Drop spraying device of evaporation vessel

Abstract

The utility model relates to the technical field of evaporation dishes, and discloses an evaporation dish dripping device which comprises an evaporation dish body, supporting frames are arranged at the two ends of the surface of the upper end of the evaporation dish body, mounting blocks are rotatably arranged at the upper ends of the supporting frames, limiting shafts are arranged on the surfaces of the lower ends of the mounting blocks, and the mounting blocks are rotatably connected with the supporting frames through the limiting shafts. An L-shaped pipeline is arranged on the mounting block, a dripping head is arranged at the front end of the lower end surface of the L-shaped pipeline, and a driving adjusting assembly is arranged on one side of the evaporation vessel main body. According to the dripping device of the evaporation vessel, the mounting block and the limiting shaft are arranged, so that the L-shaped pipeline can be effectively limited and supported, the L-shaped pipeline can rotate, the position of the dripping head can be rotationally adjusted by matching with the driving adjusting assembly and the L-shaped pipeline, and it is guaranteed that liquid can be accurately dripped to the required position.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of evaporation boat, concretely is a kind of dripping device of evaporation boat. BACKGROUND

[0002] Evaporation boat, also known as evaporation dish, is an important component in vacuum evaporation equipment. Its main function is to load plating materials. Under vacuum conditions, the plating materials are vaporized and flown to the substrate surface by heating evaporation, and finally condensed into a film.

[0003] In special application scenarios, evaporation boat needs a certain form of dripping device to assist the plating process. The dripping device drips solvents, reactants or additives into the evaporation boat in a controllable manner to change the properties, evaporation rate or plating process of the plating materials. However, the position of the existing dripping device is generally fixed, which causes the position of the liquid dropped into the evaporation dish to be fixed, and cannot guarantee that the liquid can be accurately dropped to the required position, resulting in poor use effect. Therefore, a dripping device for evaporation boat is needed to solve the above problems. SUMMARY

[0004] In view of the deficiencies of the prior art, the utility model provides a dripping device for evaporation boat, which solves the problems mentioned in the background.

[0005] The utility model provides the following technical scheme: a dripping device for evaporation boat, comprising an evaporation boat body, support frames are arranged at both ends of the upper surface of the evaporation boat body, an installation block is rotatably arranged on the upper end of the support frame, an L-shaped pipeline is arranged on the installation block, a dripping head is arranged at the front end of the lower end surface of the L-shaped pipeline, and a driving adjustment assembly is arranged on one side of the evaporation boat body.

[0006] The driving adjustment assembly comprises a bidirectional screw, which is rotatably arranged inside the evaporation chamber and below the L-shaped pipeline.

[0007] Preferably, the L-shaped pipeline is provided with a connector at the end, and a flexible pipe is connected to the end of the L-shaped pipeline through the connector.

[0008] Preferably, the end of the flexible pipe away from the connector penetrates through the side wall of the evaporation chamber and is connected to a liquid supply device outside.

[0009] Preferably, an axle hole is formed in the center of the upper wall of the support frame, a limiting shaft is arranged on the lower end surface of the installation block, and the installation block is rotatably connected to the support frame through the limiting shaft.

[0010] Preferably, the driving adjusting assembly further comprises a driving motor, a limiting seat and a driving block, the limiting seat is arranged at one end of the bidirectional screw rod, the end of the bidirectional screw rod is rotatably connected with the inner wall of the evaporation chamber through the limiting seat, and the end of the bidirectional screw rod is fixedly connected with the output end of the driving motor through the side wall of the evaporation chamber.

[0011] Preferably, the threads arranged at the two ends of the bidirectional screw rod are opposite in direction, and the driving block is provided with two driving blocks which are both threadedly connected with the bidirectional screw rod.

[0012] Preferably, the upper end surfaces of the two driving blocks are rotatably provided with rotating shafts, and the upper ends of the rotating shafts are provided with shaft sleeves.

[0013] Preferably, the shaft sleeves are slidably sleeved on the outer surfaces of the L-shaped pipes, and the L-shaped pipes are rotatably connected with the driving blocks through the rotating shafts at the lower ends of the shaft sleeves.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] 1. The dripping device of the evaporation dish, through the driving adjusting assembly, the bidirectional screw rod is driven to rotate through the working of the driving motor, under the limiting action of the L-shaped pipes, the two driving blocks move along the bidirectional screw rod to approach or move away from each other, the shaft sleeves provide the inward thrust or outward pull to the one end of the close connection head of the two L-shaped pipes during the approaching of the two driving blocks, the shaft sleeves provide the outward pull to the one end of the close connection head of the two L-shaped pipes during the moving away of the two driving blocks, and under the limiting action of the limiting shaft, the position of the dripping head of the L-shaped pipe can be adjusted, so that the liquid can be accurately added to the required position.

[0016] 2. The dripping device of the evaporation dish, through the installation block and the limiting shaft, the L-shaped pipe can be effectively limited and supported, and the L-shaped pipe can be rotatable. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a whole structure schematic view of the dripping device of the evaporation dish of the utility model;

[0018] Figure 2 It is a structure schematic view of the main body and the support frame of the evaporation dish of the utility model;

[0019] Figure 3 It is a structure schematic view of the driving adjusting assembly of the utility model;

[0020] Figure 4 It is an installation structure schematic view of the limiting shaft of the utility model;

[0021] Figure 5 It is an installation structure schematic view of the rotating shaft of the utility model.

[0022] In the figure: 1, evaporation boat main body; 2, support frame; 201, shaft hole; 3, mounting block; 4, limiting shaft; 5, L-shaped pipeline; 501, drip head; 502, connecting head; 503, hose; 6, drive adjusting assembly; 601, drive motor; 602, bidirectional screw; 603, limiting seat; 604, drive block; 605, rotating shaft; 606, shaft sleeve. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0024] Please refer to Figures 1-5 A drip device of an evaporation boat, comprising an evaporation boat main body 1, support frames 2 are arranged at both ends of the upper end surface of the evaporation boat main body 1, mounting blocks 3 are rotatably arranged at the upper ends of the support frames 2, L-shaped pipelines 5 are arranged on the mounting blocks 3, drip heads 501 are arranged at the front ends of the lower end surfaces of the L-shaped pipelines 5, and drive adjusting assemblies 6 are arranged on one side of the evaporation boat main body 1.

[0025] The drive adjusting assembly 6 comprises a bidirectional screw 602, which is rotatably arranged inside an evaporation chamber and below the L-shaped pipeline 5.

[0026] Among them; the L-shaped pipeline 5 is provided with a connecting head 502 at the tail end, the L-shaped pipeline 5 is connected with a hose 503 through the connecting head 502, one end of the hose 503 away from the connecting head 502 penetrates through the side wall of the evaporation chamber and is connected with a liquid supply equipment outside, by being provided with the connecting head 502, the liquid inlet of the L-shaped pipeline 5 is connected with the hose 503, so that the liquid supply equipment outside can deliver liquid to the L-shaped pipeline 5 through the hose 503, and finally discharge through the drip head 501.

[0027] Among them; the support frame 2 is provided with a shaft hole 201 in the center of the upper wall, the mounting block 3 is provided with a limiting shaft 4 at the lower end surface, and the mounting block 3 is rotatably connected with the support frame 2 through the limiting shaft 4, by being provided with the mounting block 3 and the limiting shaft 4, the L-shaped pipeline 5 can be effectively limited and supported, so that the L-shaped pipeline 5 can rotate.

[0028] The driving adjusting assembly 6 further comprises a driving motor 601, a limiting seat 603 and a driving block 604. The limiting seat 603 is arranged at one end of the bidirectional screw rod 602. The end of the bidirectional screw rod 602 is rotatably connected with the inner wall of the evaporation chamber through the limiting seat 603. The end of the bidirectional screw rod 602 is fixedly connected with the output end of the driving motor 601 through the limiting seat 603. The threads arranged at the two ends of the bidirectional screw rod 602 are opposite in direction. The driving block 604 is provided with two driving blocks 604, which are threadedly connected with the bidirectional screw rod 602. The evaporation boat body 1 is fixed in the evaporation chamber. Through the working of the driving motor 601, the bidirectional screw rod 602 can be effectively driven to rotate. Under the limiting action of the L-shaped pipeline 5, the two driving blocks 604 move along the bidirectional screw rod 602 to approach or move away from each other. Through the shaft sleeve 606, the two L-shaped pipelines 5 are pushed inward or pulled outward at the one end of the close joint 502 during the approaching of the two driving blocks 604. Through the shaft sleeve 606, the two L-shaped pipelines 5 are pulled outward at the one end of the close joint 502 during the moving away of the two driving blocks 604. Under the limiting action of the limiting shaft 4, the L-shaped pipeline 5 can be rotated to adjust the position of the drip head 501, so that the liquid can be accurately dropped to the required position.

[0029] The upper end surface of each of the two driving blocks 604 is rotatably provided with a rotating shaft 605. The upper end of the rotating shaft 605 is provided with a shaft sleeve 606. The shaft sleeve 606 is slidably sleeved on the outer surface of the L-shaped pipeline 5. The L-shaped pipeline 5 is rotatably connected with the driving block 604 through the rotating shaft 605 at the lower end of the shaft sleeve 606. Through the rotating shaft 605 and the shaft sleeve 606, when the two driving blocks 604 move, the rotating shaft 605 rotates to make the shaft sleeve 606 slide along the L-shaped pipeline 5.

[0030] The working principle is that the evaporation boat body 1 is fixed in the evaporation chamber. The liquid inlet of the L-shaped pipeline 5 is connected with the hose 503 through the close joint 502, so that the external liquid supply device can deliver the liquid to the L-shaped pipeline 5 through the hose 503, and finally discharge the liquid through the drip head 501. The mounting block 3 and the limiting shaft 4 can effectively limit and support the L-shaped pipeline 5, so that the L-shaped pipeline 5 can be rotated.

[0031] Further, by driving the motor 601 to work, the bidirectional screw rod 602 can be effectively driven to rotate, and under the limiting action of the L-shaped pipeline 5, the two driving blocks 604 can move along the bidirectional screw rod 602 to approach or move away from each other, and in the process of the two driving blocks 604 approaching each other, the shaft sleeve 606 can provide an inward thrust or an outward pull to the end of the L-shaped pipeline 5 close to the connecting head 502, and in the process of the two driving blocks 604 moving away from each other, the shaft sleeve 606 can provide an outward pull to the end of the L-shaped pipeline 5 close to the connecting head 502, and under the limiting action of the limiting shaft 4, the L-shaped pipeline 5 can be rotated to adjust the position of the drip head 501, so that the liquid can be accurately dripped to the required position.

[0032] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A dripping device of an evaporation boat comprising an evaporation boat main body (1), characterized by, The both ends of upper surface of the evaporation boat body (1) are provided with support frame (2), the upper end of support frame (2) is rotatably provided with mounting block (3), the mounting block (3) is provided with L-shaped pipeline (5), the lower end surface of L-shaped pipeline (5) is provided with drip head (501) in front end, one side of evaporation boat body (1) is provided with driving adjustment assembly (6). The driving adjustment assembly (6) comprises a bidirectional screw rod (602), the bidirectional screw rod (602) is rotatably arranged in the evaporation chamber and below the L-shaped pipeline (5).

2. The drop-on-demand device of claim 1, wherein: The L-shaped pipeline (5) is provided with a connector (502) at the end, and a hose (503) is connected to the end of the L-shaped pipeline (5) through the connector (502).

3. The drop-on-demand device of claim 2, wherein the drop-on-demand device is a thermal drop-on-demand device. The end of the hose (503) away from the connector (502) penetrates through the side wall of the evaporation chamber and is connected with the external liquid supply equipment.

4. The drop-on-demand device of claim 1, wherein the drop-on-demand device is a thermal drop-on-demand device. The upper wall of the support frame (2) is provided with an axle hole (201) in the center, the lower end surface of the mounting block (3) is provided with a limiting shaft (4), and the mounting block (3) is rotatably connected with the support frame (2) through the limiting shaft (4).

5. The drop-on-demand device of claim 1, wherein: The driving adjustment assembly (6) further comprises a driving motor (601), a limiting seat (603) and a driving block (604), the limiting seat (603) is arranged at one end of the bidirectional screw rod (602), the end of the bidirectional screw rod (602) is rotatably connected with the inner wall of the evaporation chamber through the limiting seat (603), and one end of the bidirectional screw rod (602) penetrates through the side wall of the evaporation chamber and is fixedly connected with the output end of the driving motor (601).

6. The drop-on-demand device of claim 5, wherein the heater is a resistive heater. The threads in the two ends of the bidirectional screw rod (602) are opposite in direction, the driving block (604) is provided with two, and the two driving blocks (604) are threadedly connected with the bidirectional screw rod (602).

7. A drop-on-demand device for an evaporation boat according to claim 6, wherein The upper end surface of the two driving blocks (604) is rotatably provided with a rotating shaft (605), and the upper end of the rotating shaft (605) is provided with a shaft sleeve (606).

8. The drop-on-demand device of claim 7, wherein the heater is a resistive heater. The shaft sleeve (606) is slidably sleeved on the outer surface of the L-shaped pipeline (5), and the L-shaped pipeline (5) is rotatably connected with the driving block (604) through the rotating shaft (605) at the lower end of the shaft sleeve (606).

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