Silicon wafer boat

Abstract

The utility model provides a silicon wafer boat which comprises a first bottom plate, a second bottom plate, two pairs of stand columns and at least one pair of groove plates used for bearing silicon wafers, the two ends of the two pairs of stand columns are fixedly arranged on the first side edge and the second side edge of the first bottom plate and the second bottom plate respectively, the two edges are opposite, and the outer side face of each stand column is provided with a lap joint part; or the outer side faces of the pair of stand columns arranged on the edge of the same side are provided with a lap joint part, according to the silicon wafer boat provided by the invention, through the mode that the two pairs of stand columns and the lap joint parts are arranged, the structural strength of the silicon wafer boat is guaranteed, and the silicon wafer boat is prevented from being broken when the silicon wafer boat is carried on the boat support.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic production equipment, and more particularly, to a silicon wafer boat. BACKGROUND

[0002] In the field of photovoltaic production equipment, the industry usually uses a CVD process (CVD, Chemical Vapor Deposition) to coat the silicon wafer. During CVD processing, manufacturers in the industry use a silicon wafer boat to load a large number of silicon wafers, and place the silicon wafer boat on a boat holder to be sent into a processing furnace cavity. The silicon wafer boat includes a top plate, a bottom plate, four groove plates, and two supporting plates. The four groove plates are arranged opposite to each other on both sides, and the four groove plates cooperate to support the silicon wafers. Each supporting plate is arranged outside the groove plate on the same side, and the supporting plate is used to lap the boat holder. The groove plate needs to support the silicon wafers on one hand, and needs to transmit the weight of the silicon wafer boat and the silicon wafers to the boat holder through the supporting plate on the other hand, which has a high risk of fracture. CONTENT OF THE UTILITY MODEL

[0003] In order to solve the above technical problems, the present application provides a silicon wafer boat, which adopts the following technical solutions:

[0004] A silicon wafer boat includes a first bottom plate, a second bottom plate, two pairs of columns, and at least one pair of groove plates for supporting silicon wafers. The two ends of the first pair of columns are fixedly arranged at the first side edges of the first bottom plate and the second bottom plate, the two ends of the second pair of columns are fixedly arranged at the second side edges of the first bottom plate and the second bottom plate, the first side edges and the second side edges are opposite to each other, and the outer side surface of each column is provided with a lapping portion. Alternatively, the outer side surfaces of a pair of columns arranged on the same side edge are provided with a lapping portion, and the lapping portion extends in a direction away from the column.

[0005] The silicon wafer boat provided by the present application is provided with two pairs of columns, and the outer side surface of each pair of columns is provided with a lapping portion. The lapping portion is used to lap the columns, thereby ensuring the structural strength of the silicon wafer boat and avoiding the fracture of the silicon wafer boat.

[0006] Optionally, the outer side surface of each column is provided with a lapping portion, the bottom surface of the lapping portion is formed with a stepped first lower surface and a second lower surface, the first lower surface is arranged away from the column and horizontally, and the second lower surface is located between the column and the first lower surface and is arranged lower than the first lower surface.

[0007] Optionally, the end of the upper surface of the lapping portion away from the column gradually rises in a direction toward the column, and the two side edges of the second lower surface are each provided with a chamfer.

[0008] The upper surface of the lap joint part is gradually raised, and the raised part forms a reinforcing rib, further improving the structural strength of the lap joint part and preventing breakage; and the two side edges of the second lower surface are chamfered, facilitating guiding when the boat is lapped.

[0009] Optionally, the outer side surface of the pair of columns arranged on the same side edge is provided with a lap joint part, and the lap joint part comprises a support plate, both ends of the support plate are fixedly connected with the pair of columns arranged on the same edge of the bottom plate, and the middle part of the support plate extends in a horizontal direction away from the pair of columns to form a lap joint block.

[0010] One support plate is fixedly connected with two columns respectively, and the two columns bear the load from the same support plate to avoid breakage.

[0011] Optionally, the lower surface of the support plate comprises a first bottom surface, a second bottom surface and a transition inclined surface connecting the first bottom surface and the second bottom surface, the first bottom surface is connected with the column, and the first bottom surface and the second bottom surface are both horizontally arranged, and the first bottom surface is lower than the second bottom surface.

[0012] The support plate connects two bottom surfaces with different heights through an inclined surface, which can match the shape of the bearing part of the boat, and the lap joint part can guide the boat after the lap joint, preventing the boat from sliding.

[0013] Optionally, two opposite side surfaces of the lap joint block extend in horizontal directions away from each other to form lugs.

[0014] The lugs formed on the two sides can increase the friction between the silicon wafer boat and the boat holder, preventing the boat from sliding after the lap joint.

[0015] Optionally, the lower surface of the support plate is provided with one limiting protrusion; or the lower surface of the support plate is provided with two limiting protrusions at intervals.

[0016] The lower surface of the support plate is provided with one or two limiting protrusions, which can cooperate with the limiting block inside the boat holder to complete the limiting, preventing the boat from sliding after the lap joint.

[0017] Optionally, a pair of groove plates are arranged on opposite edges of the first bottom plate and the second bottom plate, the inner side surface of the groove plate is provided with wafer carrying parts at equal intervals in the vertical direction, and at least two wafer carrying parts at the same height of at least one pair of groove plates are used to carry one silicon wafer; the wafer carrying part extends in the horizontal direction, and the wafer carrying part is a detachable sharp needle; or the wafer carrying part is a sharp tooth.

[0018] A pair of groove plates are arranged, and the groove plate is provided with a plurality of wafer carrying parts, which can be used to carry a large number of silicon wafers in the vertical direction, facilitating efficient processing.

[0019] Optionally, the lower surface edge of the first bottom plate and the upper surface edge of the second bottom plate are correspondingly provided with mounting grooves, the extension direction of the mounting grooves is perpendicular to the extension direction of the edges, and the upper end and the lower end of the at least one pair of groove plates are fixedly connected with the first bottom plate and the second bottom plate through the mounting grooves respectively.

[0020] By arranging the mounting grooves, the groove plates can be installed at different positions to carry silicon wafers of various sizes.

[0021] Optionally, one of the first bottom plate and the second bottom plate is formed with a shallow groove on the side facing the silicon wafer boat accommodating space, or the middle part of the at least one of the first bottom plate and the second bottom plate is hollowed out.

[0022] Optionally, the silicon wafer boat further comprises at least one groove rod arranged between the two groove plates, the groove rod is located in the middle of the two groove plates, and the two sides of the groove rod facing the two groove plates are correspondingly provided with the wafer carrying parts, and the three wafer carrying parts of the two groove plates and the groove rod at the same height are used to carry two silicon wafers.

[0023] By additionally arranging the groove rod, the original silicon wafer boat capable of carrying a whole piece of silicon wafer can carry half or multiple pieces of silicon wafers, and the compatibility of the silicon wafer boat is improved.

[0024] The shallow groove or the hollowing out is arranged in one of the two bottom plates, so that the weight of the silicon wafer boat can be effectively reduced, the production materials can be saved, and the cost can be reduced.

[0025] Optionally, the first bottom plate, the second bottom plate and the two pairs of stand columns are integrally formed, or the first bottom plate, the second bottom plate, the two pairs of stand columns and the at least one pair of groove plates are integrally formed, one of the pair of groove plates is coplanar with the first pair of stand columns, and the other of the pair of groove plates is coplanar with the second pair of stand columns.

[0026] The two bottom plates and the stand columns are fixed together by using the integrally formed mode, and have high structural strength; the groove plates and the stand columns are coplanar by using the integrally formed mode, and are arranged in the coplanar mode, so that the process is saved and time is saved.

[0027] Compared with the prior art, the beneficial effects of the technical scheme of the present application are:

[0028] By additionally arranging the stand columns, the stand columns are used for lapping, so that the groove plates are only used for carrying the silicon wafers and no longer bear the load transmitted during lapping, the structural strength is improved, and the silicon wafer boat and the silicon wafers carried thereby are prevented from being damaged due to fracture when the silicon wafer boat is lapped to the boat holder. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall structure of the first silicon wafer boat embodiment of the present application;

[0030] Figure 2The overall structure schematic diagram of the second wafer boat embodiment of the present application;

[0031] Figure 3 The structure schematic diagram of the first lap joint embodiment of the present application;

[0032] Figure 4 The structure schematic diagram of the second lap joint embodiment of the present application;

[0033] Figure 5 The structure schematic diagram of the first wafer carrier embodiment of the present application;

[0034] Figure 6 The structure schematic diagram of the second wafer carrier embodiment of the present application;

[0035] Figure 7 The structure schematic diagram of the third lap joint embodiment of the present application;

[0036] Figure 8 The structure schematic diagram of the third wafer carrier embodiment of the present application.

[0037] Figures 1-8 Comprise:

[0038] 1, the first bottom plate; 2, the second bottom plate;

[0039] 4, the slot plate; 41, the pointed needle; 42, the tine; 43, the mounting slot; 44, the slot stick;

[0040] 3, the column; 31, the first pair of columns; 32, the second pair of columns;

[0041] 5, the lap joint; 51, the first lower surface; 52, the second lower surface; 53, the support plate; 531, the first bottom surface; 532, the second bottom surface; 533, the supporting lug; 534, the lap joint block; 535, the limiting protrusion. DETAILED DESCRIPTION

[0042] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application will be further described in detail below in combination with the drawings and specific embodiments.

[0043] In the field of photovoltaic production equipment, the CVD process (CVD, Chemical Vapor Deposition) is commonly used to coat the silicon wafer. Before the CVD process, the industry uses a silicon wafer boat to load a large number of silicon wafers, and places several silicon wafer boats on the boat holder and sends them into the processing furnace cavity. The existing silicon wafer boat includes a top plate, a bottom plate, four groove plates and two supporting plates, the four groove plates are arranged opposite to each other on both sides, the four groove plates cooperate to carry the silicon wafers, and each supporting plate is arranged outside the groove plate on the same side, and the supporting plate is used to engage with the boat holder. The groove plate needs to support the silicon wafer on one hand, and needs to transfer the weight of the silicon wafer boat and the silicon wafer to the boat holder through the supporting plate on the other hand, which has a high risk of fracture.

[0044] To solve this problem, the present application provides a silicon wafer boat, which can effectively avoid the risk of fracture of the groove plate 4 by setting the stand column 3 to engage with the boat holder.

[0045] Reference Figure 1 The silicon wafer boat of the present application includes a first bottom plate 1, a second bottom plate 2, a first pair of stand columns 31, a second pair of stand columns 32, an engaging portion 5, and at least one pair of groove plates 4 for carrying silicon wafers. The two ends of the first pair of stand columns 31 are arranged at the first side edges of the first bottom plate 1 and the second bottom plate 2, the two ends of the second pair of stand columns 32 are arranged at the second side edges of the first bottom plate 1 and the second bottom plate 2, the engaging portion 5 is arranged on the outer side surface of each stand column 3, or alternatively, with reference to Figure 2 The engaging portion 5 can also be arranged on the outer side of a pair of stand columns 3 on the same side, and the engaging portion 5 extends away from the pair of stand columns 3.

[0046] It can be seen that the silicon wafer boat provided by the present application, compared with the existing silicon wafer boat, additionally increases two pairs of stand columns 3, and sets an engaging portion 5 on the outer side of the stand column 3 to engage with the boat holder, thereby reducing the load of the groove plate 4, effectively preventing the fracture of the groove plate 4, and improving the safety.

[0047] In order to improve the engagement stability of the engaging portion 5 and the boat holder, optionally, with reference to Figure 1 The outer side surface of each stand column 3 is provided with an engaging portion 5. Further, with reference to Figure 3The bottom surface of the lap joint 5 is in a stepped shape, and the bottom surface can be roughly divided into a first lower surface 51 and a second lower surface 52, wherein the second lower surface 52 is lower than the first lower surface 51. By setting the first lower surface 51 and the second lower surface 52 with different heights, a substantially vertical plane can be formed therebetween, which can be used to abut against the side plate of the boat holder, increase the friction and limit the position; at the same time, the first lower surface 51 is in contact with the upper surface of the side plate of the boat holder, so that the silicon wafer boat of the present application is stably lapped with the boat holder, and the sliding of the silicon wafer boat after being placed on the boat holder is prevented. Optionally, the distance between the substantially vertical plane and the column 3 gradually decreases in the vertical direction, which also plays a guiding role.

[0048] As shown in FIG. 1, Figure 3 the end of the upper surface of the lap joint 5 away from the column 3 gradually rises in the direction towards the column 3 to form a reinforcing rib for strengthening the stability of the structure, which can effectively prevent the column 3 from being broken; at the same time, chamfers are arranged on both sides of at least one of the first lower surface 51 and the second lower surface 52, which can play a guiding role when lapping with the boat holder provided with a bearing block for bearing the silicon wafer boat.

[0049] In another embodiment, as shown in FIG. 2, Figure 2 , Figure 4 a pair of columns 3 arranged on the same side edge are provided with a lap joint 5, and the lap joint 5 includes a support plate 53, both ends of the support plate 53 are connected with the columns 3 at the same height, and the middle part of the support plate 53 extends in the horizontal direction away from the columns 3 to form a lap block 534. The two ends of a support plate 53 are respectively fixed to the two columns 3 on the same side, so that the load can be transmitted to the two columns 3, and the breakage of the groove plate 4 when lapping with the boat holder is avoided.

[0050] Further, in order to stably lap with the boat holder, the lower bottom surface of the support plate 53 includes a first bottom surface 531, a second bottom surface 532 and a transition inclined surface connecting the first bottom surface 531 and the second bottom surface 532, and the transition inclined surface and the first bottom surface 531 and the second bottom surface 532 with different heights can provide a guiding role when lapping with the boat holder, so as to prevent deviation when lapping.

[0051] Continuing to refer to Figure 4 , in order to increase the friction between the silicon wafer boat and the boat holder, the two sides of the lap block 534 extend in directions away from each other to form lugs 533, which can be used to increase the friction between the silicon wafer boat and the boat holder. Specifically, the side plate of the boat holder is generally provided with a shallow groove, the second bottom surface 532 abuts against the groove bottom, and the two lugs 533 can abut against the upper surfaces of the boat holder side plates on both sides of the shallow groove, so that the total contact area is increased, and the friction is increased.

[0052] At present, there is a boat holder, the inner side of the side plate of which is provided with at least one limiting block, and one limiting block is used for limiting one silicon wafer boat. Therefore, correspondingly, in order to prevent the silicon wafer boat from sliding on the boat holder, as shown in Figure 7 An embodiment of the silicon wafer boat provided by the present application is shown, and the support plate 53 of the silicon wafer boat, more specifically, the bottom surface of the support plate 53, is provided with two limiting protrusions 535 for limiting. Figure 7 Two limiting protrusions 535 are shown in the middle, which are used for mutual abutment with one limiting block of the boat holder, that is, when the silicon wafer boat is placed on the boat holder, one limiting block of the side plate of the boat holder is located between the two limiting protrusions 535 of the silicon wafer boat, so as to prevent the silicon wafer boat from sliding along the length direction of the side plate after being placed on the boat holder. Correspondingly, if the side plate of the boat holder is provided with at least one pair of limiting blocks, each pair of limiting blocks is used for limiting one silicon wafer boat, then the limiting protrusion of the silicon wafer boat can be provided as one, that is, after the silicon wafer boat is placed on the boat holder, one limiting protrusion of the silicon wafer boat is located between one pair of limiting blocks on the side plate of the boat holder, which can also prevent the silicon wafer boat from sliding.

[0053] Reference Figure 1 , Figure 2 The silicon wafer boat of the present application comprises at least one pair of groove plates 4, and the two groove plates 4 of each pair are oppositely arranged, and the inner side surface of each groove plate 4 is provided with wafer carrying parts at equal intervals in the vertical direction, and at least two wafer carrying parts at the same height of the at least one pair of groove plates 4 are used for carrying one silicon wafer, and the wafer carrying parts extend in the horizontal direction. As shown in Figure 5 In some feasible cases, the wafer carrying part is a detachable sharp needle 41; as shown in Figure 6 The wafer carrying part can be provided as a sharp tooth 42, that is, a gear-like tooth structure. The wafer carrying parts are densely arranged, can carry a large number of silicon wafers, are convenient for process processing, and have high efficiency.

[0054] In order to adapt to the sizes of various silicon wafers and multiple wafer pieces, optionally, as shown in Figure 1 and Figure 2 The lower surface of the first bottom plate 1 and the upper surface of the second bottom plate 2 can be correspondingly provided with mounting grooves 43, the mounting grooves 43 extend in the horizontal direction and are perpendicular to the edge of the bottom plate, and the two ends of the groove plate 4 can be respectively fitted into the corresponding two mounting grooves 43 of the first bottom plate 1 and the second bottom plate 2, so as to realize the position adjustment of the groove plate 4 and adapt to more specifications of silicon wafers.

[0055] In addition, optionally, also in order to adapt to the sizes of various silicon wafers and multiple wafer pieces, as shown in Figure 8The silicon wafer boat can further include at least one slot rod located between the two slot plates, and the slot rod is provided with a wafer portion on each side facing the two slot plates, and the three wafer portions at the same height of the two slot plates and the slot rod can be used to carry two silicon wafers. The compatibility of the wafer portion is improved. The slot plate and the slot rod involved in the present application do not limit the shape of the cross section, and the cross section of the slot plate or the slot rod can be freely selected as a circle, a triangle, and other polygons.

[0056] Generally, the silicon wafer boat itself has a certain weight, in order to reduce the load of the boat holder, at least one side of the first bottom plate 1 and the second bottom plate 2 facing the silicon wafer containing space is provided with a shallow groove, and even optionally, the middle part of at least one of the first bottom plate 1 and the second bottom plate 2 is directly hollowed out, which can effectively reduce the weight of the silicon wafer boat. In addition, one of the two bottom plates can be provided with a shallow groove, and the middle part of the other is hollowed out, which is also a feasible weight reduction method.

[0057] In order to save the time of producing the silicon wafer boat and improve the structural strength of the silicon wafer boat, optionally, the two bottom plates and the two pairs of columns 3 can be directly processed by integral molding, and then the installation groove 43, the installation slot plate 4, the added lap joint 5 and other processes are performed according to the actual situation; or each bottom plate, the two pairs of columns 3 and at least one pair of slot plates 4 are processed by integral molding, and one of the at least one pair of slot plates 4 is coplanar with the first pair of columns 31, and the other of the at least one pair of slot plates 4 is coplanar with the second pair of columns 31. Although this method cannot adjust the position of the slot plate 4, it significantly increases the structural strength of the surface where the slot plate 4 and the column 3 are located.

[0058] The above description of the present application is sufficiently detailed and has certain particularity, and the above examples can be combined to form new examples according to actual needs without conflict. Those skilled in the art should understand that the description in the examples is only exemplary, and all changes made without departing from the true spirit and scope of the present application should belong to the protection scope of the present application. The scope of protection claimed by the present application is defined by the claims, not by the above description of the examples.

Claims

1. A silicon wafer boat characterized by, The silicon wafer boat comprises a first bottom plate, a second bottom plate, two pairs of columns, and at least one pair of groove plates for carrying silicon wafers, two ends of the first pair of columns are fixedly arranged at a first side edge of the first bottom plate and the second bottom plate, two ends of the second pair of columns are fixedly arranged at a second side edge of the first bottom plate and the second bottom plate, the first side edge and the second side edge are opposite to each other, an outer side surface of each column is provided with a lap joint part; or, outer side surfaces of a pair of columns arranged at the same side edge are provided with a lap joint part, and the lap joint part extends away from the column.

2. A silicon wafer boat as claimed in claim 1, wherein, An outer side surface of each column is provided with a lap joint part, a bottom surface of the lap joint part is formed with a stepped first lower surface and a second lower surface, the first lower surface is arranged away from the column and horizontally, and the second lower surface is located between the column and the first lower surface, and the second lower surface is arranged lower than the first lower surface.

3. A silicon wafer boat as claimed in claim 2, wherein the plurality of slots are arranged in a plurality of rows, each row having a plurality of slots. An end of an upper surface of the lap joint part away from the column gradually rises in a direction towards the column, and both side edges of the second lower surface are provided with chamfers.

4. The silicon wafer boat of claim 1 wherein, Outer side surfaces of a pair of columns arranged at the same side edge are provided with a lap joint part, the lap joint part comprises a support plate, both ends of the support plate are fixedly connected with a pair of columns arranged at the same edge of the bottom plate, and a middle part of the support plate extends away from the pair of columns in a horizontal direction to form a lap joint block.

5. A silicon wafer boat as claimed in claim 4, wherein the plurality of slots are arranged in a plurality of rows, each row having a plurality of slots. A lower surface of the support plate comprises a first bottom surface, a second bottom surface, and a transition inclined surface connecting the first bottom surface and the second bottom surface, the first bottom surface is connected with the column, and both the first bottom surface and the second bottom surface are arranged horizontally, and the first bottom surface is arranged lower than the second bottom surface.

6. A silicon wafer boat as claimed in claim 4, wherein, Two opposite side surfaces of the lap joint block are formed with lugs in horizontal directions away from each other.

7. A silicon wafer boat as claimed in claim 4, wherein the plurality of slots are arranged in a plurality of rows, each row having a plurality of slots. The lower surface of the support plate is provided with a limiting protrusion; or, the lower surface of the support plate is provided with two limiting protrusions at intervals.

8. A silicon wafer boat as claimed in claim 1, wherein, Two pairs of groove plates are arranged at opposite edges of the first bottom plate and the second bottom plate respectively, an inner side surface of the groove plate is provided with a wafer carrying part at equal intervals in a vertical direction, at least two wafer carrying parts at the same height of at least one pair of groove plates are used for carrying a silicon wafer; the wafer carrying part extends in a horizontal direction, and the wafer carrying part is a detachable sharp needle; or, the wafer carrying part is a sharp tooth.

9. A silicon wafer boat as claimed in claim 8, wherein the plurality of wafer supports are arranged in a plurality of rows, each row comprising a plurality of wafer supports. A lower edge of the first bottom plate and an upper edge of the second bottom plate are correspondingly provided with mounting grooves, an extension direction of the mounting groove is perpendicular to an extension direction of the edge, and upper ends and lower ends of the at least one pair of groove plates are fixedly connected with the first bottom plate and the second bottom plate through the mounting grooves.

10. A silicon wafer boat as described in claim 8, characterized in that, The silicon wafer boat further comprises at least one groove rod arranged between the two pairs of groove plates, the groove rod is located in the middle of the two groove plates, both sides of the groove rod facing the two groove plates are correspondingly provided with wafer carrying parts, and three wafer carrying parts at the same height of the two groove plates and the groove rod are used for carrying two silicon wafers.

11. A silicon wafer boat as claimed in claim 1, wherein, At least one of the first bottom plate and the second bottom plate is formed with a shallow groove on a side facing the silicon wafer boat containing space; or a middle part of at least one of the first bottom plate and the second bottom plate is hollowed out.

12. A silicon wafer boat as claimed in claim 1, wherein, The first bottom plate, the second bottom plate and the two pairs of columns are integrally formed; or the first bottom plate, the second bottom plate, the two pairs of columns and the at least one pair of groove plates are integrally formed, one of a pair of the groove plates is coplanar with the first pair of columns, and the other of the pair of the groove plates is coplanar with the second pair of columns.

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