Limiting device, conveying equipment and magnetron sputtering transmission device

Abstract

The utility model relates to the technical field of machining equipment, in particular to a limiting device, conveying equipment and a magnetron sputtering transmission device. The limiting device comprises a first limiting ring and a second limiting ring, the first limiting ring and the second limiting ring are used for being arranged on a transmission rod in a sleeving mode and arranged on the two sides of a transmission wheel respectively, and the transmission wheel is used for being fixedly arranged on the transmission rod in a sleeving mode; a first sliding limiting part is arranged on the side, facing the transmission wheel, of the first limiting ring, and a second sliding limiting part is arranged on the side, facing the transmission wheel, of the second limiting ring. The first sliding limiting part and the second sliding limiting part are used for being in rolling contact with the transmission wheel so as to limit the transmission wheel; the first limiting ring and the second limiting ring are both arranged in a synchronous rotation mode with the transmission wheel. The axial direction of the transmission wheel can be limited through rolling contact between the first sliding limiting part and the transmission wheel and between the second sliding limiting part and the transmission wheel, and the stability and reliability of the transmission process can be improved by adapting to rotation of the transmission wheel and keeping the rotation stability of the transmission wheel.

Description

Technical Field

[0001] This application relates to the field of processing equipment technology, and in particular to a limiting device, a conveying device, and a magnetron sputtering transmission device. Background Technology

[0002] Conveying equipment often employs a single-shaft or simple chain drive system, which has a relatively simple structure and mainly achieves continuous conveying of workpieces through the meshing of the chain and the drive wheel. However, if the drive wheel becomes loose unexpectedly during rotation, it can easily lead to chain misalignment or transmission failure.

[0003] It should be noted that the above content is not necessarily prior art, nor is it intended to limit the scope of patent protection of this application. Utility Model Content

[0004] This application provides a limiting device, a conveying device, and a magnetron sputtering transmission device to solve or alleviate one or more of the technical problems mentioned above.

[0005] As a first aspect of the embodiments of this application, the embodiments of this application provide a limiting device, including:

[0006] The first limiting ring and the second limiting ring are used to be sleeved on the transmission rod and respectively disposed on both sides of the transmission wheel, and the transmission wheel is used to be fixedly sleeved on the transmission rod;

[0007] The first limiting ring has a first sliding limiting part on the side facing the transmission wheel, and the second limiting ring has a second sliding limiting part on the side facing the transmission wheel; the first sliding limiting part and the second sliding limiting part are used to roll into contact with the transmission wheel to limit the transmission wheel.

[0008] The first limiting ring and the second limiting ring are both configured to rotate synchronously with the transmission wheel.

[0009] Optionally, the first sliding limiting portion includes a first sliding ball, which is rotatably disposed on the side of the first limiting ring facing the transmission wheel, and the first sliding ball makes rolling contact with the side of the transmission wheel; and / or

[0010] The second sliding limiting part includes a second sliding ball, which is rotatably disposed on the side of the second limiting ring facing the transmission wheel, and the second sliding ball makes rolling contact with the side of the transmission wheel.

[0011] Optionally, the number of the first sliding balls may be multiple; and / or

[0012] The number of the second sliding balls is multiple.

[0013] Optionally, the first sliding ball is made of an elastic material; and / or

[0014] The second sliding ball is made of an elastic material.

[0015] As a second aspect of the embodiments of this application, this application provides a conveying device, including:

[0016] A conveyor frame; a plurality of transmission rods are rotatably mounted on the conveyor frame, and a transmission wheel is fixedly mounted on each of the transmission rods;

[0017] A driving component, the driving component being used to drive the transmission rod to rotate;

[0018] The conveying unit, wherein the drive wheel drives the conveying unit to transport the workpiece by rotation;

[0019] The aforementioned limiting device, one of the limiting devices corresponds to one of the transmission wheels.

[0020] Optionally, the plurality of transmission wheels include a plurality of first transmission wheels and a plurality of second transmission wheels; one end of one transmission rod is fixedly provided with a first transmission wheel, and the other end of one transmission rod is fixedly provided with a second transmission wheel;

[0021] The conveying section includes a first conveyor belt and a second conveyor belt;

[0022] Multiple first drive wheels are connected by a first conveyor belt, and multiple second drive wheels are connected by a second conveyor belt.

[0023] Optionally, the conveying unit further includes a conveyor belt; one side of the conveyor belt is connected to the first conveyor belt, and the other side is connected to the second conveyor belt.

[0024] Optionally, the conveyor belt is provided with a plurality of through holes at intervals, the through holes penetrating the conveyor belt.

[0025] Optionally, the conveying device includes:

[0026] Dehumidification device;

[0027] The conveyor frame includes a conveyor box, and a conveyor chamber is provided inside the conveyor box. The conveying part and the limiting device are disposed inside the conveyor chamber.

[0028] The dehumidification device is installed in the conveying chamber and is used to discharge the moisture in the conveying chamber.

[0029] Optionally, the dehumidification device includes a dehumidification fan and a blower, both of which are disposed on the inner wall forming the conveying chamber, and the dehumidification fan is used to exhaust moisture from the conveying chamber.

[0030] As a third aspect of the present application, the present application provides a magnetron sputtering transmission device, including: the conveying equipment as described above.

[0031] The embodiments of this application employing the above-described technical solution may have the following advantages:

[0032] Since the first and second limiting rings rotate synchronously with the drive wheel, when the drive wheel becomes loose, it will move axially. The first and second sliding limiting parts roll against the drive wheel to limit its axial movement. Furthermore, the first and second sliding limiting parts can also adapt to the rotation of the drive wheel and maintain its rotational stability through rolling contact with it. This effectively improves the situation of chain deviation or transmission failure caused by a loose drive wheel, and enhances the smoothness and reliability of the transmission process. Attached Figure Description

[0033] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0034] Figure 1 This is a schematic diagram of the limiting device provided in the embodiments of this application.

[0035] Figure 2 This is a schematic diagram of the conveying equipment provided in the embodiments of this application.

[0036] Figure 3 This is a partial structural schematic diagram of the conveying equipment provided in the embodiments of this application.

[0037] Explanation of reference numerals in the attached figures:

[0038] 1. First limiting ring; 11. First sliding ball; 2. Second limiting ring; 21. Second sliding ball; 3. Conveyor frame; 31. Transmission rod; 32. Drive component; 33. First transmission wheel; 34. Second transmission wheel; 35. First conveyor belt; 36. Second conveyor belt; 37. Conveyor belt; 371. Through hole; 38. Conveyor box; 381. Conveyor chamber; 4. Dehumidifying fan; 5. Fan; 6. Support unit. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other. The application will now be described in detail with reference to the accompanying drawings and embodiments.

[0040] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0041] Exemplary embodiments according to this application will now be described in more detail with reference to the accompanying drawings. It should be understood that these exemplary embodiments may be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein.

[0042] like Figures 1-3 As shown, in a first aspect, embodiments of this application may provide a limiting device, which may include:

[0043] The first limiting ring 1 and the second limiting ring 2 are used to be sleeved on the transmission rod 31 and respectively disposed on both sides of the transmission wheel, which is used to fix the transmission wheel on the transmission rod 31. The first limiting ring 1 has a first sliding limiting part on the side facing the transmission wheel, and the second limiting ring 2 has a second sliding limiting part on the side facing the transmission wheel. The first sliding limiting part and the second sliding limiting part are used to roll in contact with the transmission wheel to limit the transmission wheel. The first limiting ring 1 and the second limiting ring 2 are both arranged to rotate synchronously with the transmission wheel.

[0044] In this embodiment, since the first limiting ring 1 and the second limiting ring 2 rotate synchronously with the transmission wheel, when the transmission wheel becomes loose, the transmission wheel will move axially (along the direction of the transmission shaft). The axial movement of the transmission wheel is limited by the rolling contact between the first sliding limiting part and the second limiting sliding part and the transmission wheel. Furthermore, the first sliding limiting part and the second limiting sliding part can also adapt to the rotation of the transmission wheel and maintain the stability of the transmission wheel's rotation by rolling contact with the transmission wheel. This effectively improves the situation of chain deviation or transmission failure caused by the loose transmission wheel, and improves the smoothness and reliability of the transmission process.

[0045] It should be noted that the transmission wheel can be a pulley, gear, or sprocket. In this embodiment, the transmission wheel can be a sprocket. The sprocket transmits power by meshing with the chain. However, unstable chain tension, uneven sprocket rotation, or external interference can cause tooth skipping. For example, if the sprocket moves axially (i.e., moves left or right along the drive shaft) during rotation, the meshing position of the chain and sprocket changes, leading to tooth skipping and overall transmission instability. Therefore, the limiting device in this embodiment can limit the axial movement of the sprocket while simultaneously driving the transmission wheel to rotate normally, ensuring the sprocket maintains a stable rotational position during rotation, guaranteeing the stability of the meshing position between the chain and sprocket, and effectively preventing tooth skipping.

[0046] In an optional embodiment, the first sliding limiting part includes a first sliding ball 11, which is rotatably disposed on the side of the first limiting ring 1 facing the transmission wheel, and the first sliding ball 11 makes rolling contact with the side of the transmission wheel; and / or

[0047] The second sliding limit part includes a second sliding ball 21, which is rotatably disposed on the side of the second limit ring 2 facing the transmission wheel, and the second sliding ball 21 makes rolling contact with the side of the transmission wheel.

[0048] In this embodiment, when the transmission wheel moves axially towards the first limiting ring 1, several first sliding balls 11 roll into contact with the side of the transmission wheel. This serves two purposes: firstly, it limits the axial movement of the transmission wheel; secondly, the first sliding balls 11 adapt better to the curved shape and rotational changes of the transmission wheel surface through their rolling motion. Furthermore, the first sliding balls 11 provide radial support (perpendicular to the transmission shaft direction) to the transmission wheel. The second limiting sliding part provides sliding limitation on the other side of the transmission wheel. Thus, the axially moving transmission wheel maintains a stable position during rotation under the combined action of the first sliding balls 11 and the second sliding limiting part, improving the problem of axial movement caused by a loose transmission wheel. Moreover, the multiple first sliding balls 11 improve the accuracy of limiting the transmission wheel. In addition, since the contact between the first sliding balls 11 and the transmission wheel is point contact with a small contact area, and the first sliding balls 11 themselves are rotatable, the friction between the first sliding balls 11 and the transmission wheel is extremely small, effectively reducing the impact of friction on the rotation of the transmission wheel.

[0049] When the drive wheel moves axially towards the second limiting ring 2, several second sliding balls 21 roll into contact with the side of the drive wheel. This serves two purposes: firstly, it limits the axial movement of the drive wheel; secondly, the second sliding balls 21 adapt better to the curved shape and rotational changes of the drive wheel surface through their rolling motion. Furthermore, the second sliding balls 21 provide radial support (perpendicular to the drive shaft direction) to the drive wheel. Meanwhile, the first limiting sliding part provides sliding limitation on the other side of the drive wheel. Thus, the axially moving drive wheel maintains a stable position during rotation under the combined action of the second sliding balls 21 and the first sliding limiting part, improving the problem of axial movement caused by a loose drive wheel. Moreover, the multiple second sliding balls 21 improve the accuracy of limiting the drive wheel. In addition, since the contact between the second sliding balls 21 and the drive wheel is point contact with a small contact area, and the second sliding balls 21 themselves are rotatable, the friction between the second sliding balls 21 and the drive wheel is extremely small, effectively reducing the impact of friction on the rotation of the drive wheel.

[0050] In an optional embodiment, the number of first sliding balls 11 is multiple; and / or

[0051] The number of second sliding balls 21 is multiple. The arrangement of multiple first sliding balls 11 and / or multiple second sliding balls 21 can further enhance the limiting effect on the transmission wheel.

[0052] In an optional embodiment, the first sliding ball 11 is made of an elastic material; and / or

[0053] The second sliding ball 21 is made of an elastic material.

[0054] The first sliding ball 11 is made of an elastic material. The first sliding ball 11 can be made of rubber. It should be noted that when the first sliding ball 11 is a rigid ball, it will be in rigid contact with the transmission wheel, generating significant friction and wear, which is detrimental to the smooth rotation of the transmission wheel. The first sliding ball 11, made of an elastic material, buffers and limits the abnormal displacement of the transmission wheel through its own sliding and elastic deformation (the elastic material) when the transmission wheel exhibits a slight tendency for axial displacement, ensuring that the transmission wheel rotates smoothly in a stable position.

[0055] The second sliding ball 21 is made of an elastic material. It can also be made of rubber. It should be noted that when the second sliding ball 21 is a rigid ball, its rigid contact with the transmission wheel will generate significant friction and wear, hindering the smooth rotation of the transmission wheel. The elastic material of the second sliding ball 21, when the transmission wheel exhibits a slight tendency for axial displacement, buffers and limits the abnormal displacement of the transmission wheel through its own sliding and elastic deformation (the elastic material), ensuring that the transmission wheel rotates smoothly in a stable position.

[0056] In addition, the first sliding ball 11 and the second sliding ball 21 play a buffering and shock absorption role, which greatly reduces friction noise and vibration during operation, provides a quieter working environment for the equipment, reduces wear on transmission components, reduces maintenance difficulty and frequency, extends the service life of transmission components, and further improves operational stability.

[0057] Secondly, embodiments of this application may provide a conveying device, the conveying device comprising:

[0058] Conveyor frame 3; Several transmission rods 31 are rotatably mounted on the conveyor frame 3, and a transmission wheel is fixedly mounted on each transmission rod 31;

[0059] Drive component 32 is used to drive transmission rod 31 to rotate. Drive component 32 can be a drive motor.

[0060] The conveyor section, driven by rotating transmission wheels, transports the workpiece.

[0061] In any of the above embodiments, the limiting device limits one transmission wheel.

[0062] In this embodiment, the conveying device can be used in a magnetron sputtering device. The workpiece to be processed is placed on the conveying section, and the driving component 32 drives the transmission rod 31 to rotate. The transmission rod 31 drives the transmission wheel to rotate, and the transmission wheel drives the conveying section to transport the workpiece by rotating. Each transmission wheel is provided with a first limiting ring 1 and a second limiting ring 2 on both sides. The first limiting ring 1 and the second limiting ring 2 are fixed relative to the transmission wheel and rotate synchronously, thereby realizing axial limiting of each transmission wheel, ensuring smooth and reliable transmission process. This not only improves the working efficiency of the conveying device, but also reduces the mechanical failure rate generated during the operation of the conveying device.

[0063] In an optional embodiment, the multiple transmission wheels include multiple first transmission wheels 33 and multiple second transmission wheels 34; one end of a transmission rod 31 is fixedly provided with a first transmission wheel 33, and the other end of a transmission rod 31 is fixedly provided with a second transmission wheel 34; the conveying section includes a first conveyor belt 35 and a second conveyor belt 36; the multiple first transmission wheels 33 are connected by transmission through the first conveyor belt 35, and the multiple second transmission wheels 34 are connected by transmission through the second conveyor belt 36. Under the action of the driving member 32, the transmission rod 31 drives the first transmission wheels 33 and the second transmission wheels 34 to rotate, thereby driving the transmission of the first conveyor belt 35 and the second conveyor belt 36, thus realizing the transportation of workpieces on the first conveyor belt 35 and the second conveyor belt 36; and the setting of the first limiting ring 1 and the second limiting ring 2 further improves the stable transportation of workpieces.

[0064] In some embodiments, the first conveyor belt 35 and the second conveyor belt 36 may be a conveyor belt and a sprocket, respectively and independently.

[0065] In an optional embodiment, the conveying unit further includes a conveyor belt 37; one side of the conveyor belt 37 is connected to the first conveyor belt 35, and the other side is connected to the second conveyor belt 36. The arrangement of the conveyor belt 37 improves the strength and stability of the workpiece transportation.

[0066] In an optional embodiment, a plurality of through holes 371 are provided at intervals on the conveyor belt 37, and the through holes 371 penetrate the conveyor belt 37.

[0067] In this embodiment, a plurality of through holes 371 are evenly spaced on the transmission belt. The through holes 371 can increase the air permeability of the conveyor belt 37, which not only meets the requirements of high-intensity transmission, but also ensures the air permeability and stability of the conveyed materials. Therefore, the conveyor belt 37 with through holes 371 can adapt to long-term, high-load operation scenarios in industrial production, greatly improving production efficiency and the applicability of the device.

[0068] In an optional embodiment, the conveying device further includes:

[0069] Dehumidification device;

[0070] The conveyor frame 3 includes a conveyor box 38, a conveyor chamber 381 is provided inside the conveyor box 38, and the conveying part and the limiting device are provided inside the conveyor chamber 381; a support part 6 is provided at the bottom of the conveyor box 38, and the support part 6 is used to place and support the conveyor box 38.

[0071] A dehumidification device is installed in the conveying chamber 381 to remove moisture from the conveying chamber 381.

[0072] In this embodiment, the conveying equipment adopts a conveying box 38, which can be a rectangular structure with a compact overall structure, reducing the area occupied by the conveying equipment. When this conveying equipment is applied to magnetron sputtering technology, the coating operation can be carried out in the conveying chamber 381 of the conveying box 38. The conveying box 38 has inlets and outlets for easy workpiece entry and exit. It should be noted that when the conveying equipment is in a high-humidity environment or under continuous operation, the moisture inside the conveying equipment cannot be efficiently discharged, which can easily cause corrosion of components and a decrease in lubrication performance. Furthermore, moisture accumulation also affects the electrical components of the conveying equipment and the stability of the thin film deposition process, further increasing the difficulty of equipment maintenance and operation. By setting up a dehumidification device, effective control of moisture can be achieved, preventing component damage caused by excessive ambient humidity.

[0073] In an optional embodiment, the dehumidification device includes a dehumidification fan 4 and a blower 5. Both the blower 5 and the dehumidification fan 4 are disposed on the inner wall forming the conveying chamber 381. The dehumidification fan 4 is used to discharge moisture from the conveying chamber 381. The number of blowers 5 can be multiple. In this embodiment, the number of blowers 5 is two, and the two blowers 5 are disposed on the bottom wall forming the conveying chamber 381.

[0074] In this embodiment, the dehumidifying fan 4 and the blower 5 are combined to create airflow circulation within the conveying chamber 381, promptly removing excess moisture and expelling dampness. Therefore, this conveying equipment is particularly suitable for high humidity or high temperature environments, improving its adaptability and durability while ensuring its normal operation.

[0075] Thirdly, embodiments of this application may provide a magnetron sputtering drive device, which includes: a conveying device as described in any of the above embodiments.

[0076] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0077] For ease of description, directional terms such as "front, back, up, down, left, right," "horizontal, vertical, horizontal," and "top, bottom" generally indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are used solely for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of this application. The directional terms "inner" and "outer" refer to the inner or outer contours relative to the components themselves. For example, if a device in the drawings is inverted, a device described as "above" or "on top of" other devices or structures will subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0078] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0079] Unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0080] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0081] It should also be noted that the terms "one embodiment," "another embodiment," or "embodiment" used in this specification refer to specific features, structures, or characteristics described in connection with that embodiment, which are included in at least one embodiment described in the general description of this application. The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure, or characteristic is described in connection with any embodiment, the intention is to suggest that implementing such a feature, structure, or characteristic in conjunction with other embodiments also falls within the scope of this application.

[0082] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0083] It should also be noted that the above are merely preferred embodiments of this application and do not limit the scope of patent protection of this application. Any equivalent structural or procedural changes made using the content of this application’s specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A limiting device, characterized in that, include: The first limiting ring (1) and the second limiting ring (2) are used to be sleeved on the transmission rod (31) and respectively set on both sides of the transmission wheel. The transmission wheel is used to be fixedly sleeved on the transmission rod (31). The first limiting ring (1) has a first sliding limiting part on the side facing the transmission wheel, and the second limiting ring (2) has a second sliding limiting part on the side facing the transmission wheel; the first sliding limiting part and the second sliding limiting part are used to roll into contact with the transmission wheel to limit the transmission wheel; The first limiting ring (1) and the second limiting ring (2) are both configured to rotate synchronously with the transmission wheel.

2. The limiting device according to claim 1, characterized in that, The first sliding limiting part includes a first sliding ball (11), which is rotatably disposed on the side of the first limiting ring (1) facing the transmission wheel, and the first sliding ball (11) makes rolling contact with the side of the transmission wheel; and / or The second sliding limit part includes a second sliding ball (21), which is rotatably disposed on the side of the second limit ring (2) facing the transmission wheel, and the second sliding ball (21) makes rolling contact with the side of the transmission wheel.

3. The limiting device according to claim 2, characterized in that, The number of the first sliding balls (11) is multiple; and / or The number of the second sliding ball (21) is multiple.

4. The limiting device according to claim 2, characterized in that, The first sliding ball (11) is made of an elastic material; and / or The material of the second sliding ball (21) is an elastic material.

5. A conveying device, characterized in that, include: A conveyor frame (3) is provided with a plurality of transmission rods (31) rotatably mounted on the conveyor frame (3), and a transmission wheel is fixedly mounted on each of the transmission rods (31); A driving element (32) is used to drive the transmission rod (31) to rotate; The conveying unit, wherein the drive wheel drives the conveying unit to transport the workpiece by rotation; The limiting device according to any one of claims 1 to 4, wherein one of the limiting devices corresponds to limiting one of the transmission wheels.

6. The conveying device according to claim 5, characterized in that, The plurality of transmission wheels include a plurality of first transmission wheels (33) and a plurality of second transmission wheels (34); one end of one transmission rod (31) is fixedly provided with a first transmission wheel (33), and the other end of one transmission rod (31) is fixedly provided with a second transmission wheel (34); The conveying section includes a first conveyor belt (35) and a second conveyor belt (36); Multiple first drive wheels (33) are connected by a first conveyor belt (35), and multiple second drive wheels (34) are connected by a second conveyor belt (36).

7. The conveying device according to claim 6, characterized in that, The conveying unit also includes a conveyor belt (37); one side of the conveyor belt (37) is connected to the first conveyor belt (35), and the other side is connected to the second conveyor belt (36).

8. The conveying device according to claim 7, characterized in that, The conveyor belt (37) is provided with a plurality of through holes (371) spaced apart, and the through holes (371) are provided through the conveyor belt (37).

9. The conveying device according to any one of claims 5 to 8, characterized in that, include: Dehumidification device; The conveyor frame (3) includes a conveyor box (38), and a conveyor chamber (381) is provided inside the conveyor box (38). The conveying part and the limiting device are located inside the conveyor chamber (381). The dehumidification device is installed in the conveying chamber (381) and is used to discharge the moisture in the conveying chamber (381).

10. The conveying device according to claim 9, characterized in that, The dehumidification device includes a dehumidification fan (4) and a blower (5). The blower (5) and the dehumidification fan (4) are both disposed on the inner wall forming the conveying chamber (381). The dehumidification fan (4) is used to exhaust the moisture in the conveying chamber (381).

11. A magnetron sputtering transmission device, characterized in that, include: The conveying device as described in any one of claims 5 to 10.

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