Auxiliary magnet installation height calibration device

Abstract

The utility model provides a device for assisting in calibrating the installation height of a magnet, and the device comprises a supporting part which is disposed above the magnet; the sliding piece can be arranged on the supporting piece in a sliding mode in the extending direction of the supporting piece; the fixing assembly is connected to the sliding piece, and the fixing assembly is used for pressing the supporting piece to fix the sliding piece when the sliding piece slides to a measuring position; the distance measuring part is arranged on the side, facing the magnet, of the sliding part and used for measuring the distance between the distance measuring part and the magnet, and the distance measuring part moves along with the sliding part so as to measure the distances at different measuring positions. By adopting the device, the measurement precision of the magnet can be improved, and the installation precision of the magnet is higher.

Description

TECHNICAL FIELD

[0001] The utility model relates to the magnet installation field in PVD coating equipment, especially a kind of auxiliary calibration magnet installation height device. BACKGROUND

[0002] In PVD process, magnet can reach control thin film growth process and influence deposition on substrate surface thin film uniformity, therefore, the installation of magnet has crucial influence on the quality of coating.In the traditional way, usually adopt one aluminum strip cooperation vernier caliper on magnet and carry out multiple point ranging, to adjust the height of magnet, so that magnet is kept at the same level height.However, it is difficult to make vernier caliper perpendicular to aluminum strip and magnet when using vernier caliper, so there will be great error. SUMMARY

[0003] In view of the above-mentioned shortcomings of prior art, the purpose of the utility model is to provide an auxiliary calibration magnet installation height device for accurately measuring the horizontal height of magnet.

[0004] To achieve the above object and other related purposes, the utility model provides an auxiliary calibration magnet installation height device, comprising: a support member configured to be erected above the magnet;A sliding member is slidably arranged on the support member along the extension direction of the support member;A fixing assembly connected to the sliding member, the fixing assembly is used to press the support member to fix the sliding member when the sliding member slides to the measuring position;A distance measuring member is arranged on the side of the sliding member facing the magnet, for measuring the distance between the distance measuring member itself and the magnet, the distance measuring member moves with the sliding member to measure the distance at different measuring positions.

[0005] Preferably, the support member includes two oppositely arranged support rods, two guiding portions are respectively arranged on the opposite sides of the two support rods, the sliding member is located between the two support rods and is slidably inserted with the two guiding portions.

[0006] Preferably, the sliding member includes a sliding body and two matching portions, two matching portions are arranged on the opposite sides of the sliding body, and each corresponding guiding portion is slidably inserted with the corresponding guiding portion.

[0007] Preferably, the guiding portion is a groove structure, and the matching portion is a convex structure.

[0008] Preferably, the guiding portion is a convex structure, and the matching portion is a groove structure.

[0009] Preferably, the side of the sliding member facing the magnet is provided with a groove for embedding the distance measuring member, and the emission signal end of the distance measuring member is flush with the side of the sliding member facing the magnet.

[0010] Preferably, the fixing assembly comprises a locking bolt and a fixing piece, the locking bolt is arranged in one end of the fixing piece and connects the fixing piece to the sliding piece, and the other end of the fixing piece is pressed against the supporting piece.

[0011] Preferably, a handle is arranged on the sliding piece, and the handle is used to drive the sliding piece to slide along the supporting piece.

[0012] Preferably, a display is arranged on the sliding piece, and the display is electrically connected to the distance measuring piece and used to receive and display the measurement result.

[0013] Preferably, the supporting piece is made of aluminum.

[0014] As described above, the auxiliary magnet installation height calibration device has the following beneficial effects: the distance measuring piece can measure the distance between the distance measuring piece and the surface of the magnet at different positions by driving the distance measuring piece to move along the supporting piece by the sliding piece. After multiple measurements, multiple measurement data can be obtained, and the operator can adjust the installation height of the magnet according to the measurement data. By using the above device, the measurement error caused by manual metering is avoided, the measurement accuracy is improved, and the labor intensity of the operator is reduced. Since the calibration accuracy is improved, the installation accuracy of the magnet is also higher, thereby improving the coating quality. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 Fig. 1 shows a schematic view of the sliding piece, the fixing assembly, the handle and the display of the present application.

[0016] Figure 2 Fig. 2 shows a cross-sectional schematic view of the auxiliary magnet installation height calibration device of the present application.

[0017] ELEMENT NUMBER EXPLANATION

[0018] 1, distance measuring piece; 2, supporting rod; 21, guide part; 3, sliding body; 4, matching part; 5, handle; 6, locking bolt; 7, fixing piece; 8, display. DETAILED DESCRIPTION

[0019] The embodiments of the present application will be described in detail with specific examples. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in the specification. The present application can also be implemented or applied in different specific embodiments, and various modifications or changes can be made to the details in the specification without departing from the spirit of the present application.

[0020] Please refer to Figure 1 and Figure 2It should be noted that the drawings provided in the present embodiment only schematically illustrate the basic concept of the present application, and only the components related to the present application are shown in the drawings, rather than being drawn according to the number, shape and size of the components in actual implementation. The shape, number and proportion of each component in actual implementation can be arbitrarily changed, and the component layout pattern can also be more complex.

[0021] The present embodiment discloses an auxiliary calibration magnet installation height device, which is used for calibrating the horizontal installation height of a magnet in a PVD process, so as to ensure the accurate installation of the magnet.

[0022] The auxiliary calibration magnet installation height device comprises a support, a sliding member and a distance measuring member 1. The support is configured to be erected above the magnet, the sliding member is slidingly arranged on the support, and the distance measuring member 1 is connected to the sliding member and is configured to be directed towards one side of the magnet. The distance measuring member 1 is used to measure the distance between itself and the surface of the magnet.

[0023] When calibrating the horizontal installation height of the magnet using the above device, first, the support is erected above the magnet, then the sliding member is slid to stop at a set measurement position, and then the distance measuring member 1 is used to measure the distance between the distance measuring member 1 itself and the surface of the magnet. When one data is measured, the sliding member is slid to the next measurement position for measurement. After such multiple measurements, a plurality of measurement data can be obtained, and the operator can adjust the installation height of the magnet according to the measurement data. In the traditional way of measuring the installation height of the magnet, the operator first erects an aluminum rod above the magnet, and then measures with a vernier caliper. During the use of the caliper, the caliper needs to be kept perpendicular to the magnet and the aluminum rod, otherwise the measurement accuracy will be affected. Compared with the traditional way, by using the above device, the manual measurement method is avoided, not only the measurement error caused by manual measurement is avoided, the measurement accuracy is improved, but also the labor intensity of the operator is reduced. Since the calibration accuracy is improved, the installation accuracy of the magnet is also higher, thereby improving the coating quality in the coating process.

[0024] In the present embodiment, the support is of a split structure, and comprises two oppositely arranged support rods 2. One guide portion 21 is arranged on each of the two opposite side surfaces of the two support rods 2, and the guide portions 21 penetrate through the support rods 2 along the extension direction of the support rods 2. When calibrating the horizontal installation height of the magnet using the above device, the two support rods 2 are erected side by side and spaced apart above the magnet, and the sliding member is arranged between the two support rods 2 and slidingly inserted with the two guide portions 21. The two guide portions 21 support the sliding member on one hand, so that the sliding member can be erected above the magnet, and on the other hand, the two guide portions 21 guide the sliding of the sliding member, so that the sliding member accurately reciprocates along the two support rods 2.

[0025] In other embodiments, the support can be a one-piece structure, the support being a support rod 2, for example, the bottom surface of the support rod 2 is provided with a T-shaped groove or a dovetail groove, and the sliding member is provided with a T-shaped block or a dovetail block, and the sliding member is slidably inserted into the support rod 2 through the T-shaped block or the dovetail block, at this time, the sliding member is located below the support rod 2.

[0026] The support rod 2 is made of aluminum, which can reduce the weight of the support rod 2 and facilitate the operator to carry it, and also has good corrosion resistance, thereby prolonging the service life of the support rod 2.

[0027] In the embodiment, the sliding member includes a sliding body 3 and two matching parts 4, the two matching parts 4 are respectively arranged on both sides of the sliding body 3, and the two matching parts 4 respectively correspond to the two guide parts 21, and each matching part 4 is slidably inserted into the corresponding guide part 21. The guide part 21 can be a groove structure, and the matching part 4 can be a protruding mechanism; the groove structure can be a rectangular groove, a T-shaped groove or a dovetail groove, and the protruding mechanism can be a rectangular block, a T-shaped block or a dovetail block, and the shape of the groove structure and the protruding mechanism is not limited in the embodiment. Or the matching part 4 can be a groove structure, and the guide part 21 can be a protruding mechanism.

[0028] The distance measuring member 1 is arranged on the side of the sliding body 3 facing the magnet, and the sliding body 3 supports the distance measuring member 1, so that the distance measuring member 1 can be located above the magnet, and in addition, the sliding body 3 is used to drive the distance measuring member 1 to move between different measurement positions, so as to measure data at multiple measurement positions.

[0029] The side of the sliding body 3 facing the magnet is provided with a groove, and the distance measuring member 1 is embedded in the groove, the distance measuring member 1 can be a laser sensor, and the distance measuring member 1 measures the distance between itself and the surface of the magnet by emitting laser. The laser emitting position of the distance measuring member 1 is flush with the side of the sliding body 3 facing the magnet.

[0030] In order to facilitate the sliding of the sliding body 3 along the support, a handle 5 is arranged on the top surface of the sliding body 3, and the shape of the handle 5 is not limited. The operator pushes and pulls the handle 5 to drive the sliding body 3 to reciprocatingly slide along the support, thereby providing convenience for the operator.

[0031] In order to avoid the slippage of the sliding body 3 during the measurement of the distance measuring element 1, the sliding body 3 is provided with a fixing assembly, which comprises a locking bolt 6 and a fixing piece 7. The fixing piece 7 is located on the top surface of the sliding body 3, and the locking bolt 6 passes through one end of the fixing piece 7 and is connected with the sliding body 3. The fixing piece 7 is fixed to the sliding body 3 by the locking bolt 6. When the fixing piece 7 is fastened by the locking bolt 6, the other end of the fixing piece 7 protrudes out of the sliding body 3 and presses the top surface of the support piece. When the fixing piece 7 presses the support piece, the friction between the fixing piece 7 and the support piece is increased, so that the sliding body 3 is fixed at the set measurement position under the pressing action of the fixing piece 7. The shape of the fixing piece 7 includes but is not limited to a strip-shaped plate.

[0032] When the distance measuring element 1 completes the measurement at a measurement position, the sliding body 3 needs to take the data of the next position measurement. At this time, the locking bolt 6 is loosened, the sliding body 3 is moved to the next position, and then the locking bolt 6 is tightened again to make the fixing piece 7 press the support piece again.

[0033] The number of fixing assemblies can be two, four or more. In the embodiment, the number of fixing assemblies is two, and the two fixing assemblies are located on both sides of the sliding body 3, and the two fixing assemblies correspond to the two support rods 2 respectively. When the locking bolts 6 of the two fixing assemblies are tightened, the two fixing pieces 7 press the top surfaces of the corresponding support rods 2 respectively.

[0034] In order to facilitate the observation of the data measured by the distance measuring element 1, the sliding body 3 is also provided with a display 8, which is connected to the top surface of the sliding body 3. The display 8 is electrically connected with the distance measuring element 1. The data measured by the distance measuring element 1 can be transmitted to the display 8 and displayed on the display 8 for the operator to watch. The operator can adjust the installation height of the magnet according to the measured data. By setting the display 8, the operator can know the measurement result in time and adjust the magnet position according to the result. In other embodiments, the data of the distance measuring element 1 can also be transmitted to an external display device for display by wireless transmission.

[0035] In summary, the implementation process of the magnet installation height auxiliary calibration device is as follows: first, place the sliding body 3 between the two support rods 2, and make the matching parts 4 on both sides of the sliding body 3 respectively inserted and matched with the corresponding guide parts 21. Then, place the two support rods 2 and the sliding body 3 above the magnet. Then, push and pull the handle 5 to move the position of the sliding body 3, so that the sliding body 3 moves to the measurement position. At this time, adjust the position of the fixing part 7, so that one end of the fixing part 7 abuts against the top surface of the corresponding support rod 2, and then tighten the locking bolt 6 to fasten the fixing part 7, so that the fixing part 7 presses the support rod 2, thereby achieving the purpose of fixing the sliding body 3. The distance measuring part 1 emits laser to measure, and sends the measured data to the display 8 for display, and the operator adjusts the magnet according to the measurement result. Therefore, the present application effectively overcomes the shortcomings in the prior art and has high industrial utilization value.

[0036] The above embodiment only illustrates the principle and effect of the present application, and is not used to limit the present application. Any person skilled in the art can modify or change the above embodiment without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought of the present application should be covered by the claims of the present application.

Claims

1. An auxiliary calibration magnet installation height device, characterized by, The application relates to a magnetometer, which comprises the following parts: a support configured to be arranged above a magnet; a sliding part arranged on the support and capable of sliding along the extension direction of the support; a fixing assembly connected to the sliding part, which is used to press the support to fix the sliding part when the sliding part slides to a measuring position; a distance measuring part arranged on the side of the sliding part facing the magnet, which is used to measure the distance between the distance measuring part and the magnet, and the distance measuring part moves with the sliding part to measure the distance at different measuring positions.

2. The auxiliary calibration magnet mounting height device of claim 1, wherein: The support comprises two oppositely arranged support rods, and each of the two opposite side faces of the two support rods is provided with a guide part; the sliding part is arranged between the two support rods and is in sliding connection with the two guide parts.

3. The auxiliary calibration magnet mounting height device of claim 2, wherein: The sliding part comprises a sliding body and two matching parts, and the two matching parts are arranged on the opposite sides of the sliding body and are in one-to-one correspondence with the two guide parts; the matching parts are in sliding connection with the corresponding guide parts.

4. The auxiliary calibration magnet mounting height device of claim 3, wherein: The guide parts are in the form of grooves, and the matching parts are in the form of protrusions.

5. The auxiliary calibration magnet mounting height device of claim 3, wherein: The guide parts are in the form of protrusions, and the matching parts are in the form of grooves.

6. The auxiliary calibration magnet mounting height device of claim 1, wherein: The side of the sliding part facing the magnet is provided with a groove for embedding the distance measuring part, and the signal emitting end of the distance measuring part is flush with the side of the sliding part facing the magnet.

7. The auxiliary calibration magnet mounting height device of claim 1, wherein: The fixing assembly comprises a locking bolt and a fixing part, the locking bolt is arranged in one end of the fixing part and connects the fixing part to the sliding part, and the other end of the fixing part presses the support.

8. The auxiliary calibration magnet mounting height device of claim 1, wherein: A handle is arranged on the sliding part, which is used to drive the sliding part to slide along the support.

9. The auxiliary calibration magnet mounting height device of claim 1, wherein: A display is arranged on the sliding part, which is electrically connected to the distance measuring part and is used to receive and display the measuring result.

10. The auxiliary calibration magnet mounting height device of claim 1, wherein: The support is made of aluminum.

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