the inner wall of the two first connecting plates 16. When the vacuum pump 17 works, the suction cup 15 can fix the ceramic mask plate and move. The moving plate 12 is connected with the limiting plate 14 on the top. The first conveying pipe 18 is slidably connected to the inner wall of the limiting plate 14. The first fixed plate 10 is provided with two limiting grooves 11 on one side. When the moving plate 12 moves, it is limited in the limiting groove 11. The moving plate 12 is slidably connected to the inner wall of the limiting groove 11.

[0039] Working principle: when using the ceramic mask plate device, first slide open the transparent door 3, place the substrate above the placement table 7, then start the vacuum pump 17, the first conveying pipe 18 transports the gas, the suction cup 15 adsorbs the ceramic mask plate on the first connecting plate 16, then start the ion fan 25, the first filter screen 26 filters the gas, the gas is sprayed from the air outlet box 28, and the electrostatic on the front and back of the ceramic mask plate is removed, and at the same time, the fan 36 is started to work, the branch pipe 31 can suck the dust into the filter box 13, then the dust is filtered by the second filter screen 35, then it is discharged from the fan 36, realizing the double-sided cleaning work of the ceramic mask plate, then the motor 9 is started to work, so that the belt pulley 22 rotates, then the belt 21 rotates, the cleaned ceramic mask plate moves to the right, and the uncleaned ceramic mask plate moves to the left, between the two air outlet boxes 28, the fan 36 and the ion fan 25 are started again to clean, then the first cylinder 5 is started to adjust the height of the substrate above the placement table 7, facilitating the film coating, the second cylinder 32 above is started to work, driving the laser direct writing instrument body 33 to adjust the height, facilitating the laser to operate the ceramic mask plate, then the used ceramic mask plate moves to the right, and the unused ceramic mask plate moves to the right, realizing continuous work and improving work efficiency, sliding the second filter screen 35 upwards and the first filter screen 26 upwards, facilitating replacement and improving filtering effect.

[0040] It should be noted that the relational terms herein such as first and second and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0041] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made thereto without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A ceramic mask device for optical coating, comprising a protective shell (1), characterized in that: The outer wall of the protective shell (1) is fixedly connected with a connecting shell (27), the inner wall of the connecting shell (27) is provided with an ion fan (25), the outer wall top of the connecting shell (27) penetrates and is slidably connected with a first filter screen (26), one side of the ion fan (25) penetrates and is fixedly connected with a second conveying pipe (34), both ends of the second conveying pipe (34) penetrate and are fixedly connected with an air outlet box (28), the outer wall right side of the protective shell (1) is fixedly connected with a supporting plate (4), the top of the supporting plate (4) is fixedly connected with a filter box (13), the outer wall of the filter box (13) penetrates and is fixedly connected with a fan (36) on one side, the top of the filter box (13) is fixedly connected with a second fixed plate (23), the top of the second fixed plate (23) penetrates and is slidably connected with a second filter screen (35), the outer wall left side of the filter box (13) penetrates and is fixedly connected with a third conveying pipe (30), the outer circle of the third conveying pipe (30) penetrates and is fixedly connected with branch pipes (31) uniformly distributed on one side, the inner wall top of the protective shell (1) is fixedly connected with a second air cylinder (32), the output end of the second air cylinder (32) is provided with a laser direct writing instrument body (33), and the front side of the outer wall of the protective shell (1) is provided with a conveying assembly.

2. The ceramic mask plate device for optical coating according to claim 1, wherein: The conveying assembly comprises a motor (9) fixedly connected between the protective shell (1), a belt pulley (22) fixedly connected to the output end of the motor (9) and penetrating the shell (8), a shell (8) fixedly connected between the inner walls of the protective shell (1), a belt pulley (22) rotatably connected to the inner wall of the shell (8) on one side, a belt (21) provided between the two belt pulleys (22), two moving plates (12) fixedly connected to one side of the belt (21), a first connecting plate (16) fixedly connected to one side of each of the two moving plates (12), a vacuum pump (17) fixedly connected to the front right side of the outer wall of the protective shell (1), a three-way pipe (20) penetrating and fixedly connected to one side of the vacuum pump (17), an electromagnetic valve (19) penetrating and fixedly connected to both ends of the three-way pipe (20), a first conveying pipe (18) penetrating and fixedly connected to one end of each of the two electromagnetic valves (19), a suction disc (15) penetrating and fixedly connected to the other end of each of the two first conveying pipes (18), and a first fixed plate (10) fixedly connected to one side of the shell (8).

3. The ceramic mask plate device for optical coating according to claim 1, wherein: The rear side of the protective shell (1) is fixedly connected with two guide rails (2), and the transparent door (3) is slidably connected between the two guide rails (2).

4. The ceramic mask plate device for optical coating according to claim 1, wherein: The second filter screen (35) is slidably connected between the inner walls of the filter box (13).

5. The ceramic mask plate device for optical coating according to claim 1, wherein: The second fixed plate (23) is rotatably connected with a lid (24) on one side.

6. The ceramic mask plate device for optical coating according to claim 1, wherein: Both the outer walls of the two air outlet boxes (28) are fixedly connected with two second connecting plates (29), and the second connecting plates (29) are fixedly connected between the third conveying pipe (30).

7. The ceramic mask plate apparatus for optical coating according to claim 1, wherein: Two first air cylinders (5) are fixedly connected to the bottom of the inner wall of the protective shell (1), the top of the two first air cylinders (5) is fixedly connected with a placing table (7), the bottom of the placing table (7) is fixedly connected with telescopic rods (6) at four corner positions, the telescopic rods (6) are fixedly connected between the protective shell (1).

8. The ceramic mask plate device for optical coating according to claim 2, wherein: Two first connecting plates (16) are fixedly connected to the bottom of the inner wall of the protective shell (1), the top of the two first connecting plates (16) is fixedly connected with a movable plate (12), the top of the movable plate (12) is connected with a limiting plate (14), the inner wall of the limiting plate (14) is slidably connected with a first conveying pipe (18), one side of the first fixed plate (10) is provided with two limiting grooves (11), the inner wall of the limiting grooves (11) is slidably connected with the movable plate (12).

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