High-precision air floating platform

Abstract

The utility model relates to a high-precision air floating platform which comprises a first driving mechanism and a second driving mechanism, the first driving mechanism comprises a supporting platform and a first floating piece, the first floating piece is movably connected to the supporting platform, and the first floating piece and the supporting platform are provided with a first inclined face and a second inclined face which are matched with each other and incline inwards respectively. The first floating piece is provided with a first air channel with the end communicating with the first inclined face. And the second driving mechanism comprises a supporting body and a second floating piece, the supporting body is arranged on the first floating piece, and the second floating piece is movably connected to the supporting body and the supporting platform. Through the arrangement, the electric control error between the first driving mechanism and the second driving mechanism can be prevented from being superposed on the second floating piece, so that the first floating piece and the second floating piece are pulled down and locked, and meanwhile, the dynamic stability can be improved to guarantee the operation precision.

Description

TECHNICAL FIELD

[0001] The utility model relates to air floatation platform technical field especially is a kind of high-precision air floatation platform. BACKGROUND

[0002] In modern precision machining, optical detection, semiconductor manufacturing and many other high-end manufacturing fields, there are very high requirements for the motion accuracy and stability of the equipment. Therefore, air floatation platform emerges as the times require, and air floatation platform is a kind of precision mechanical component developed according to gas lubrication technology, generally having two axes. Air floatation platform can realize frictionless sliding between slide plate and guide rail by forming rigid air film between guide rail and slide plate.

[0003] At present, the error of two axes of the air floatation platform is amplified when in use, resulting in large terminal error, and additional vacuum or magnetic attraction method is needed for pre-tightening to ensure accuracy, which also leads to complex structure and increased operating cost. In addition, the magnetic attraction pre-tightening method is not suitable for magnetic exclusion scene. UTILITY MODEL CONTENT

[0004] Therefore, the utility model solves the technical problem that the error of two axes of the air floatation platform in the prior art is amplified when in use, resulting in large terminal error, and additional vacuum or magnetic attraction method is needed for pre-tightening to ensure accuracy, thereby providing a high-precision air floatation platform.

[0005] To solve the above technical problems, the utility model provides a kind of high-precision air floatation platform, comprising:

[0006] The first driving mechanism includes a support platform and a first floating member, the first floating member is movably connected to the support platform, the first floating member and the support platform are respectively provided with a first inclined surface and a second inclined surface that are matched with each other and inwardly inclined, and the first floating member is provided with a first air channel that is communicated to the first inclined surface at the end portion.

[0007] The second driving mechanism includes a support body and a second floating member, the support body is arranged on the first floating member, the second floating member is movably connected to the support body and the support platform, the second floating member and the support body are respectively provided with a third inclined surface and a fourth inclined surface that are matched with each other and inwardly inclined, the second floating member is provided with a second air channel that is communicated to one side of the second floating member facing the support platform and the third inclined surface at the end portion, and the support body is provided with a third air channel that is communicated to the side facing the support platform at the end portion.

[0008] In one embodiment of the utility model, the first driving mechanism further includes a first driving member, the first driving member is arranged on both sides of the support platform respectively, and the output end of the first floating member is connected to the first driving member.

[0009] In one embodiment of the present invention, the second driving mechanism further includes a second driving member, which is arranged along the length direction of the support body, and the output ends of the second floating member and the second driving member are connected.

[0010] In one embodiment of the present invention, the first air passage includes: a first main air passage and a plurality of first sub-air passages. The input end of the first main air passage is connected to an air source. The input ends of the plurality of first sub-air passages are all connected to the output end of the first main air passage. The output ends of the first sub-air passages pass through a first inclined plane and the plurality of first sub-air passages are arranged along the running direction of the first driving member.

[0011] In one embodiment of the present invention, the second air passage includes: a second main air passage and a plurality of second sub-air passages. The input end of the second main air passage is connected to an air source. The input ends of the plurality of second sub-air passages are all connected to the output end of the first main air passage. The output ends of the second sub-air passages pass through the third inclined plane and the plurality of second sub-air passages are arranged along the running direction of the second driving member.

[0012] In one embodiment of the present invention, the second air passage further includes a plurality of third sub-air passages, the input ends of which are all connected to the output ends of the second main air passage, and the third sub-air passages pass through the second floating member toward one side of the support platform.

[0013] In one embodiment of the present invention, the support platform is provided with first stop blocks on both sides of the first driving member, and the support body is provided with second stop blocks on both sides of the second driving member.

[0014] In one embodiment of the present invention, the support platform includes: a first support plate and a second support plate, the first support plate being disposed on the second support plate, the second inclined surface being formed on both sides of the second support plate, the second support plate also having a mounting groove communicating with the second inclined surface, and the first driving member being embedded in the mounting groove.

[0015] In one embodiment of this utility model, a frame is also included, and the first drive mechanism and the second drive mechanism are both disposed on the frame. The frame is provided with height-adjustable support feet on all four sides.

[0016] In one embodiment of this utility model, the first floating component and the support platform are provided with corresponding first position sensors, and the second floating component and the support body are provided with corresponding second position sensors.

[0017] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0018] The utility model discloses a high accuracy air floatation platform can avoid the electric control error superposition between first drive mechanism and second drive mechanism to second floating piece, simultaneously, through the cooperation of first slope and second slope and the cooperation of third slope and fourth slope, make the reaction force of the air film that first floating piece and second floating piece receive all have the downward component force, make first floating piece and second floating piece be pulled down and lock, improve the air floatation rigidity under the condition that vacuum pre -tension and electromagnetic pre -tension are not used, realize the cost of saving operating cost and structure ontology, can improve dynamic stability to guarantee the operation accuracy simultaneously. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to make the content of the utility model more easily be clearly understood, the following according to the specific embodiment of the utility model and combining with the drawings, the utility model is further detailed, wherein

[0020] Figure 1 It is the structure schematic drawing of the utility model air floatation platform;

[0021] Figure 2 It is the structure schematic drawing of the utility model support platform;

[0022] Figure 3 It is the structure schematic drawing of the utility model support platform and first floating piece;

[0023] Figure 4 It is the utility model Figure 3 The enlarged view of A in the utility model;

[0024] Figure 5 It is the utility model second floating piece's sectional view;

[0025] Figure 6 It is the sectional view of the utility model support body.

[0026] Description of the drawings reference sign: 1, rack;2, support foot;3, support platform;31, first support plate;32, second support plate;4, first floating piece;5, support body;6, second floating piece;7, first drive part;8, first main gas channel;9, second drive part;10, installation slot;11, first slope;12, second slope;13, first sub gas channel;14, third slope;15, fourth slope;16, second main gas channel;17, second sub gas channel;18, third gas channel;19, third sub gas channel. DETAILED DESCRIPTION

[0027] The utility model will be further explained in the following combining with the drawings and specific embodiment, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model.

[0028] Embodiment

[0029] Referring to Figures 1-6 The utility model discloses a high-precision air floatation platform, including:

[0030] First drive mechanism, it includes support platform 3 and first float 4, first float 4 swing joint is in support platform 3, first float 4 and support platform 3 are equipped with the first inclined plane 11 and the second inclined plane 12 of mutual adaptation and inward inclination respectively, first float 4 is opened with the first gas passage that end communicates to the first inclined plane 11;

[0031] Second drive mechanism, it includes support body 5 and second float 6, support body 5 sets up at first float 4, second float 6 swing joint is in support body 5 and support platform 3, second float 6 and support body 5 are opened with the third inclined plane 14 and the fourth inclined plane 15 of mutual adaptation and inward inclination respectively, second float 6 is opened with the second gas passage that end respectively communicates to the side of second float 6 towards support platform 3 and the third inclined plane 14, support body 5 is opened with the third gas passage 18 that end communicates to the side towards support platform 3.

[0032] The utility model discloses a high-precision air floatation platform, through the input end of first gas passage and second gas passage respectively provides the air inlet pressure of external gas source, gas enters the clearance between first float 4 and support platform 3 through first gas passage, gas enters the clearance between second float 6 and support platform 3 and the clearance between second float 6 and support body 5 through second gas passage, gas enters the clearance between support body 5 and support platform 3 through third gas passage 18, and forms a layer of lubricating gas film with certain bearing and rigidity in each clearance, first float 4 and second float 6 avoid direct contact by the lubrication support of this gas film, the utility model discloses through above-mentioned setting, makes second float 6 directly float on support platform 3, can avoid the electric control error between first drive mechanism and second drive mechanism and add to second float 6, simultaneously, through the cooperation of first inclined plane 11 and second inclined plane 12 and the cooperation of third inclined plane 14 and fourth inclined plane 15, make first float 4 and second float 6 receive the reaction force of gas film and have the downward component force, make first float 4 and second float 6 be pulled down and lock, improve air floatation rigidity under the condition of not using vacuum pre-tightening and electromagnetic pre-tightening, realize the cost of saving operating cost and structure ontology, can improve dynamic stability to guarantee operating precision simultaneously.

[0033] Referring to Figure 2As shown, the first driving mechanism further comprises first driving members 7, which are arranged on both sides of the support platform 3. The output ends of the first floating members 4 and the first driving members 7 are connected. The first driving members 7 are servo linear motors. Arranging the first driving members 7 on both sides of the support platform 3 can make the first floating members 4 receive balanced driving force during movement, avoid problems such as inclination and deviation caused by unilateral force, and thus ensure that the air floating platform has higher precision and stability during operation.

[0034] The second driving mechanism further comprises second driving members 9, which are arranged along the length direction of the support body 5. The output ends of the second floating members 6 and the second driving members 9 are connected. The second driving members 9 are servo linear motors. For this embodiment, the second driving members 9 are arranged in the support body 5. The support body 5 is provided with grooves adapted to the second driving members 9 to increase space utilization. The second floating members 6 are driven by the second driving members 9 to move along the support body 5. The support body 5 limits and guides the second floating members 6.

[0035] Referring to Figures 3-4 As shown, the first air passage comprises a first main air passage 8 and a plurality of first sub-air passages 13. The input end of the first main air passage 8 is circumscribed around the gas source. The input ends of the plurality of first sub-air passages 13 are connected with the output end of the first main air passage 8. The output ends of the first sub-air passages 13 pass through the first inclined surface 11. The plurality of first sub-air passages 13 are arranged along the running direction of the first driving members 7. The gas source is started and supplies gas to the first main air passage 8. The gas is transmitted along the first main air passage 8. The size of the first main air passage 8 is larger than that of the first sub-air passage 13. The gas can quickly reach the output end of the first sub-air passage 13 under smaller resistance. The gas from the output end of the first sub-air passage 13 passes through the first inclined surface 11 and is sprayed into the gap formed between the first inclined surface 11 and the second inclined surface 12 between the first floating member 4 and the support platform 3. The gas continuously enters the gap and forms a uniform and continuously existing air film in the gap.

[0036] Referring to Figure 5As shown, the second gas channel comprises a second main gas channel 16, the input end of which is circumscribed by the gas source, and a plurality of second sub-gas channels 17, the input end of each of which is connected to the output end of the first main gas channel 8, the output end of the second sub-gas channel 17 passes through the third inclined surface 14, and the plurality of second sub-gas channels 17 are arranged along the running direction of the second driving member 9. The gas source is started and gas is supplied to the second main gas channel 16. The gas is transmitted along the second main gas channel 16. The size of the second main gas channel 16 is greater than that of the second sub-gas channel 17. The gas can quickly reach the output end of the second sub-gas channel 17 under smaller resistance. The gas from the output end of the second sub-gas channel 17 passes through the third inclined surface 14 and is sprayed into the gap between the third inclined surface 14 and the fourth inclined surface 15 between the second floating member 6 and the support body 5. The gas continuously enters the gap and forms a uniform and continuously existing gas film in the gap.

[0037] The second gas channel further comprises a plurality of third sub-gas channels 19, the input end of each of which is connected to the output end of the second main gas channel 16, and the third sub-gas channel 19 passes through the second floating member 6 towards one side of the support platform 3. The gas in the second gas channel simultaneously enters the second sub-gas channel 17 and the third sub-gas channel 19. On the one hand, the third sub-gas channel 19 forms a gas film between the second floating member 6 and the support platform 3. On the other hand, the third gas channel 18 forms a gas film between the support body 5 and the support platform 3, thereby respectively floating the second floating member 6 and the support body 5 on the support platform 3, floating the support body 5 and the second floating member 6 independently on the support platform 3, and being limited in the running direction by the support body 5, thereby improving the accuracy of the second floating member 6, avoiding the error of the first driving member 7 and the second driving member 9 from being superimposed on the second floating member 6. In some embodiments, the third sub-gas channel 19 is configured with a separate main gas channel. The third gas channel 18 also comprises a third main gas channel and a fourth sub-gas channel. In this embodiment, the first main gas channel, the second main gas channel and the third main gas channel are respectively opened along the length direction of the respective base, i.e. the first floating member 4, the second floating member 6 and the support body 5. Each of them is at least connected to the external gas source through the input end of the base and the output end of the base. The end is in a closed state similar to a blind hole with an appropriate length. A plurality of corresponding sub-gas channels are spaced apart along the length direction of the respective gas channel body to form a plurality of output ends. The output end of the sub-gas channel extends to the gap between the opened base and the adjacent base.

[0038] The support platform 3 is provided with a first stop block on both sides of the first driving member 7, and the support body 5 is provided with a second stop block on both sides of the second driving member 9, so as to accurately limit and protect the movement range of the first floating member 4 and the second floating member 6. When the first floating member 4 or the second floating member 6 moves under the driving of the driving member, the stop block can prevent it from exceeding the predetermined movement range due to accidental situations such as driving out of control, external interference, etc., avoiding collision damage to other parts of the air floating platform, and also helping to ensure the movement accuracy and stability of the air floating platform.

[0039] The support platform 3 comprises a first support plate 31 and a second support plate 32, the first support plate 31 is arranged on the second support plate 32, the second inclined surface 12 is arranged on both sides of the second support plate 32, the second support plate 32 is also provided with a mounting groove 10 connected to the second inclined surface 12, and the first driving member 7 is embedded in the mounting groove 10. The second inclined surface 12 is inclined inward on both sides of the second support plate 32, and the center line of the first sub-air channel 13 is perpendicular to the first inclined surface 11 and the second inclined surface 12, so that the reaction force direction of the air film to the first floating member 4 is inclined outward and downward, realizing the pre-tightening of the first floating member 4. The center line of the second sub-air channel 17 is perpendicular to the third inclined surface 14 and the fourth inclined surface 15, so that the reaction force direction of the air film to the second floating member 6 is inclined outward and downward, realizing the pre-tightening of the first floating member 4. And because the second support plate 32 and the support body 5 are respectively provided with the second inclined surface 12 and the fourth inclined surface 15 on both sides of the running direction of the first driving member 7 and the second driving member 9, each group of two opposite second inclined surfaces 12 and fourth inclined surfaces 15 can limit each other to prevent the width direction from deviating.

[0040] It also comprises a rack 1, the first driving mechanism and the second driving mechanism are arranged on the rack 1, and the rack 1 is provided with support feet 2 with adjustable height around, so as to install the first driving mechanism and the second driving mechanism on the rack 1 and make the air floating platform located at the predetermined working position. By detecting the horizontal state of the air floating platform, it is judged whether the height of the support feet 2 needs to be adjusted. If the air floating platform is inclined, the operator can adjust the height of the support feet 2 around the rack 1 according to the inclination direction and degree, and the adjustment mode includes but is not limited to screw, motor, air cylinder and other adjustment modes.

[0041] The first floating member 4 and the support platform 3 are provided with corresponding first position sensors, and the second floating member 6 and the support body 5 are provided with corresponding second position sensors. The first position sensor and the second position sensor are selected from any one or more of grating ruler, magnetic grating ruler, laser displacement sensor and inductive displacement sensor according to the movement accuracy requirement, measurement range, working environment and other factors of the air floating platform.

[0042] Obviously, the above embodiments are only examples for clearly illustrating the present application, and are not intended to limit the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments are not required to be exhausted, and the obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A high precision air floatation platform, characterized in that, include: The first drive mechanism includes a support platform and a first floating component. The first floating component is movably connected to the support platform. The first floating component and the support platform are respectively provided with a first inclined surface and a second inclined surface that are mutually adapted and inwardly inclined. The first floating component has a first air passage whose end is connected to the first inclined surface. The second drive mechanism includes a support body and a second floating member. The support body is disposed on the first floating member. The second floating member is movably connected to the support body and the support platform. The second floating member and the support body are respectively provided with a third inclined surface and a fourth inclined surface that are adapted to each other and inclined inward. The second floating member is provided with a second air passage whose end is respectively connected to the side of the second floating member facing the support platform and the third inclined surface. The support body is provided with a third air passage whose end is connected to the side facing the support platform.

2. The high precision air floating platform according to claim 1, characterized in that: The first driving mechanism further includes a first driving component, which is respectively disposed on both sides of the support platform, and the first floating component is connected to the output end of the first driving component.

3. The high precision air floating platform according to claim 2, characterized in that: The second driving mechanism further includes a second driving member, which is arranged along the length direction of the support body, and the output ends of the second floating member and the second driving member are connected.

4. The high precision air floating platform according to claim 2, characterized in that: The first air passage includes a first main air passage and a plurality of first sub-air passages. The input end of the first main air passage is connected to an air source. The input ends of the plurality of first sub-air passages are all connected to the output end of the first main air passage. The output ends of the first sub-air passages pass through the first inclined plane and the plurality of first sub-air passages are arranged along the running direction of the first driving member.

5. The high precision air floating platform according to claim 3, characterized in that: The second air passage includes: a second main air passage and multiple second sub-air passages. The input end of the second main air passage is connected to an air source. The input ends of the multiple second sub-air passages are all connected to the output end of the first main air passage. The output ends of the second sub-air passages pass through the third inclined plane and the multiple second sub-air passages are arranged along the running direction of the second driving member.

6. The high precision air floatation platform according to claim 3, wherein: The second airway also includes multiple third sub-airways, the input ends of which are all connected to the output ends of the second main airway, and the third sub-airways pass through the second floating member toward one side of the support platform.

7. The high precision air floatation platform according to claim 3, wherein: The support platform is provided with first stop blocks on both sides of the first driving member, and the support body is provided with second stop blocks on both sides of the second driving member.

8. The high precision air floatation platform according to claim 1, wherein: The support platform includes a first support plate and a second support plate. The first support plate is disposed on the second support plate. The second inclined surface is formed on both sides of the second support plate. The second support plate is also provided with a mounting groove communicating with the second inclined surface. The first driving component is embedded in the mounting groove.

9. The high precision air floatation platform according to claim 1, wherein: It also includes a frame, on which the first drive mechanism and the second drive mechanism are both mounted. The frame is provided with height-adjustable support feet on all four sides.

10. The high precision air floatation platform according to claim 1, wherein: The first floating component and the support platform are equipped with corresponding first position sensors, and the second floating component and the support body are equipped with corresponding second position sensors.

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