Gas pipeline heat preservation structure

Abstract

The utility model relates to the field of semiconductor equipment accessories, in particular to a gas pipeline heat preservation structure which comprises a gas pipeline and a temperature sensor, the temperature sensor comprises a temperature detection probe, a heating belt is wound on the outer side of the gas pipeline, an insulation interlayer is arranged between the gas pipeline and the heating belt, and the temperature detection probe is arranged in the insulation interlayer. The temperature detection probe is arranged in the insulation interlayer, the gas pipeline is provided with check rings used for fixing the heating belt, the heating belt is wound with a protection layer, the protection layer is wrapped with a heat preservation cotton layer, and the check rings are arranged at the two ends of the gas pipeline to fix the heating belt, so that the heating belt is more tightly attached to the gas pipeline. The protective layer and the heat preservation cotton layer are wrapped outside the heating belt, the heat preservation effect is further improved, the heating effect and the heat preservation effect of the gas pipeline are better, meanwhile, the temperature detection probe is arranged in the insulation interlayer, and short circuit between the temperature detection probe and the heating belt / gas pipeline is prevented during detection.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor equipment accessories, and especially relates to a gas pipeline heat preservation structure. BACKGROUND

[0002] Semiconductor manufacturing needs to go through a series of complex process flow, and different equipment is needed to realize these process flow, which includes special gas treatment equipment, and the gas needs to be heated under certain conditions, and the accuracy of the gas temperature is very important for semiconductor manufacturing, therefore, the current gas pipeline is wrapped with a heating belt outside to heat the pipeline, so that the pipeline is kept at a certain temperature, and a temperature detection sensor is arranged between the heating belt and the pipeline, but such structure is too simple, and the heat preservation effect is poor, especially the heating belt is wrapped outside the pipeline by winding, which is easy to loosen, causing the heating belt and the pipeline to be not tightly attached, which affects the heating and heat preservation effect, and because the gas pipeline is made of metal material, the heating belt needs to be used for conduction, and the loose heating belt may also cause short circuit of the temperature sensor. SUMMARY

[0003] The utility model discloses a gas pipeline heat preservation structure to solve the technical problem mentioned above.

[0004] To achieve the above object, the utility model provides the following technical scheme: a gas pipeline heat preservation structure, including gas pipeline and temperature sensor, the temperature sensor includes temperature detection probe, the gas pipeline outside is wound with heating belt, and the insulating interlayer is arranged between the gas pipeline and the heating belt, the temperature detection probe is arranged in the insulating interlayer, the gas pipeline is provided with the baffle ring for fixing the heating belt, the heating belt is wound with the protective layer outside, the protective layer is coated with the heat preservation cotton layer outside, and the fixed section is arranged outside the heat preservation cotton layer.

[0005] Preferably, the temperature sensor is connected to the temperature detection probe through a wire, and the wire has an insulating tube outside.

[0006] Preferably, the middle part of the gas pipeline is divided into a detection area, and the insulating interlayer is arranged on the detection area.

[0007] Preferably, the protective layer and the fixed section are made of aluminum foil.

[0008] Preferably, the insulating interlayer is provided with an aluminum foil belt outside.

[0009] Preferably, the heating belt is connected with a connector, and a temperature fuse is connected between the heating belt and the connector.

[0010] Compared with the prior art, the gas pipeline heat preservation structure has the advantages that: the baffle ring is arranged at both ends of the gas pipeline to fix the heating belt, so that the heating belt is more closely attached to the gas pipeline, the protective layer and the thermal insulation cotton layer are arranged outside the heating belt to further improve the heat preservation effect, the heating effect and the heat preservation effect of the gas pipeline are better, and the temperature detection probe is arranged in the insulation interlayer, so that short circuit between the temperature detection probe and the heating belt / gas pipeline is prevented while detection. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 It is a whole structure schematic view of the utility model.

[0012] Figure 2 It is a connection schematic view of the temperature detection probe and the gas pipeline in the utility model.

[0013] Figure 3 It is a structure schematic view of the insulation interlayer and the gas pipeline in the utility model.

[0014] Figure 4 It is a structure schematic view of the heating belt in the utility model.

[0015] Figure 5 It is a structure schematic view of the protective layer and the baffle ring in the utility model.

[0016] Figure 6 It is a structure schematic view of the aluminum foil belt in the utility model.

[0017] In the drawing: 1, gas pipeline; 2, temperature sensor; 21, temperature detection probe; 30, connector 30; 101, insulation interlayer; 102, heating belt; 103, baffle ring; 104, protective layer; 105, thermal insulation cotton layer; 122, aluminum foil belt; 300, temperature fuse. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0019] As shown in the drawing, the utility model discloses a gas pipeline heat preservation structure, which comprises a gas pipeline 1 and a temperature sensor 2, the temperature sensor 2 comprises a temperature detection probe 21, the temperature detection probe 21 of a gas pipeline 1 is like Figure 2Two temperature detection probes 21 are preferably arranged to ensure the accuracy of temperature detection, the gas pipeline 1 is wrapped with a heating belt 102, an insulating layer 101 is arranged between the gas pipeline 1 and the heating belt 102, the insulating layer 101 is two layers of insulating layer, preferably insulating glue, the temperature detection probe 21 is arranged in the insulating layer 101, the gas pipeline 1 is provided with a blocking ring 103 for fixing the heating belt 102, the outer surface of the heating belt 102 is wrapped with a protective layer 104 to prevent heat loss, the protective layer 104 is wrapped with a thermal insulation cotton layer 105, and the thermal insulation cotton layer 105 is used to prevent the influence of external temperature on the temperature of the gas pipeline 1 to achieve the effect of heat preservation, and a fixing section is arranged outside the thermal insulation cotton layer 105, which is actually an aluminum foil used to reinforce the thermal insulation cotton layer 105.

[0020] It should be noted that the entire manufacturing process needs to be carried out in a dust-free workshop, and the product is sealed with plastic wrap from the beginning to prevent the gas pipeline 1 from entering dust. First, a layer of insulating layer is wrapped outside the gas pipeline 1, then the temperature detection probe 21 is installed, and another layer of insulating layer is covered on the temperature detection probe 21. Second, the heating belt 102 is wound, and after winding, it is fixed by the blocking ring 103. Third, the protective layer 104 and the thermal insulation cotton layer 105 are covered in turn. Fourth, after covering, the thermal insulation cotton layer 105 is fixed by the fixing section, which is arranged at both ends and the middle part, mainly to fix the thermal insulation cotton layer 105. The number and specifications of the heating belt 102 are determined according to the gas pipeline 1, and the heating belt 102 can cover the entire outer surface of the gas pipeline 1. The heating belt 102 is connected in series with a wire in the middle, and the heating belt 102 is temporarily fixed by using rubber bands during winding. Then, the blocking ring 103 is arranged on the gas pipeline 1 to fix the heating belt 102, so that the heating belt 102 is more closely attached to the gas pipeline 1. The blocking ring 103 is used to fix the end of the heating belt 102 on the gas pipeline 1. The heating belt 102 is wrapped around the outer surface of the gas pipeline 1 in a winding manner, so that the inner surface of the heating belt 102 is attached to the gas pipeline 1. After winding, the blocking ring 103 is tightened and fixed. If one heating belt 102 is wound on the gas pipeline 1, the ends of the heating belt 102 can be fixed on the gas pipeline 1 by two blocking rings 103. Then, the protective layer 104 and the thermal insulation cotton layer 105 are wrapped outside the heating belt 102 to further improve the heat preservation effect, so that the heating effect and heat preservation effect of the gas pipeline 1 are better. At the same time, the temperature detection probe 21 is arranged in the insulating layer 101 to detect while preventing short circuit between the temperature detection probe 21 and the heating belt 102 / gas pipeline 1.

[0021] In this embodiment, the temperature sensor 2 is connected to the temperature detection probe 21 by a wire, and the wire has an insulating sleeve outside to prevent direct contact between the wire and the heating belt 102 / gas pipeline 1. The insulating sleeve can be made of insulating glue.

[0022] In the embodiment, the gas pipeline 1 is divided into a detection area in the middle, and the insulating interlayer 101 is arranged on the detection area. Figure 2 In the embodiment, the insulating interlayer 101 only covers a small section of the middle part of the gas pipeline 1, that is, the detection area part, and the temperature detection probe 21 is arranged in the interlayer to achieve the insulation effect.

[0023] In the embodiment, the protective layer 104 and the fixing section are both made of aluminum foil, and the protective layer 104 preferably has two or more layers. The protective layer 104 is made of aluminum foil and is wrapped tightly on the outer surface of the heating belt 102, so that the heating belt 102 is more closely attached to the gas pipeline 1, and the structural stability is enhanced. The fixing section is also made of aluminum foil, which not only fixes the thermal insulation cotton but also plays a certain heat insulation and protection role.

[0024] In the embodiment, the insulating interlayer 101 is provided with an aluminum foil strip 122, which is arranged between the heating belt 102 and the insulating glue of the outer layer of the insulating interlayer 101, and is used for fixing the insulating interlayer 101.

[0025] In the embodiment, the heating belt 102 is connected with a connector 30, and a temperature fuse 300 is connected between the heating belt 102 and the connector 30. The connector 30 is a prior structure, and the temperature fuse 300 needs to be described. Once the temperature exceeds the preset value, the temperature fuse 300 will be burned out to protect the gas pipeline 1. During the wiring process, the temperature fuse 300 is welded with good insulation, and the long end of the heating belt 102 is connected with a wire, and the other end is connected with a Teflon extension line. The other end of the silica gel heating belt 102 is also welded with a Teflon extension line, and is protected by a heat shrink tube and a yellow wax tube to ensure the safety and reliability of the electrical connection.

[0026] The above embodiment is a preferred embodiment of the utility model, and any similar structure and equivalent changes made should be within the protection scope of the utility model.

Claims

1. A gas pipeline heat insulation structure comprising a gas pipeline and a temperature sensor, the temperature sensor comprising a temperature detection probe, and a heating belt wrapped outside the gas pipeline, characterized in that: The gas pipeline and the heating belt are provided with an insulating interlayer, the temperature detection probe is arranged in the insulating interlayer, the gas pipeline is provided with a check ring for fixing the heating belt, the heating belt is externally wrapped with a protective layer, the protective layer is externally coated with a thermal insulation cotton layer, and the thermal insulation cotton layer is externally provided with a fixing section.

2. A gas pipe thermal insulation structure according to claim 1, characterized in that: The temperature sensor is connected to the temperature detection probe through a wire, and the wire is externally provided with an insulating sleeve.

3. A gas pipe thermal insulation structure according to claim 1, characterized in that: The middle part of the gas pipeline is divided into a detection area, and the insulating interlayer is arranged on the detection area.

4. A gas pipe thermal insulation structure according to claim 1, characterized by: The protective layer and the fixing section are both made of aluminum foil.

5. A gas pipe thermal insulation structure according to claim 1, characterized by: The insulating interlayer is externally provided with an aluminum foil belt.

6. A gas pipe thermal insulation structure according to claim 1, characterized by: The heating belt is connected with a connector, and a temperature fuse is connected between the heating belt and the connector.

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