Film coating clamp of magnetron sputtering film coating machine

Abstract

The utility model discloses a coating clamp of a magnetron sputtering coating machine, which relates to the field of coating clamps, and comprises a rotating mechanism, the rotating mechanism comprises a support prism, an angle adjusting mechanism is arranged on the support prism, the angle adjusting mechanism comprises an angle adjusting rack, an extension arm is fixed on the support prism, and the angle adjusting rack is fixed on the extension arm. A first gear is rotationally connected to one end in the extension arm, the first gear is meshed with the angle adjusting rack, the first gear is connected with the driving bevel gear through a synchronous belt, a driven bevel gear is meshed with one side of the driving bevel gear, a connecting shaft is fixed to the driven bevel gear, the other end of the connecting shaft extends out of the extension arm, and a clamping mechanism is arranged on the connecting shaft. The device has the beneficial effects that the angle adjusting rack drives the first gear to rotate, the first gear drives the driven bevel gear to rotate, the first gear drives the clamping support to conduct angle adjustment through the connecting shaft, the surface of a workpiece subjected to sputtering ions of a plating material can be changed, the surface, subjected to film plating, of the workpiece can be controlled, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of coating fixture, especially a kind of coating fixture of magnetron sputtering coating machine. BACKGROUND

[0002] Magnetron sputtering coating refers to coating material as target cathode, using argon ion bombardment target material, produces cathode sputtering, target material atom sputtering deposition layer on workpiece to form a kind of coating technology, horizontal type magnetron sputtering coating machine refers to the horizontal type coating machine using this kind of technology, and horizontal type magnetron sputtering coating machine needs to use carrier when carrying out coating to substrate, i.e. fixture, for clamping substrate so as to be positioned to sputtering coating chamber by carrier together with substrate to carry out coating.

[0003] For example, the patent document with the announcement number CN215713340U discloses a kind of base fixed fixture of magnetron sputtering coating machine.The utility model, including the magnetron sputtering coating machine body, control panel is installed in one side of magnetron sputtering coating machine body, first motor is installed at the bottom in the magnetron sputtering coating machine body, output end of first motor is rotatably installed with vertical rod, multiple discs and placing rod are vertically equidistantly installed on the outer surface of vertical rod.The utility model, by placing annular object on placing rod, cylindrical object is placed on placing column, cubic object is positioned by the cooperation of first recess and second recess, so that different specifications of object can be fixed and positioned to carry out coating, and multiple objects can be simultaneously coated, so that object will not be shaken due to simple hanging in coating device, the rotation of coating device causes the unevenness of coating and the failure of coating, the coating efficiency of magnetron sputtering coating machine is greatly improved.In prior art, when carrying out magnetron vacuum sputtering coating process, workpiece is usually clamped by revolution multiworkpiece fixture, and revolution multiworkpiece fixture can make multiple workpieces receive sputtering ion to form coating by rotation, but revolution can only form coating on the side of workpiece aligned with coating material, and cannot coat the whole surface of workpiece, so a kind of coating fixture of magnetron sputtering coating machine is proposed, which can control the surface of workpiece receiving sputtering coating while revolving. UTILITY MODEL CONTENTS

[0004] The utility model aims at solving the above-mentioned problems and provides a kind of coating fixture of magnetron sputtering coating machine.

[0005] The utility model realizes the above-mentioned purposes by the following technical solutions:

[0006] The utility model provides a kind of coating fixture of magnetron sputtering coating machine, including rotating mechanism, rotating mechanism includes support prism, angle adjusting mechanism is provided on support prism, angle adjusting mechanism includes electric push rod rotationally connected in the top of support prism, electric push rod output end rotationally connected with lifting prism rod, lifting prism rod is fixedly connected with the angle adjusting rack of several circumferentially uniform settings, support prism is fixedly connected with the extension arm of several uniform settings, first gear is rotationally connected in one end of extension arm, first gear is engaged with angle adjusting rack, first gear one end is fixedly connected with first pulley, driving bevel gear is rotationally connected in the other end of extension arm, driving bevel gear one end is fixedly connected with second pulley, first pulley and second pulley are connected by synchronous belt between, driving bevel gear one side is engaged with driven bevel gear, driven bevel gear is fixedly connected with connecting shaft, connecting shaft is rotationally connected with extension arm, connecting shaft other end extends to outside of extension arm, and clamping mechanism is provided on connecting shaft.

[0007] Preferably, the bottom of the support prism is fixedly connected with a turntable, and the turntable is provided with a plurality of positioning rods, which are slidably connected with the lifting prism rod.

[0008] Preferably, the support prism is provided with a coating cabin, the turntable is rotationally connected with the inner bottom of the coating cabin, the bottom of the coating cabin is fixedly connected with a rotating motor, the output end of the rotating motor is fixedly connected with the turntable, and the top of the coating cabin is fixedly connected with the electric push rod.

[0009] Preferably, the clamping mechanism comprises a clamping bracket fixedly connected with the connecting shaft, a bidirectional screw rod rotationally connected with the clamping bracket, symmetrically arranged sliding clamps threadedly connected with the bidirectional screw rod, the sliding clamps being slidably connected with the clamping bracket, and a knob fixedly connected with one end of the bidirectional screw rod.

[0010] Preferably, the sliding clamps are fixedly connected with up-down symmetrically arranged clamping frames, a forced rack is slidably connected with the clamping frames, second gears are engaged with the two sides of the forced rack, clamping jaws are fixedly connected with the second gears, one end of the clamping jaws is rotationally connected with the clamping frames, and rubber pads are fixedly connected with the other end of the clamping jaws.

[0011] Preferably, one end of the forced rack is fixedly connected with a contact plate, the other end of the forced rack is fixedly connected with a spring, and the other end of the spring is fixedly connected with the clamping frames.

[0012] The beneficial effects are that: through the setting of the angle adjusting mechanism, the angle adjusting rack drives the first gear to rotate, the first gear drives the driven bevel gear to rotate, and the first gear drives the clamping bracket to adjust the angle through the connecting shaft, so that the surface of the workpiece subjected to sputtering ions of plated material can be changed, and thus the staff can control the surface of the workpiece for coating, thereby improving the production efficiency.

[0013] The additional technical features and advantages of the utility model will be more obvious in the following description, or can be understood through the specific practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0014] The accompanying drawings are included to provide a further understanding of the utility model, and constitute a part of the specification, and are used together with the following specific embodiments to explain the utility model, but do not constitute the limitation to the utility model.In the drawings:

[0015] Figure 1 It is the stereogram of the film coating fixture of the magnetron sputtering coating machine of the utility model;

[0016] Figure 2 It is the relative position schematic view of the support prism and the film coating bin of the film coating fixture of the magnetron sputtering coating machine of the utility model;

[0017] Figure 3 It is the relative position schematic view of the support prism and the angle adjusting mechanism of the film coating fixture of the magnetron sputtering coating machine of the utility model;

[0018] Figure 4 It is the left side sectional view of the extension arm of the film coating fixture of the magnetron sputtering coating machine of the utility model;

[0019] Figure 5 It is the relative position schematic view of the clamping mechanism of the film coating fixture of the magnetron sputtering coating machine of the utility model;

[0020] Figure 6 It is the upper side sectional view of the clamping support of the film coating fixture of the magnetron sputtering coating machine of the utility model;

[0021] Figure 7 It is the upper side sectional view of the clamping support of the film coating fixture of the magnetron sputtering coating machine of the utility model.

[0022] The reference signs are explained as follows:

[0023] 101, support prism;102, turntable;103, rotation motor;104, positioning rod;105, film coating bin;201, electric push rod;202, lifting edge rod;203, angle adjusting rack;204, extension arm;205, first gear;206, driving bevel gear;207, driven bevel gear;208, connecting shaft;209, first pulley;210, second pulley;301, clamping support;302, bidirectional screw;303, sliding clamping plate;304, clamping support;305, forced rack;306, clamping jaw;307, rubber pad;308, second gear;309, spring. DETAILED DESCRIPTION

[0024] Clearly, the described embodiments are merely part of the embodiments of the present application, not all the embodiments.

[0025] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0026] The present application will be further described below in conjunction with the drawings:

[0027] As shown in Figures 1-7 A film coating fixture of a magnetron sputtering coating machine, comprising a rotating mechanism, the rotating mechanism comprises a support prism 101, the support prism 101 is provided with an angle adjusting mechanism, the angle adjusting mechanism comprises an electric push rod 201 rotatably connected to the top of the support prism 101, the output end of the electric push rod 201 is rotatably connected with a lifting prism rod 202, a plurality of angle adjusting racks 203 are fixedly connected to the lifting prism rod 202 and are uniformly arranged in a circle, a plurality of extension arms 204 are fixedly connected to the support prism 101 and are uniformly arranged, a first gear 205 is rotatably connected to one end of the extension arm 204, the first gear 205 is engaged with the angle adjusting rack 203, a first pulley 209 is fixedly connected to one end of the first gear 205, a driving bevel gear 206 is rotatably connected to the other end of the extension arm 204, a second pulley 210 is fixedly connected to one end of the driving bevel gear 206, the first pulley 209 and the second pulley 210 are connected through a synchronous belt, a driven bevel gear 207 is engaged with one side of the driving bevel gear 206, a connecting shaft 208 is fixedly connected to the driven bevel gear 207, the connecting shaft 208 is rotatably connected with the bearing of the extension arm 204, the other end of the connecting shaft 208 extends to the outside of the extension arm 204, a clamping mechanism is arranged on the connecting shaft 208, when angle adjustment is needed, the electric push rod 201 drives the lifting prism rod 202 to lift, the lifting prism rod 202 drives the angle adjusting rack 203 to lift, the angle adjusting rack 203 drives the first gear 205 to rotate, the first gear 205 drives the first pulley 209 to rotate, the first pulley 209 drives the second pulley 210 to rotate through the synchronous belt, the second pulley 210 drives the driving bevel gear 206 to rotate, the driving bevel gear 206 drives the driven bevel gear 207 to rotate, the driven bevel gear 207 drives the connecting shaft 208 to rotate, the connecting shaft 208 drives the clamping mechanism to rotate, the rotation angle of the clamping mechanism can be controlled by the movement amount of the angle adjusting rack 203, and then the sputtering coating surface of the workpiece is controlled.

[0028] The bottom of the support prism 101 is fixedly connected with a rotating disc 102, three positioning rods 104 are arranged in the rotating disc 102, the positioning rods 104 are distributed in a triangular shape, the positioning rods 104 are slidably connected with the lifting prismatic rods 202, a coating chamber 105 is arranged outside the support prism 101, the rotating disc 102 is rotatably connected with the inner bottom of the coating chamber 105, a rotating motor 103 is fixedly connected with the bottom of the coating chamber 105, the output end of the rotating motor 103 is fixedly connected with the rotating disc 102, the top of the coating chamber 105 is fixedly connected with the electric push rod 201, when the sputtering coating process is performed, the staff starts the coating machine, the rotating motor 103 drives the rotating disc 102, the rotating disc 102 drives the support prism 101 to rotate, the support prism 101 drives the extension arm 204 to rotate, the extension arm 204 drives the clamping mechanism to revolve, the clamping mechanism drives the workpiece to revolve, in this way, the coating process can be performed on multiple workpieces, and the positioning rods 104 distributed in a triangular shape ensure that the lifting prismatic rods 202 will not produce transverse displacement during lifting.

[0029] The clamping mechanism comprises a clamping bracket 301 which is connected with the connecting shaft 208 through a key, a bidirectional screw rod 302 which is rotatably connected with the clamping bracket 301, symmetrically arranged sliding clamping plates 303 which are threadedly connected with the bidirectional screw rod 302, the sliding clamping plates 303 being slidably connected with the clamping bracket 301, a knob which is fixedly connected with one end of the bidirectional screw rod 302, clamping frames 304 which are symmetrically arranged on the sliding clamping plates 303, a forced rack 305 which is slidably connected with the clamping frames 304, second gears 308 which are meshed with the two sides of the forced rack 305, clamping jaws 306 which are fixedly connected with the second gears 308, one end of the clamping jaws 306 being rotatably connected with the clamping frames 304, rubber pads 307 which are fixedly connected with the other end of the clamping jaws 306, a contact plate which is fixedly connected with one end of the forced rack 305, a spring 309 which is fixedly connected with the other end of the forced rack 305, the other end of the spring 309 being fixedly connected with the clamping frames 304, before the coating, the staff places the workpiece in the middle of the two sliding clamping plates 303, rotates the bidirectional screw rod 302 through the knob, the bidirectional screw rod 302 drives the sliding clamping plates 303 to move towards each other, the sliding clamping plates 303 drive the clamping frames 304 to move, the clamping frames 304 drive the forced rack 305 to contact the workpiece, the forced rack 305 produces relative displacement with the clamping frames 304 under the reaction force of the workpiece, at this time, the spring 309 is compressed, the forced rack 305 drives the second gears 308 to rotate, the second gears 308 drive the clamping jaws 306 to rotate, the clamping jaws 306 rotate to clamp the surface of the workpiece, the setting of the rubber pads 307 improves the friction force, so that relative sliding is avoided, in this way, the clamping of the workpiece is completed.

[0030] Working principle: before coating, the workers place the workpiece in the middle of the two sliding clamping plates 303, rotate the knob to drive the bidirectional screw rod 302, the bidirectional screw rod 302 drives the sliding clamping plate 303 to move towards each other, the sliding clamping plate 303 drives the clamping scaffold 304 to move, the clamping scaffold 304 drives the forced rack 305 to contact the workpiece, the forced rack 305 is subjected to the reaction force of the workpiece and the clamping scaffold 304 generates relative displacement, at this time the spring 309 is compressed, the forced rack 305 drives the second gear 308 to rotate, the second gear 308 drives the clamping jaw 306 to rotate, the clamping jaw 306 rotates to clamp the surface of the workpiece, the setting of the rubber pad 307 improves the friction force, ensures that relative sliding does not occur, so the clamping of the workpiece is completed, when the sputtering coating process is carried out, the workers start the coating machine, rotate the motor 103 to drive the turntable 102, the turntable 102 drives the supporting prism 101 to rotate, the supporting prism 101 drives the extension arm 204 to rotate, the extension arm 204 drives the clamping mechanism to revolve, the clamping mechanism drives the workpiece to revolve, so that multiple workpieces can be coated, the positioning rod 104 in a triangular shape ensures that the lifting edge rod 202 does not produce transverse displacement during lifting, when angle adjustment is required, the electric push rod 201 drives the lifting edge rod 202 to lift, the lifting edge rod 202 drives the angle adjustment rack 203 to lift, the angle adjustment rack 203 drives the first gear 205 to rotate, the first gear 205 drives the first pulley 209 to rotate, the first pulley 209 drives the second pulley 210 to rotate through the synchronous belt, the second pulley 210 drives the driving bevel gear 206 to rotate, the driving bevel gear 206 drives the driven bevel gear 207 to rotate, the driven bevel gear 207 drives the connecting shaft 208 to rotate, the connecting shaft 208 drives the clamping mechanism to rotate, the angle of rotation of the clamping mechanism can be controlled by the movement of the angle adjustment rack 203, and the surface of the workpiece subjected to sputtering coating is controlled.

[0031] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A coating fixture of a magnetron sputtering coater, comprising a rotating mechanism, characterized in that: The rotating mechanism comprises a support prism (101), an angle adjusting mechanism is arranged on the support prism (101), the angle adjusting mechanism comprises an electric push rod (201) rotatably connected to the top of the support prism (101), a lifting prism rod (202) is rotatably connected to the output end of the electric push rod (201), a plurality of angle adjusting racks (203) are fixedly connected to the lifting prism rod (202) and are uniformly arranged in a circle, a plurality of extension arms (204) are fixedly connected to the support prism (101) and are uniformly arranged, a first gear (205) is rotatably connected to one end of the extension arm (204), the first gear (205) is engaged with the angle adjusting rack (203), a first pulley (209) is fixedly connected to one end of the first gear (205), a driving bevel gear (206) is rotatably connected to the other end of the extension arm (204), a second pulley (210) is fixedly connected to one end of the driving bevel gear (206), the first pulley (209) and the second pulley (210) are connected through a synchronous belt, a driven bevel gear (207) is engaged with one side of the driving bevel gear (206), a connecting shaft (208) is fixedly connected to the driven bevel gear (207), the connecting shaft (208) is rotatably connected with the extension arm (204), the other end of the connecting shaft (208) extends out of the extension arm (204), and a clamping mechanism is arranged on the connecting shaft (208).

2. The coating fixture of a magnetron sputtering coating machine according to claim 1, wherein: A rotating disc (102) is fixedly connected to the bottom of the support prism (101), a plurality of positioning rods (104) are arranged in the rotating disc (102), and the positioning rods (104) are slidably connected with the lifting prism rod (202).

3. The coating fixture of a magnetron sputtering coating machine according to claim 2, wherein: A coating film bin (105) is arranged outside the support prism (101), the rotating disc (102) is rotatably connected with the inner bottom of the coating film bin (105), a rotating motor (103) is fixedly connected to the bottom of the coating film bin (105), the output end of the rotating motor (103) is fixedly connected with the rotating disc (102), and the top of the coating film bin (105) is fixedly connected with the electric push rod (201).

4. The coating fixture of claim 1, wherein: the coating fixture is a coating fixture of a magnetron sputtering coating machine. The clamping mechanism comprises a clamping bracket (301) fixedly connected with the connecting shaft (208), a bidirectional screw rod (302) is rotatably connected to the clamping bracket (301), symmetrically arranged sliding clamping plates (303) are threadedly connected to the bidirectional screw rod (302), the sliding clamping plates (303) are slidably connected with the clamping bracket (301), and a knob is fixedly connected to one end of the bidirectional screw rod (302).

5. The coating fixture of a magnetron sputtering coating machine according to claim 4, wherein: The sliding clamping plate (303) is fixedly connected with upper and lower symmetrically arranged clamping scaffolds (304), the clamping scaffold (304) is slidably connected with a forced rack (305), the forced rack (305) is meshed with second gears (308) on both sides, the second gears (308) are fixedly connected with clamping jaws (306), one end of the clamping jaw (306) is rotatably connected with the clamping scaffold (304), and the other end of the clamping jaw (306) is fixedly connected with a rubber pad (307).

6. The coating fixture of a magnetron sputtering coating machine according to claim 5, wherein: One end of the forced rack (305) is fixedly connected with a contact plate, the other end of the forced rack (305) is fixedly connected with a spring (309), and the other end of the spring (309) is fixedly connected with the clamping scaffold (304).

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