Semiconductor valve with backflow prevention pipe

Abstract

The utility model relates to the technical field of semiconductor valves, in particular to a semiconductor valve with an anti-backflow pipe, which comprises a valve body, a liquid inlet pipe is fixedly connected onto the valve body, a liquid outlet pipe is fixedly connected onto the valve body, the liquid inlet pipe and the liquid outlet pipe are symmetrically arranged, a fixing plate is fixedly connected inside the liquid inlet pipe, and the fixing plate is fixedly connected with the anti-backflow pipe. A plurality of first through holes are formed in the fixing plate, the first through holes are distributed in a circumferential array state, a telescopic rod is fixedly connected to the end of the fixing plate, a spring is fixedly connected to the end of the fixing plate, the spring is arranged outside the telescopic rod, and a first sealing block is fixedly connected to the end of the telescopic rod. According to the liquid supply system, the condition of liquid backflow can be effectively reduced, the condition that external fluid flows back into the liquid supply system through the liquid inlet pipe is reduced, pollution to the liquid is reduced, pressure and abrasion to pipelines, pumps and other liquid supply system equipment are reduced, the service life of the equipment is prolonged, and the stability of the whole liquid supply system is also improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor valve technology, and in particular to a semiconductor valve with an anti-backflow tube. Background Technology

[0002] Semiconductor valves are valves used in the semiconductor manufacturing process to control parameters such as fluid flow, pressure, and flow rate. Depending on their function and application, semiconductor valves can be divided into various types, such as ball valves, diaphragm valves, bellows valves, and regulating valves. These valves play a crucial role in semiconductor equipment, including opening and closing, controlling flow, and regulating pressure.

[0003] Existing semiconductor valves are prone to liquid backflow during use, causing external fluid to flow back into the liquid supply system through the inlet pipe, resulting in liquid contamination. Liquid backflow can also cause wear on pipes, pumps, and other liquid supply system equipment. To address this, we propose a semiconductor valve with an anti-backflow pipe. Utility Model Content

[0004] To address the aforementioned problems, this invention provides a semiconductor valve with an anti-backflow pipe, which effectively reduces liquid backflow and minimizes the return of external fluids into the liquid supply system through the inlet pipe. This reduces liquid contamination, pressure and wear on pipes, pumps, and other liquid supply system equipment, thereby extending the service life of the equipment and improving the stability of the entire liquid supply system.

[0005] The technical solution of this utility model is:

[0006] The system includes a valve body with an inlet pipe and an outlet pipe fixedly connected to it, arranged symmetrically. A fixing plate is fixedly connected inside the inlet pipe, and the fixing plate has multiple first through holes arranged in a circular array. A telescopic rod is fixedly connected to one end of the fixing plate, and a spring is fixedly connected to the other end of the fixing plate, with the spring positioned outside the telescopic rod. A first sealing block is fixedly connected to the end of the telescopic rod, and the end of the spring is fixedly connected to the first sealing block. A first baffle is fixedly connected inside the valve body, and a second through hole is formed on the first baffle. The first sealing block is slidably connected inside the second through hole. This structure effectively reduces liquid backflow, minimizing the possibility of external fluid flowing back into the liquid supply system through the inlet pipe. This reduces liquid contamination, pressure and wear on pipes, pumps, and other liquid supply system equipment, extending equipment lifespan and improving the overall stability of the liquid supply system.

[0007] In a further technical solution, a second baffle is fixedly connected inside the valve body, and a third through hole is provided on the second baffle. A second sealing block is slidably connected inside the third through hole. A connecting plate is fixedly connected to the valve body, and a connecting cylinder is fixedly connected to the top of the connecting plate. A lead screw is threaded inside the connecting cylinder, and a handle is fixedly connected to the top of the lead screw. The bottom end of the lead screw is fixedly connected to the second sealing block. With the above structure, the user can quickly open or close the valve, thereby achieving a rapid response to the liquid supply system, effectively improving work efficiency, and the operation method is simple and convenient, improving the ease of use.

[0008] In a further technical solution, a fixed seat is fixedly connected inside the outlet pipe, and the fixed seat is located at the end away from the valve body. A filter frame is slidably connected inside the fixed seat, and a filter screen is fixedly connected inside the filter frame. A sealing gasket is slidably connected to the outlet pipe, the bottom of the sealing gasket is fixedly connected to the filter frame, and a pull rod is fixedly connected to the top of the sealing gasket. Through the above structure, impurities in the liquid can be effectively filtered, reducing the impact of impurities on subsequent operations. The filter screen and the outlet pipe are detachable, which facilitates the user to maintain and replace the filter screen, effectively improving the overall flexibility of the valve.

[0009] In a further technical solution, a bracket is fixedly connected to the valve body, and two sets of positioning rods are fixedly connected to the top of the bracket. The two sets of positioning rods are symmetrically arranged, and a protective cover is slidably connected to the middle of the positioning rod. Through the above structure, the valve can be effectively protected, reducing the deformation of the valve body caused by external impact, and effectively protecting the safety of the valve.

[0010] In a further technical solution, a drain pipe is fixedly connected to the middle of the outlet pipe. The drain pipe is located at one end near the valve body, and a pipe cap is threaded to the end of the drain pipe. Through the above structure, impurities on the filter screen can be effectively removed, reducing the need to remove the filter screen for cleaning, thereby reducing valve downtime and effectively improving work efficiency.

[0011] In a further technical solution, a first flange is fixedly connected to the end of the inlet pipe, and a second flange is fixedly connected to the end of the outlet pipe. With the above structure, the valve can be easily connected to the pipeline or other equipment, and it is also easy to disassemble when the valve needs to be repaired or replaced, thus improving the convenience of use.

[0012] In a further technical solution, the outer part of the sealing gasket is made of rubber, and the shape of the sealing gasket is arc-shaped. Through the above structure, the connection between the sealing gasket and the liquid outlet pipe will be tighter, effectively reducing the leakage of liquid from the gap between the sealing gasket and the liquid outlet pipe.

[0013] The beneficial effects of this utility model are:

[0014] 1. By setting a first sealing block, the force generated by the liquid flow acts on the first sealing block, pushing it to slide. The telescopic rod and spring will retract, and the liquid will flow out from the second through hole. When backflow occurs, the pressure on the left side of the inlet pipe will decrease. At this time, the force generated by the spring retraction will drive the first sealing block to quickly return to its original position. This structure can effectively reduce liquid backflow and reduce the possibility of external fluid flowing back into the liquid supply system through the inlet pipe, thereby reducing liquid contamination and reducing pressure and wear on pipelines, pumps, and other liquid supply system equipment. This extends the service life of the equipment and improves the stability of the entire liquid supply system.

[0015] 2. By setting a handle to drive the lead screw to move, and the lead screw to move the second sealing block to slide at the same time, the user can quickly open or close the valve, thereby realizing a rapid response to the liquid supply system, effectively improving work efficiency, and the operation method is simple and convenient, improving the ease of use. Attached Figure Description

[0016] Figure 1 This is a perspective view of the present invention;

[0017] Figure 2 This is a cross-sectional view of the valve body according to an embodiment of the present utility model;

[0018] Figure 3 This is a cross-sectional view of the first sealing block according to an embodiment of this utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the third through hole in an embodiment of this utility model;

[0020] Figure 5 This is a schematic diagram of the structure of the fixing base according to an embodiment of the present utility model;

[0021] Figure 6 This is a schematic diagram of the positioning rod in an embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. Valve body; 11. Inlet pipe; 12. Outlet pipe; 13. Fixing plate; 14. First through hole; 15. Telescopic rod; 16. Spring; 17. First sealing block; 18. First baffle; 19. Second through hole; 2. Second baffle; 21. Third through hole; 22. Second sealing block; 23. Connecting plate; 24. Connecting cylinder; 25. Screw rod; 26. Handle; 3. Fixing seat; 31. Filter frame; 32. Filter screen; 33. Sealing gasket; 34. Pull rod; 4. Bracket; 41. Positioning rod; 42. Protective cover; 5. Drain pipe; 51. Pipe cover; 6. First flange; 61. Second flange. Detailed Implementation

[0024] The embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0025] Example:

[0026] like Figures 1-4 As shown, the valve includes a valve body 1, an inlet pipe 11 and an outlet pipe 12 fixedly connected to the valve body 1. The inlet pipe 11 and the outlet pipe 12 are symmetrically arranged. A fixing plate 13 is fixedly connected inside the inlet pipe 11. The fixing plate 13 has multiple first through holes 14 arranged in a circular array. A telescopic rod 15 is fixedly connected to the end of the fixing plate 13. A spring 16 is fixedly connected to the end of the fixing plate 13 and is located outside the telescopic rod 15. A first sealing block 17 is fixedly connected to the end of the telescopic rod 15. The end of the spring 16 is fixedly connected to the first sealing block 17. A first baffle 18 is fixedly connected inside the valve body 1. A second through hole 19 is opened on the first baffle 18. The first sealing block 17 is slidably connected inside the second through hole 19.

[0027] The working principle of the above technical solution is as follows:

[0028] During operation, liquid enters through the inlet pipe 11. The force generated by the liquid flow acts on the first sealing block 17, pushing it to slide. At this time, the telescopic rod 15 and the spring 16 retract, and the liquid flows out through the second through hole 19. When backflow occurs, the pressure on the left side of the inlet pipe 11 decreases. The force generated by the retraction of the spring 16 causes the first sealing block 17 to quickly return to its original position, blocking the second through hole 19. Through the above structure, liquid backflow can be effectively reduced, and the possibility of external fluid flowing back into the liquid supply system through the inlet pipe 11 can be reduced. This reduces contamination of the liquid and also reduces pressure and wear on pipes, pumps, and other liquid supply system equipment, thereby extending the service life of the equipment and improving the stability of the entire liquid supply system.

[0029] In another embodiment, such as Figure 2 and Figure 4As shown, a second baffle 2 is fixedly connected inside the valve body 1. A third through hole 21 is provided on the second baffle 2. A second sealing block 22 is slidably connected inside the third through hole 21. A connecting plate 23 is fixedly connected to the valve body 1. A connecting cylinder 24 is fixedly connected to the top of the connecting plate 23. A lead screw 25 is threadedly connected inside the connecting cylinder 24. A handle 26 is fixedly connected to the top of the lead screw 25. The bottom end of the lead screw 25 is fixedly connected to the second sealing block 22. During operation, rotating the handle 26 causes the lead screw 25 to rotate. While rotating, the lead screw 25 also moves vertically. The movement of the lead screw 25 causes the second sealing block 22 at its bottom to move. When the second sealing block 22 is inserted into the third through hole 21, the valve is closed; otherwise, it is opened. With the above structure, the user can quickly open or close the valve, thereby achieving a rapid response to the liquid supply system, effectively improving work efficiency. The operation is simple and convenient, improving the ease of use.

[0030] In another embodiment, such as Figure 2 and Figure 5 As shown, a fixed seat 3 is fixedly connected inside the outlet pipe 12. The fixed seat 3 is located at the end away from the valve body 1. A filter frame 31 is slidably connected inside the fixed seat 3. A filter screen 32 is fixedly connected inside the filter frame 31. A sealing gasket 33 is slidably connected to the outlet pipe 12. The bottom of the sealing gasket 33 is fixedly connected to the filter frame 31, and a pull rod 34 is fixedly connected to the top of the sealing gasket 33. During operation, when the liquid passes through the filter screen 32, the filter screen 32 can remove solid impurities from the liquid. When the filter screen 32 is damaged and needs to be replaced, the filter screen 32 can be removed from the inside of the outlet pipe 12 by sliding it upward on the pull rod 34. Through the above structure, impurities in the liquid can be effectively filtered, reducing the impact of impurities on subsequent operations. The filter screen 32 and the outlet pipe 12 are detachable, which facilitates the user to maintain and replace the filter screen 32, effectively improving the overall flexibility of the valve.

[0031] In another embodiment, such as Figure 1 and Figure 6 As shown, a bracket 4 is fixedly connected to the valve body 1. Two sets of positioning rods 41 are fixedly connected to the top of the bracket 4. The two sets of positioning rods 41 are symmetrically arranged. A protective cover 42 is slidably connected to the middle of the positioning rods 41. During operation, the valve may be subjected to external impacts. The bracket 4 is set outside the valve body 1. The protective cover 42 is detachably connected to the bracket 4. When the valve is in operation, the protective cover 42 is inserted into the bracket 4. Through the above structure, the valve can be effectively protected, reducing the deformation of the valve body 1 caused by external impacts, and effectively protecting the safety of the valve.

[0032] In another embodiment, such as Figure 1 and Figure 2As shown, a drain pipe 5 is fixedly connected to the middle of the outlet pipe 12. The drain pipe 5 is located at one end near the valve body 1. The end of the drain pipe 5 is threadedly connected to a pipe cap 51. During operation, the pipe cap 51 is rotated to remove it from the drain pipe 5. At this time, the liquid washes the filter screen 32, and the impurities on the filter screen 32 will flow out from the drain pipe 5. Through the above structure, the impurities on the filter screen 32 can be effectively removed, reducing the need to remove the filter screen 32 for cleaning, thereby reducing valve downtime and effectively improving work efficiency.

[0033] In another embodiment, such as Figure 1 As shown, a first flange 6 is fixedly connected to the end of the inlet pipe 11, and a second flange 61 is fixedly connected to the end of the outlet pipe 12. During operation, the valve needs to be connected to pipelines or other equipment. The first flange 6 and the second flange 61 are provided at the ends of the inlet pipe 11 and the outlet pipe 12. Through the above structure, it is convenient to connect the valve to pipelines or other equipment. When the valve needs to be repaired or replaced, it is also convenient to disassemble, which improves the convenience of use.

[0034] In another embodiment, such as Figure 5 As shown, the outer part of the sealing gasket 33 is made of rubber, and the shape of the sealing gasket 33 is arc-shaped. When working, the arc shape of the sealing gasket 33 allows it to be better inserted into the interior of the liquid outlet pipe 12. The outer material of the sealing gasket 33 is made of rubber, which can increase the friction between it and the liquid outlet pipe 12. Through the above structure, the connection between the sealing gasket 33 and the liquid outlet pipe 12 will be tighter, effectively reducing the leakage of liquid from the gap between the sealing gasket 33 and the liquid outlet pipe 12.

[0035] The above embodiments merely illustrate specific implementations of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model.

Claims

1. A semiconductor valve with an anti-backflow tube, comprising a valve body (1), characterized in that: An inlet pipe (11) is fixedly connected to the valve body (1), and an outlet pipe (12) is fixedly connected to the valve body (1). The inlet pipe (11) and the outlet pipe (12) are symmetrically arranged. A fixing plate (13) is fixedly connected inside the inlet pipe (11). The fixing plate (13) has multiple first through holes (14) arranged in a circular array. A telescopic rod (15) is fixedly connected to the end of the fixing plate (13). 3) A spring (16) is fixedly connected to the end of the telescopic rod (15), and the spring (16) is located outside the telescopic rod (15). A first sealing block (17) is fixedly connected to the end of the telescopic rod (15). The end of the spring (16) is fixedly connected to the first sealing block (17). A first baffle (18) is fixedly connected inside the valve body (1). A second through hole (19) is opened on the first baffle (18). The first sealing block (17) is slidably connected inside the second through hole (19).

2. A semiconductor valve with an anti-backflow tube according to claim 1, characterized in that: A second baffle (2) is fixedly connected inside the valve body (1). A third through hole (21) is provided on the second baffle (2). A second sealing block (22) is slidably connected inside the third through hole (21). A connecting plate (23) is fixedly connected to the valve body (1). A connecting cylinder (24) is fixedly connected to the top of the connecting plate (23). A screw rod (25) is threaded inside the connecting cylinder (24). A handle (26) is fixedly connected to the top of the screw rod (25). The bottom end of the screw rod (25) is fixedly connected to the second sealing block (22).

3. A semiconductor valve with an anti-backflow tube according to claim 1, characterized in that: A fixing seat (3) is fixedly connected inside the outlet pipe (12). The fixing seat (3) is located at the end away from the valve body (1). A filter frame (31) is slidably connected inside the fixing seat (3). A filter screen (32) is fixedly connected inside the filter frame (31). A sealing gasket (33) is slidably connected on the outlet pipe (12). The bottom of the sealing gasket (33) is fixedly connected to the filter frame (31). A pull rod (34) is fixedly connected to the top of the sealing gasket (33).

4. A semiconductor valve with an anti-backflow tube according to claim 1, characterized in that: A bracket (4) is fixedly connected to the valve body (1), and two sets of positioning rods (41) are fixedly connected to the top of the bracket (4). The two sets of positioning rods (41) are symmetrically arranged, and a protective cover (42) is slidably connected to the middle of the positioning rods (41).

5. A semiconductor valve with an anti-backflow tube according to claim 1, characterized in that: A drain pipe (5) is fixedly connected to the middle of the outlet pipe (12). The drain pipe (5) is located at one end close to the valve body (1). A pipe cap (51) is threaded to the end of the drain pipe (5).

6. A semiconductor valve with an anti-backflow tube according to claim 1, characterized in that: The end of the inlet pipe (11) is fixedly connected to a first flange (6), and the end of the outlet pipe (12) is fixedly connected to a second flange (61).

7. A semiconductor valve with an anti-backflow tube according to claim 3, characterized in that: The outer part of the sealing gasket (33) is made of rubber, and the sealing gasket (33) is arc-shaped.

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