Vacuum adsorption clamp for machining electrostatic chuck with shaft

Abstract

The utility model discloses a vacuum adsorption fixture for processing a shaft-equipped electrostatic chuck, which belongs to the technical field of electrostatic chuck adsorption fixtures and comprises a frame and an adsorption component arranged on the frame. The adsorption assembly comprises a lower adsorption part detachably connected with the rack and an upper adsorption part detachably connected with the lower adsorption part, a groove is formed in the lower adsorption part, a lower protrusion is arranged in the groove, a lower through hole is formed in the lower protrusion, a first outer sealing ring is arranged on the inner side wall of the groove, and a second outer sealing ring is arranged on the inner side wall of the groove. A first inner sealing ring is arranged on the lower protrusion, a connecting hole for communicating the groove with external vacuum equipment is further formed in the lower adsorption part, and a plurality of communicating holes for communicating the interior of the groove are formed in the upper adsorption part. According to the vacuum adsorption clamp, the electrostatic chuck can be directly adsorbed, the waiting time for loading and unloading is saved, the flatness of the electrostatic chuck is improved, and the machining efficiency and the product percent of pass of products are improved.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck adsorption fixture technology, and in particular to a vacuum adsorption fixture for machining electrostatic chucks with shafts. Background Technology

[0002] Electrostatic chucks need to be fixed on the processing table during processing. Traditional fixing methods include mechanical clamps, adhesive, and wax. Traditional methods are too time-consuming during loading and unloading and are prone to insecure fixing, causing the product to fly off the worktable and be damaged. Due to uneven adhesive or wax application and inaccurate positioning of mechanical clamps, the flatness of the electrostatic chuck can be affected, resulting in low processing efficiency and low product qualification rate. Summary of the Invention

[0003] The technical problem to be solved by this utility model is to provide a vacuum adsorption fixture for machining electrostatic chucks with shafts, so as to solve the problems mentioned in the background art.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0005] A vacuum adsorption fixture for machining electrostatic chucks with shafts includes a frame and an adsorption assembly mounted on the frame. The adsorption assembly includes a lower adsorption component detachably connected to the frame and an upper adsorption component detachably connected to the lower adsorption component. The lower adsorption component has a groove, a lower protrusion in the groove, and a lower through hole in the lower protrusion. A first outer sealing ring is provided on the inner sidewall of the groove, and a first inner sealing ring is provided on the lower protrusion. The lower adsorption component also has a connection hole connecting the groove to an external vacuum device. The upper adsorption component has several connecting holes for connecting the inside of the groove.

[0006] Preferably, the upper adsorption member is further provided with an upper protrusion, and the upper protrusion is provided with an upper through hole, which is aligned with the lower through hole.

[0007] Preferably, a second inner sealing ring is fitted on the upper protrusion, and a second outer sealing ring is embedded in the edge of the upper adsorption member.

[0008] Preferably, the upper adsorption component is further provided with several countersunk holes, and the groove is provided with a connecting protrusion with an internal thread hole.

[0009] Preferably, the frame includes a base plate and an upper plate disposed above the base plate, the upper plate being connected to the base plate via a connecting block, and the lower suction member having mounting holes for connecting to the upper plate.

[0010] Preferably, the groove is a circular groove, the upper adsorption element is a disc structure, and the lower through hole is located at the center of the circular groove.

[0011] The above technical solution has the following beneficial effects:

[0012] By setting up a lower adsorption component and an upper adsorption component, the upper adsorption component can directly contact the electrostatic chuck, while the lower adsorption component is connected to an external vacuum device. Adsorption can be performed when the vacuum device is activated.

[0013] The vacuum adsorption fixture of this application can directly adsorb electrostatic chucks, eliminating the waiting time for loading and unloading, improving the flatness of the electrostatic chucks, and increasing the processing efficiency and product qualification rate. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a vacuum adsorption fixture for machining an electrostatic chuck with a shaft according to the present invention;

[0015] Figure 2 This is a schematic diagram of the structure of the lower adsorption component of this utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the upper adsorption component of this utility model;

[0017] Figure 4 This is a schematic diagram of the connection between the upper and lower adsorption components of this utility model. Detailed Implementation

[0018] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that these descriptions are for the purpose of aiding understanding of this utility model, but do not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0019] refer to Figures 1-4 A vacuum adsorption fixture for machining electrostatic chucks with shafts includes a frame 1 and an adsorption assembly mounted on the frame 1. The adsorption assembly includes a lower adsorption component 2 detachably connected to the frame 1 and an upper adsorption component 3 detachably connected to the lower adsorption component 2. The lower adsorption component 2 has a groove 21, a lower protrusion 25 in the groove 21, a lower through hole 22 on the lower protrusion 25, a first outer sealing ring 26 on the inner sidewall of the groove 21, a first inner sealing ring 28 on the lower protrusion 25, and a connection hole 27 connecting the groove 21 to an external vacuum device. The upper adsorption component 3 has several connecting holes 34 for connecting the inside of the groove 21.

[0020] The groove 21 is a circular groove that can form a certain space for communication with external vacuum equipment to form a vacuum environment, thereby achieving the effect of adsorbing the electrostatic chuck with shaft. The lower protrusion 25 is located in the center of the circular groove 21, and the lower through hole 22 is provided to accommodate the shaft of the electrostatic chuck. By setting the first outer sealing ring 26 and the first inner sealing ring 28, the fit between the upper adsorption component 3 and the lower adsorption component 2 is kept airtight so as to form a vacuum. The groove 21 can be provided with a groove for installing the first outer sealing ring 26, and the lower protrusion 25 can be provided with a groove for installing the first inner sealing ring 28. The first inner sealing ring 28 can also be directly sleeved on the lower protrusion 25. After the first inner sealing ring 28 and the first outer sealing ring 26 are installed, the height of both is higher than the upper surface of the lower adsorption component 2 in order to maintain the sealing performance.

[0021] The connecting hole 27 can be a threaded hole for connecting to an external vacuum device. The connecting hole 34 on the upper adsorption component 3 is connected to the space inside the groove 21. When in use, place the axial electrostatic chuck on the upper adsorption component 3, start the external vacuum device, and evacuate the space inside the groove 21 to complete the adsorption.

[0022] The upper adsorption component 3 is also provided with an upper protrusion 31, and an upper through hole 36 is provided on the upper protrusion 31. The upper through hole 36 is aligned with the lower through hole 22. After alignment, it is used to accommodate the shaft of the electrostatic chuck. The electrostatic chuck to be processed is adsorbed on the upper adsorption component 3.

[0023] A second inner sealing ring 32 is fitted on the upper protrusion 31. The second inner sealing ring 32 can be fitted on the upper protrusion 31, or a groove can be provided on the upper protrusion 31 for installing the second inner sealing ring 32. After the second inner sealing ring 32 is installed, its height is higher than the upper surface of the upper protrusion 31. A second outer sealing ring 33 is embedded in the edge of the upper adsorption member 3. The second outer sealing ring 33 is installed by providing a groove on the upper adsorption member 3. After installation, its height is aligned with the second inner sealing ring 32.

[0024] During adsorption, the electrostatic chuck with shaft is placed on the upper adsorption component 3, with the shaft extending into the upper through hole 36. The lower surface of the electrostatic chuck contacts the second inner sealing ring 32 and the second outer sealing ring 33. The external vacuum equipment works to draw a vacuum, and adsorption is completed.

[0025] The upper adsorption component 3 is also provided with several countersunk holes 35, and the groove 21 is provided with a corresponding connecting protrusion 24 with an internal thread hole. By passing the screw through the countersunk hole 35 and connecting protrusion 24, the connection and installation of the upper adsorption component 3 and the lower adsorption component 2 can be completed. At the same time, a certain pressure is applied to the upper adsorption component 3 to press the first inner sealing ring 28 and the first outer sealing ring 26 to ensure sealing.

[0026] The frame 1 includes a base plate 12 and an upper plate 11 disposed above the base plate 12. The upper plate 11 and the base plate 12 are connected by a connecting block. The lower adsorption component 2 is provided with a mounting hole 23 for connecting with the upper plate 11. The lower adsorption component 2 can be connected to the upper plate 11 by a threaded connection. The connecting block can be provided with a hole aligned with the lower through hole 22 for accommodating the shaft structure of the electrostatic chuck.

[0027] The groove 21 is a circular groove, the upper adsorption component 3 is a disc structure, and the lower through hole 22 is set in the center of the circular groove 21. The electrostatic chuck to be processed is a disc structure, and its shaft is located in the center. The upper adsorption component 3 is a disc structure, and it is provided with an upper through hole 36 and a lower through hole 22 for placing its shaft.

[0028] By setting up a lower adsorption component 2 and an upper adsorption component 3, the upper adsorption component 3 can directly contact the electrostatic chuck, and the lower adsorption component 2 can be connected to an external vacuum device. The adsorption can be performed as soon as the vacuum device is activated, making adsorption and fixation simpler.

[0029] The vacuum adsorption fixture of this application can directly adsorb electrostatic chucks, eliminating the waiting time for loading and unloading, improving the flatness of the electrostatic chucks, and increasing the processing efficiency and product qualification rate.

[0030] The embodiments of this utility model have been described in detail above with reference to the accompanying drawings, but this utility model is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of this utility model, and these variations still fall within the protection scope of this utility model.

Claims

1. A vacuum adsorption fixture for machining electrostatic chucks with shafts, characterized in that, The device includes a frame (1) and an adsorption assembly mounted on the frame (1). The adsorption assembly includes a lower adsorption component (2) detachably connected to the frame (1) and an upper adsorption component (3) detachably connected to the lower adsorption component (2). The lower adsorption component (2) has a groove (21) and a lower protrusion (25) in the groove (21). The lower protrusion (25) has a lower through hole (22). The inner wall of the groove (21) has a first outer sealing ring (26). The lower protrusion (25) has a first inner sealing ring (28). The lower adsorption component (2) also has a connection hole (27) connecting the groove (21) to an external vacuum device. The upper adsorption component (3) has several connecting holes (34) for connecting the inside of the groove (21).

2. The vacuum adsorption fixture for machining electrostatic chucks with shafts according to claim 1, characterized in that, The upper adsorption member (3) is also provided with an upper protrusion (31), and the upper protrusion (31) is provided with an upper through hole (36), which is aligned with the lower through hole (22).

3. A vacuum adsorption fixture for machining electrostatic chucks with shafts according to claim 2, characterized in that, The upper protrusion (31) is fitted with a second inner sealing ring (32), and the edge of the upper adsorption member (3) is fitted with a second outer sealing ring (33).

4. A vacuum adsorption fixture for machining electrostatic chucks with shafts according to claim 1, characterized in that, The upper adsorption component (3) is also provided with several countersunk holes (35), and the groove (21) is provided with a corresponding connecting protrusion (24) with an internal thread hole.

5. A vacuum adsorption fixture for machining electrostatic chucks with shafts according to claim 1, characterized in that, The frame (1) includes a base plate (12) and an upper plate (11) disposed above the base plate (12). The upper plate (11) is connected to the base plate (12) through a connecting block with internal holes. The lower adsorption member (2) is provided with mounting holes (23) for connecting to the upper plate (11).

6. A vacuum adsorption fixture for machining electrostatic chucks with shafts according to claim 1, characterized in that, The groove (21) is a circular groove, the upper adsorption member (3) is a disc structure, and the lower through hole (22) is located at the center of the circular groove (21).

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