Leveling mechanism

Abstract

The utility model relates to the technical field of mask plate processing equipment, in particular to a leveling mechanism which comprises a mounting frame, a connecting shaft mounted on the mounting frame, a constant-temperature box with one end rotationally connected to the mounting frame, a swing assembly used for driving the constant-temperature box to swing around the connecting shaft, a positioning hole formed in the constant-temperature box and a positioning piece connected to the mounting frame. The position of the constant-temperature box can be adjusted, alignment errors in the installation process of the constant-temperature box are reduced, the rate of defective products is reduced, and production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mask plate processing equipment technical field especially point to a leveling mechanism. BACKGROUND

[0002] In the photoetching exposure process, the mask plate will absorb photons to generate heat, which leads to temperature rise, and this thermal effect will affect the exposure accuracy. In order to reduce the influence of this thermal effect, it is usually necessary to take constant temperature cooling measures. For example, in the mass integrated circuit production, the mask plate needs to be put into a constant temperature box to realize the constant temperature control of ±0.1 degrees, so as to maintain the stability of the production environment.

[0003] In order to ensure the quality and performance of the chip, it is necessary to meet strict process and technical requirements. The mask plate, as a key component in the chip manufacturing process, its position and direction must be accurately controlled. However, due to the inconvenience of adjusting the position of the constant temperature box, there is an alignment error in the installation of the constant temperature box, which leads to the increase of the defective rate in the chip manufacturing process and reduces the production efficiency. SUMMARY

[0004] The utility model provides a leveling mechanism in view of the prior art's insufficient, can adjust the position of constant temperature box, reduce the alignment error in the installation of constant temperature box, reduce the defective rate, promote production efficiency.

[0005] In order to solve the above technical problem, the utility model adopts the following technical scheme:

[0006] The utility model provides a leveling mechanism, including mounting frame, the connecting shaft of installing in mounting frame, the constant temperature box of one end rotation connection in mounting frame, the swing assembly for driving constant temperature box swing around connecting shaft, set up in the positioning hole of constant temperature box and the positioning piece of connecting in mounting frame;

[0007] When needing to adjust the constant temperature box horizontally, the swing assembly drives the constant temperature box to swing around the connecting shaft, drives the positioning piece to swing to the required position, so that the positioning hole is coaxial with the positioning piece.

[0008] Among them, the mounting frame is installed with the lifting unit, and the output end of the lifting unit is drivenly connected with the positioning piece, the lifting unit drives the positioning piece to move up and down, and the positioning piece is provided with the butt joint part matched with the positioning hole;

[0009] When the positioning hole is coaxial with the positioning piece, the lifting unit drives the positioning piece to move downward to the required position, so that the butt joint part is matched and inserted into the positioning hole.

[0010] The swing assembly comprises a swing support connected with the mounting frame, a swing arm having one end rotatably connected with the swing support, a swing base connected with the thermostat, and a swing driving member. One end of the swing driving member is embedded in the swing base, and the other end of the swing driving member is rotatably connected with the swing arm. The swing driving member and the swing base have a movement gap for horizontal movement of the swing driving member.

[0011] When horizontal adjustment of the thermostat is needed, the swing arm is swung around the connection with the swing support by external force, and the swing driving member is moved in the swing base, so that the swing driving member pushes the swing base and the thermostat to swing around the center of the connection shaft.

[0012] The swing base is provided with a mounting groove and an embedded hole communicating with the bottom end of the mounting groove. The swing driving member is provided with a movable part and an embedded part connected with the movable part. The movable part is arranged in the mounting groove, and the gap between the movable part and the mounting groove is the movement gap. The diameter of the embedded hole is greater than the width of the mounting groove, and the width of the embedded part is greater than the width of the mounting groove. The embedded part is located in the embedded hole.

[0013] The swing arm is provided with a rotating hole, and the swing driving member is provided with a swing head connected with the movable part. The swing head is rotatably fitted in the rotating hole, and the width of the swing head is greater than the width of the mounting groove.

[0014] The swing support is connected with a swing support member, the swing support member is provided with a bearing, the swing arm is provided with a receiving hole, the bearing is rotatably fitted in the receiving hole, and the swing arm is provided with a cover plate. The cover plate shields the side of the bearing away from the swing support.

[0015] The swing support member comprises a support column, a support end cover, and a support locking member. The bearing is sleeved on the support column, the support end cover abuts against the end face of the bearing away from the swing support, the swing support is provided with a first locking hole, the support column is provided with a second locking hole, and the support end cover is provided with a third locking hole.

[0016] The inner end of the support locking member passes through the third locking hole and the second locking hole and is threadedly connected to the first locking hole, so as to lock the swing support member and the swing support.

[0017] The support column is provided with a receiving groove matched with the inner ring of the bearing. The inner side of the bearing extends into the receiving groove, and the length of the receiving groove is equal to the thickness of the bearing.

[0018] The cover plate is provided with a dismounting opening, the width of the dismounting opening is greater than the width of the support locking member, and the support locking member corresponds to the dismounting opening.

[0019] The positioning hole is provided with a protective sleeve, and the protective sleeve is provided with a protective hole coaxial with the positioning hole.

[0020] When the positioning hole is coaxially aligned with the positioning member, the lifting unit drives the positioning member to move downward to a required position, so that the butt joint part is inserted into the protective hole.

[0021] The utility model discloses the beneficial effects of:

[0022] In actual application, when needing to horizontally adjust the thermostat, the swing assembly drives the thermostat to swing around the connecting shaft, drives the positioning member to swing to a required position, so that the positioning hole is coaxially aligned with the positioning member, thereby smoothly adjusting the position of the thermostat, reducing the alignment error in the installation of the thermostat, reducing the defective rate, and improving the production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a three-dimensional structure schematic view of the leveling mechanism.

[0024] Figure 2 It is a partial three-dimensional view of the lifting unit, the thermostat and the positioning member.

[0025] Figure 3 It is an exploded view of the lifting unit, the thermostat and the positioning member.

[0026] Figure 4 It is a three-dimensional view of the connecting structure of the thermostat and the swing assembly.

[0027] Figure 5 It is a sectional view of the mounting structure of the swing base and the swing driving member.

[0028] Figure 6 It is a schematic view of the connecting structure of the movable part and the swing base.

[0029] Figure 7 It is an exploded three-dimensional view of the swing assembly.

[0030] Figure 8 It is an exploded three-dimensional view of the protective sleeve, the positioning member and the lifting unit.

[0031] Figure 9 It is a three-dimensional view of the protective sleeve, the positioning member and the lifting unit when the butt joint part is inserted into the protective hole.

[0032] 1, mounting frame;2, connecting shaft;

[0033] 3, thermostat;301, positioning hole;31, protective sleeve;32, protective hole;

[0034] 4, swing assembly;

[0035] 41, swing support;411, first locking hole;

[0036] 42, swing arm; 421, rotating hole; 422, accommodating hole;

[0037] 43, swing base; 431, mounting slot; 432, embedding hole;

[0038] 44, swing driving member; 441, movable part; 442, embedding part;

[0039] 443, swing head part;

[0040] 5, positioning member; 51, butt joint part;

[0041] 6, lifting unit;

[0042] 7, swing support member;

[0043] 71, support column; 711, second locking hole; 712, accommodating slot;

[0044] 72, support end cover; 721, third locking hole;

[0045] 73, support locking member;

[0046] 8, bearing;

[0047] 9, cover plate; 91, dismounting opening. DETAILED DESCRIPTION

[0048] For the convenience of the understanding of the skilled in the art, the present application will be further described below in conjunction with the embodiments and the accompanying drawings. The specific embodiments of the present application will be described below, and it should be noted that, in the specific description of these embodiments, the present specification cannot possibly describe all the features of the actual embodiments in detail for the sake of concise and brief description.

[0049] Reference Figures 1 to 9The utility model provides a leveling mechanism, including mounting frame 1, install the connecting shaft 2 of mounting frame 1, the thermostat 3 of one end rotation connection in mounting frame 1, be used for driving thermostat 3 to swing around connecting shaft 2 swing subassembly 4, set up in the positioning hole 301 of thermostat 3 and the positioning piece 5 of connection in mounting frame 1, when needing horizontal adjustment thermostat 3, the swing subassembly 4 drives thermostat 3 to swing around connecting shaft 2, drives the swing of positioning piece 5 required position, to make positioning hole 301 with positioning piece 5 coaxial alignment, thereby smoothly adjust the position of thermostat 3, reduce the alignment error in the installation of thermostat 3, reduce the defective rate, improve production efficiency, specifically, positioning piece 5 is the columnar structure, can adopt optical sensor to detect the center position of positioning hole 301, and optical sensor can be laser ranging sensor, optical fiber sensor or ultrasonic sensor, to realize accurate detection center of positioning hole 301, when the center of positioning hole 301 coincides with the center of positioning piece 5, stop adjusting thermostat 3, improve the adjustment accuracy of thermostat 3, when the position of thermostat 3 is adjusted, can install gasket or silicon steel sheet at the bottom of thermostat 3 to stabilize the installation position of thermostat 3.

[0050] Reference Figure 2 、 3 In the embodiment, the mounting frame 1 is provided with a lifting unit 6, the output end of the lifting unit 6 is drivingly connected with the positioning piece 5, the lifting unit 6 drives the positioning piece 5 to move up and down, and the positioning piece 5 is provided with a butt joint part 51 matched with the positioning hole 301. Figure 1 、 2 As shown in the reference, the butt joint part 51 and the connecting shaft 2 are used to stably position both ends of the thermostat 3, prevent the thermostat 3 from shaking, and facilitate accurate positioning of the thermostat 3.

[0051] Reference Figure 1 、 4As shown, in the embodiment, the swing assembly 4 comprises a swing bracket 41 connected with the mounting frame 1, a swing arm 42 having one end rotatably connected with the swing bracket 41, a swing base 43 connected with the thermostat 3, and a swing driving member 44, one end of the swing driving member 44 is embedded in the swing base 43, the other end of the swing driving member 44 is rotatably connected with the swing arm 42, and the swing driving member 44 has a movement gap for horizontal movement of the swing driving member 44 between the swing driving member 44 and the swing base 43; in actual application, when it is needed to horizontally adjust the thermostat 3, the swing arm 42 is swung around the connection with the swing bracket 41 by external force, the swing driving member 44 is driven to move in the swing base 43, so that the swing driving member 44 drives the swing base 43 and the thermostat 3 to swing around the rotation center of the connection shaft 2, thereby smoothly adjusting the position of the thermostat 3, facilitating accurate positioning of the thermostat 3, and reducing the alignment error of the thermostat 3.

[0052] Referring to Figure 5 , 6 As shown, in the embodiment, the swing base 43 is provided with a mounting groove 431 and an embedded hole 432 communicated with the bottom end of the mounting groove 431, the swing driving member 44 is provided with a movable part 441 and an embedded part 442 connected with the movable part 441, the movable part 441 is arranged in the mounting groove 431, and the gap between the movable part 441 and the mounting groove 431 is the movement gap; referring to Figure 6 As shown, the diameter of the embedded hole 432 is greater than the width of the mounting groove 431, the width of the embedded part 442 is greater than the width of the mounting groove 431, and the embedded part 442 is located in the embedded hole 432, thereby preventing the swing driving member 44 from falling off from the swing base 43 and facilitating stable maintenance of the connection relationship between the movable part 441 and the swing base 43; referring to Figure 4 , 5 , 6, in actual application, the swing arm 42 is swung around the connection with the swing bracket 41 by external force, the movable part 441 contacts the inner side wall of the mounting groove 431 and drives the swing base 43 and the thermostat 3 to rotate around the rotation center of the connection shaft 2 under the action of the external force, thereby smoothly adjusting the position of the thermostat 3 and reducing the alignment error of the thermostat 3.

[0053] Referring to Figure 7 As shown, in the embodiment, the swing arm 42 is provided with a rotation hole 421, the swing driving member 44 is provided with a swing head part 443 connected with the movable part 441, and the swing head part 443 is rotatably fitted in the rotation hole 421; referring to Figure 5 , 7As shown, the width of the swing head 443 is greater than the width of the mounting groove 431, preventing the swing head 443 from falling into the mounting groove 431, and facilitating the connection between the swing head 443 and the rotating hole 421.

[0054] With reference to Figure 7 As shown, in the embodiment, the swing support 41 is connected with a swing support member 7, the swing support member 7 is installed with a bearing 8, the swing arm 42 is provided with a containing hole 422, the bearing 8 is rotationally fitted in the containing hole 422, the swing arm 42 is installed with a cover plate 9, the cover plate 9 shields the side of the bearing 8 away from the swing support 41; in actual application, the swing arm 42 is rotated around the center of the bearing 8 under external force, facilitating the swing of the swing arm 42 relative to the swing support 41, the cover plate 9 is detachably connected with the swing arm 42, the cover plate 9 is detached from the swing arm 42, the swing support member 7 is detached from the swing support 41, the bearing 8 can be cleaned smoothly, and the connection between the swing support 41 and the swing arm 42 can be cleaned or maintained.

[0055] With reference to Figure 7 As shown, in the embodiment, the swing support member 7 comprises a support column 71, a support end cover 72 and a support locking member 73, the bearing 8 is sleeved on the support column 71, the support end cover 72 abuts against the end face of the bearing 8 away from the swing support 41, the swing support 41 is provided with a first locking hole 411, the support column 71 is provided with a second locking hole 711, the support end cover 72 is provided with a third locking hole 721, and the inner end of the support locking member 73 is threadedly connected to the first locking hole 411 after passing through the third locking hole 721 and the second locking hole 711, so as to lock the swing support member 7 and the swing support 41.

[0056] In actual application, the support locking member 73 adopts a locking screw, when the bearing 8 needs to be detached, the support locking member 73 is rotated to make the support locking member 73 disengage from the first locking hole 411, the second locking hole 711 and the third locking hole 721, the support column 71 and the support end cover 72 are smoothly detached from the swing support 41, the bearing 8 can be smoothly detached from the containing hole 422, and the support column 71, the support end cover 72 and the bearing 8 can be cleaned smoothly; when the bearing 8 needs to be installed, the bearing 8 is placed at the two ends of the support column 71 and the support end cover 72 respectively, the first locking hole 411, the second locking hole 711 and the third locking hole 721 are corresponded, the inner end of the support locking member 73 is threadedly connected to the first locking hole 411 after passing through the third locking hole 721 and the second locking hole 711, and the installation is convenient.

[0057] With reference to Figure 4 , 7As shown, specifically, when it is necessary to lock the swing support 7 and the swing bracket 41, the support column 71, the bearing 8 and the support end cover 72 are sequentially placed, so that the first locking hole 411, the second locking hole 711 and the third locking hole 721 correspond, the bearing 8 is matched and arranged in the accommodating hole 422, so that the bearing 8 is kept in a stable mounting position, an external tool is used to drive the support locking piece 73 to rotate, so that the inner end of the support locking piece 73 is threadedly connected to the first locking hole 411 after passing through the third locking hole 721 and the second locking hole 711, thereby realizing the locking of the swing support 7 and the swing bracket 41, and then the cover plate 9 is mounted with the swing arm 42; the mode of first positioning the bearing 8, then locking the support arm, the bearing 8 and the swing bracket 41 can position the bearing 8 before the positioning of the support column 71, the swing bracket 41 and the support end cover 72, prevent the bearing 8 from shaking to affect the positioning accuracy of the support column 71, the swing bracket 41 and the support end cover 72, and facilitate the quick mounting or dismounting of the swing arm 42 and the swing bracket 41.

[0058] Reference Figure 7 As shown, in the embodiment, the support column 71 is provided with a receiving groove 712 matched with the inner ring of the bearing 8, the inner side of the bearing 8 extends into the receiving groove 712, and the length of the receiving groove 712 is equal to the thickness of the bearing 8, so that the bottom surface of the receiving groove 712 and the inner side surface of the support end cover 72 abut against the two end surfaces of the bearing 8 respectively, thereby facilitating the positioning of the bearing 8.

[0059] Reference Figure 7 As shown, in the embodiment, the cover plate 9 is provided with a dismounting opening 91, the width of the dismounting opening 91 is greater than the width of the support locking piece 73, and the support locking piece 73 corresponds to the dismounting opening 91; in actual application, when the swing support 7 and the swing bracket 41 are in the locked state, an external tool is inserted into the dismounting opening 91 to drive the support locking piece 73 to rotate, without the need to additionally dismount the cover plate 9, thereby facilitating the quick dismounting of the swing support 7 and the swing bracket 41 and the quick dismounting of the swing arm 42 and the swing bracket 41.

[0060] Reference Figure 8 As shown, in the embodiment, the positioning hole 301 is mounted with a protective sleeve 31, and the protective sleeve 31 is provided with a protective hole 32 coaxially corresponding to the positioning hole 301; the protective sleeve 31 is arranged to protect the positioning hole 301, prevent the abutting portion 51 from abrading and damaging the structural integrity of the positioning hole 301, and ensure the positioning accuracy of the positioning hole 301; as shown in Figure 9 As shown, in actual application, when the positioning hole 301 is coaxially aligned with the positioning piece 5, the lifting unit 6 drives the positioning piece 5 to move downward to a required position, so that the abutting portion 51 is matched and inserted into the protective hole 32, thereby facilitating the accurate positioning of the incubator 3 and reducing the installation error of the incubator 3.

[0061] The above is only the preferred embodiment of the present application, and does not limit the present application in any form. Although the present application is disclosed as above in the preferred embodiment, it is not intended to limit the present application. Any skilled person in the art can make some changes or modifications to the disclosed technical content without departing from the technical solution of the present application, and any equivalent embodiment with equivalent changes is equivalent to the above embodiment. Any simple modification, equivalent change and modification of the above embodiment according to the present application technical solution are within the scope of the present application technical solution.

Claims

1. A levelling mechanism characterised in that, The utility model provides a horizontal adjustment device of constant temperature box, including mounting frame (1), the connecting shaft (2) of installation in mounting frame (1), one end rotation is connected in mounting frame (1) constant temperature box (3), be used for driving constant temperature box (3) swing around connecting shaft (2) swing assembly (4), set up in constant temperature box (3) positioning hole (301) and the positioning piece (5) of connection in mounting frame (1), When needing to adjust the constant temperature box (3) horizontally, the swing assembly (4) drives the constant temperature box (3) to swing around the connecting shaft (2), and drives the positioning piece (5) to swing to the required position, so that the positioning hole (301) is coaxially aligned with the positioning piece (5).

2. Levelling mechanism according to claim 1, characterized in that The mounting frame (1) is provided with a lifting unit (6), and the output end of the lifting unit (6) is drivingly connected with the positioning piece (5); the lifting unit (6) drives the positioning piece (5) to move up and down; the positioning piece (5) is provided with a butt joint portion (51) matched with the positioning hole (301). When the positioning hole (301) is coaxially aligned with the positioning piece (5), the lifting unit (6) drives the positioning piece (5) to move downward to the required position, so that the butt joint portion (51) is matched and inserted into the positioning hole (301).

3. The leveling mechanism of claim 1, wherein, The swing assembly (4) comprises a swing bracket (41) connected with the mounting frame (1), a swing arm (42) rotationally connected with one end of the swing bracket (41), a swing base (43) connected with the constant temperature box (3), and a swing driving piece (44); one end of the swing driving piece (44) is embedded in the swing base (43); the other end of the swing driving piece (44) is rotationally connected with the swing arm (42); the swing driving piece (44) and the swing base (43) have a movement gap for horizontal movement of the swing driving piece (44); When needing to adjust the constant temperature box (3) horizontally, the swing arm (42) is swung around the connection with the swing bracket (41) under the action of external force, drives the swing driving piece (44) to move in the swing base (43), so that the swing driving piece (44) drives the swing base (43) and the constant temperature box (3) to swing around the center of rotation of the connecting shaft (2).

4. Levelling mechanism according to claim 3, characterized in that The swing base (43) is provided with a mounting groove (431) and an embedded hole (432) in communication with the bottom end of the mounting groove (431); the swing driving piece (44) is provided with a movable portion (441) and an embedded portion (442) connected with the movable portion (441); the movable portion (441) is arranged in the mounting groove (431); the gap between the movable portion (441) and the mounting groove (431) is the movement gap; the diameter of the embedded hole (432) is greater than the width of the mounting groove (431); the width of the embedded portion (442) is greater than the width of the mounting groove (431); and the embedded portion (442) is located in the embedded hole (432).

5. Levelling mechanism according to claim 4, characterized in that The swing arm (42) is provided with a rotation hole (421); the swing driving piece (44) is provided with a swing head portion (443) connected with the movable portion (441); the swing head portion (443) is rotationally matched in the rotation hole (421); and the width of the swing head portion (443) is greater than the width of the mounting groove (431).

6. The leveling mechanism of claim 3, wherein, The swing support (7) is connected with the swing support (41), the swing support (7) is installed with the bearing (8), the swing arm (42) is provided with the containing hole (422), the bearing (8) is rotationally fitted in the containing hole (422), the swing arm (42) is installed with the cover plate (9), and the cover plate (9) shields the side of the bearing (8) away from the swing support (41).

7. Levelling mechanism according to claim 6, characterized in that The swing support (7) includes a support column (71), a support end cover (72) and a support locking piece (73), the bearing (8) is sleeved on the support column (71), the support end cover (72) abuts against the end face of the bearing (8) away from the swing support (41), the swing support (41) is provided with a first locking hole (411), the support column (71) is provided with a second locking hole (711), and the support end cover (72) is provided with a third locking hole (721). The inner end of the support locking piece (73) is threadedly connected to the first locking hole (411) after penetrating through the third locking hole (721) and the second locking hole (711), so as to lock the swing support (7) and the swing support (41).

8. The leveling mechanism of claim 7, wherein, The support column (71) is provided with a receiving groove (712) matched with the inner ring of the bearing (8), the inner side of the bearing (8) extends into the receiving groove (712), and the length of the receiving groove (712) is equal to the thickness of the bearing (8).

9. The leveling mechanism of claim 7, wherein, The cover plate (9) is provided with a dismounting opening (91), the width of the dismounting opening (91) is greater than the width of the support locking piece (73), and the support locking piece (73) corresponds to the dismounting opening (91).

10. The leveling mechanism of claim 2, wherein, The positioning hole (301) is installed with a protective sleeve (31), and the protective sleeve (31) is provided with a protective hole (32) coaxially corresponding to the positioning hole (301). When the positioning hole (301) is coaxially aligned with the positioning piece (5), the lifting unit (6) drives the positioning piece (5) to move downward to the required position, so that the butt joint part (51) is matched and inserted into the protective hole (32).

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