Annular pressure equalizing structure applied to air floating guide rail

Abstract

The utility model belongs to the technical field of annular pressure equalizing devices, in particular to an annular pressure equalizing structure applied to an air floating guide rail, which consists of an air floating bottom plate and an orifice plug, an inner grading ring, an outer grading ring, a vertical grading groove, a transverse grading groove, an internally communicated gas channel and pressure-bearing surfaces which are arranged in the inner grading ring and the outer grading ring and are flush with the end surface of the air floatation bottom plate are processed on the front end surface of the air floatation bottom plate. According to the air floatation guide rail, on one hand, the pressure equalizing grooves and the pressure equalizing rings are matched with each other, efficient pressure equalizing is conducted on air, the load capacity of the air floatation guide rail can be greatly improved, the problem that a traditional guide rail is poor in performance under the space limitation or high stability requirement is effectively solved, on the other hand, the pressure distribution uniformity can be remarkably improved, the local pressure gradient is reduced, and the service life of the air floatation guide rail is prolonged. The bearing area of the air film is enlarged, so that the rigidity and the stability of the guide rail are improved, the air floating guide rail is more reliable in practical application, and the use requirements of various precision devices can be better met.

Description

TECHNICAL FIELD

[0001] The utility model relates to annular pressure equalizing device technical field, concretely is a kind of annular pressure equalizing structure applied to air floatation guide rail. BACKGROUND

[0002] Air floatation guide rail technology originated in the mid-19th century, French scholars first proposed the idea of using gas as a lubricant. In 1828, RR Willis published an article on the gas pressure in the small hole throttling plate, and its research model became the prototype of gas lubricated guide rail. After development, air floatation guide rail technology has been quite mature, and various suspension technologies such as mixed pressure gas suspension, gas magnetic suspension and acoustic pressure gas suspension are based on static pressure gas lubrication technology, and are based on throttle structure and combined with new structure or control method to improve performance.

[0003] In terms of throttle structure, common forms include small hole throttling, slit throttling, new material throttling, variable throttling and composite throttling. Small hole throttling is simple and effective, and is a basic form; slit throttling and new material throttling are based on Laval nozzle principle, and expand the throttling influence area to improve guide rail performance; new material throttling forms pressure gas film by means of porous material; variable throttling improves bearing stiffness and load capacity by actively controlling the pressure gas source, but is greatly affected by gas pressure, gas type and environmental temperature, and has limited application; composite throttling uses micro structures such as shallow cavities and grooves to realize secondary or multiple throttling, and improves throttling effect and pressure uniformization effect; among them, cavity type composite throttling can improve stiffness, but is easy to cause air hammer vibration to reduce stability, and multi-groove type composite throttling has good stability, but is easy to form negative pressure inside to reduce load capacity.

[0004] Currently, the traditional method to improve the mechanical performance of guide rail is to increase the gas supply pressure and the floating area, but in the case of limited space or high stability requirement, this method is difficult to work, and there are few related documents on small air floatation guide rail. In order to solve the contradiction between small size and maximum performance, it is of great significance to study new air floatation guide rail structure, and the annular pressure equalizing structure applied to air floatation guide rail in this paper is born to overcome the shortcomings of existing technology and improve the performance of air floatation guide rail. INVENTION CONTENTS

[0005] In view of the shortcomings of the prior art, the annular pressure equalizing structure applied to air floatation guide rail is provided, which solves the problems proposed in the background art.

[0006] The utility model discloses in order to realize the above-mentioned purpose specifically adopts the following technical scheme:

[0007] The application relates to a ring-shaped pressure equalizing structure applied to an air-floating guide rail, which is composed of an air-floating bottom plate and a throttle plug, an inner pressure equalizing ring, an outer pressure equalizing ring, vertical pressure equalizing grooves, horizontal pressure equalizing grooves, an internal gas passage and a pressure bearing surface which is flush with the end surface of the air-floating bottom plate are processed on the front end surface of the air-floating bottom plate, and the throttle plug is provided with a throttle hole in the center.

[0008] A groove with the same diameter as the throttle plug is formed in the front end surface of the air-floating bottom plate, the throttle plug is inserted into the groove, the throttle plug and the air-floating bottom plate have a height difference in the end surface, a pressure equalizing cavity with the same diameter as the throttle plug is formed, one end of the throttle hole is connected with an external gas source through the gas passage, and the other end is connected with the pressure equalizing cavity.

[0009] Further, the gas passage is T-shaped in the air-floating bottom plate.

[0010] Further, one end of the gas passage is sealed in a mechanical mode, one end is connected with an external source, gas passes through the passage to reach the throttle plug, the throttle plug is provided with a throttle hole, gas passes through the throttle hole, the gas flow rate is increased, the gas enters the pressure equalizing cavity, the gas changes the flow direction in the pressure equalizing cavity, the gas is equalized in the pressure equalizing cavity, enters the vertical pressure equalizing grooves, the horizontal pressure equalizing grooves and the pressure bearing surface, and further enters the inner pressure equalizing ring along with the further flow of the gas in the pressure equalizing grooves; under the action of the inner pressure equalizing ring, the gas further presents a circumferential distribution, plays a circumferential pressure equalizing role, and enters the outer pressure equalizing ring through the vertical pressure equalizing grooves and the horizontal pressure equalizing grooves to improve the circumferential pressure equalization after the gas flow reaches a balance condition.

[0011] Further, the vertical pressure equalizing grooves and the horizontal pressure equalizing grooves present a cross distribution with a distribution angle of 90 degrees.

[0012] Further, the inner pressure equalizing ring and the outer pressure equalizing ring are connected with the vertical pressure equalizing grooves and the horizontal pressure equalizing grooves at different positions respectively, present a double-layer ring-shaped distribution, and form a gas passage connected with the vertical pressure equalizing grooves and the horizontal pressure equalizing grooves.

[0013] Compared with the prior art, the application provides the ring-shaped pressure equalizing structure applied to the air-floating guide rail, and has the following beneficial effects:

[0014] The air-floating guide rail can be greatly improved in load capacity, the problem that the traditional guide rail is poor in performance under the conditions of space limitation or high stability requirement can be effectively solved, the pressure distribution uniformity can be obviously improved, the local pressure gradient can be reduced, the air film bearing area can be expanded, the rigidity and stability of the guide rail can be further improved, the air-floating guide rail can be more reliable in actual application, and the use requirement of various precision equipment can be better met. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1The utility model discloses a three-dimensional structure schematic diagram.

[0016] Figure 2 The utility model discloses a front structure schematic diagram.

[0017] Figure 3 The utility model discloses a top view sectional structure schematic diagram.

[0018] In the drawing: 100, air floating bottom plate;200, throttle plug;1, throttle hole;2, inner pressure equalizing ring;3, outer pressure equalizing ring;4, vertical pressure equalizing groove;5, horizontal pressure equalizing groove;6, pressure equalizing chamber;7, gas passage;8, pressure bearing surface. Specific implementation

[0019] The technical scheme in the embodiments of the utility model will be apparently and completely described below with the drawings in the embodiments of the utility model, and apparently, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor are within the protection scope of the utility model. Embodiment

[0020] As Figure 1 and 3 The utility model discloses an annular pressure equalizing structure applied to air floating guide rail, which is composed of air floating bottom plate 100 and throttle plug 200, and the structures are connected closely and jointly act to improve the performance of air floating guide rail.

[0021] As Figures 1-3 The throttle plug 200 is provided with a throttle hole 1 in the center, and the air floating bottom plate 100 is provided with a groove with the same diameter as the throttle plug 200 at the front end face to embed and fix the throttle plug 200. The end faces of the two have a height difference to form a pressure equalizing chamber 6. The connection mode makes the gas accelerate after entering the pressure equalizing chamber 6 through the throttle hole 1, realizes preliminary pressure equalization and lays a foundation for subsequent uniform distribution of the gas.

[0022] As Figure 3 The gas passage 7 is in T shape in the air floating bottom plate 100, one end is connected with an external gas supply source, and the other end is mechanically blocked. It introduces the external gas into the throttle hole 1 of the throttle plug 200 to provide a gas source for the whole pressure equalizing process.

[0023] As Figure 2As shown, the vertical equalizing groove 4 and the horizontal equalizing groove 5 are cross-distributed (included angle 90°) and connected with the equalizing cavity 6. The equalized gas enters the equalizing groove from the equalizing cavity 6 and is further uniformly distributed. The inner equalizing ring 2 and the outer equalizing ring 3 are connected with the vertical equalizing groove 4 and the horizontal equalizing groove 5 at different positions respectively to form the communication air passage. The gas enters the inner equalizing ring 2 to realize the circumferential equalization, and then enters the outer equalizing ring 3 to further improve the circumferential equalization effect, thereby improving the load capacity and pressure distribution uniformity of the air floating guide rail.

[0024] As shown, Figure 2 The pressure bearing surface 8 is located in the inner equalizing ring 2 and the outer equalizing ring 3 and is flush with the end surface of the air floating bottom plate 100, and is communicated with the equalizing cavity 6 and the equalizing groove. It can bear the pressure during the operation of the air floating guide rail, and ensure the stability of the air floating guide rail during the gas equalization process.

[0025] When the air floating guide rail ring-shaped equalization structure works, the gas from the external gas source enters through the gas passage 7. The gas passage 7 is connected with the external gas source at one end and is mechanically blocked at the other end, and is in T shape in the air floating bottom plate 100. After the gas reaches the throttle plug 200, the flow rate increases through the throttle hole 1, and enters the equalizing cavity 6. The equalizing cavity 6 is formed by the height difference between the throttle plug 200 and the end surface of the air floating bottom plate 100, and the gas changes the flow direction in the cavity and is equalized. The equalized gas enters the vertical equalizing groove 4, the horizontal equalizing groove 5 and the pressure bearing surface 8, which are cross-distributed. With the gas flowing into the inner equalizing ring 2, it is distributed in a circle under the action of the inner equalizing ring 2 to realize circumferential equalization, and after reaching balance, it enters the outer equalizing ring 3 through the vertical equalizing groove 4 and the horizontal equalizing groove 5, thereby further improving the circumferential equalization effect and improving the performance of the air floating guide rail.

[0026] Finally, it should be pointed out that the above-mentioned is only the preferred embodiment of the present application and is not used to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A ring-shaped pressure equalization structure applied to an air floating guide rail, composed of an air floating bottom plate (100) and a throttle plug (200), characterized in that: The front end surface of the air cushion bottom plate (100) is machined with an inner pressure equalizing ring (2), an outer pressure equalizing ring (3), a vertical pressure equalizing groove (4), a horizontal pressure equalizing groove (5), an internally connected gas passage (7), and a pressure bearing surface (8) flush with the end surface of the air cushion bottom plate (100) in the inner pressure equalizing ring (2) and the outer pressure equalizing ring (3); The throttle plug (200) is centrally provided with a throttle hole (1), and the front end surface of the air cushion bottom plate (100) is provided with a groove with a diameter equal to that of the throttle plug (200), the throttle plug (200) is inserted and fixed, the throttle plug (200) and the air cushion bottom plate (100) have a height difference at the end surface, forming a pressure equalizing cavity (6) with the same diameter as the throttle plug (200), one end of the throttle hole (1) is connected with an external gas source through the gas passage (7), and the other end is connected with the pressure equalizing cavity (6).

2. The annular pressure equalizing structure for air floating guide rails according to claim 1, characterized in that: The gas passage (7) is T-shaped in the air cushion bottom plate (100).

3. The annular pressure equalizing structure for air floating guide rails according to claim 1, characterized in that: One end of the gas passage (7) is sealed by a mechanical method, and the other end is connected with an external gas source, gas passes through the passage to reach the throttle plug (200), the throttle hole (1) is formed on the throttle plug (200), gas passes through the throttle hole (1), the gas flow rate increases, enters the pressure equalizing cavity (6), the gas changes the flow direction in the pressure equalizing cavity (6), the gas enters the vertical pressure equalizing groove (4), the horizontal pressure equalizing groove (5) and the pressure bearing surface (8) through the pressure equalization of the pressure equalizing cavity (6), and further flows into the inner pressure equalizing ring (2) along with the further flow of the gas in the pressure equalizing groove; under the action of the inner pressure equalizing ring (2), the gas further presents a circumferential distribution, and plays a circumferential pressure equalizing role; after the gas flow reaches a balance condition, the gas enters the outer pressure equalizing ring (3) through the vertical pressure equalizing groove (4) and the horizontal pressure equalizing groove (5), and the circumferential pressure equalization is improved.

4. The annular pressure equalizing structure for air floating guide rails according to claim 1, characterized in that: The vertical pressure equalizing groove (4) and the horizontal pressure equalizing groove (5) are cross-distributed with a distribution angle of 90°.

5. The annular pressure equalizing structure for air floating guide rails according to claim 4, characterized in that: The inner pressure equalizing ring (2) and the outer pressure equalizing ring (3) are respectively connected with the vertical pressure equalizing groove (4) and the horizontal pressure equalizing groove (5) at different positions, and are distributed in a double-layer ring shape, and form a gas passage connected with the vertical pressure equalizing groove (4) and the horizontal pressure equalizing groove (5).

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