Heat insulation device and heat furnace

Abstract

The utility model belongs to the technical field of semiconductor technology, and discloses a heat insulation device and a heat furnace. The heat insulation device comprises a heat insulation piece and a flow uniformizing piece, a furnace door is connected to the end of the supporting paddle and used for sealing a furnace opening of the furnace tube, the heat insulation piece and the flow uniformizing piece are arranged at the end, close to the furnace door, of the supporting paddle, and the heat insulation piece is arranged close to the furnace door compared with the flow uniformizing piece. The heat insulation device is arranged between the boat and the furnace mouth of the furnace tube, the flow uniformizing piece is provided with a ventilation structure in a penetrating mode in the axis direction of the furnace tube, and airflow can penetrate through the flow uniformizing piece through the ventilation structure, so that the flow uniformizing piece can guide and adjust the airflow direction, especially the airflow direction located between the boat and the furnace mouth, and airflow accumulation on the upper portion in the furnace tube is reduced; and the phenomenon that the film forming quality is affected due to the fact that the gas amount in the area is too high is prevented, the in-sheet uniformity and the whole-pipe uniformity of film forming can be improved, and the defect of the white edge above the gas facing face of the head boat at the furnace mouth is overcome with low cost.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor technology, especially to a heat insulation device and a hot furnace. BACKGROUND

[0002] Vapor deposition is a kind of semiconductor process that deposits gas in a low pressure environment to process a substrate. In normal pressure, the movement rate of gas molecules is faster than the chemical reaction rate, and holes will be formed during film formation due to incomplete reaction, affecting the film formation quality. By vacuum pumping to make the furnace tube inside the hot furnace into low pressure, the movement rate of molecules is slower than the chemical reaction rate at appropriate temperature, which can improve the film formation quality.

[0003] However, in the existing semiconductor process, for example, in LPCVD (Low Pressure CVD), the film formation quality near the furnace port area of the furnace tube is lower than that of the remaining area inside the furnace tube, resulting in poor product quality.

[0004] Therefore, there is an urgent need for a heat insulation device and a hot furnace to solve the above technical problems. SUMMARY

[0005] The first purpose of the utility model is to provide a heat insulation device that can improve the film formation quality at the furnace port area of the furnace tube.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The heat insulation device is arranged on the support paddle, and the end of the support paddle is connected with a furnace door for closing the furnace port of the furnace tube. The heat insulation device includes a heat insulation member and a flow uniformizing member. The heat insulation member and the flow uniformizing member are arranged at the end of the support paddle close to the furnace door. The heat insulation member is arranged closer to the furnace door than the flow uniformizing member. The flow uniformizing member is provided with a ventilation structure penetrating along the axis direction of the furnace tube. The airflow can pass through the flow uniformizing member through the ventilation structure.

[0008] The heat insulation device has the following advantages: the ventilation structure is arranged penetrating along the axis direction of the furnace tube, and the airflow can pass through the flow uniformizing member through the ventilation structure, so that the flow uniformizing member can guide and adjust the airflow direction, especially the airflow direction between the boat and the furnace port. This reduces the airflow accumulation in the upper part of the furnace tube and prevents the phenomenon of excessive gas in this area affecting the film formation quality. It can improve the in-film uniformity and the whole-tube uniformity of the film formation, and improve the white edge defect above the furnace port first-boat air inlet surface at a low cost.

[0009] In some embodiments, a ventilation gap is formed between the flow uniformizing member and the inner wall of the furnace tube. The airflow can flow through the ventilation structure and the ventilation gap, further adjusting the airflow accumulation phenomenon in the upper part of the furnace tube.

[0010] In some embodiments, the flow uniformizing member comprises a flow uniformizing sheet, and the air passage structure comprises a through groove and / or a through hole, so as to facilitate the air flow to pass through the flow uniformizing sheet along the axial direction of the furnace tube.

[0011] In some embodiments, the flow uniformizing sheet is provided with a through groove, and the length direction of the through groove is arranged along the vertical direction, so as to facilitate the prevention of the accumulation of the upper air flow. Alternatively, the flow uniformizing sheet is provided with a plurality of through holes, and the plurality of through holes are arranged uniformly along the vertical direction and / or the horizontal direction, so as to facilitate the prevention of the accumulation of the upper air flow.

[0012] In some embodiments, the flow uniformizing member comprises a flow uniformizing sheet, and the flow uniformizing sheet is arranged perpendicularly to the axial direction of the furnace tube, so as to guide the air flow to flow along the flow uniformizing sheet between the upper and lower regions of the furnace tube.

[0013] In some embodiments, the heat insulation device further comprises a first base connected to the support paddle and located at the side of the heat insulation member away from the furnace door, and the first base is used for detachably mounting the flow uniformizing member.

[0014] In some embodiments, the first base is provided with a slot, and the flow uniformizing member is inserted and mounted in the slot, so as to further facilitate the replacement and maintenance of the flow uniformizing member in the plug-in mounting manner.

[0015] In some embodiments, the flow uniformizing member is provided with a relief gap for accommodating the first base, so as to prevent interference and further facilitate the replacement and maintenance of the flow uniformizing member.

[0016] In some embodiments, the heat insulation device further comprises a second base connected to the support paddle and abutting between the first base and the furnace door, and the second base is used for mounting the heat insulation member. The heat insulation member can play a heat insulation effect, improve the temperature drop in the lower temperature zone inside the furnace tube, and reduce the heat exchange between the upper and lower regions of the furnace tube.

[0017] In some embodiments, the heat insulation member comprises a complete heat insulation sheet having a closed surface capable of blocking the air flow, so as to achieve a good heat insulation effect.

[0018] The second object of the utility model is to provide a hot stove which can improve the film forming quality at the furnace port region of the furnace tube.

[0019] To achieve the object, the utility model adopts the following technical scheme:

[0020] The hot stove comprises a support paddle, a furnace tube, a furnace door and a heat insulation device. The support paddle can be inserted into the furnace tube from the furnace port of the furnace tube. The furnace door is connected to the end portion of the support paddle and is used for sealing the furnace port. The heat insulation device is arranged at the end portion of the support paddle close to the furnace door.

[0021] The hot furnace has the beneficial effects that: the air flow direction is guided and adjusted through the uniform flow member, especially the air flow direction between the boat and the furnace mouth, the air flow accumulation in the upper part of the furnace pipe is reduced, the phenomenon of excessive air volume in the region affecting the film forming quality is prevented, the in-film uniformity and the whole pipe uniformity of film forming are improved, and the white edge defect above the air inlet surface of the first boat is improved at a low cost. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is the first assembly view of the heat insulation device provided by the utility model;

[0023] Figure 2 is the structure view of the first uniform flow member provided by the utility model;

[0024] Figure 3 is the structure view of the second uniform flow member provided by the utility model;

[0025] Figure 4 is the structure view of the complete heat insulation sheet in the utility model;

[0026] Figure 5 is the structure view of the first base in the utility model.

[0027] In the drawings:

[0028] 1, furnace door; 2, heat insulation member; 3, uniform flow member; 31, through hole; 32, through slot; 33, avoiding notch; 4, second base; 5, first base; 51, insertion slot; 6, supporting paddle. DETAILED DESCRIPTION

[0029] The utility model will be further described in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0030] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0031] In the utility model, unless another definite provision and limitation, first feature is "on" or "under" second feature, can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them.Moreover, first feature "on", "above" and "upper surface of" second feature includes that first feature is directly above and obliquely above second feature, or only indicates that first feature is higher than second feature in horizontal height.

[0032] In the description of the embodiment, the terms "upper", "lower", "right", "left" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model.In addition, the terms "first", "second" are only used to distinguish in description, and have no special meaning.

[0033] According to the drawings Figure 1 to the drawings Figure 5 The utility model provides a heat insulation device and a hot furnace.

[0034] As Figure 1 shown, in the embodiment, the heat insulation device is arranged on the support paddle 6, comprising a heat insulation piece 2 and a flow uniformizing piece 3.The support paddle 6 is used to carry the boat, so as to realize the position movement of the boat, so that the boat can carry the sheet into the furnace tube of the hot furnace for corresponding process treatment.The furnace door 1 is connected to the end of the support paddle 6, when the support paddle 6 carries the boat into the furnace tube, the furnace door 1 can be sealed and arranged at the furnace port of the furnace tube.When the furnace tube is sealed, the air pressure in the furnace tube can be reduced by the way of air extraction, to meet the condition of implementing the LPCVD process.

[0035] The heat insulation piece 2 and the flow uniformizing piece 3 are arranged at the end of the support paddle 6 close to the furnace door 1, and the heat insulation piece 2 is arranged closer to the furnace door 1 than the flow uniformizing piece 3.The flow uniformizing piece 3 is arranged between the boat and the furnace port of the furnace tube, and is arranged through the air passage structure along the axial direction (such as X-axis shown in the figure) of the furnace tube, and the airflow can flow through the air passage structure.As shown in the figure, the heat insulation piece 2 comprises a complete heat insulation sheet, the complete heat insulation sheet is arranged along the cross section of the furnace tube, has a closed surface capable of blocking heat, and is not arranged with a hole or a slot and other through structures, so as to reduce the airflow flowing to the furnace door 1 along the axial direction of the furnace tube (that is, the length direction of the support paddle 6), improve the temperature drop of the lower temperature zone inside the furnace tube, and reduce the heat exchange between the upper and lower regions of the furnace tube. Figure 1 Figure 4

[0036] ​​The air passage structure is provided through the flow uniformizing piece 3 along the axial direction of the furnace tube, and the hot air flow can pass through the flow uniformizing piece 3 through the air passage structure, so that the flow uniformizing piece 3 can guide and adjust the air flow direction, especially the air flow direction between the boat and the furnace mouth, reduce the air flow accumulation in the upper part of the furnace tube, prevent the phenomenon that the air amount in the region is too high to affect the film forming quality, and can be beneficial to improve the in-film uniformity and the whole tube uniformity of film forming, and improve the white edge defect above the air inlet surface of the furnace mouth first boat (i.e. the boat closest to the furnace mouth) at a lower cost.

[0037] Specifically, in the embodiment, the flow uniformizing piece 3 includes a flow uniformizing piece, and the air passage structure includes a through hole 31 and / or a through groove 32 and the like through structure. As shown in Figure 1 、 Figure 2 The first flow uniformizing piece provided by the utility model can be arranged between the heat insulation piece 2 and the boat perpendicularly to the axial direction of the furnace tube, and is installed on the support paddle 6, so as to enter and exit the furnace tube along with the support paddle 6. A plurality of circular through holes are arranged on the flow uniformizing piece, and the air flow can flow through the flow uniformizing piece through the circular through holes. Preferably, the plurality of circular through holes are arranged uniformly in the vertical direction and the horizontal direction, and the air flow can conveniently flow from the upper region to the lower region, so as to be beneficial to alleviate the phenomenon of air flow accumulation in the upper part of the furnace tube.

[0038] As shown in Figure 3 The second flow uniformizing piece is also arranged between the heat insulation piece 2 and the boat perpendicularly to the axial direction of the furnace tube, and is installed on the support paddle 6, so as to enter and exit the furnace tube along with the support paddle 6. A plurality of through grooves 32 are arranged on the flow uniformizing piece, and the air flow can flow through the flow uniformizing piece through the through grooves 32. Preferably, the length direction of the through groove 32 is arranged in the vertical direction, and the air flow can conveniently flow from the upper region to the lower region, so as to be beneficial to alleviate the phenomenon of air flow accumulation in the upper part of the furnace tube. Of course, in some embodiments, the length direction of the through groove 32 can also be arranged in the horizontal direction or other directions, which is not limited in the utility model.

[0039] In some embodiments, according to the needs of the flow uniformizing effect, the through hole 31 and the through groove 32 can also be arranged on the flow uniformizing piece at the same time, or the flow uniformizing piece with the through hole 31 and the flow uniformizing piece with the through groove 32 can also be arranged at the same time. It can be understood that compared with the through hole 31, the air flow passes through the through groove 32 with smaller resistance, so that the through groove 32 can be arranged on the upper part of the flow uniformizing piece, and the through hole 31 can be arranged on the lower part of the flow uniformizing piece, which is further beneficial to the air flow in the upper part of the furnace tube, and can better prevent the air flow accumulation in the upper part.

[0040] Of course, in addition to the above-mentioned ventilation structure, according to the need for uniform flow effect, a ventilation gap can also be formed between the uniform flow sheet and the inner wall of the furnace tube, so that the gas flow can flow through the ventilation structure and the ventilation gap at the same time, thereby further adjusting the gas flow accumulation phenomenon in the upper part of the furnace tube.

[0041] As shown in Figure 1 , Figure 5 In the embodiment, the support paddle 6 is connected with the first base 5, the first base 5 is used for detachably mounting the uniform flow sheet, and the first base 5 is arranged on the side of the heat insulation member 2 away from the furnace door 1. Specifically, the first base 5 is provided with a slot 51, the uniform flow sheet is arranged perpendicularly to the axis direction of the furnace tube and is inserted and mounted in the slot 51, and the uniform flow sheet can be conveniently plugged in and pulled out when maintenance or replacement is needed, and the gas flow is guided to flow along the uniform flow sheet between the upper and lower regions of the furnace tube.

[0042] Optionally, the bottom of the uniform flow sheet is further provided with a avoiding gap 33 for accommodating the first base 5, thereby reducing the installation difficulty of the uniform flow sheet and further facilitating the plugging and pulling operation of the uniform flow sheet.

[0043] Similarly, the support paddle 6 is also connected with the second base 4, and the second base 4 is used for detachably mounting the complete heat insulation sheet. As shown in Figure 1 , the second base 4 is arranged adjacent to the furnace door 1, and the second base 4 is provided with a slot 51, and the complete heat insulation sheet can also be inserted and mounted in the slot 51 and can be conveniently plugged in and pulled out when maintenance or replacement is needed. Optionally, the complete heat insulation sheet is also provided with an avoiding gap 33, and can also be conveniently plugged in and pulled out.

[0044] It should be emphasized that the number and spacing of the complete heat insulation sheet and the uniform flow sheet are limited by process requirements and the structure of the furnace tube, so the present application does not make specific limitations.

[0045] Exemplarily, in the embodiments provided by the present application, 10 uniform flow sheets are equidistantly mounted on the first base 5, and 10 complete heat insulation sheets are equidistantly mounted on the second base 4, and the uniform flow sheets and the complete heat insulation sheets are arranged at a spacing of 1.8 cm. The length of the first base 5 and the second base 4 along the axis direction of the furnace tube is 26 cm, and the furnace door 1, the second base 4 and the first base 5 abut in turn.

[0046] In use, the first base 5 and the uniform flow sheet are arranged on the existing support paddle 6, and the first base 5 and the original second base 4 are placed in close contact. After the first base 5 and the uniform flow sheet are placed, the support paddle 6 is pushed into the furnace tube, and the furnace door 1 is closed and covered on the furnace opening, so that the corresponding process treatment can be carried out.

[0047] The following uses the statistical results of the comparative test to illustrate the improvement effect of the two kinds of uniform flow sheets on the amorphous silicon film thickness.

[0048]

[0049] Table 1, control example using only complete heat insulation sheets

[0050]

[0051] Table 2, embodiment using complete heat insulation sheets and the first kind of uniform flow sheet (with through holes 31)

[0052]

[0053] Table 3, embodiment using complete heat insulation sheets and the second kind of uniform flow sheet (with through grooves 32)

[0054] It should be noted that in the above table 1, table 2, table 3, the first column B1 to B12 is the serial number of the sheet, that is, 12 sheets are processed in the process of the comparative test. The first row 1, 2, 3, 4, 5 respectively refer to 5 different measurement positions on the sheet, for example, in table 3, the first measurement position of B1 sheet, the film thickness is 224.4, the second measurement position, the film thickness is 232.2. The ave column is the average value of the film thickness measured at the five different measurement positions, the sheet uniformity is the statistical value of the fluctuation degree of the film thickness measured at the five different measurement positions on the sheet (variance, standard deviation, etc. can be used), and the whole tube uniformity is the statistical value of the fluctuation degree of the average film thickness of B1 to B12 (variance, standard deviation, etc. can be used). According to the results of table 1, table 2, table 3, it can be known that the first kind of uniform flow sheet and the second kind of uniform flow sheet are added, which has better effect on improving the sheet uniformity and the whole tube uniformity.

[0055] The utility model also provides a kind of hot furnace, the hot furnace includes support paddle 6, furnace tube, furnace door and above-mentioned heat insulation device, support paddle 6 can be inserted in furnace tube from the furnace mouth of furnace tube, furnace door 1 is connected to the end of support paddle 6 and is used to seal furnace mouth, heat insulation device is set to the end of support paddle 6 close to furnace door 1.The heat insulation device includes uniform flow piece 3, can guide and adjust airflow direction, especially the airflow direction between boat and furnace mouth, reduce the airflow accumulation in upper portion of furnace tube, prevent the phenomenon that gas amount in this area is too high, affect film forming quality, can be beneficial to improve the sheet uniformity and the whole tube uniformity of film forming, with lower cost to improve the white edge defect above the gas-facing surface of furnace mouth first boat.

[0056] In the description of the specification, the description referring to the terms "some embodiments", "other embodiments", etc. means that the particular feature, structure, material or characteristic being described is included in at least one embodiment or example of the present application. The illustrative appearance of the above-mentioned terms in various places in the specification are not necessarily referring to the same embodiment or example. Moreover, the particular features, structures, materials or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0057] Obviously, the above embodiments of the present application are merely exemplary and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the scope of the present application. Here, it is not necessary and impossible to exhaust all the embodiments. Any modification, equivalent substitution and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A heat insulating device provided on a support paddle, an end portion of the support paddle being connected to a furnace door for closing a furnace opening of a furnace tube, characterized by, The heat insulation device comprises a heat insulation member and a flow uniformizing member, the heat insulation member and the flow uniformizing member are arranged at the end of the support paddle close to the furnace door, the heat insulation member is arranged closer to the furnace door than the flow uniformizing member, and the flow uniformizing member is provided with a ventilation structure penetrating along the axial direction of the furnace tube, and the airflow can pass through the flow uniformizing member through the ventilation structure.

2. The heat insulation device according to claim 1, wherein The ventilation gap is formed between the flow uniformizing member and the inner wall of the furnace tube, and the airflow can flow through the ventilation structure and the ventilation gap.

3. The heat insulation device according to claim 1 or 2, wherein The flow uniformizing member comprises a flow uniformizing sheet, and the ventilation structure comprises a through groove and / or a through hole.

4. The heat insulation device according to claim 3, wherein The through groove is arranged on the flow uniformizing sheet, and the length direction of the through groove is arranged in the vertical direction; or A plurality of through holes are arranged on the flow uniformizing sheet, and the plurality of through holes are arranged uniformly in the vertical direction and / or the horizontal direction.

5. The heat insulation device according to claim 1, wherein The flow uniformizing member comprises a flow uniformizing sheet, and the flow uniformizing sheet is arranged perpendicular to the axial direction of the furnace tube.

6. The heat insulation device according to claim 5, wherein Along the axial direction of the furnace tube, at least three flow uniformizing sheets are arranged at equal intervals.

7. The heat insulation device according to claim 1, wherein The heat insulation device further comprises a first base, the first base is connected to the support paddle and located on the side of the heat insulation member away from the furnace door, and the first base is used for detachably mounting the flow uniformizing member.

8. The heat insulation device according to claim 7, wherein The first base is provided with a slot, and the flow uniformizing member is inserted and mounted in the slot.

9. The heat insulation device according to claim 7, wherein The flow uniformizing member is provided with a avoiding gap for accommodating the first base.

10. The heat insulation device according to claim 7, wherein The heat insulation device further comprises a second base, the second base is connected to the support paddle and abuts between the first base and the furnace door, and the second base is used for mounting the heat insulation member.

11. The heat insulation device according to claim 1, wherein The heat insulation member comprises a complete heat insulation sheet, and the complete heat insulation sheet has a closed surface capable of blocking airflow.

12. A hot stove characterized by A support paddle, a furnace tube, a furnace door and a heat insulation device according to any one of claims 1-11 are provided, the support paddle can be inserted into the furnace tube from the furnace opening of the furnace tube, the furnace door is connected to the end of the support paddle and is used for sealing the furnace opening, and the heat insulation device is arranged at the end of the support paddle close to the furnace door.

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