Tail exhaust filtering device and processing equipment

Abstract

The utility model provides a tail exhaust filtering device and processing equipment. The tail exhaust filtering device comprises an air inlet pipeline; an exhaust line; one end of the first filtering pipeline is connected to the gas inlet pipeline, the other end of the first filtering pipeline is connected to the gas exhaust pipeline, and the first filtering pipeline is provided with a first switch valve, a first filter and a second switch valve at intervals in the gas flowing direction of the first filtering pipeline; one end of the second filtering pipeline is connected to the gas inlet pipeline, the other end of the second filtering pipeline is connected to the gas exhaust pipeline, and a third switch valve, a second filter and a fourth switch valve are arranged on the second filtering pipeline at intervals in the gas flowing direction of the second filtering pipeline. According to the technical scheme, under the condition that filter elements of individual filters need to be replaced, filtering can be conducted through other filters, production work of the whole process furnace does not need to be stopped, the use efficiency and production efficiency of equipment are improved, meanwhile, the risk that materials in the process furnace are reworked and scrapped is reduced, and the rate of finished products is increased.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of photovoltaic semiconductor equipment, and particularly relates to a tail exhaust filtering device and a processing equipment. BACKGROUND

[0002] A process furnace is one of important devices for photovoltaic semiconductor processing. In the actual application of the process furnace, a pump is used to perform vacuum pumping and emptying of process gas exchange actions on the process furnace. In this process, the gas in the process furnace is filtered through the tail exhaust filtering device under the pumping action of the pump and finally discharged through the tail exhaust pipeline.

[0003] However, as the filtering time increases, the filter of the tail exhaust filtering device may be blocked. At this time, the process furnace production needs to be stopped to replace the filter element of the tail exhaust filtering device, which reduces the production efficiency and increases the risk of rework and scrap of the material in the process furnace, thereby affecting the yield. CONTENT OF THE UTILITY MODEL

[0004] In view of the above, it is necessary to provide a tail exhaust filtering device and a processing equipment, which can improve the production efficiency and the yield.

[0005] The first aspect of the present application provides a tail exhaust filtering device, comprising: an air inlet pipeline; an air outlet pipeline; a first filtering pipeline, one end of the first filtering pipeline being connected to the air inlet pipeline, the other end of the first filtering pipeline being connected to the air outlet pipeline, the first filtering pipeline being provided with a first switch valve, a first filter and a second switch valve in sequence along the gas flow direction of the first filtering pipeline; and a second filtering pipeline, one end of the second filtering pipeline being connected to the air inlet pipeline, the other end of the second filtering pipeline being connected to the air outlet pipeline, the second filtering pipeline being provided with a third switch valve, a second filter and a fourth switch valve in sequence along the gas flow direction of the second filtering pipeline.

[0006] In some embodiments, the tail exhaust filtering device further comprises a series pipeline, the series pipeline being provided with a fifth switch valve; a first end of the series pipeline being connected to the second filtering pipeline, and the second filter, the first end of the series pipeline and the fourth switch valve being sequentially distributed along the gas flow direction of the second filtering pipeline; a second end of the series pipeline being connected to the first filtering pipeline, and the first switch valve, the second end of the series pipeline and the first filter being sequentially distributed along the gas flow direction of the first filtering pipeline.

[0007] In some embodiments, the series pipeline is provided with a series flow meter, and the series flow meter is located between the first end and the second end of the series pipeline.

[0008] In some embodiments, the first filtering pipeline is further provided with a first filtering flow meter, and the first filter and the first filtering flow meter are sequentially distributed along the gas flow direction of the first filtering pipeline.

[0009] In some embodiments, the second filtering pipeline is further provided with a second filtering flow meter, and the second filter and the second filtering flow meter are sequentially arranged along the gas flow direction of the second filtering pipeline.

[0010] In some embodiments, the exhaust pipeline is provided with an exhaust pump for exhausting the exhaust pipeline.

[0011] In some embodiments, the tail gas filtering device further comprises a cooling mechanism for cooling the gas in the air inlet pipeline.

[0012] In some embodiments, the tail gas filtering device further comprises an inert gas pipeline connected to the exhaust pipeline.

[0013] The second aspect of the present application provides a processing equipment comprising a process furnace and the tail gas filtering device provided in the first aspect, and the air inlet pipeline of the tail gas filtering device is connected to the process furnace.

[0014] Through the tail gas filtering device and the processing equipment provided in the present application, the first filtering pipeline and the second filtering pipeline can simultaneously or individually filter the tail gas. In the case that neither the first filtering pipeline nor the second filtering pipeline needs to replace the filter element, the first switch valve and the second switch valve can be opened, and the third switch valve and the fourth switch valve can also be opened, so that the first filtering pipeline and the second filtering pipeline can simultaneously pass and filter the tail gas. In the case that the first filtering pipeline needs to replace the filter element, the first switch valve and the second switch valve can be closed, and the third switch valve and the fourth switch valve can be opened, so that the second filtering pipeline can pass and filter the tail gas, and at the same time, the first filtering pipeline can replace the filter element. In the case that the second filtering pipeline needs to replace the filter element, the third switch valve and the fourth switch valve can be closed, and the first switch valve and the second switch valve can be opened, so that the first filtering pipeline can pass and filter the tail gas, and at the same time, the second filtering pipeline can replace the filter element. In this way, in the case that an individual filter needs to replace the filter element, the other filters can be used for filtering, and the production work of the entire process furnace does not need to be stopped, which improves the use efficiency of the equipment and reduces the risk of rework and scrap of the materials in the process furnace. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 The structure schematic diagram of the processing equipment provided in the embodiment of the present application.

[0016] Figure 2 The structure schematic diagram of the tail gas filtering device provided in the first embodiment of the present application.

[0017] Figure 3 The structure schematic diagram of the tail gas filtering device provided in the second embodiment of the present application.

[0018] Figure 4The tail gas filtering device provided in the third embodiment of the present application.

[0019] Main element symbol description

[0020] 100, tail gas filtering device; 10, air inlet pipeline; 20, exhaust pipeline; 30, first filtering pipeline; 31, first switch valve; 32, first filter; 33, second switch valve; 34, first filtering flow meter; 40, second filtering pipeline; 41, third switch valve; 42, second filter; 43, fourth switch valve; 44, second filtering flow meter; 50, air pump; 60, cooling mechanism; 70, inert gas pipeline; 80, series pipeline; 81, fifth switch valve; 82, series flow meter; 200, process furnace. DETAILED DESCRIPTION

[0021] In the description of the embodiments of the present application, when one element is considered to be "connected" to another element, it can be directly connected to the other element or a centrally arranged element can exist simultaneously. When one element is considered to be "arranged on" another element, it can be directly arranged on the other element or a centrally arranged element can exist simultaneously. In the present application, unless otherwise explicitly specified and limited, the terms "mount", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific circumstances.

[0022] In this paper, the "embodiment" means that the specific features, structures or characteristics described in conjunction with the embodiment can be included in at least one embodiment of the present application. The phrase appears in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment to other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0023] The present application provides a tail gas filtering device and processing equipment, which has the technical effect of improving production efficiency and yield.

[0024] Figure 1 The structure schematic diagram of the processing equipment provided in the present application is provided.

[0025] As Figure 1As shown, the processing equipment includes a tail gas filtration device 100 and a process furnace 200, wherein the tail gas filtration device 100 is connected to the process furnace 200 through a pipeline. The gas inside the process furnace 200 can be discharged from the process furnace 200 through a corresponding pipeline and enter the tail gas filtration device 100 to perform gas exchange.

[0026] Figure 2 A structural schematic diagram of the tail gas filtration device provided for Embodiment One of the present application.

[0027] As shown, Figure 2 The tail gas filtration device 100 includes an air inlet pipeline 10, an air outlet pipeline 20, a first filtration pipeline 30, a second filtration pipeline 40, and a gas suction pump 50. The air inlet pipeline 10 is connected to the process furnace 200, the gas suction pump 50 is connected to the air outlet pipeline 20, and the first filtration pipeline 30 and the second filtration pipeline 40 are respectively arranged between the air inlet pipeline 10 and the air outlet pipeline 20.

[0028] The gas suction pump 50 can perform gas suction through the air outlet pipeline 20. The gas of the process furnace 200 is first suctioned into the air inlet pipeline 10, then the gas is filtered through the first filtration pipeline 30 and the second filtration pipeline 40, and finally the gas is discharged through the air outlet pipeline 20.

[0029] In the present embodiment, one end of the first filtration pipeline 30 is connected to the air inlet pipeline 10, and the other end of the first filtration pipeline 30 is connected to the air outlet pipeline 20. The first filtration pipeline 30 is provided with a first switch valve 31, a first filter 32, and a second switch valve 33 at intervals along the gas flow direction thereof. The gas flow direction of the first filtration pipeline 30 is from the air inlet pipeline 10 to the air outlet pipeline 20. Exemplarily, the first switch valve 31 and the second switch valve 33 are both pneumatic control valves, and the first switch valve 31 and the second switch valve 33 can be controlled by a system switch.

[0030] When the second switch valve 33 is opened, the gas of the air inlet pipeline 10 is allowed to enter the first filtration pipeline 30 and be filtered through the first filter 32. When the second switch valve 33 is opened, the gas in the first filtration pipeline 30 after passing through the first filter 32 is allowed to enter the air outlet pipeline 20.

[0031] When the first switch valve 31 is closed, the gas of the air inlet pipeline 10 is blocked from passing through the first filter 32. When the second switch valve 33 is closed, the gas of the first filtration pipeline 30 is blocked from entering the air outlet pipeline 20.

[0032] In the present embodiment, one end of the second filter pipeline 40 is connected to the gas inlet pipeline 10, and the other end of the second filter pipeline 40 is connected to the gas outlet pipeline 20. The second filter pipeline 40 is provided with a third switch valve 41, a second filter 42 and a fourth switch valve 43 in sequence along the gas flow direction of the second filter pipeline 40. The gas flow direction of the second filter pipeline 40 is from the gas inlet pipeline 10 to the gas outlet pipeline 20. The third switch valve 41 and the fourth switch valve 43 are both pneumatic control valves, and can be controlled by the system control switch.

[0033] When the third switch valve 41 is opened, the gas in the gas inlet pipeline 10 is allowed to enter the second filter pipeline 40 and pass through the second filter 42 for filtration. When the fourth switch valve 43 is opened, the gas in the second filter pipeline 40 after passing through the second filter 42 is allowed to enter the gas outlet pipeline 20.

[0034] When the third switch valve 41 is closed, the gas in the gas inlet pipeline 10 is blocked from passing through the second filter 42. When the fourth switch valve 43 is closed, the gas in the second filter pipeline 40 is blocked from entering the gas outlet pipeline 20.

[0035] It can be understood that by switching the opening and closing states of the first switch valve 31, the second switch valve 33, the third switch valve 41 and the fourth switch valve 43, the tail gas filtration device 100 has at least three filtration modes.

[0036] The first filtration mode: the first switch valve 31 and the second switch valve 33 are opened, and the third switch valve 41 and the fourth switch valve 43 are opened, so that the gas of the process furnace 200 can enter the first filter pipeline 30 and the second filter pipeline 40 from the gas inlet pipeline 10 respectively, and pass through the first filter 32 and the second filter respectively for filtration, and finally enter the gas outlet pipeline 20 for discharge.

[0037] The second filtration mode: the first switch valve 31 and the second switch valve 33 are opened, and the third switch valve 41 and the fourth switch valve 43 are closed, so that the gas of the process furnace 200 can enter the first filter pipeline 30 from the gas inlet pipeline 10, and pass through the first filter 32 for filtration, and finally enter the gas outlet pipeline 20 for discharge. At this time, the gas of the process furnace 200 is not filtered by the second filter 42 of the second filter pipeline 40.

[0038] The third filtration mode: the first switch valve 31 and the second switch valve 33 are closed, and the third switch valve 41 and the fourth switch valve 43 are opened, so that the gas of the process furnace 200 can enter the second filter pipeline 40 from the gas inlet pipeline 10, and pass through the second filter 42 for filtration, and finally enter the gas outlet pipeline 20 for discharge. At this time, the gas of the process furnace 200 is not filtered by the first filter 32 of the first filter pipeline 30.

[0039] In this way, the first filter pipeline 30 and the second filter pipeline 40 form two pipelines in parallel, the first filter pipeline 30 and the second filter pipeline 40 can simultaneously perform tail gas filtration, and the first filter pipeline 30 or the second filter pipeline 40 can also perform tail gas filtration alone.

[0040] In the case where neither the first filter 32 nor the second filter 42 needs filter element replacement, the first switch valve 31 and the second switch valve 33 can be opened, the third switch valve 41 and the fourth switch valve 43 can also be opened, and the first filter pipeline 30 and the second filter pipeline 40 can simultaneously supply the gas of the process furnace 200 to pass through and be filtered.

[0041] In the case where the first filter 32 needs filter element replacement, the first switch valve 31 and the second switch valve 33 can be closed, the third switch valve 41 and the fourth switch valve 43 can be opened, and the second filter pipeline 40 can supply the gas of the process furnace 200 to pass through and be filtered, while blocking the gas from entering the first filter pipeline 30.

[0042] In the case where the second filter 42 needs filter element replacement, the third switch valve 41 and the fourth switch valve 43 can be closed, the first switch valve 31 and the second switch valve 33 can be opened, and the first filter pipeline 30 can supply the gas of the process furnace 200 to pass through and be filtered, while blocking the gas from entering the second filter pipeline 40.

[0043] Through the tail gas filtration device 100 provided in the embodiment, in the case where individual filters need filter element replacement, the other filters can be used for filtration, without the need to stop the production work of the entire process furnace 200, thereby improving the use efficiency and production efficiency of the equipment, and reducing the risk of rework and scrapping of the materials in the process furnace 200, thereby improving the yield.

[0044] It should be noted that the number of the first filter pipeline 30 and the second filter pipeline 40 in the embodiment is taken as an example of 1, and in other examples, the number of the first filter pipeline 30 and the second filter pipeline 40 can also be greater than 1, and a plurality of first filter pipelines 30 or a plurality of second filter pipelines 40 are arranged in parallel, which is not limited in the application.

[0045] In the embodiment, the tail gas filtration device 100 further comprises a cooling mechanism 60, which is arranged in the gas inlet pipeline 10. For example, the cooling mechanism 60 is arranged in the middle of the gas inlet pipeline 10, the front end of the gas inlet pipeline 10 is connected to the process furnace 200, and the rear end of the gas inlet pipeline 10 is connected to the first filter pipeline 30 and the second filter pipeline 40. The cooling mechanism 60 can cool the gas in the gas inlet pipeline 10. It can be understood that the gas directly discharged from the process furnace 200 has a high temperature, and cooling the gas by the cooling mechanism 60 can reduce the risk of damage to the internal elements of the pipeline caused by high-temperature gas.

[0046] In the embodiment, the tail exhaust filtering device 100 further comprises an inert gas pipeline 70, wherein the inert gas pipeline 70 is used for conveying inert gas such as nitrogen, and the inert gas pipeline 70 is connected to the exhaust pipeline 20. When the first switch valve 31 and the third switch valve 41 are both closed, the exhaust pump 50 can exhaust the inert gas pipeline 70, so as to exhaust the inert gas from the inert gas pipeline 70 into the exhaust pipeline 20.

[0047] It can be understood that the embodiment can realize the function of exhausting the process gas and the inert gas by the exhaust pump 50, simplifies the design of the exhaust driving mechanism, and reduces the hardware cost.

[0048] Figure 3 A structure schematic diagram of a tail exhaust filtering device provided for the second embodiment of the present application is shown.

[0049] As shown in Figure 3 The difference between the embodiment and the first embodiment is that the first filtering pipeline 30 is further provided with a first filtering flow meter 34, and the first filter 32 and the first filtering flow meter 34 are sequentially distributed along the gas flow direction of the first filtering pipeline 30. For example, the first filtering flow meter 34 can be a mass flow controller (MFC).

[0050] The first filtering flow meter 34 can be used to monitor the flow of the gas filtered by the first filter 32 in the first filtering pipeline 30. The monitoring data of the first filtering flow meter 34 can be used to determine whether the first filter 32 is blocked, so as to discover the blocking phenomenon in time.

[0051] In the embodiment, the second filtering pipeline 40 is further provided with a second filtering flow meter 44, and the second filter 42 and the second filtering flow meter 44 are sequentially distributed along the gas flow direction of the second filtering pipeline 40. For example, the second filtering flow meter 44 can be a mass flow controller (MFC).

[0052] The second filtering flow meter 44 can be used to monitor the flow of the gas filtered by the second filter 42 in the second filtering pipeline 40. The monitoring data of the second filtering flow meter 44 can be used to determine whether the second filter 42 is blocked, so as to discover the blocking phenomenon in time.

[0053] Figure 4 A structure schematic diagram of a tail exhaust filtering device provided for the third embodiment of the present application is shown.

[0054] As shown in Figure 4The difference between the present embodiment and the embodiment one is that the tail exhaust filtration device 100 further comprises a series pipeline 80, and the series pipeline 80 is provided with a fifth switch valve 81. The fifth switch valve 81 is used to control the opening and closing of the series pipeline 80. Exemplarily, the fifth switch valve 81 is a pneumatic control valve, and the fifth switch valve 81 can be controlled by the system switch.

[0055] The first end of the series pipeline 80 is connected to the second filtration pipeline 40, and the second filter 42, the first end of the series pipeline 80 and the fourth switch valve 43 are sequentially distributed along the gas flow direction of the second filtration pipeline 40. The second end of the series pipeline 80 is connected to the first filtration pipeline 30, and the first switch valve 31, the second end of the series pipeline 80 and the first filter 32 are sequentially distributed along the gas flow direction of the first filtration pipeline 30.

[0056] When the fifth switch valve 81 is opened, the second filtration pipeline 40 close to one end of the exhaust pipeline 20 is communicated with the first filtration pipeline 30 close to one end of the intake pipeline 10, allowing the gas filtered by the second filter 42 to enter the first filtration pipeline 30 through the series pipeline 80, then filtered by the first filter 32, and finally enter the exhaust pipeline 20.

[0057] When the fifth switch valve 81 is closed, the gas filtered by the second filter 42 is blocked from entering the first filtration pipeline 30 through the series pipeline 80.

[0058] It can be understood that by switching the opening and closing states of the first switch valve 31, the second switch valve 33, the third switch valve 41, the fourth switch valve 43 and the fifth switch valve 81, the tail exhaust filtration device 100 has at least four filtration modes.

[0059] The fourth filtration mode: the first switch valve 31 and the second switch valve 33 are opened, the third switch valve 41 and the fourth switch valve 43 are opened, and the fifth switch valve 81 is closed, and the gas of the process furnace 200 can enter the first filtration pipeline 30 and the second filtration pipeline 40 from the intake pipeline 10 respectively, and be filtered by the first filter 32 and the second filter respectively, and finally enter the exhaust pipeline 20 and be discharged.

[0060] The fifth filtration mode: the first switch valve 31 and the second switch valve 33 are opened, the third switch valve 41 and the fourth switch valve 43 are closed, and the fifth switch valve 81 is closed, and the gas of the process furnace 200 can enter the first filtration pipeline 30 from the intake pipeline 10, and be filtered by the first filter 32, and finally enter the exhaust pipeline 20 and be discharged. At this time, the gas of the process furnace 200 is not filtered by the second filter 42 of the second filtration pipeline 40.

[0061] The sixth filtering mode: the first switch valve 31 and the second switch valve 33 are closed, the third switch valve 41 and the fourth switch valve 43 are opened, and the fifth switch valve 81 is closed. The gas of the process furnace 200 can enter the second filtering pipeline 40 from the gas inlet pipeline 10, and then pass through the second filter 42 for filtering, and finally enter the gas outlet pipeline 20 for discharge. At this time, the gas of the process furnace 200 does not pass through the first filter 32 of the first filtering pipeline 30 for filtering.

[0062] The seventh filtering mode: the third switch valve 41 and the second switch valve 33 are opened, the fourth switch valve 43 and the first switch valve 31 are closed, and the fifth switch valve 81 is opened. The gas of the process furnace 200 can enter the second filtering pipeline 40 from the gas inlet pipeline 10, and then pass through the second filter 42 for filtering. The gas then enters the first filtering pipeline 30 through the series pipeline 80, and then passes through the first filter 32 for filtering, and finally enters the gas outlet pipeline 20 for discharge. At this time, the gas of the process furnace 200 can pass through multiple filters for multiple filtering.

[0063] In the embodiment, the series pipeline 80 is provided with a series flow meter 82, which is located between the first end and the second end of the series pipeline 80. For example, the series flow meter 82 can be a mass flow controller (MFC).

[0064] In the case of using the seventh filtering mode, the flow of the gas filtered by the second filter 42 in the series pipeline 80 can be monitored by the series flow meter 82. By using the monitoring data of the series flow meter 82, it can be determined whether the second filter 42 is blocked, so that the blocking phenomenon can be found in time.

[0065] In the embodiment, the first filtering pipeline 30 is also provided with a first filtering flow meter 34, and the first filter 32 and the first filtering flow meter 34 are sequentially arranged along the gas flow direction of the first filtering pipeline 30. For example, the first filtering flow meter 34 can be a mass flow controller (MFC).

[0066] In the case of using the seventh filtering mode, the flow of the gas filtered by the second filter 42 and then filtered by the first filter 32 in the first filtering pipeline 30 can be monitored by the first filtering flow meter 34. By using the monitoring data of the series flow meter 82, it can be determined whether the first filtering pipeline 30 is blocked, and by using the monitoring data of the first filtering flow meter 34 and the series flow meter 82 in combination, the specific blocking position can be determined.

[0067] For example, in the case that the monitoring data of the first filtering flow meter 34 determines that there is filter clogging, if the monitoring data of the serial flow meter 82 determines that the second filter 42 does not clog, it can be determined that the first filter 32 clogs. If the monitoring data of the serial flow meter 82 determines that the second filter 42 clogs, it can be determined that the second filter 42 clogs, at this time, the fifth filtering mode can be used to work, if the monitoring data of the first filtering flow meter 34 determines that there is still filter clogging, it can be determined that the first filter 32 and the second filter 42 clog simultaneously; if the monitoring data of the first filtering flow meter 34 determines that the first filter 32 does not clog, it can be determined that only the second filter 42 clogs.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and are not limited. Although the present application has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present application can be modified or replaced equivalently without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. An exhaust filtration device, characterized by, The tail gas filtration device comprises: an air inlet pipeline; an air outlet pipeline; a first filtration pipeline, one end of which is connected to the air inlet pipeline, the other end of which is connected to the air outlet pipeline, and along the gas flow direction of the first filtration pipeline, a first switch valve, a first filter and a second switch valve are arranged at intervals; a second filtration pipeline, one end of which is connected to the air inlet pipeline, the other end of which is connected to the air outlet pipeline, and along the gas flow direction of the second filtration pipeline, a third switch valve, a second filter and a fourth switch valve are arranged at intervals.

2. The tailrace filtration device of claim 1, wherein, The tail gas filtration device further comprises a series pipeline, which is provided with a fifth switch valve. The first end of the series pipeline is connected to the second filtration pipeline, and the second filter, the first end of the series pipeline and the fourth switch valve are sequentially arranged along the gas flow direction of the second filtration pipeline. The second end of the series pipeline is connected to the first filtration pipeline, and the first switch valve, the second end of the series pipeline and the first filter are sequentially arranged along the gas flow direction of the first filtration pipeline.

3. The tailrace filtration device of claim 2, wherein, The series pipeline is provided with a series flow meter, which is located between the first end and the second end of the series pipeline.

4. The tailrace filtration device according to claim 1 or 3, characterized in that The first filtration pipeline is further provided with a first filtration flow meter, and the first filter and the first filtration flow meter are sequentially arranged along the gas flow direction of the first filtration pipeline.

5. The tailrace filtration apparatus of claim 1, wherein, The second filtration pipeline is further provided with a second filtration flow meter, and the second filter and the second filtration flow meter are sequentially arranged along the gas flow direction of the second filtration pipeline.

6. The tailrace filtration device of claim 1, wherein, The air outlet pipeline is provided with an air extraction pump for extracting air from the air outlet pipeline.

7. The tailrace filtration device of claim 1, wherein, The tail gas filtration device further comprises a cooling mechanism for cooling the gas in the air inlet pipeline.

8. The tailrace filtration device of claim 1, wherein, The tail gas filtration device further comprises an inert gas pipeline, which is connected to the air outlet pipeline.

9. A processing apparatus characterized by comprising: The tail gas filtration device comprises a process furnace and the tail gas filtration device according to any one of claims 1 to 8, and the air inlet pipeline of the tail gas filtration device is connected to the process furnace.

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