Crucible rotating device and single crystal furnace

Abstract

The utility model discloses a crucible rotating device and a single crystal furnace, the crucible rotating device is used for the single crystal furnace, the crucible rotating device comprises a rotating shaft main body, a cavity extending in the axial direction of the rotating shaft main body is formed in the rotating shaft main body, one axial end of the rotating shaft main body is open, and the other axial end of the rotating shaft main body is closed and connected with a crucible of the single crystal furnace; the flow guide ring extends in the axial direction of the rotating shaft body, at least part of the flow guide ring is coaxially arranged in a cavity in the rotating shaft body, an outer cavity is formed between the outer wall of the flow guide ring and the inner wall of the cavity, an inner cavity is formed in the flow guide ring, and the ends, close to the crucible, of the outer cavity and the inner cavity communicate with each other; the ends, close to the crucible, of the outer cavity and the inner cavity are mutually communicated, the ends, away from the crucible, of the outer cavity and the inner cavity are mutually independent, one is an air inlet, and the other is an air outlet; and the fan is communicated with one end, far away from the crucible, of the outer cavity or the inner cavity. The crucible rotating device is simple in structure, convenient to operate, high in safety and reliability and low in cost.

Description

TECHNICAL FIELD

[0001] The present application relates to a single crystal furnace, in particular to a crucible rotating device and a single crystal furnace. BACKGROUND

[0002] The crucible is one of the important components of the single crystal furnace, in order to ensure better refining of crystalline silicon, the corresponding rotating device is usually required to drive the crucible to rotate according to the process parameter requirements, since the temperature is high during the working process of the single crystal furnace, the rotating device also needs to be cooled. However, the traditional crucible rotating device is cooled by water cooling, in order to seal, the crucible rotating shaft is connected with the cooling water pipe through the rotary joint, the structure is complex, the operation is inconvenient, and the rotary joint is easy to be damaged due to poor processing and other problems, and it is also easy to cause the risk of damaging the cooling water pipe due to silicon leakage, the safety and reliability are low, the cost is increased, and the increasing production demand cannot be met. CONTENT OF THE UTILITY MODEL

[0003] The purpose of the present application is to provide a crucible rotating device and a single crystal furnace, which is simple in structure, convenient to operate, high in safety and reliability, and low in cost.

[0004] In order to solve at least one of the above technical problems, the technical scheme of the present application is as follows:

[0005] According to the first aspect of the present application, a crucible rotating device for a single crystal furnace is provided, comprising: a rotating shaft body, an inner cavity extending along the axial direction of the rotating shaft body is formed in the rotating shaft body, one end of the rotating shaft body is open, the other end is closed and connected with the crucible of the single crystal furnace; a flow guide ring, the flow guide ring extends along the axial direction of the rotating shaft body and is at least partially coaxially arranged in the inner cavity of the rotating shaft body, an outer cavity is formed between the outer wall of the flow guide ring and the inner wall of the cavity, an inner cavity is formed in the flow guide ring, the end of the outer cavity and the inner cavity close to the crucible communicates with each other, the end of the outer cavity and the inner cavity far from the crucible is independent of each other and one of them is an air inlet and the other is an air outlet; a fan, the fan is communicated with the end of the outer cavity or the inner cavity far from the crucible.

[0006] In a possible implementation of the above first aspect, the end of the flow guide ring far from the crucible extends out of the rotating shaft body, a plurality of partition strips are arranged at the end of the outer cavity far from the crucible, the partition strips extend along the radial direction and one end is connected to the outer wall of the flow guide ring and the other end is connected to the inner wall of the rotating shaft body, the plurality of partition strips are uniformly distributed along the circumferential direction of the flow guide ring.

[0007] In a possible implementation of the above first aspect, the fan is sleeved on the outer periphery of the part of the flow guide ring extending out of the rotating shaft body and is communicated with the end of the outer cavity far from the crucible.

[0008] In a possible implementation of the first aspect, the fan comprises: an inner sleeve configured to be sleeved on an outer wall of the portion of the flow guide ring extending out of the main body of the rotating shaft, and the flow guide ring is coaxially connected to the inner sleeve; a plurality of blades arranged outside the inner sleeve and uniformly distributed along a circumferential direction of the inner sleeve; and a baffle surrounding each blade along the circumferential direction of the inner sleeve, each blade being located between the baffle and the inner sleeve, and a region between the baffle and the adjacent two blades being in communication with the outer cavity away from the crucible.

[0009] In a possible implementation of the first aspect, the crucible rotating device further comprises a magnetic fluid sealing device, which comprises: a magnetic conductive sleeve sleeved outside the main body of the rotating shaft; and an outer shell sleeved outside the magnetic conductive sleeve and rotationally connected to the magnetic conductive sleeve through a bearing, wherein a magnetic liquid for sealing is arranged between the outer shell and the magnetic conductive sleeve.

[0010] In a possible implementation of the first aspect, the magnetic liquid is arranged at an end of the magnetic fluid sealing device away from the fan, and a cooling channel is arranged inside the outer shell at a position adjacent to the magnetic liquid, the cooling channel surrounding the magnetic conductive sleeve along a circumferential direction of the magnetic conductive sleeve.

[0011] In a possible implementation of the first aspect, the magnetic liquid is arranged at an end of the magnetic fluid sealing device close to the fan.

[0012] According to a second aspect, a single crystal furnace is provided, which comprises a furnace body, a crucible rotating device, a drag rod assembly and a crucible arranged in the furnace body, wherein the crucible rotating device is the crucible rotating device of the first aspect, a closed end of the main body of the rotating shaft of the crucible rotating device forms a connecting hole recessed away from the crucible, one end of the drag rod assembly is accommodated in the connecting hole and connected to the main body of the rotating shaft, and the other end of the drag rod assembly is connected to the crucible; the connecting hole and the one end of the drag rod assembly are in matched inverted conical shapes.

[0013] In a possible implementation of the second aspect, the main body of the rotating shaft is connected to the main body of the rotating shaft through a locking piece, the locking piece penetrates a central axis of the drag rod assembly along an axial direction of the drag rod assembly and extends out of a bottom of the drag rod assembly to be connected to the main body of the rotating shaft.

[0014] In a possible implementation of the second aspect, a first threaded hole is arranged on the main body of the rotating shaft, a transition nut is threadedly connected in the first threaded hole, a second threaded hole for threadedly connecting the locking piece is arranged on the transition nut, and the transition nut is made of graphite.

[0015] In a possible implementation of the second aspect, the transition nut is provided with an operation hole, the operation hole is used for screwing the transition nut into the first threaded hole, the operation hole is coaxially arranged with the second threaded hole and located on the upper side of the second threaded hole, the operation hole is hexagonal in a cross section perpendicular to the axial direction, and the second threaded hole is a circle inscribed by the hexagon in the cross section perpendicular to the axial direction.

[0016] The above technical solutions of the present application have at least one of the following beneficial effects:

[0017] According to the crucible rotating device, the inside of the rotating shaft body is formed with a cavity extending along the axial direction of the rotating shaft body, one end of the rotating shaft body is open, the other end is closed and connected with the crucible of the single crystal furnace, the flow guide ring is coaxially arranged in the cavity inside the rotating shaft body and extends along the axial direction of the rotating shaft body, the outer wall of the flow guide ring and the inner wall of the cavity form an outer cavity, the inside of the flow guide ring forms an inner cavity, the one end of the outer cavity and the inner cavity close to the crucible communicates with each other, the one end of the outer cavity and the inner cavity close to the crucible communicates with each other, the one end of the outer cavity and the inner cavity away from the crucible is independent of each other and one of them is an air inlet and the other is an air outlet, the fan communicates with the one end of the outer cavity or the inner cavity away from the crucible, and the fan provides the power for the flow of the air flow, so that the gas outside the rotating shaft body enters through the air inlet and flows out from the air outlet, and the heat of the crucible rotating device is taken away by the external cold gas, thereby cooling the crucible rotating device. Thus, the crucible rotating device of the present application adopts the structure of air cooling, which eliminates the rotating joint and cooling water pipe of the traditional water cooling structure, has simple structure, convenient and fast operation, is not easy to cause damage to the corresponding parts, has high safety and reliability, reduces the cost, and can meet the increasingly high production demand.

[0018] In addition, according to the single crystal furnace, the above-mentioned crucible rotating device adopts the structure of air cooling, which eliminates the rotating joint and cooling water pipe of the traditional water cooling structure, has simple structure, convenient and fast operation, is not easy to cause damage to the corresponding parts, has high safety and reliability, reduces the cost, and can meet the increasingly high production demand.

[0019] In addition, in the technical solutions of the present application, if not specially stated, the technical solutions can be realized by using conventional means in the art. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creating any inventive work.

[0021] Figure 1 Structure diagram of a crucible rotating device according to an embodiment of the present application;

[0022] Figure 2 Structure diagram of a crucible rotating device according to an embodiment of the present application after removing the drag rod assembly;

[0023] Figure 3 Structure diagram of a rotating shaft body and a flow guide ring according to an embodiment of the present application;

[0024] Figure 4 Sectional view of a rotating shaft body and a flow guide ring according to an embodiment of the present application;

[0025] Figure 5 Structure diagram of a fan according to an embodiment of the present application;

[0026] Figure 6 Structure diagram of a transition nut according to an embodiment of the present application;

[0027] Figure 7 Sectional view of a magnetic fluid sealing device according to an embodiment of the present application;

[0028] Figure 8 Structure diagram of a magnetic fluid sealing device according to an embodiment of the present application.

[0029] Explanation of reference numerals in the drawings:

[0030] Rotating shaft body 100; outer cavity 101; partition strip 102; connecting hole 103; first threaded hole 104; shaft shoulder 105;

[0031] Flow guide ring 200; inner cavity 201;

[0032] Fan 300; inner sleeve 301; blade 302; baffle 303;

[0033] Drag rod assembly 400; connecting part 401;

[0034] Magnetic fluid sealing device 500; magnetically conductive sleeve 501; outer shell 502; magnetic liquid 503; bearing 504; connecting flange 505; dust collecting disc 506; cooling channel 507;

[0035] Locking member 600;

[0036] Transition nut 700; second threaded hole 701; operating hole 702. DETAILED DESCRIPTION

[0037] In order to make the purposes, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are part of the embodiments of the present application, rather than all the embodiments of the present application, and are only used to explain the present application, and do not limit the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0038] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inner", "outer", "two ends", "two sides", "bottom", "top" and the like indicate the orientation or positional relationship shown in the drawings, and are only used for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the elements referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "superior", "inferior", "primary", "secondary" and the like are only for descriptive purposes and can simply be used to more clearly distinguish different components, and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0040] Referring to Figures 1-8 As shown in the figure, a crucible rotating device provided by an embodiment of the present application is schematically shown, which is mainly used for driving the crucible to rotate in a single crystal furnace. The crucible rotating device of the present application can include a rotating shaft body 100 (i.e. a mandrel), a flow guide ring 200 and a fan 300.

[0041] The rotating shaft body 100 has a cavity extending along the axial direction of the rotating shaft body 100, the flow guide ring 200 extends along the axial direction of the cavity and is at least partially coaxially arranged in the cavity, one end of the rotating shaft body 100 is open, the other end of the rotating shaft body 100 is closed and used to be connected with the crucible of the single crystal furnace, an outer cavity 101 is formed between the flow guide ring 200 and the inner wall of the cavity, an inner cavity 201 is formed in the flow guide ring 200, the outer cavity 101 and the inner cavity 201 are communicated with each other at the end close to the crucible (the end away from the opening), the outer cavity 101 and the inner cavity 201 are independent of each other at the end away from the crucible (the end close to the opening) and one of them is used as an air inlet and the other is used as an air outlet, the fan 300 is arranged at the end of the rotating shaft body 100 away from the crucible (the end close to the opening) and is communicated with the outer cavity 101 or the inner cavity 201 at the end away from the crucible (the end close to the opening). The fan 300 can provide power for the flow of the gas flow, so that the external gas enters through the air inlet and flows out from the air outlet. For example, the end of the outer cavity 101 away from the crucible is used as the air inlet and the end of the inner cavity 201 away from the crucible is used as the air outlet, then the gas enters the outer cavity 101 from the end of the outer cavity 101 away from the crucible under the driving of the fan 300, then enters the inner cavity 201 close to the crucible from the end of the outer cavity 101 close to the crucible, then enters the inner cavity 201, and finally flows out from the end of the inner cavity 201 away from the crucible, thereby forming a gas flow in the rotating shaft body 100, and the heat of the crucible rotating device is taken away by the external cold gas, thereby cooling the crucible rotating device.

[0042] It should be noted that, as shown in Figures 1-2 , the rotating shaft body 100 is usually arranged along the vertical direction, and the rotating shaft body 100 can be made of stainless steel. The motor can be used to drive the rotating shaft body 100 to rotate through a gear mechanism, thereby driving the crucible to rotate.

[0043] As shown in Figure 1 , 4As shown, according to one embodiment of the present application, the fan 300 is in communication with the end of the outer cavity 101 away from the crucible, when the fan 300 rotates in the forward direction, the end of the outer cavity 101 away from the crucible is the air inlet, the airflow passes through the end of the outer cavity 101 away from the crucible, the outer cavity 101, the inner cavity 201 and the end of the inner cavity 201 away from the crucible in turn, and then flows out of the rotating shaft body 100, when the fan 300 rotates in the reverse direction, the end of the outer cavity 101 away from the crucible is the air outlet, the airflow passes through the end of the inner cavity 201 away from the crucible, the inner cavity 201, the outer cavity 101 and the end of the outer cavity 101 away from the crucible in turn, and then flows out of the rotating shaft body 100, thereby cooling the rotating shaft body 100 of the crucible rotating device. According to another embodiment of the present application, the fan 300 can be in communication with the end of the inner cavity 201 away from the crucible, when the fan 300 rotates in the forward direction, the end of the inner cavity 201 away from the crucible is the air inlet, the airflow passes through the end of the inner cavity 201 away from the crucible, the inner cavity 201, the outer cavity 101 and the end of the outer cavity 101 away from the crucible in turn, and then flows out of the rotating shaft body 100, when the fan 300 rotates in the reverse direction, the end of the inner cavity 201 away from the crucible is the air outlet, the airflow passes through the end of the outer cavity 101 away from the crucible, the outer cavity 101, the inner cavity 201 and the end of the inner cavity 201 away from the crucible in turn, and then flows out of the rotating shaft body 100, thereby cooling the rotating shaft body 100 of the crucible rotating device.

[0044] Therefore, the crucible rotating device of the present application adopts the air cooling structure, eliminates the rotating joint and the cooling water pipe of the traditional water cooling structure, has a simple structure, is convenient and fast to operate, is not easy to cause damage to the corresponding parts, has high safety and reliability, has a long service life, reduces the cost, and can meet the increasingly high production demand.

[0045] In some embodiments, referring to Figure 3 As shown, the end of the flow guide ring 200 away from the crucible extends out of the rotating shaft body, a plurality of partition strips 102 are arranged at the end of the outer cavity 101 away from the crucible, the partition strips 102 extend along the radial direction and are connected to the outer wall of the flow guide ring 200 at one end and to the inner wall of the rotating shaft body 100 at the other end, and the plurality of partition strips 102 are uniformly distributed along the circumferential direction of the flow guide ring 200. Ventilation openings are respectively formed between adjacent two partition strips 102, the plurality of partition strips 102 divide the end of the outer cavity 101 away from the crucible into a plurality of ventilation openings, and the plurality of ventilation openings are uniformly distributed along the circumferential direction of the flow guide ring 200. Therefore, it is ensured that the airflow is uniformly passed through, and the cooling effect is better.

[0046] Further, the end of the outer cavity 101 or the inner cavity 201 away from the crucible, which serves as the air inlet, is provided with a dust screen (not shown). Therefore, by arranging the dust screen on the air inlet, dust and other sundries are prevented from entering the rotating shaft body 100, which is safer and more reliable.

[0047] In some embodiments, referring to Figures 1-4 As shown in the figure, the fan 300 is sleeved on the outer wall of the part of the flow guide ring 200 extending out of the rotating shaft body 100, and communicates with the end of the outer cavity 101 away from the crucible.

[0048] That is, the rotating shaft body 100 and the flow guide ring 200 are coaxially arranged and connected by the partition strips 102, the fan 300 is arranged on the flow guide ring 200, the flow guide ring 200 and the fan 300 rotate synchronously with the rotating shaft body 100, the rotating shaft body 100 rotates forward, the fan 300 rotates forward, and the rotating shaft body 100 rotates reversely, the fan 300 also rotates reversely. Therefore, the fan 300 does not need a separate driving member to drive it to rotate synchronously with the rotating shaft body 100, thereby driving the cold gas outside the rotating shaft body 100 into the inside of the rotating shaft body 100 to cool the crucible rotating device. The structure is more simple and compact, the volume is reduced, the operation is more convenient, and the cost is reduced.

[0049] Further, as shown in the figure, Figure 5 The fan 300 includes an inner sleeve 301, a wind shield 303, and a plurality of blades 302. The inner sleeve 301 is used to be sleeved on the outer wall of the part of the flow guide ring 200 extending out of the rotating shaft body 100, the flow guide ring 200 is coaxially connected with the inner sleeve 301, the plurality of blades 302 are arranged outside the inner sleeve 301 and are uniformly distributed along the circumferential direction of the inner sleeve 301, the wind shield 303 surrounds each blade 302 along the circumferential direction of the inner sleeve 301, each blade 302 is located between the wind shield 303 and the inner sleeve 301, and the area between the wind shield 303 and the adjacent two blades communicates with the end of the outer cavity 101 away from the crucible.

[0050] When each blade 302 of the fan 300 rotates forward, the air vents between the adjacent two partition strips 102 are air inlets, and the airflow flows to the outside of the rotating shaft body 100 in sequence through the air vents, the outer cavity 101, and the inner cavity 201. When each blade 302 of the fan 300 rotates reversely, the air vents between the adjacent two partition strips 102 are air outlets, and the airflow flows to the outside of the rotating shaft body 100 in sequence through the inner cavity 201, the outer cavity 101, and the air vents, thereby cooling the rotating shaft body 100 of the crucible rotating device. Therefore, not only is the structure simple and stable, but also the cooling effect is good. In addition, the angle of the blade should be increased as much as possible to ensure sufficient airflow for cooling at low speed.

[0051] In some embodiments, referring to Figures 1-2 As shown in the figure, the crucible rotating device also includes a magnetic fluid sealing device 500 sleeved on the rotating shaft body 100. Therefore, the rotating shaft body 100 is dynamically sealed in a vacuum environment with strict requirements by the magnetic fluid sealing device 500, the sealing effect is better, and the sealing is more stable and reliable.

[0052] Specifically, referring to Figure 7 As shown in the figure, the magnetic fluid sealing device 500 comprises a magnetic sleeve 501 and a shell 502. The magnetic sleeve 501 is sleeved on the rotating shaft body 100, and the shell 502 is sleeved on the magnetic sleeve 501 and rotationally connected with the magnetic sleeve 501. The magnetic fluid 503 for sealing is arranged between the shell 502 and the magnetic sleeve 501. The magnetic sleeve 501 rotates with the rotating shaft body 100, and the shell 502 is usually fixedly connected with the corresponding mechanism of the single crystal furnace. Since the magnetic fluid 503 needs to work in an environment with a temperature less than 80℃, according to an embodiment of the present application, the magnetic fluid 503 is arranged at one end of the magnetic fluid sealing device 500 close to the fan 300, i.e. the end away from the crucible. The temperature at the end close to the fan 300 is relatively low, which can prevent the temperature of the magnetic fluid 503 from being too high and ensure that the magnetic fluid 503 can better perform sealing.

[0053] In some embodiments, referring to Figure 8 As shown in the figure, according to some embodiments of the present application, the magnetic fluid 503 is arranged at one end of the magnetic fluid sealing device 500 away from the fan 300. In this case, the inside of the end of the shell 502 away from the fan 300 is provided with a cooling channel 507, which is adjacent to the position of the magnetic fluid 503 to cool the magnetic fluid 503. The cooling channel 507 surrounds the magnetic sleeve 501 along the circumferential direction of the magnetic sleeve 501. Since the shell 502 is usually fixed, the cooling channel 507 can be cooled in a water-cooled manner. A corresponding circulating cooling water supply device is in communication with the cooling channel 507, and a rotating joint does not need to be arranged. In this way, the temperature of the magnetic fluid 503 is prevented from being too high, and the magnetic fluid 503 can better perform sealing. In addition, the cooling channel 507 can also be cooled in an air-cooled manner.

[0054] In some embodiments, referring to Figures 2-4 As shown in the figures, the end of the magnetic fluid sealing device 500 away from the fan 300 is provided with a connecting flange 505, and the rotating shaft body 100 is provided with a shaft shoulder 105 for cooperating with the connecting flange 505. The outer diameter of the shaft shoulder 105 is smaller than that of the connecting flange 505, and the shaft shoulder 105 is coaxially connected with the connecting flange 505.

[0055] That is, the connecting flange 505 is arranged on the shell 502, and the shell 502 is fixed by being connected with the corresponding mechanism of the single crystal furnace through the connecting flange 505. In addition, the shaft shoulder 105 of the rotating shaft body 100 can also abut on the end face of the connecting flange 505. In this way, the operation is simpler and faster, and the structure is more stable and reliable.

[0056] In some embodiments, referring to Figure 7As shown, the connecting flange 505 is provided with a dust receiving disc 506 on the end face close to the shaft shoulder 105, and the dust receiving disc 506 is provided with an avoiding hole for the rotating shaft body 100 to pass through. In this way, by providing the dust receiving disc 506, the dust and other sundries are prevented from entering the magnetic fluid sealing device 500 to affect the rotation, damage the components, etc., the safety and reliability are improved, and the service life is prolonged.

[0057] In some embodiments, referring to Figures 7-8 As shown, the shell 502 is further provided with a bearing 504 between the shell 502 and the magnetic conducting sleeve 501. The shell 502 is rotationally connected with the magnetic conducting sleeve 501 through the bearing 504. The bearing 504 can be one, two or more. In this way, the magnetic conducting sleeve 501 is better ensured to rotate relative to the shell 502.

[0058] According to the single crystal furnace provided by the embodiment of the present application, the above-mentioned crucible rotating device is adopted, the structure of the wind cooling is adopted, the rotating joint and the cooling water pipe of the traditional water cooling structure are omitted, the structure is simple, the operation is convenient and fast, the damage of the corresponding components is not easy to cause, the safety and the reliability are high, the cost is reduced, and the increasingly high production demand can be met.

[0059] In some embodiments, referring to

[0060] In some embodiments, referring to Figures 1-2, 4, 6, the rotating shaft body 100 is connected with the tow bar assembly 400 through the locking piece 600, the locking piece 600 penetrates the central axis of the tow bar assembly 400 along the axial direction of the tow bar assembly 400, and extends from the bottom of the tow bar assembly 400 to be connected with the rotating shaft body 100. The rotating shaft body 100 is provided with a first threaded hole 104 corresponding to the locking piece 600, and a transition nut 700 is threadedly connected in the first threaded hole 104. The transition nut 700 is provided with a second threaded hole 701 for threadedly connecting with the locking piece 600, and the first threaded hole 104 can be located on the bottom surface of the connecting hole 103. Therefore, by arranging the transition nut 700 in the first threaded hole 104, the locking piece 600 is prevented from directly contacting the rotating shaft body 100, effectively preventing the locking piece 600 from being stuck with the rotating shaft body 100, ensuring better connection between the rotating shaft body 100 and the tow bar assembly 400, and improving the safety and reliability and the operation convenience.

[0061] In some embodiments, referring to Figure 6 The transition nut 700 is provided with an operation hole 702, which is used for rotating the transition nut 700 into the first threaded hole 104. The operation hole 702 can be coaxially arranged with the second threaded hole 701 and located on the upper side of the second threaded hole 701, the operation hole 702 is hexagonal along the cross section perpendicular to the axial direction, and the second threaded hole 701 is a circumscribed circle of the hexagon along the cross section perpendicular to the axial direction. The locking piece 600 can pass through the operation hole 702 and be threadedly connected in the second threaded hole 701, and a wrench can be inserted into the operation hole 702 to rotate the transition nut 700 into the first threaded hole 104. Therefore, the operation is more convenient and fast.

[0062] In some embodiments, the locking piece 600 is a screw made of graphite material, the transition nut 700 is a nut made of graphite material, and the tow bar assembly 400 is also usually made of graphite material. Therefore, graphite has high strength and self-lubricating property, which not only improves the structural strength and prolongs the service life, but also better prevents the locking piece 600 from being stuck with the rotating shaft body 100.

[0063] Based on the above embodiments of the present application, the technical features of one embodiment can be beneficially combined with one or more other embodiments without explicit negation or conflict.

[0064] The above merely describes some embodiments of the present application, and is used to illustrate the technical solutions of the present application, but not to limit the same. It should be understood that, for those skilled in the art, without departing from the concept of the present application, the above description can be improved or replaced, and all these improvements and replacements shall fall within the protection scope of the appended claims of the present application. In this case, all details can be replaced by equivalent elements, and the materials, shapes and sizes can be arbitrary.

Claims

1. A crucible rotating apparatus characterized by comprising: A single crystal furnace comprises: a rotating shaft body, an inner cavity of which is formed along an axial direction of the rotating shaft body, an axial end of the rotating shaft body is open, and the other end is closed and connected with a crucible of the single crystal furnace; a flow guide ring, which is arranged at least partially coaxially in the cavity in the rotating shaft body, an outer wall of the flow guide ring and an inner wall of the cavity form an outer cavity, an inner cavity of the flow guide ring is formed, the outer cavity and the inner cavity are communicated with each other at one end close to the crucible, the outer cavity and the inner cavity are independent of each other at the other end away from the crucible, and one of the outer cavity and the inner cavity is an air inlet and the other is an air outlet; a fan, which is communicated with the other end of the outer cavity or the inner cavity away from the crucible.

2. The crucible rotating apparatus according to claim 1, wherein The flow guide ring extends out of the rotating shaft body at the other end away from the crucible, a plurality of partitions are arranged at the end of the outer cavity away from the crucible, the partitions extend radially and are connected to the outer wall of the flow guide ring at one end and to the inner wall of the rotating shaft body at the other end, and the partitions are uniformly distributed along the circumference of the flow guide ring.

3. The crucible rotation apparatus of claim 1, wherein The fan is arranged around the part of the flow guide ring extending out of the rotating shaft body and is communicated with the other end of the outer cavity away from the crucible.

4. The crucible rotating apparatus according to claim 3, wherein The fan comprises: an inner sleeve, which is arranged on the outer wall of the part of the flow guide ring extending out of the rotating shaft body, and the flow guide ring is coaxially connected with the inner sleeve; a plurality of blades, which are arranged outside the inner sleeve and are uniformly distributed along the circumference of the inner sleeve; a baffle, which surrounds each blade along the circumference of the inner sleeve, each blade is located between the baffle and the inner sleeve, and the area between the baffle and the adjacent two blades is communicated with the other end of the outer cavity away from the crucible.

5. The crucible rotation apparatus of claim 1, wherein Further comprising: a magnetic fluid sealing device, which comprises: a magnetic conductive sleeve, which is arranged outside the rotating shaft body; a shell, which is arranged outside the magnetic conductive sleeve and is rotationally connected with the magnetic conductive sleeve through a bearing; wherein a magnetic liquid for sealing is arranged between the shell and the magnetic conductive sleeve.

6. The crucible rotating apparatus according to claim 5, wherein The magnetic liquid is arranged at the end of the magnetic fluid sealing device away from the fan, a cooling channel is arranged inside the shell at a position adjacent to the magnetic liquid, and the cooling channel surrounds the magnetic conductive sleeve along the circumferential direction of the magnetic conductive sleeve.

7. The crucible rotating apparatus according to claim 5, wherein The magnetic liquid is arranged at the end of the magnetic fluid sealing device close to the fan.

8. A single crystal furnace characterized by comprising: A single crystal furnace comprises a furnace body, a crucible rotating device, a drag rod assembly and a crucible in the furnace body, wherein the crucible rotating device is the crucible rotating device according to any one of claims 1-7, the closed end of the rotating shaft body of the crucible rotating device forms a connecting hole recessed away from the crucible, one end of the drag rod assembly is accommodated in the connecting hole and is connected with the rotating shaft body, and the other end of the drag rod assembly is connected with the crucible. The connecting hole and the one end of the drag rod assembly are in matched inverted conical shapes.

9. The single crystal furnace of claim 8, wherein The drawbar assembly is connected with the rotating shaft body through a locking piece, the locking piece penetrates the central axis of the drawbar assembly along the axial direction of the drawbar assembly and extends from the bottom of the drawbar assembly to be connected with the rotating shaft body.

10. The single crystal furnace of claim 9, wherein The rotating shaft body is provided with a first threaded hole, a transition nut is threadedly connected in the first threaded hole, the transition nut is provided with a second threaded hole for threadedly connecting with the locking piece, Wherein, the transition nut is made of graphite material.

11. The single crystal furnace of claim 10, wherein The transition nut is provided with an operation hole, the operation hole is used for screwing the transition nut into the first threaded hole, the operation hole is coaxially arranged with the second threaded hole and located on the upper side of the second threaded hole, the operation hole is hexagonal along the cross section perpendicular to the axial direction, and the second threaded hole is an inscribed circle of the hexagon along the cross section perpendicular to the axial direction.

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