Novel water curtain humidifying device of scribing machine

Abstract

The utility model relates to the technical field of scribing machines, and discloses a novel water curtain humidifying device of a scribing machine, which comprises a water spraying arm, a flow channel is arranged in the water spraying arm, a plurality of water spraying holes communicated with the flow channel are arranged on one side surface of the water spraying arm, two ends of the water spraying arm are fixedly connected with sliding blocks, and guide columns are arranged on the sliding blocks in a penetrating manner. The end, away from the sliding block, of the guide column is fixedly connected with a fixing plate. The tail ends of the guide columns at the two ends of the water spraying arm are fixedly connected to the same fixing plate. The sliding block is provided with a locking mechanism used for locking the relative position of the sliding block and the guide column. According to the novel water curtain humidifying device of the scribing machine, the distance between the water spraying arm and a wafer can be flexibly adjusted, and the novel water curtain humidifying device can adapt to cleaning of wafers of different sizes; in a preferable scheme, the liquid spraying of the water spraying holes in each area can be flexibly controlled, and the cleaning procedure of the wafer can be flexibly regulated and controlled.

Description

Technical Field

[0001] This utility model belongs to the field of dicing machine technology, specifically relating to a novel water curtain humidification device for dicing machines. Background Technology

[0002] When a dicing machine cuts products, the high-speed rotation of the blades generates a large amount of heat during the grinding process. This high temperature can adversely affect the wafer and thus the cutting quality. Therefore, in existing technologies, a water spray device is usually installed near the blades to cool the cutting edge. However, during the wafer cutting process, some silicon crystal debris and metal debris are generated and adhere to the wafer surface and the blades. Such water spray devices can usually only cool and clean the cutting edge, but cannot clean the wafer surface.

[0003] To address the aforementioned issues, existing solutions involve simultaneously installing water spray nozzles on the water spray hood for cooling the cutting edge and rinsing the wafer surface. These include main coolant nozzles and side coolant nozzles for cooling and cleaning the cutting edge, as well as wafer cleaning water nozzles for cleaning the wafer. This allows for cleaning of the cutting edge and the surrounding wafer surface. However, the spray angle and position of each nozzle on this water spray hood device are fixed, making it inconvenient to adjust the distance of the water curtain according to the actual wafer size. Utility Model Content

[0004] The purpose of this invention is to provide a novel water curtain humidification device for a dicing machine, which allows for convenient adjustment of the water curtain distance according to the actual wafer size.

[0005] To achieve the above objectives, the technical solution specifically provided by this utility model is as follows:

[0006] A novel water curtain humidification device for a dicing machine includes a spray arm. The spray arm has a flow channel inside and several spray holes communicating with the flow channel on one side. Sliding blocks are fixedly connected to both ends of the spray arm. Guide posts are passed through the sliding blocks. A fixing plate is fixedly connected to the end of the guide post away from the sliding block. The ends of the guide posts at both ends of the spray arm are fixedly connected to the same fixing plate. A locking mechanism is provided on the sliding block for locking the relative position of the sliding block and the guide post.

[0007] By adopting the above technical solution, the position of the sliding block can be adjusted along the guide post according to the actual size of the wafer being processed, thereby changing the relative position of the water spray arm and the wafer, and thus achieving adjustment of the water curtain's distance. After the sliding block is adjusted to the correct position, it can be locked in place using a locking mechanism. Based on the aforementioned solution, the problem of inconvenient adjustment caused by the fixed water spray angle and position in existing wafer processing is effectively solved.

[0008] Further, the locking mechanism comprises spring pins inserted in the sliding blocks and positioning holes formed in the guide columns.

[0009] Further, a pair of sliding blocks are arranged at the two ends of the water spraying arm, and a guide column is arranged on each sliding block, and the guide columns are parallel to each other.

[0010] Further, the water spraying arm has arc-shaped side walls, and the water spraying holes are uniformly distributed along the arc-shaped side walls.

[0011] Further, the water spraying arm comprises a water spraying upper plate and a water spraying lower plate which are fixedly connected, the top surface of the water spraying lower plate is provided with a lower notch, the water spraying upper plate is provided with an upper notch corresponding to the position of the lower notch, and the periphery of the lower notch is provided with a sealing gasket.

[0012] Further, the lower notch comprises a main flow groove and auxiliary flow grooves located at the two ends of the main flow groove, the main flow groove comprises a first flow groove and a second flow groove communicated at the two ends of the first flow groove, and the bottom walls of the first flow groove, the second flow groove and the auxiliary flow grooves are all provided with flow guide holes, and each flow guide hole is correspondingly communicated with a liquid inlet pipe joint mounted on the side wall of the water spraying lower plate.

[0013] Further, the fixed plate is connected with a T-axis assembly connecting plate, so that the water curtain humidifying device can be conveniently installed on the main body of the scribing machine.

[0014] Further, the water spraying arm is fixed with a fastening connecting piece at the end, and the sliding block is fixedly connected to the fastening connecting piece.

[0015] Further, the fastening connecting piece comprises a connecting arm and a fastening plate fixed at the end of the connecting arm, and the fastening plate is fixedly connected to the top surface of the sliding block.

[0016] Further, a transition connecting plate is further arranged, and the transition connecting plate is clamped and embedded between the fastening plate and the sliding block.

[0017] The utility model has the following beneficial effects:

[0018] 1. The water curtain distance can be adjusted according to different wafer sizes to achieve better cleaning effect and better adaptability;

[0019] 2. The small holes are arranged in a ring shape on the water spraying arm, and the small holes are uniformly arranged, so that the wafer area can be cleaned widely;

[0020] 3. The water supply of the water spraying holes in different areas can be independently controlled, and the water curtain cleaning process of the wafer can be flexibly controlled according to the requirements. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a structure schematic view (perspective view) of the new water curtain humidifying device of the wafer dicing machine in the embodiment;

[0022] Figure 2 It is an enlarged view of part A in the embodiment; Figure 1

[0023] Figure 3 It is a structure schematic view (bottom view) of the new water curtain humidifying device of the wafer dicing machine in the embodiment;

[0024] Figure 4 It is a structure schematic view of the water spraying lower plate in the embodiment;

[0025] Figure 5 It is a structure schematic view of the water spraying upper plate in the embodiment.

[0026] BRIEF DESCRIPTION OF DRAWINGS

[0027] 1. Water spraying arm; 11, arc-shaped side wall; 2, water spraying upper plate; 21, upper notch; 3, water spraying lower plate; 31, lower notch; 311, main flow groove; 3111, first flow groove; 3112, second flow groove; 312, auxiliary flow groove; 313, flow guide hole; 32, sealing gasket; 33, liquid inlet pipe joint; 4, water spraying hole; 5, sliding block; 51, spring pin; 6, guide column; 7, fixed plate; 71, T-axis assembly connecting plate; 8, fastening connecting piece; 81, connecting arm; 82, fastening plate; 9, transition connecting plate; 91, pressing block. DETAILED DESCRIPTION

[0028] In order to make the person skilled in the art better understand the technical scheme in the present application, the following will be further described in detail in combination with the drawings.

[0029] Referring to Figure 1 A new water curtain humidifying device of a wafer dicing machine, comprising a water spraying arm 1, a fastening connecting piece 8, a sliding block 5, a guide column 6 inserted into the sliding block 5, and a fixed plate 7 fixed to the end of the guide column 6.

[0030] Referring to Figure 1 ​The fixed plate 7 is arranged on one side of the water spraying arm 1, and the bottom surface of the fixed plate 7 is fixedly connected with a pair of T-shaft assembly connecting plates 71 through bolts, so as to install the water curtain humidifying device on the main body of the wafer dicing machine. The water spraying arm 1 is fixedly connected with fastening connecting pieces 8 at two ends, and the fastening connecting pieces 8 are fixedly connected with the sliding blocks 5. The guide columns 6 are arranged along the length direction perpendicular to the fixed plate 7, and one end of each guide column 6 is arranged through the sliding block 5, and the other end is fixedly arranged on the side wall of the fixed plate 7. The sliding block 5 can be moved along the guide column 6, so as to change the distance between the water spraying arm 1 and the fixed plate 7.

[0031] With reference to Figure 1 and Figure 2 The fastening connecting piece 8 comprises a connecting arm 81 and a fastening plate 82 fixedly arranged at the end of the connecting arm 81. The end of the connecting arm 81 away from the fastening plate 82 is fixedly connected with the end of the water spraying arm 1 through bolts, and the sliding block 5 is arranged on the bottom surface of the fastening plate 82.

[0032] With reference to Figure 2 and Figure 3 A pair of sliding blocks 5 are arranged at each end of the water spraying arm 1. An L-shaped transition connecting plate 9 is arranged between the fastening plate 82 and the sliding block 5; the fastening plate 82 is provided with fastening screws, so as to connect the fastening plate 82, the transition connecting plate 9 and the sliding block 5 as a whole. The part of the transition connecting plate 9 protruding from the fastening plate 82 is in contact with the top surface of one sliding block 5, and a pressing block 91 is arranged above the part. The pressing block 91 is provided with fastening screws for connecting the protruding part of the transition connecting plate 9, the pressing block 91 and the sliding block 5 as a whole.

[0033] With reference to Figure 2 and Figure 3 The two sliding blocks 5 arranged at the same end of the water spraying arm 1 are arranged at intervals. The guide columns 6 are arranged through each sliding block 5, and the guide columns 6 are parallel to each other and are fixedly connected with the fixed plate 7 at the end away from the sliding block 5. The spring pins 51 are inserted into the side wall of the outer sliding block 5, and a plurality of positioning holes (not shown in the figure) for the movable ends of the spring pins 51 are arranged along the length direction of the guide column 6. After the sliding block 5 is moved to the appropriate position along the guide column 6, the movable end of the spring pin 51 is clamped into the positioning hole, so as to fix the relative position of the sliding block 5 and the guide column 6.

[0034] With reference to Figure 1 , Figure 4 and Figure 5 The water spraying arm 1 is the main component of the water curtain humidifying device, which comprises a water spraying upper plate 2 and a water spraying lower plate 3 which are detachably connected, and has an arc-shaped side wall 11. The water spraying arm 1 has a flow channel inside, and a plurality of water spraying holes 4 which are in communication with the flow channel are uniformly distributed on the arc-shaped side wall 11 at equal intervals, so as to uniformly spray water on the surface of the wafer.

[0035] With reference to Figure 1 , Figure 4 and Figure 5, the lower slot 31 is arranged on the top surface of the lower plate 3. The lower slot 31 comprises a main flow slot 311 and two independent auxiliary flow slots 312 arranged at both ends of the main flow slot 311. The main flow slot 311 comprises a first flow slot 3111 and a second flow slot 3112 connected to both ends of the first flow slot 3111. In order to ensure the sealing between the upper plate 2 and the lower plate 3, a sealing gasket 32 is arranged around the lower slot 31. The bottom surface of the upper plate 2 is provided with an upper slot 21 corresponding to the shape of the lower slot 31. After the upper plate 2 and the lower plate 3 are buckled and fixed, the upper slot 21 and the lower slot 31 cooperate to form a flow channel for supplying water flow to the water spray hole 4.

[0036] Referring to Figure 1 and Figure 4 The bottom wall of the auxiliary flow slot 312, the first flow slot 3111 and the second flow slot 3112 is provided with a flow guide hole 313. Each flow guide hole 313 is connected to a liquid inlet pipe joint 33. The liquid inlet pipe joint 33 is used to connect a liquid supply pipe (not shown in the figure). The liquid inlet pipe joint 33 is installed on the side wall of the lower plate 3. Through the liquid inlet pipe joint 33 and the electromagnetic valve (not shown in the figure), water flow can be independently supplied to the auxiliary flow slot 312, the first flow slot 3111 and the second flow slot 3112, and the water flow can be controlled, so that the water curtain humidifying device can flexibly adjust and control the cleaning process of the wafer according to actual needs.

[0037] The implementation principle of the utility model is as follows:

[0038] 1. According to the size of the wafer, the position of the sliding block 5 is changed along the guide column 6, and the spring pin 51 is locked, so that the distance between the water spray arm 1 and the wafer is adjusted, which is flexible and has good adaptability.

[0039] 2. The auxiliary flow slot 312, the first flow slot 3111 and the second flow slot 3112 can be controlled by the independent liquid inlet pipe joint 33 and the electromagnetic valve, and the cleaning process of the wafer can be flexibly controlled according to needs.

[0040] The above are the preferred embodiments of the application, which do not limit the protection scope of the application, so that: any equivalent changes made according to the structure, shape and principle of the application should be covered within the protection scope of the application.

Claims

1. A novel water curtain humidifying device for a dicing machine, comprising a water spraying arm (1) provided with a flow channel inside and a plurality of water spraying holes (4) on one side surface thereof, characterized in that: The water spraying arm (1) is fixedly connected with sliding blocks (5) at both ends, a guide column (6) is arranged on the sliding block (5), and a fixed plate (7) is fixedly connected to the end of the guide column (6) away from the sliding block (5); the guide columns (6) at both ends of the water spraying arm (1) are fixedly connected to the same fixed plate (7); the sliding block (5) is provided with a locking mechanism for locking the relative position of the sliding block (5) and the guide column (6).

2. The novel water curtain humidifying device of the dicing machine according to claim 1, characterized in that: The locking mechanism comprises spring pins (51) inserted into the sliding block (5) and a plurality of positioning holes formed in the guide column (6).

3. The novel water curtain humidifying device of the dicing machine according to claim 1, characterized in that: The water spraying arm (1) is provided with a pair of sliding blocks (5) at both ends, and each sliding block (5) is provided with a guide column (6), and the guide columns (6) are parallel to each other.

4. The novel water curtain humidifying device of the dicing machine according to claim 1, characterized in that: The water spraying arm (1) has an arc-shaped side wall (11), and the water spraying holes (4) are uniformly distributed along the arc-shaped side wall (11).

5. The novel water curtain humidifying device of the dicing machine according to claim 4, characterized in that: The water spraying arm (1) comprises a fixedly connected water spraying upper plate (2) and a water spraying lower plate (3); the top surface of the water spraying lower plate (3) is provided with a lower notch (31), and the water spraying upper plate (2) is provided with an upper notch (21) corresponding to the position of the lower notch (31); the periphery of the lower notch (31) is provided with a sealing gasket (32).

6. The novel water curtain humidifying device of the dicing machine according to claim 5, characterized in that: The lower notch (31) comprises a main flow groove (311) and a secondary flow groove (312) located at both ends of the main flow groove (311), and the main flow groove (311) comprises a first flow groove (3111) and a second flow groove (3112) connected at both ends of the first flow groove (3111); the first flow groove (3111), the second flow groove (3112) and the bottom wall of the secondary flow groove are all provided with flow guide holes (313), and each flow guide hole (313) is correspondingly connected with a liquid inlet pipe joint (33) installed on the side wall of the water spraying lower plate (3).

7. A novel water curtain humidifying device for a dicing saw according to any one of claims 1-6, characterized in that: The fixed plate (7) is connected with a T-axis assembly connecting plate (71).

8. A novel water curtain humidifying device for a dicing saw according to any one of claims 1-6, characterized in that: The water spraying arm (1) is fixedly connected with a fastening connecting piece (8) at the end, and the sliding block (5) is fixedly connected to the fastening connecting piece (8).

9. The novel water curtain humidifying device of the dicing machine according to claim 8, characterized in that: The fastening connecting piece (8) comprises a connecting arm (81) and a fastening plate (82) fixed to the end of the connecting arm (81); the fastening plate (82) is fixedly connected to the top surface of the sliding block (5).

10. The novel water curtain humidifying device of the dicing machine according to claim 9, characterized in that: Further comprising a transition connecting plate (9), the transition connecting plate (9) is clamped between the fastening plate (82) and the sliding block (5).

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