Beam expanding magnification detection device of beam expander

Abstract

The utility model provides a beam expanding magnification detection device of a beam expander. The beam expanding magnification detection device comprises a laser, a collimating lens group, a detection assembly and the beam expander, the laser is used for emitting laser beams; the collimating lens group is used for collimating laser beams emitted by the laser; the detection assembly is used for detecting the collimation degree of the laser beam passing through the collimating lens group and detecting the size of a first light spot of the laser beam passing through the collimating lens group; the beam expander is used for expanding the laser beam collimated by the collimator group; the detection assembly is further used for detecting the collimation degree of the laser beam passing through the beam expander and detecting the size of a second light spot of the laser beam passing through the beam expander. When the beam expanding multiplying power detection device of the beam expanding lens is used, the divergence angle of the laser is adjusted through the collimating lens set, so that the laser beam before entering the beam expanding lens is collimated light, after the collimation degree of the laser beam is measured, the incident light spot and the emergent light spot of the beam expanding lens are measured, and the beam expanding multiplying power of the beam expanding lens is obtained.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a beam expander magnification detection device of a beam expander, and belongs to the technical field of optical equipment. BACKGROUND

[0002] A laser beam expander is a lens capable of changing the diameter and divergence angle of a laser beam. The laser beam expander is included in a laser processing device in the prior art, and the laser beam expander can be combined with a collimator, a galvanometer, a field lens, and the like to form a laser processing device.

[0003] The collimation degree and the beam expander magnification of the beam expander have an important influence on the working distance and the processing effect of laser processing, and therefore the accuracy of the beam expander magnification is particularly important for laser processing. Therefore, before using the beam expander, the magnification of the beam expander needs to be tested.

[0004] However, there is no device capable of accurately detecting the beam expander magnification in the prior art. CONTENT OF THE INVENTION

[0005] The present disclosure provides a beam expander magnification detection device of a beam expander.

[0006] According to one aspect of the present disclosure, a beam expander magnification detection device of a beam expander is provided, which comprises:

[0007] a laser for emitting a laser beam;

[0008] a collimator group for collimating the laser beam emitted by the laser;

[0009] a detection assembly for detecting the collimation degree of the laser beam after passing through the collimator group, and for detecting the first spot size of the laser beam after passing through the collimator group; and

[0010] a beam expander for expanding the laser beam collimated by the collimator group; wherein the detection assembly is further configured to detect the collimation degree of the laser beam after passing through the beam expander, and to detect the second spot size of the laser beam after passing through the beam expander.

[0011] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure further comprises:

[0012] a slide rail assembly, wherein the laser is arranged at one end of the slide rail assembly, and the relative position between the slide rail assembly and the laser is fixed.

[0013] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure, the collimator lens group comprises a first collimator lens and a second collimator lens, wherein the first collimator lens is mounted on a first base, the second collimator lens is mounted on a second base, and the first base and the second base are both slidably arranged on the slide rail assembly.

[0014] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure further comprises:

[0015] A first detection platform is slidably arranged on the slide rail assembly, and the detection assembly is detachably arranged on the first detection platform.

[0016] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure, the first detection platform comprises:

[0017] A first sliding base is slidably arranged on the slide rail assembly; and

[0018] A first rotating base is rotatably arranged on the first sliding base, and the detection assembly is detachably arranged on the first rotating base.

[0019] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure, the detection assembly comprises a shearing interferometer and a beam analyzer, and when the first rotating base is rotated by 180°, the shearing interferometer in the optical path formed by the laser beam is replaced by the beam analyzer, or the beam analyzer in the optical path formed by the laser beam is replaced by the shearing interferometer.

[0020] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure, the beam expander is a variable-magnification beam expander, and the beam expander is fixed to the slide rail assembly.

[0021] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure further comprises:

[0022] A second detection platform is slidably arranged on the slide rail assembly, and the detection assembly is detachably arranged on the second detection platform.

[0023] The beam expander magnification detection device of the beam expander according to at least one embodiment of the present disclosure, the second detection platform comprises:

[0024] A second sliding base is slidably arranged on the slide rail assembly; and

[0025] A second rotating base is rotatably arranged on the second sliding base, wherein the detection assembly is detachably arranged on the second rotating base.

[0026] The detection assembly of the beam expander magnification detection device according to at least one embodiment of the present disclosure comprises a shearing interferometer and a beam analyzer, and when the second rotating base is rotated by 180°, the shearing interferometer in the optical path formed by the laser beam is replaced by the beam analyzer, or the beam analyzer in the optical path formed by the laser beam is replaced by the shearing interferometer.

[0027] The beam expander magnification detection device of the utility model has the advantages that when the beam expander magnification detection device of the utility model is used, the divergence angle of the laser is adjusted through the collimating lens group, so that the laser beam before entering the beam expander is collimated light, and after the collimation of the laser beam is measured, the measurement of the incident light spot and the outgoing light spot of the beam expander is carried out, so that the beam expander magnification detection device of the utility model not only can realize the detection of the beam expander magnification, but also greatly reduces the measurement error of the beam expander magnification, and improves the accuracy of the measurement result of the beam expander magnification. BRIEF DESCRIPTION OF DRAWINGS

[0028] The accompanying drawings illustrate exemplary embodiments of the present disclosure and together with the general description of the disclosure given above, and the detailed description of the embodiments below, serve to explain the principles of the present disclosure.

[0029] Figure 1 FIG. 1 is a structural schematic diagram of a beam expander magnification detection device according to an embodiment of the present disclosure.

[0030] Figure 2 FIG. 2 is a front view of a beam expander magnification detection device according to an embodiment of the present disclosure.

[0031] Figure 3 FIG. 3 is a side view of a beam expander magnification detection device according to an embodiment of the present disclosure.

[0032] Specifically, the reference signs in the drawings are as follows:

[0033] 100 sliding rail assembly

[0034] 110 base plate

[0035] 120 guide rail

[0036] 200 laser

[0037] 300 collimating lens group

[0038] 310 first collimating lens

[0039] 320 second collimating lens

[0040] 330 first base

[0041] 340 second base

[0042] 400 detection assembly

[0043] 410 shearing interferometer

[0044] 420 beam profiler

[0045] 500 beam expander

[0046] 600 first detection platform

[0047] 610 first sliding base

[0048] 620 first rotating base

[0049] 700 second detection platform

[0050] 710 second sliding base

[0051] 720 second rotating base. DETAILED DESCRIPTION

[0052] The present disclosure will be further described in conjunction with the drawings and embodiments. It can be understood that the specific embodiments described herein are merely exemplary features of various details and are not intended to limit the disclosure. In addition, it should be noted that only parts related to the disclosure are shown in the drawings for ease of description.

[0053] It should be noted that the embodiments and features in the embodiments of the disclosure can be combined with each other without conflict. The technical solutions of the disclosure will be described in detail below with reference to the drawings and in conjunction with the embodiments.

[0054] Unless otherwise specified, the exemplary embodiments shown will be understood to provide exemplary features of various details that can implement the technical concepts of the disclosure in practice. Therefore, unless otherwise specified, the features of various embodiments can be additionally combined, separated, interchanged and / or rearranged without departing from the technical concepts of the disclosure.

[0055] The use of cross-hatching and / or shading in the drawings is generally used to illustrate the boundaries and / or transitions between adjacent portions of a part. As such, unless specified, the presence or absence of cross-hatching and / or shading is not intended to convey or imply any preference or requirement for specific material, material properties, dimensions, proportions, commonality of the illustrated parts between the parts, and / or any other characteristic, attribute, property, etc. of the parts. Moreover, in the drawings, the size and relative sizes of parts can be exaggerated for clarity and / or descriptive purposes. When exemplary embodiments can be practiced differently, a specific sequence of processes can be performed in a different order than described. For example, two consecutively described processes can be performed substantially simultaneously or in the opposite order to that described. Moreover, like reference numerals can denote like parts throughout the specification.

[0056] When a part is referred to as being "on" or "over" another part, "connected to" or "coupled to" another part, it can be directly on, directly connected to, or directly coupled to the other part, or intervening parts can be present. However, when a part is referred to as being "directly on", "directly connected to", or "directly coupled to" another part, there are no intervening parts. In this regard, the term "connected" can mean physical, electrical, and / or the like, with or without intervening parts.

[0057] For descriptive purposes, the disclosure can use spatial or relative terms, such as "below", "lower", "lowermost", "above", "upper" and "uppermost", "vertical", "horizontal", and the like, which are sometimes used for the purpose of explanation only. Such spatial and / or relative terms can encompass different positions and orientations of the device in use, operation, and / or manufacture. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. Moreover, the device can be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0058] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. Furthermore, to the extent that the terms "comprising," "including," "containing," and / or "having" are used in the specification and / or claims, such terms are to be read expansively and without limitation unless otherwise indicated. Additionally, as used herein, the term "substantially" is used to describe an attribute, property, characteristic or the like that can not be perfect, absolute or complete, but is acceptable for the intended purpose. In other words, the term "substantially" is used to describe a value, condition, attribute, property, characteristic or the like that is acceptable for the intended purpose, even though it may not be perfect, absolute or complete.

[0059] Figure 1 is a structural schematic diagram of a beam expander magnification detection device of a beam expander according to an embodiment of the present disclosure. Figure 2 is a front view of a beam expander magnification detection device of a beam expander according to an embodiment of the present disclosure. Figure 3 is a side view of a beam expander magnification detection device of a beam expander according to an embodiment of the present disclosure.

[0060] As shown in Figures 1 to 3 , the beam expander magnification detection device of the beam expander of the present disclosure can detect the beam expander magnification of the beam expander 500 when in use, and can also determine whether the collimation of the laser beam after passing through the beam expander 500 meets the requirements.

[0061] Specifically, the beam expander magnification detection device of the beam expander of the present disclosure can include components such as a sliding rail assembly 100, a laser 200, a collimating mirror group 300, a detection assembly 400, and a beam expander 500.

[0062] The sliding rail assembly 100 of the present disclosure can include a base plate 110 and guide rails 120 arranged on the base plate 110. Specifically, the base plate 110 of the present disclosure can be formed in a substantially rectangular shape and have a length direction. The guide rails 120 can be arranged in two, with the two guide rails 120 arranged parallel to each other. Moreover, the guide rails 120 can extend along the length direction of the base plate 110.

[0063] The laser 200 is arranged at one end of the sliding rail assembly 100, and the relative position of the sliding rail assembly 100 and the laser 200 is fixed. Specifically, one side of the laser 200 can be fixedly connected to one end of the base plate 110 and / or the guide rails 120 of the sliding rail assembly 100.

[0064] The laser 200 is used to emit a laser beam. That is, the laser 200 of the present disclosure is arranged as a light-emitting light source at one end of the entire device.

[0065] The collimating lens group 300 is used to collimate the laser beam emitted by the laser 200; accordingly, the laser beam after passing through the collimating lens group 300 can be emitted substantially horizontally, at which time the optical path formed by the laser beam can be substantially parallel to the length direction of the base plate 110.

[0066] Specifically, the collimating lens group 300 includes a first collimating lens 310 and a second collimating lens 320, wherein the first collimating lens 310 and the second collimating lens 320 are sequentially arranged along the propagation direction of the laser beam. In other words, along the propagation direction of the laser beam, the second collimating lens 320 is located on the downstream side of the first collimating lens 310.

[0067] The first collimating lens 310 is mounted on a first base 330, and the second collimating lens 320 is mounted on a second base 340, both of which are slidably arranged on the slide rail assembly 100. In this way, the distance between the first collimating lens 310 and the laser 200 is adjustable, and the distance between the first collimating lens 310 and the second collimating lens 320 is also adjustable. Based on this, the beam expander magnification detection device of the beam expander of the present disclosure can adjust the collimation of the laser beam by adjusting the position of the first collimating lens 310 and / or the second collimating lens 320 when in use, and make the collimation of the laser beam meet the requirements.

[0068] That is, the non-collimated laser beam emitted by the laser 200 will become a collimated laser beam after passing through the collimating lens group 300.

[0069] Moreover, when the collimation of the laser beam passing through the collimating lens group 300 meets the requirements, the first base 330 can be fixed to the slide rail assembly 100 and the second base 340 can be fixed to the slide rail assembly 100 by locking screws.

[0070] In a preferred embodiment, as shown in Figure 1 The first base 330 of the present disclosure includes a downwardly open groove, two opposite side walls of the groove are formed as guide surfaces, wherein one side wall of the groove is in sliding contact with one surface of one guide rail 120, and the other side wall of the groove is in sliding contact with one surface of the other guide rail 120, so that the first base 330 of the present disclosure can be guided by the two guide rails 120 together, thereby enabling the laser beam to pass through the center of the first collimating lens 310 and the second collimating lens 320.

[0071] The second base 340 can have the same structure as the first base 330, and the structure of the second base 340 will not be described again.

[0072] The beam expander beam expansion ratio detection device of the present disclosure further comprises a first detection platform 600, which is slidably arranged on the slide rail assembly 100, and the detection assembly 400 is detachably arranged on the first detection platform 600.

[0073] In the present disclosure, along the propagation direction of the laser beam, the first detection platform 600 is located on the downstream side of the collimator lens group 300, i.e. on the downstream side of the second collimator lens 320, so that the collimated laser beam after the collimator lens group 300 will be irradiated to the detection assembly 400 and detected by the detection assembly 400.

[0074] Specifically, the first detection platform 600 comprises a first sliding base 610 and a first rotating base 620. The first sliding base 610 is slidably arranged on the slide rail assembly 100; for example, the first sliding base 610 is slidably arranged on one of the guide rails 120 of the slide rail assembly 100. The first rotating base 620 is rotatably arranged on the first sliding base 610, and preferably the rotation axis of the first rotating base 620 is a vertical axis which does not intersect the optical path center of the laser beam. In other words, there is a predetermined distance interval between the vertical plane in which the optical path center of the laser beam is located and the vertical axis.

[0075] The detection assembly 400 is detachably arranged on the first rotating base 620, wherein the detection assembly 400 is used to detect the collimation of the laser beam after the collimator lens group 300, and to detect the first spot size of the laser beam, wherein the first spot of the laser beam is the spot formed when the laser beam irradiates to the detection assembly 400.

[0076] The detection assembly 400 comprises a shearing interferometer 410 and a beam analyzer 420. When the beam expander beam expansion ratio detection device of the present disclosure is in use, the first rotating base 620 can be rotated, and the shearing interferometer 410 is first rotated to the optical path center of the laser beam to test whether the laser beam after the collimator lens group 300 is a collimated light, i.e. to judge whether the collimation of the laser beam after the collimator lens group 300 meets the requirements, and if the collimation of the laser beam does not meet the requirements, the positions of the first collimator lens 310 and / or the second collimator lens 320 are adjusted until the collimation of the laser beam meets the requirements. At the same time, when the collimation of the laser beam meets the requirements, the first base 330 and the second base 340 are fixed on the slide rail assembly 100.

[0077] Then the first rotating base 620 is rotated by 180°, and the shearing interferometer 410 in the optical path of the laser beam is replaced by the beam analyzer 420, at this time the laser beam will irradiate to the beam analyzer 420 and form a spot on the beam analyzer 420, at this time the beam analyzer 420 can obtain the size of the spot and obtain the first spot size (i.e. the diameter D1) of the laser beam.

[0078] When the measurement of the first spot size of the laser beam is completed, the shearing interferometer 410 and the beam analyzer 420 are detached from the first detection platform 600, at this time, since the first detection platform 600 is located below the laser beam, the laser beam can irradiate to the beam expander 500.

[0079] The beam expander 500 is used to expand the collimated laser beam collimated by the collimator lens group 300; preferably, the beam expander 500 is a variable magnification beam expander 500, and the beam expander 500 is fixed to the slide rail assembly 100.

[0080] That is to say, the beam expander magnification detection device of the present disclosure can adjust the beam expander 500 to the corresponding magnification position when in use, and then confirm whether the magnification is accurate through the beam expander magnification detection device of the present disclosure.

[0081] In the present disclosure, the detection assembly 400 is also used to detect the collimation of the laser beam after passing through the beam expander 500, and to detect the size of the second spot of the laser beam.

[0082] In other words, after the detection assembly 400 of the present disclosure is detached from the first detection platform 600, it can be installed on the second detection platform 700. At this time, along the propagation direction of the laser beam, the first detection platform 600 is located on the upstream side of the beam expander 500, and the second detection platform 700 is located on the downstream side of the beam expander 500.

[0083] The beam expander magnification detection device of the present disclosure further comprises: a second detection platform 700, which is slidably arranged on the slide rail assembly 100, and the detection assembly 400 is detachably arranged on the second detection platform 700.

[0084] In the present disclosure, along the propagation direction of the laser beam, the second detection platform 700 is located on the downstream side of the beam expander 500, so that the laser beam after passing through the beam expander 500 will irradiate to the detection assembly 400 and be detected by the detection assembly 400.

[0085] Specifically, the second detection platform 700 comprises a second sliding base 710 and a second rotating base 720. The second sliding base 710 is slidably arranged on the slide rail assembly 100; for example, the second sliding base 710 is slidably arranged on one of the guide rails 120 of the slide rail assembly 100. The second rotating base 720 is rotatably arranged on the second sliding base 710, preferably, the rotation axis of the second rotating base 720 is a vertical axis, which does not intersect with the optical path center of the laser beam. In other words, there is a preset distance interval between the vertical plane where the optical path center of the laser beam is located and the vertical axis.

[0086] The detection assembly 400 is detachably arranged on the second rotating base 720, wherein the detection assembly 400 is used for detecting the collimation of the laser beam after the beam expander 500, and is used for detecting the second spot size of the laser beam, wherein the second spot of the laser beam is the spot formed when the laser beam irradiates to the detection assembly 400.

[0087] The detection assembly 400 includes a shearing interferometer 410 and a beam analyzer 420. When the beam expander magnification detection device of the present disclosure is in use, the second rotating base 720 can be rotated, and the shearing interferometer 410 is first rotated to the center of the light path of the laser beam to test whether the collimation of the laser beam after the beam expander 500 meets the requirements. If the collimation of the laser beam does not meet the requirements, the beam expander 500 is adjusted until the collimation of the laser beam meets the requirements.

[0088] Then, the second rotating base 720 is rotated by 180°, and the shearing interferometer 410 in the light path of the laser beam is replaced by the beam analyzer 420. At this time, the laser beam will irradiate to the beam analyzer 420 and form a spot on the beam analyzer 420. At this time, the beam analyzer 420 can obtain the size of the spot and obtain the second spot size (diameter D2) of the laser beam. Correspondingly, the ratio of the second spot size (diameter D2) to the first spot size (diameter D1) is the corresponding magnification of the beam expander 500.

[0089] When the measurement of the first spot size of the laser beam is completed, the shearing interferometer 410 and the beam analyzer 420 are detached from the second detection platform 700 and are prepared for the next use.

[0090] When the beam expander magnification detection device of the present disclosure is in use, the collimation of the laser beam is adjusted by the collimator group 300 to make the laser beam before entering the beam expander to be collimated light. After the collimation of the laser beam is measured, the measurement of the incident spot and the exit spot of the beam expander is performed. Therefore, the beam expander magnification detection device of the present disclosure not only can realize the detection of the magnification of the beam expander, but also greatly reduces the measurement error of the magnification of the beam expander and improves the accuracy of the measurement result of the magnification of the beam expander.

[0091] In addition, although Figures 1 to 3 The beam expander magnification detection devices shown in the prior art all include two sets of detection devices, but the beam expander magnification detection device of the present disclosure can realize the detection of the magnification of the beam expander by one set of detection assembly when in use, thereby saving one set of detection assembly and reducing the cost of the beam expander magnification detection device.

[0092] In the description of the specification, the description of the terms "one embodiment / way", "some embodiments / ways", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment / way or example are included in at least one embodiment / way or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment / way or example. Also, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments / ways or examples. In addition, the person skilled in the art can combine and combine the different embodiments / ways or examples described in the specification and the features of the different embodiments / ways or examples, without contradiction.

[0093] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0094] The person skilled in the art should understand that the above-mentioned embodiments are only for the purpose of clearly illustrating the present disclosure, and are not intended to limit the scope of the present disclosure. Based on the above disclosure, other changes or modifications can also be made by those skilled in the art, and these changes or modifications are still within the scope of the present disclosure.

Claims

1. A device for detecting the magnification of a beam expander, characterized in that, include: A laser for emitting a laser beam; A collimating lens group, which is used to collimate the laser beam emitted by the laser. A detection component, wherein the detection component is used to detect the collimation of the laser beam after passing through the collimating lens group, and to detect the size of the first spot of the laser beam after passing through the collimating lens group; as well as A beam expander is used to expand the laser beam collimated by the collimating lens group; wherein, the detection component is also used to detect the collimation of the laser beam after passing through the beam expander, and to detect the size of the second spot of the laser beam after passing through the beam expander.

2. The beam magnification detection device for a beam expander according to claim 1, characterized in that, Also includes: A slide rail assembly, wherein the laser is disposed at one end of the slide rail assembly, and the relative position of the slide rail assembly and the laser is fixed.

3. The beam magnification detection device for a beam expander according to claim 2, characterized in that, The collimating lens assembly includes a first collimating lens and a second collimating lens, wherein the first collimating lens is mounted on a first base and the second collimating lens is mounted on a second base, and both the first base and the second base are slidably disposed on the slide rail assembly.

4. The beam magnification detection device for a beam expander according to claim 2, characterized in that, Also includes: A first detection platform is slidably disposed on the slide rail assembly, and the detection assembly is detachably disposed on the first detection platform.

5. The beam magnification detection device for a beam expander according to claim 4, characterized in that, The first detection platform includes: A first sliding base, slidably disposed on the slide rail assembly; and A first rotating base is rotatably disposed on a first sliding base, wherein the detection component is detachably disposed on the first rotating base.

6. The beam magnification detection device for a beam expander according to claim 5, characterized in that, The detection component includes a shearing interferometer and a beam analyzer. When the first rotating base rotates 180°, the shearing interferometer in the optical path formed by the laser beam is replaced with a beam analyzer, or the beam analyzer in the optical path formed by the laser beam is replaced with a shearing interferometer.

7. The beam magnification detection device for a beam expander according to claim 2, characterized in that, The beam expander is an adjustable magnification beam expander, and the beam expander is fixed to the slide rail assembly.

8. The beam magnification detection device for a beam expander according to claim 2, characterized in that, Also includes: The second detection platform is slidably disposed on the slide rail assembly, and the detection assembly is detachably disposed on the second detection platform.

9. The beam magnification detection device for a beam expander according to claim 8, characterized in that, The second detection platform includes: A second sliding base, slidably disposed on the slide rail assembly; and The second rotating base is rotatably disposed on the second sliding base, wherein the detection component is detachably disposed on the second rotating base.

10. The beam magnification detection device for a beam expander according to claim 9, characterized in that, The detection component includes a shearing interferometer and a beam analyzer. When the second rotating base rotates 180°, the shearing interferometer in the optical path formed by the laser beam is replaced with a beam analyzer, or the beam analyzer in the optical path formed by the laser beam is replaced with a shearing interferometer.

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