Heat dissipation structure of vertical furnace control device, vertical furnace control device and vertical furnace

Abstract

The utility model discloses a heat dissipation structure of a vertical furnace control device, the vertical furnace control device and a vertical furnace. The heat dissipation structure of the vertical furnace control device comprises a shell, an air inlet, an air outlet and a first fan. The shell comprises a closed space defined by shell walls. A heating assembly of the vertical furnace control device is arranged in the closed space. The air inlet and the air outlet are both formed in the shell, and the air outlet is formed above the air inlet in the height direction of the shell. The first fan is arranged in the air inlet or arranged at the position adjacent to the air inlet so that air can be sucked into the shell through the air inlet, the air inlet and the air outlet can form a ventilation path in the height direction of the shell, and the heating assembly is arranged on the ventilation path. Therefore, heat exchange can be carried out on the heating assembly in the control device, the temperature of the heating assembly is rapidly and effectively reduced, the heat dissipation problem of the control device is improved, and the phenomenon of downtime of a machine or product scrapping is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor process equipment technical field, concretely relates to a vertical furnace control device's heat radiation structure, vertical furnace control device and vertical furnace. BACKGROUND

[0002] Vertical furnace is the equipment commonly used in the semiconductor manufacturing process. The control device in the vertical furnace is used for receiving execution instructions, and each step of the semiconductor process is executed through the menu, including the accurate control of temperature, pressure, air flow and feedback, which is the core control device of the whole vertical furnace. However, due to the narrow space of the control device installed in the machine table, combined with the heat dissipation characteristics of the furnace pipe, the heat dissipation of the control device itself is poor, the communication problem and communication error of the communication module in the control device often occur, once the light occurs, the heavy one is scrapped. This seriously affects the manufacturing process of the semiconductor, resulting in the decline of production efficiency. UTILITY MODEL CONTENT

[0003] In view of the above shortcomings of the prior art, the purpose of the utility model is to provide a vertical furnace control device's heat radiation structure, vertical furnace control device and vertical furnace, to improve the heat dissipation problem of the control device in the vertical furnace, and avoid the phenomenon of machine downtime or product scrapping.

[0004] In order to realize the above purpose and other related purposes, the utility model provides a vertical furnace control device's heat radiation structure, vertical furnace control device and vertical furnace, which comprises:

[0005] The heat generating component of the vertical furnace control device is arranged in the closed space formed by the wall of the shell;

[0006] The air inlet is arranged on the shell;

[0007] The air outlet is arranged on the shell, and the air outlet is arranged above the air inlet in the height direction of the shell;

[0008] The first fan is arranged in the air inlet or adjacent to the air inlet, so as to suck air into the shell through the air inlet, so that the air inlet and the air outlet form a ventilation path in the height direction of the shell, and the heat generating component is arranged on the ventilation path.

[0009] Optionally, the heat radiation structure further comprises:

[0010] The second fan is arranged in the air outlet or adjacent to the air outlet, so as to exhaust air from the shell through the air outlet.

[0011] Optionally, the heat generating component is a control module of the vertical furnace control device, and the heat generating component comprises a circuit board and a functional chip arranged on the circuit board.

[0012] Optionally, the first fan is a centrifugal fan or an axial fan, and the second fan is a centrifugal fan.

[0013] Optionally, the heat dissipation structure further comprises:

[0014] A temperature monitoring device is arranged in the shell and is used for detecting the temperature in the shell.

[0015] Optionally, the heat dissipation structure further comprises:

[0016] A temperature alarm is connected with the temperature monitoring device.

[0017] According to one aspect of the present application, the present application further provides a vertical furnace control device, which comprises:

[0018] A heat dissipation structure, which is the heat dissipation structure described above.

[0019] A heating assembly is arranged in the shell of the heat dissipation structure and is arranged on the ventilation path between the air inlet and the air outlet of the heat dissipation structure, and the heating assembly comprises a circuit board and a functional chip arranged on the circuit board.

[0020] Optionally, a heat conduction block is arranged on the functional chip and is arranged on the ventilation path.

[0021] Optionally, the shell of the heat dissipation structure comprises a first wall body and a second wall body, the air inlet is arranged on the first wall body, the air outlet is arranged on the second wall body, and the functional chip is arranged transversely along the direction from the first wall body to the second wall body.

[0022] According to one aspect of the present application, the present application further provides a vertical furnace, which comprises a control device, and the control device is the vertical furnace control device described above.

[0023] Compared with the prior art, the vertical furnace control device, the vertical furnace control device and the vertical furnace provided by the present application have at least the following beneficial effects:

[0024] The heat dissipation structure of this vertical furnace control device includes a shell, an air inlet, an air outlet, and a first fan. The shell includes a closed space enclosed by the shell walls. The heating element of the vertical furnace control device is disposed within this closed space. Both the air inlet and the air outlet are disposed on the shell, with the air outlet positioned above the air inlet along the height direction of the shell. The first fan is disposed inside the air inlet or adjacent to it, drawing air into the shell through the air inlet, thus forming a ventilation path along the height direction of the shell between the air inlet and the air outlet. The heating element is disposed on this ventilation path. When the first fan draws outside air into the shell through the air inlet, the air rises due to the pressure difference, exchanging heat with the heating element along the ventilation path. Since the air outlet is positioned above the air inlet, the hot air continues to rise and is discharged outside the shell through the air outlet. Thus, this invention utilizes the flowing air to exchange heat with the heating element within the control device, quickly and effectively reducing the temperature of the heating element and improving its heat dissipation.

[0025] The vertical furnace control device of this utility model includes the aforementioned heat dissipation structure and heating component, and also possesses the aforementioned effects. Furthermore, a heat-conducting block is provided on the functional chip of the heating component of the vertical furnace control device. This heat-conducting block is positioned on or facing the ventilation path, which can further accelerate the heat dissipation efficiency of the chip. Even further, the functional chip is arranged laterally along the direction from the first wall to the second wall of the heat dissipation structure's housing to increase the contact area between the convective air and the functional chip, thereby improving the heat dissipation effect. Therefore, this utility model can effectively dissipate heat from the vertical furnace, improve errors in the vertical furnace control device caused by heat dissipation problems, and avoid furnace downtime or product scrapping caused by such problems.

[0026] The vertical furnace of this utility model includes the aforementioned vertical furnace control device or the heat dissipation structure of the vertical furnace control device, and similarly possesses the aforementioned technical effects. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of the vertical furnace control device in an example of Embodiment 1 of this utility model;

[0028] Figure 2 This is a schematic diagram of the structure of a vertical furnace control device in another embodiment of the present utility model;

[0029] Figure 3 This is a schematic diagram of the heating component of the vertical furnace control device in an embodiment of the present invention.

[0030] List of reference numerals in the attached diagram:

[0031] 100 housing

[0032] 101 first wall body

[0033] 102 second wall body

[0034] 201 air inlet

[0035] 202 air outlet

[0036] 300 first fan

[0037] 400 second fan

[0038] 500 heat generating component

[0039] 501 circuit board

[0040] 502 functional chip

[0041] 503 heat conduction block

[0042] 600 ventilation path DETAILED DESCRIPTION

[0043] The embodiments of the present application will be described in detail by the specific embodiments, and the person skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in the specification. The present application can also be implemented or applied by different specific embodiments, and each detail in the specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0044] It should be understood that the drawings provided in the embodiments of the present application only illustrate the basic concept of the present application in a schematic manner, and although only the components related to the present application are shown in the drawings, the actual implementation does not draw the components, shapes and sizes, and the shapes, numbers and proportions of each component can be changed arbitrarily, and the component layout form can be more complex. The structure, proportion, size, etc. shown in the drawings of the specification are only used to cooperate with the content disclosed in the specification for understanding and reading by the person skilled in the art, and are not used to limit the implementation conditions of the present application, so they do not have technical substantive significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the effects and purposes that can be achieved by the present application, should still fall within the scope of the technical content disclosed in the present application.

[0045] A400 DPC is an important device for ASM vertical furnace process control, and is a core control device of the entire A400 vertical furnace. However, due to the narrow space in which the DPC is installed in the machine table, combined with the heat dissipation characteristics of the furnace pipe, the heat dissipation of the DPC itself is poor, and frequent downtime occurs, which leads to product scrap. After replacing the circuit board several times or replacing the new power supply several times, the problem cannot be effectively solved. After the inventor's research, it is found that opening the cover of the DPC can alleviate or avoid the above phenomenon, and it is determined that the phenomenon is caused by the unstable work of the circuit due to the poor heat dissipation of the DPC.

[0046] In order to solve the technical problems in the background art and the above technical problems, the embodiment provides a heat dissipation structure of a vertical furnace control device, a vertical furnace control device and a vertical furnace, which can effectively solve the heat dissipation problem of the vertical furnace control device and avoid the downtime and product scrap phenomenon of the vertical furnace.

[0047] The utility model will be described in detail below in combination with specific embodiments.

[0048] Embodiment 1

[0049] The embodiment provides a heat dissipation structure of a vertical furnace control device, which refers to Figure 1 The heat dissipation structure of the vertical furnace control device includes a shell 100, an air inlet 201, an air outlet 202 and a first fan 300. The shell 100 includes a closed space formed by the shell 100 wall. The heat generating components 500 of the vertical furnace control device are arranged in the closed space. The air inlet 201 and the air outlet 202 are arranged on the shell 100, and along the height direction of the shell 100, the air outlet 202 is arranged above the air inlet 201. The first fan 300 is arranged in the air inlet 201 or adjacent to the air inlet 201, so as to suck air into the shell 100 through the air inlet 201, so that the air inlet 201 and the air outlet 202 form a ventilation path 600 in the height direction of the shell 100, and the heat generating components 500 are arranged on the ventilation path 600. In this embodiment, after the first fan 300 sucks the air outside through the air inlet 201 into the shell 100, the air will move upward due to the pressure difference, and exchange heat with the heat generating components 500 on the ventilation path 600. Due to the fact that the air outlet 202 is arranged above the air inlet 201, the hot air will continue to move upward by means of the hot air principle, and will be discharged out of the shell 100 through the air outlet 202. Thus, the embodiment can exchange heat of the heat generating components 500 in the control device by means of flowing air, quickly and effectively reduce the temperature of the heat generating components 500, and improve the heat dissipation problem of the heat generating components 500.

[0050] Specifically, referring to Figure 1The shell 100 includes a closed space formed by the walls of the shell 100. The heat generating assembly 500 of the vertical furnace control device is arranged in the closed space of the shell 100. The shell 100 can be made of metal, and the shape of the shell 100 can be a cuboid or other shapes, and the shape of the shell 100 is not limited in the embodiment. In the embodiment, the shell 100 is a cuboid. The heat generating assembly 500 is a control module of the vertical furnace control device, and the heat generating assembly 500 includes a circuit board 501 and a functional chip 502 arranged on the circuit board 501. The functional chip 502 can be used for signal transmission of the control module.

[0051] With reference to Figure 1 The air inlet 201 and the air outlet 202 are arranged on the shell 100. In the height direction of the shell 100, the air outlet 202 is arranged above the air inlet 201. Alternatively, the air inlet 201 and the air outlet 202 can be arranged on the opposite two side walls of the shell 100 or the opposite top wall and bottom wall, and of course one can be arranged on the side wall and the other can be arranged on the top wall or the bottom wall. It should be noted that as long as the air outlet 202 is located at the upper end of the air inlet 201 and the ventilation path 600 passes through the heat generating assembly 500. In one example of the embodiment, with reference to Figure 1 The shell 100 has a first wall 101 and a second wall 102 arranged opposite to each other, the first wall 101 is a left side wall, and the second wall 102 is a right side wall. The air inlet 201 is arranged below the first wall 101, and the air outlet 202 is arranged above the second wall 102. In another example of the embodiment, with reference to Figure 2 The first wall 101 is the bottom wall of the shell 100, the second wall 102 is the top wall of the shell 100, the air inlet 201 is arranged on the bottom wall, and the air outlet 202 is arranged on the top wall.

[0052] With reference to Figure 1 The first fan 300 is arranged in the air inlet 201 or adjacent to the air inlet 201, and air is sucked into the shell 100 through the air inlet 201 by the power of the first fan 300, so that the air inlet 201 and the air outlet 202 form a ventilation path 600 in the height direction of the shell 100. Alternatively, the first fan 300 can be a centrifugal fan or an axial flow fan. Due to the relationship between the air inlet 201 and the air outlet 202 and the temperature rise of the air after heat exchange in the ventilation path 600, the hot air can finally rise to the air outlet 202 and be discharged out of the shell 100, so that the heat dissipation effect is rapid and effective. In this embodiment, the principle of hot air is used, and the air inlet and the air outlet can be realized without arranging a fan at the air outlet 202, thereby reducing the heat dissipation energy consumption.

[0053] In an optional embodiment, with reference to Figure 1Or Figure 2 In order to accelerate the heat dissipation efficiency, the second fan 400 is arranged in the exhaust port 202 or the position adjacent to the exhaust port 202. Optionally, the second fan 400 can be a centrifugal fan. Thus, the first fan 300 can directly and quickly suck the air outside the shell 100 into the shell 100 through the air inlet 201, and the second fan 400 can quickly suck the hot air to the exhaust port 202 and discharge the hot air outside the shell 100, thereby further accelerating the heat exchange rate of the heat generating assembly 500 and the cold air, and being more conducive to the heat dissipation of the heat generating assembly 500.

[0054] In an optional embodiment, in order to further accelerate the heat dissipation efficiency, an air guide structure (not shown in the figure) can be arranged inside the shell 100. The air guide structure is arranged on the shell 100 and extends from the air inlet 201 to the exhaust port 202, and the heat generating assembly 500 is surrounded on the ventilation path 600, so that the heat generating assembly 500 on the ventilation path 600 is blocked from other spaces in the shell 100, so that the air only flows in the area where the heat generating assembly 500 is located, thereby improving the heat exchange efficiency.

[0055] In an optional embodiment, referring to Figure 1 Or Figure 2 The shell 100 of the embodiment further comprises a temperature monitoring device (not shown in the figure) and a temperature alarm (not shown in the figure). The temperature monitoring device is arranged in the shell 100 and is arranged close to the heat generating assembly 500 to detect the temperature of the heat generating assembly 500 or the shell 100. The temperature monitoring device is signal connected with the temperature alarm. When the temperature monitoring device detects that the temperature in the shell 100 reaches a preset value, a signal is sent to the temperature alarm to alarm. When the temperature alarm alarms, the first fan 300 can be controlled to be turned on to dissipate heat of the heat generating assembly 500 of the control device. If the heat dissipation effect is not good or the alarm still occurs, the second fan 400 can be controlled to be turned on to further accelerate the heat dissipation efficiency. Thus, the temperature alarm can be used to control the opening and closing of the first fan 300 and the second fan 400, so as to avoid the energy consumption caused by the operation of the first fan 300 or the second fan 400, and reduce the heat dissipation cost.

[0056] Embodiment 2

[0057] The embodiment provides a vertical furnace control device, referring to Figure 1 Or Figure 2The vertical furnace control device includes a heat dissipation structure and a heating assembly 500. The heat dissipation structure is the heat dissipation structure in Embodiment 1, and its structure is not described here again. The heating assembly 500 is arranged in the shell 100 of the heat dissipation structure, and is arranged on the ventilation path 600 of the air inlet 201 and the air outlet 202 of the heat dissipation structure. The heating assembly 500 includes a circuit board 501 and a functional chip 502 arranged on the circuit board 501. The functional chip 502 is used for signal transmission and the like of the control device. Of course, the heating assembly 500 can also include other heat dissipation elements, such as capacitors, inductors, and the like.

[0058] In order to further accelerate the heat dissipation efficiency, with reference to Figure 3 With reference to Figure 2 , the heat dissipation block 503 is arranged on the functional chip 502 of the heating assembly 500, and the heat dissipation block 503 is arranged on or towards the ventilation path 600, so as to accelerate the heat dissipation efficiency of the chip. In order to save costs, the heat dissipation block 503 can also be arranged only on the important functional chip 502 according to the actual heat dissipation situation.

[0059] In order to further accelerate the heat dissipation efficiency, with reference to Figure 1 , the functional chip 502 of the embodiment is arranged transversely along the direction of the first wall body 101 to the second wall body 102 of the shell 100 of the heat dissipation structure. That is, when the shape of the functional chip 502 is a cuboid, the long side of the cuboid is arranged along the ventilation path 600, so that the ventilation passes through the largest side of the chip, so as to increase the contact area of the convection air and the functional chip 502, and improve the heat dissipation effect.

[0060] Embodiment 3

[0061] The embodiment provides a vertical furnace, which includes a control device, and the control device is the vertical furnace control device in Embodiment 2. Since the vertical furnace control device has a high-efficiency heat dissipation structure, the problem of shutdown of the vertical furnace caused by errors of the control device due to poor heat dissipation capacity can be avoided, and the product scrap rate is reduced, and the production efficiency is improved.

[0062] In summary, the heat dissipation structure of the vertical furnace control device comprises a shell, an air inlet, an air outlet and a first fan.

[0063] The vertical furnace control device comprises the heat dissipation structure and the heat generating component, and has the above-mentioned effects.

[0064] The vertical furnace comprises the vertical furnace control device or the heat dissipation structure of the vertical furnace control device, and has the above-mentioned technical effects.

[0065] The above-mentioned embodiments only exemplarily illustrate the principles and effects of the vertical furnace control device, and are not used for limiting the vertical furnace control device. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and category of the vertical furnace control device. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the vertical furnace control device should be covered by the claims of the vertical furnace control device.

Claims

1. A heat radiation structure of a vertical furnace control device, characterized by comprising: The application relates to a heat dissipation structure of a vertical furnace control device. The heat dissipation structure comprises: an air inlet arranged on the shell; an air outlet arranged on the shell and arranged above the air inlet along the height direction of the shell; a first fan arranged in the air inlet or arranged adjacent to the air inlet to suck air into the shell through the air inlet, so that the air inlet and the air outlet form an air passage along the height direction of the shell, and the heat generating component is arranged on the air passage.

2. The heat dissipating structure according to claim 1, wherein The heat dissipation structure further comprises: a second fan arranged in the air outlet or arranged adjacent to the air outlet to discharge air out of the shell through the air outlet.

3. The heat dissipating structure according to claim 1, wherein The heat generating component is a control module of the vertical furnace control device, and the heat generating component comprises a circuit board and a functional chip arranged on the circuit board.

4. The heat dissipating structure according to claim 2, wherein The first fan is a centrifugal fan or an axial flow fan, and the second fan is a centrifugal fan.

5. The heat dissipating structure according to claim 1, wherein The heat dissipation structure further comprises: a temperature monitoring device arranged in the shell and used for detecting the temperature in the shell.

6. The heat dissipating structure according to claim 5, wherein The heat dissipation structure further comprises: a temperature alarm device connected with the temperature monitoring device.

7. A vertical furnace control device characterized by comprising: The application relates to a heat dissipation structure of a vertical furnace control device. The heat dissipation structure comprises: a heat generating component arranged in the shell of the heat dissipation structure and arranged on the air passage of the air inlet and the air outlet of the heat dissipation structure, and the heat generating component comprises a circuit board and a functional chip arranged on the circuit board.

8. The vertical furnace control apparatus according to claim 7, characterized by The functional chip is provided with a heat conduction block arranged on the air passage.

9. The vertical furnace control apparatus according to claim 7, characterized by The shell of the heat dissipation structure comprises a first wall body and a second wall body, the air inlet is arranged on the first wall body, the air outlet is arranged on the second wall body, and the functional chip is arranged transversely along the direction from the first wall body to the second wall body.

10. A vertical furnace characterized by The vertical furnace comprises a control device, and the control device is the vertical furnace control device as claimed in any one of claims 7 to 9.

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