Positioning clamp for coating machine

Abstract

The utility model discloses a positioning clamp for a coating machine, and belongs to the technical field of coating machines. The positioning clamp for the coating machine comprises a base installed in the coating machine, a supporting plate is fixed to the upper end of the base, and a three-jaw chuck capable of rotating is arranged on the supporting plate and used for clamping a cylindrical workpiece; a sliding plate capable of being adjusted in a sliding mode is arranged on the base, and the sliding direction is parallel to the axial direction of the cylindrical workpiece. Two clamping plates capable of synchronously and reversely sliding are arranged on the base, the sliding direction is perpendicular to the sliding direction of the sliding plate, the rectangular workpiece can be centered and clamped, and one side of the rectangular workpiece makes contact with the sliding plate for limiting. Therefore, the positioning clamp can be suitable for positioning and fixing various workpieces so as to ensure the coating quality.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of coating machine, specifically relates to a positioning fixture for coating machine. BACKGROUND

[0002] The coating machine is a kind of equipment widely used in optics, semiconductor, precision engineering and other fields, its main function is to deposit a layer of film on the surface of various substrates, and the film can be metal, alloy, compound or other materials, for changing the optical properties, corrosion resistance, wear resistance of substrate etc.The common coating machine includes vacuum ion evaporation coating machine, magnetron sputtering coating machine etc., by electron beam or ion beam bombardment target material, and make target surface material deposition on the surface of workpiece to be plated film;

[0003] If the workpiece position is unstable and moves randomly when coating, then affect the coating quality;Therefore, the workpiece needs to be clamped and positioned, and therefore a positioning fixture for coating machine is proposed. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of prior art, the utility model aims at providing a positioning fixture for coating machine, to solve the problems in prior art.

[0005] The utility model can be realized by the following technical scheme:

[0006] A positioning fixture for coating machine, including the base installed in the coating machine, the support plate is fixed on the upper end of base, the three-jaw chuck that can rotate is set up on the support plate, to clamp cylindrical workpiece;

[0007] The sliding plate that can slide and adjust is set up on the base, and the sliding direction is parallel to the axial direction of cylindrical workpiece;Two clamping plates that can slide reversely synchronously are set up on the base, and the sliding direction is perpendicular to the sliding direction of sliding plate, and can clamp and center rectangular workpiece, and one side of rectangular workpiece is in contact with sliding plate and is limited. Thus, the positioning fixture can be suitable for the positioning and fixing of various workpieces, to ensure the coating quality.

[0008] Further, the top rod is rotatably connected to the sliding plate, and the top rod is coaxial with the cylindrical workpiece, and the end of the top rod can abut against the end face of the cylindrical workpiece.

[0009] Further, the end of the top rod is provided with a taper head to abut against the end face of the cylindrical workpiece.

[0010] Further, the sliding plate is slidably connected to the base, and the sliding direction is parallel to the axial direction of the cylindrical workpiece, and the base is provided with two first fixed plates at the lower end, and a first screw rod that can rotate is arranged between the two first fixed plates, and the first screw rod penetrates the sliding plate and is threadedly connected thereto.

[0011] Further, the thread angle of the first screw rod is less than the equivalent friction angle.

[0012] Further, the two clamping plates are slidably connected with the base, and the sliding directions are perpendicular to the sliding direction of the sliding plate; the base is provided with two second fixed plates at the lower end, a second screw rod capable of rotating is arranged between the two second fixed plates, the second screw rod is provided with a first external thread and a second external thread with opposite rotation directions and equal pitches at two ends respectively, and the first external thread and the second external thread pass through the two clamping plates and are threadedly connected with the two clamping plates.

[0013] Further, the thread angle of the first external thread and the second external thread is less than the equivalent friction angle.

[0014] Further, the base is provided with two air cylinders to drive the two clamping plates to slide synchronously and reversely.

[0015] Further, the base is provided with an air cylinder to directly drive the sliding plate to slide.

[0016] The beneficial effects of the utility model are as follows:

[0017] 1. The three-jaw chuck capable of rotating is arranged on the supporting plate to position and clamp the cylindrical workpiece, and the workpiece can rotate during coating to facilitate improving coating uniformity and quality; the clamping assembly is arranged to center and clamp the rectangular workpiece, and the contact limiting action of the sliding plate capable of sliding and adjusting is matched to realize positioning and fixing of the rectangular workpiece; so that the positioning clamp can be suitable for positioning and fixing various workpieces to ensure coating quality.

[0018] 2. The top rod capable of rotating is arranged on the sliding plate and coaxial with the cylindrical workpiece to support the cylindrical workpiece and avoid deformation caused by deflection of the cylindrical workpiece with too long length.

[0019] 3. After the rectangular workpiece is positioned and fixed, the sliding plate is controlled to move away from the rectangular workpiece to avoid interference of the sliding plate with the electron gun during coating. DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed in the embodiment or the prior art description will be briefly introduced as follows, and obviously, other drawings can be obtained by those skilled in the art without creative labor on the premise of not paying the creative labor.

[0021] Figure 1 It is the overall structure schematic view of the positioning clamp of the utility model;

[0022] Figure 2It is the ejector rod assembly structure schematic diagram of the utility model;

[0023] Figure 3 It is the clamping assembly structure schematic diagram of the utility model;

[0024] Figure 4 It is the second screw structure schematic diagram of the utility model. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be apparently and completely described in combination with the drawings in the embodiments of the utility model, and apparently, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor belong to the range protected by the utility model.

[0026] As Figure 1 Indicated, a kind of positioning fixture for coating machine, including the base 1 installed in coating machine, the upper end of base 1 is fixed with support plate 2, support plate 2 is provided with the three-jaw chuck 3 of being able to rotate, three-jaw chuck 3 can be clamped and positioned to cylindrical workpiece, to facilitate coating machine to carry out coating, and by controlling three-jaw chuck 3 drives cylindrical workpiece rotation, can help to improve the uniformity and sufficiency of coating;

[0027] In the embodiment, motor is provided on support plate 2 to drive three-jaw chuck 3 rotation, in turn to control cylindrical workpiece rotation.

[0028] Base 1 is provided with ejector rod assembly 4, as Figure 2 Indicated, ejector rod assembly 4 includes the sliding plate 41 that can be axially adjusted along cylindrical workpiece, sliding plate 41 is rotationally connected with ejector rod 42, and ejector rod 42 is coaxial with cylindrical workpiece;The end of ejector rod 42 is provided with taper head, by moving and adjusting sliding plate 41, the taper head of the end of ejector rod 42 can be tightly closed to the end surface of cylindrical workpiece, to play the supporting role to cylindrical workpiece, avoid the deflection of cylindrical workpiece length too long and cause deformation;

[0029] In the embodiment, sliding plate 41 is slidably connected with base 1, and the sliding direction is parallel with the axial direction of cylindrical workpiece, and ejector rod assembly 4 further includes two first fixed plates 43 fixed at the lower end of base 1, first screw rod 44 is rotationally connected between the two first fixed plates 43, first screw rod 44 penetrates the lower end of sliding plate 41 and is screw-connected with it, by being provided with motor on one of first fixed plate 43, the sliding position of sliding plate 41 can be adjusted;

[0030] And, in order to ensure the stability of the pressing force of the ejector rod 42 on the cylindrical workpiece, the first screw rod 44 needs to have self-locking property, that is, the thread angle of the first screw rod 44 is smaller than the equivalent friction angle.

[0031] Of course, the mode for driving the sliding plate 41 to slide for adjustment includes but is not limited to the structure of the first screw rod 44 in the embodiment, and in some embodiments, a hydraulic cylinder, a pneumatic cylinder or other linear driving component can be arranged on the upper end of the base 1 to directly drive the sliding plate 41 to slide for adjustment.

[0032] The base 1 is provided with a clamping assembly 5 to clamp the rectangular workpiece, so that the positioning fixture can be applied to workpieces of more types of structures;

[0033] As shown in Figure 3 , the clamping assembly 5 includes two clamping plates 51 capable of synchronous reverse sliding, and the sliding direction of the clamping plates 51 is perpendicular to the sliding direction of the sliding plate 41. The two clamping plates 51 are synchronously close to each other to clamp and fix the rectangular workpiece in the center, and cooperate with the contact limiting action of the sliding plate 41 to realize the positioning and fixing of the rectangular workpiece, and in turn ensure the stability of the position of the rectangular workpiece during the coating process and ensure the coating quality of the workpiece.

[0034] In use, first, one side of the rectangular workpiece is in contact with the sliding plate 41 for limiting, then the two clamping plates 51 are controlled to approach each other to clamp the rectangular workpiece, so as to realize the positioning and fixing of the rectangular workpiece. Then, before coating, the sliding plate 41 is controlled to move away from the rectangular workpiece (the two clamping plates 51 do not move to clamp the workpiece), so as to avoid the interference of the sliding plate 41 with the movement space of the electron gun during coating, thereby affecting the coating quality.

[0035] In the embodiment, the two clamping plates 51 are both in sliding connection with the base 1, and the sliding direction is perpendicular to the sliding direction of the sliding plate 41; the clamping assembly 5 further includes two second fixed plates 52 fixed at the lower end of the base 1, and the two second fixed plates 52 are rotatably connected with each other, as shown in Figure 4 , the second screw rod 53 is provided with a first external thread 531 and a second external thread 532 with opposite rotation directions and equal pitches at both ends, respectively, the first external thread 531 and the second external thread 532 penetrate through the two clamping plates 51 and are in threaded connection with the clamping plates 51, and a motor is arranged on one of the second fixed plates 52 to drive the second screw rod 53 to rotate, so as to realize the driving of the rotation of the second screw rod 53, thereby realizing the synchronous reverse sliding of the two clamping plates 51.

[0036] And, in order to ensure the stability of the clamping of the rectangular workpiece, the second screw rod 53 needs to have self-locking property, that is, the thread angle of the first external thread 531 and the second external thread 532 is smaller than the equivalent friction angle.

[0037] Of course, the mode of driving the two clamping plates 51 to slide synchronously and reversely includes but is not limited to the second screw rod 53 and the like in the embodiment, and in some embodiments, two cylinders can be arranged on the base 1 to drive the two clamping plates 51 to slide synchronously and reversely respectively.

[0038] Working principle:

[0039] The three-jaw chuck 3 arranged on the support plate 2 can be rotated to position and clamp the cylindrical workpiece, and can control the rotation of the workpiece during coating to facilitate improving the coating uniformity and the like; the clamping assembly 5 is arranged to center and clamp the rectangular workpiece, and the contact limiting action of the sliding plate 41 which can be adjusted by sliding is matched to realize the positioning and fixing of the rectangular workpiece; so that the positioning fixture can be suitable for the positioning and fixing of various workpieces to ensure the coating quality. The top rod 42 arranged on the sliding plate 41 can be rotated, and the top rod 42 is coaxial with the cylindrical workpiece to support the cylindrical workpiece, avoiding the deformation caused by the deflection of the cylindrical workpiece due to the excessive length. After the rectangular workpiece is positioned and fixed, the sliding plate 41 is controlled to move away from the rectangular workpiece, which can avoid the interference of the sliding plate 41 with the electron gun during coating.

[0040] In the description of the present specification, the description of the terms "one embodiment", "example", "specific example" and the like means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0041] The basic principles, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A positioning fixture for a coating machine, comprising a base (1) mounted in the coating machine, characterized in that, The base (1) is fixed with a support plate (2) at the upper end, and a three-jaw chuck (3) is arranged on the support plate (2) and can rotate to clamp the cylindrical workpiece; The base (1) is provided with a sliding plate (41) capable of sliding adjustment, and the sliding direction is parallel to the axial direction of the cylindrical workpiece; the base (1) is provided with two clamping plates (51) capable of synchronous reverse sliding, and the sliding direction is perpendicular to the sliding direction of the sliding plate (41), and the rectangular workpiece can be centered and clamped, and one side of the rectangular workpiece is in contact with the sliding plate (41) for limiting.

2. The positioning clamp for a coating machine according to claim 1, wherein The sliding plate (41) is rotatably connected with a top rod (42), and the top rod (42) is coaxial with the cylindrical workpiece, and the end of the top rod (42) can abut against the end face of the cylindrical workpiece.

3. The positioning fixture for a coating machine according to claim 2, wherein The end of the top rod (42) is provided with a tapered head to abut against the end face of the cylindrical workpiece.

4. The positioning fixture for a coating machine according to claim 1, wherein The sliding plate (41) is slidably connected with the base (1), and the sliding direction is parallel to the axial direction of the cylindrical workpiece, and the base (1) is provided with two first fixed plates (43) at the lower end, and a first screw rod (44) capable of rotating is arranged between the two first fixed plates (43), and the first screw rod (44) penetrates the sliding plate (41) and is threadedly connected therewith.

5. The positioning fixture for a coating machine according to claim 4, wherein The thread angle of the first screw rod (44) is smaller than the equivalent friction angle.

6. The positioning fixture for a coating machine according to claim 1, wherein The two clamping plates (51) are slidably connected with the base (1), and the sliding direction is perpendicular to the sliding direction of the sliding plate (41); the base (1) is provided with two second fixed plates (52) at the lower end, and a second screw rod (53) capable of rotating is arranged between the two second fixed plates (52), and the two ends of the second screw rod (53) are respectively provided with first external threads (531) and second external threads (532) with opposite rotation directions and equal pitches, and the first external threads (531) and the second external threads (532) penetrate the two clamping plates (51) and are threadedly connected therewith.

7. The positioning fixture for a coating machine according to claim 6, wherein The thread angle of the first external thread (531) and the second external thread (532) is smaller than the equivalent friction angle.

8. The positioning fixture for a coating machine according to claim 1, wherein Two air cylinders are arranged on the base (1) to drive the two clamping plates (51) to synchronously and reversely slide.

9. The positioning fixture for a coating machine according to claim 1, wherein An air cylinder is arranged on the base (1) to directly drive the sliding plate (41) to slide.

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