Furnace tube drainage structure

By installing components such as liquid storage pipes, monitoring devices, and control valves in the furnace tubes, the liquid level and gas pressure are monitored and controlled, thus solving the problem of pressure fluctuations within the furnace tubes and improving product quality and safety.

CN223726860UActive Publication Date: 2025-12-26ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD
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Patent Information

Application Number
CN202423063519.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-11
Publication Date
2025-12-26
Estimated Expiration
2034-12-11

AI Technical Summary

Technical Problem

Pressure fluctuations inside the furnace tube affect the thickness of the oxide during oxide formation. How can these fluctuations be reduced?

Method used

By setting up a liquid storage pipe, monitoring components, control valves, and a main controller, the liquid level is monitored and the flow of the drain pipe is controlled. Combined with the condenser and pressure regulating components, the liquid level and gas pressure are regulated to prevent liquid backflow and gas pressure disturbance.

Benefits of technology

It effectively reduces pressure fluctuations within the furnace tubes, improves product quality and operational safety, and ensures the stability of the process environment and the consistency of products.

✦ Generated by Eureka AI based on patent content.

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Abstract

The embodiment of the utility model provides a furnace tube liquid discharge structure which comprises a liquid storage tube, the first end of the liquid storage tube is connected with a furnace tube, and the liquid storage tube is used for storing liquid discharged by the furnace tube; the first end of the liquid discharge pipe is connected with the second end of the liquid storage pipe; the monitoring piece is arranged at the first end of the liquid storage pipe and used for monitoring the height of the liquid level in the liquid storage pipe; the control valve is arranged on the liquid discharging pipe and used for controlling the liquid discharging pipe to be communicated, and the control valve is coupled with the monitoring part and used for controlling the liquid discharging pipe to be communicated according to the monitoring result of the monitoring part. By adopting the technical scheme, the pressure fluctuation in the furnace tube can be reduced.
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Description

TECHNICAL FIELD

[0001] The embodiment of the present disclosure relates to the technical field of furnace tube liquid discharge, in particular to a furnace tube liquid discharge structure. BACKGROUND

[0002] In the process of growing oxides in the furnace tube, the pressure in the furnace tube will change under the influence of the external atmospheric pressure, thereby affecting the thickness of the generated oxides.

[0003] How to reduce the pressure fluctuation in the furnace tube is a problem worth discussing. CONTENT OF THE INVENTION

[0004] Therefore, the embodiment of the present disclosure provides a furnace tube liquid discharge structure which can reduce the pressure fluctuation in the furnace tube.

[0005] To solve the above technical problems, the embodiment of the present disclosure provides a furnace tube liquid discharge structure, which comprises:

[0006] A liquid storage pipe, a first end of the liquid storage pipe being connected with the furnace tube, the liquid storage pipe being used for storing liquid discharged from the furnace tube;

[0007] A liquid discharge pipe, a first end of the liquid discharge pipe being connected with a second end of the liquid storage pipe;

[0008] A monitoring member, arranged at the first end of the liquid storage pipe, used for monitoring the liquid level height in the liquid storage pipe;

[0009] A control valve, arranged on the liquid discharge pipe, used for controlling the conduction of the liquid discharge pipe, wherein the control valve is coupled with the monitoring member, used for controlling the conduction of the liquid discharge pipe according to the monitoring result of the monitoring member.

[0010] Optionally, the furnace tube liquid discharge structure further comprises:

[0011] A main controller, coupled with the monitoring member, used for receiving the monitoring result of the monitoring member and generating an interlocking signal.

[0012] Optionally, the liquid storage pipe is a U-shaped pipe.

[0013] Optionally, the monitoring member is a non-contact liquid level sensor.

[0014] Optionally, the furnace tube liquid discharge structure further comprises:

[0015] A condenser, arranged between the liquid storage pipe and the furnace tube;

[0016] Wherein, an outlet of the condenser is in communication with the first end of the liquid storage pipe, and an inlet of the condenser is in communication with the furnace tube.

[0017] Optionally, the furnace tube liquid discharge structure further comprises:

[0018] An exhaust assembly, comprising:

[0019] A three-way pipe, a first end of the three-way pipe being connected with an outlet of the condenser, a second end of the three-way pipe being communicated with a first end of the liquid storage pipe;

[0020] An exhaust pipe, the exhaust pipe being communicated with a third end of the three-way pipe.

[0021] Optionally, the exhaust assembly further comprises:

[0022] A first air pressure sensor, the first air pressure sensor being disposed on the exhaust pipe and coupled with a main controller;

[0023] A solenoid valve, the solenoid valve being disposed on the exhaust pipe and coupled with the first air pressure sensor.

[0024] Optionally, the liquid discharge structure of the furnace pipe further comprises:

[0025] A pressure regulating assembly, the pressure regulating assembly being used for regulating a liquid level difference in the liquid storage pipe.

[0026] Optionally, the pressure regulating assembly comprises:

[0027] A pressure regulating plate, the pressure regulating plate being hinged with an inner wall of the liquid storage pipe;

[0028] A contact switch, the contact switch being disposed on the liquid storage pipe and capable of abutting against the pressure regulating plate, the contact switch being coupled with the main controller.

[0029] Optionally, the pressure regulating assembly further comprises:

[0030] A second air pressure sensor, the second air pressure sensor being disposed on the liquid discharge pipe and coupled with the main controller.

[0031] Compared with the prior art, the technical scheme of the embodiment of the present disclosure has the following advantages:

[0032] In the embodiment of the present disclosure, a first end of the liquid storage pipe is connected with the furnace pipe, the liquid storage pipe is used for storing liquid discharged by the furnace pipe, a first end of the liquid discharge pipe is connected with a second end of the liquid storage pipe, and is used for discharging liquid in the liquid storage pipe, a monitoring member is disposed at the first end of the liquid storage pipe, and is used for monitoring a liquid level, and a control valve is disposed on the liquid discharge pipe, and is coupled with the monitoring member, and is used for controlling the liquid discharge pipe to be conducted according to a monitoring result of the monitoring member, so that pressure fluctuation in the furnace pipe can be reduced.

[0033] Further, by setting the main controller and the monitoring member, it can be effectively monitored whether the liquid in the liquid storage pipe exceeds the preset value, and when the liquid in the liquid storage pipe exceeds the preset value, the monitoring member sends a signal to the main controller to prevent backflow of the liquid. Since pressure fluctuations and backflow of the liquid can be prevented, the quality of the product can be improved, and the convenience and safety of operation are improved.

[0034] Further, by setting the pressure regulating assembly, the pressure at both ends of the liquid storage pipe is detected. During the exhaust process of the exhaust pipe, if the exhaust pressure increases and causes the liquid level at both ends of the liquid storage pipe to have a height difference, if the exhaust pressure of the exhaust pipe returns to normal or decreases, the high liquid level end of the liquid storage pipe will flow to the low liquid level end. The pressure regulating plate isolates during this process, reduces the possibility of backflow of the high liquid level liquid, and thus keeps the liquid level at the low liquid level end unchanged, thereby reducing the possibility of backflow of the high liquid level liquid causing the pressure in the exhaust pipe to increase sharply or causing pressure disorder, so that the exhaust pressure can be more stable.

[0035] Further, by the contact switch, when the pressure regulating plate contacts or presses the contact switch, the liquid in the liquid storage pipe is discharged through the liquid discharge pipe, and the staff is prompted to slowly open the normally closed control valve when it is opened, so as to prevent the possibility of opening too fast and causing the pressure in the liquid storage pipe to be unstable, thereby reducing the influence on the exhaust pipe. By the second air pressure sensor, the air pressure in the liquid discharge pipe is detected in real time, and if the air pressure exceeds a certain threshold value, the liquid is discharged, which reduces the possibility of the liquid in the liquid storage pipe accumulating too much or the air pressure in the liquid storage pipe being too large, thereby reducing the influence on the exhaust pipe. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the following will briefly introduce the drawings needed to be used in the embodiments of the present disclosure or the prior art description. Obviously, the drawings described below are only some embodiments of the present disclosure, and other drawings can be obtained by those skilled in the art without creating any creative labor.

[0037] Figure 1 A structure schematic diagram of a liquid discharge structure of a furnace pipe in an embodiment of the present disclosure is shown;

[0038] Figure 2 A structure cross-sectional view schematic diagram of a liquid storage pipe and a liquid discharge pipe in an embodiment of the present disclosure is shown;

[0039] Figure 3 A cross-sectional view schematic diagram of a part of mechanism in an exhaust pipe in an embodiment of the present disclosure is shown.

[0040] Reference signs:

[0041] 1, furnace tube; 2, condenser; 4, monitoring piece; 5, liquid storage tube; 6, normally closed control valve; 7, liquid discharge tube; 8, main controller; 9, exhaust assembly; 91, three-way pipe; 92, exhaust pipe; 93, first air pressure sensor; 94, electromagnetic valve; 10, pressure regulating assembly; 11, pressure regulating plate; 12, contact switch; 13, second air pressure sensor. DETAILED DESCRIPTION

[0042] According to the background, during the growth of the oxide in the furnace tube, liquid will be generated in the furnace tube, which needs to be discharged. During the liquid discharge process, the pressure in the reaction cavity of the furnace tube will be affected.

[0043] In a specific scenario of furnace tube liquid discharge, a furnace tube and a liquid discharge tube are included. The furnace tube is a normal pressure furnace tube. The first end of the liquid discharge tube is connected to the furnace tube. During the liquid discharge process, changes in liquid flow or slight disturbances in the liquid discharge system can cause significant air pressure fluctuations in the normal pressure furnace tube. Such air pressure fluctuations can be directly transmitted to the reaction cavity connected thereto, thereby changing the pressure conditions of the reaction system.

[0044] To solve the above technical problems, in the embodiments of the present disclosure, the first end of the liquid storage tube is connected to the furnace tube, and the liquid storage tube is used to store the liquid discharged by the furnace tube. The first end of the liquid discharge tube is connected to the second end of the liquid storage tube, and is used to discharge the liquid in the liquid storage tube. The monitoring piece is arranged at the first end of the liquid storage tube, and is used to monitor the liquid level. The control valve is arranged on the liquid discharge tube and is coupled with the monitoring piece, and is used to control the conduction of the liquid discharge tube according to the monitoring result of the monitoring piece. In this way, the pressure fluctuation in the furnace tube can be reduced.

[0045] To make the above-mentioned purposes, features and benefits of the present disclosure more obvious and easy to understand, the specific embodiments of the present disclosure will be described in detail below with reference to the drawings.

[0046] Combined with reference Figures 1 to 3 , wherein, Figure 1 shows a structure schematic diagram of a furnace tube liquid discharge structure in an embodiment of the present disclosure; Figure 2 shows a structure cross-sectional view schematic diagram of a liquid storage tube and a liquid discharge tube part in an embodiment of the present disclosure; Figure 3 shows a part mechanism cross-sectional view schematic diagram of an exhaust pipe in an embodiment of the present disclosure.

[0047] Continue to combine with reference Figures 1 to 3 The furnace tube liquid discharge structure can include a liquid storage tube 5 and a liquid discharge tube 7.

[0048] Specifically, the first end of the liquid storage tube 5 is connected to the furnace tube 1. The liquid storage tube 5 is used to store the liquid discharged by the furnace tube 1. The first end of the liquid discharge tube 7 is connected to the second end of the liquid storage tube 5, and is used to discharge the liquid in the liquid storage tube 5.

[0049] In some examples, the furnace tube 1 can be one of a normal pressure furnace tube, a variable pressure furnace tube, or the like.

[0050] It should be noted that the following examples are described with a normal pressure furnace tube as an example, but do not constitute a limitation on the specific type of the furnace tube 1.

[0051] In some examples, the liquid storage tube 5 is designed in a U shape.

[0052] Specifically, the U-shaped liquid storage tube 5 can form a liquid seal by storing liquid, thereby reducing the probability of gas in the furnace tube escaping from the furnace tube liquid discharge structure through the liquid storage tube 5.

[0053] It should be noted that the number of U-shaped bends in the liquid storage tube can be multiple, for example, the number of U-shaped bends in the liquid storage tube 5 can be two, which can further reduce the probability of gas in the furnace tube escaping from the furnace tube liquid discharge structure through the liquid storage tube 5.

[0054] It should be noted that the liquid discharged from the furnace tube 1 has a high temperature, on the one hand, it is easy to release flammable or toxic gas, on the other hand, high-temperature liquid is easy to cause damage to downstream equipment or processing systems.

[0055] In some examples, the furnace tube liquid discharge structure can further include a condenser 2.

[0056] Specifically, the condenser 2 is arranged between the liquid storage tube 5 and the furnace tube 1, the first end of the liquid storage tube 5 is in communication with the outlet of the condenser 2, and the inlet of the condenser 2 is fixedly communicated with the furnace tube 1, so that the condenser 2 can cool the liquid entering the liquid storage tube 5 from the furnace tube 1, thereby reducing the amount of flammable or toxic gas released by the liquid and reducing damage to downstream equipment or processing systems.

[0057] In some examples, the furnace tube liquid discharge structure can further include a monitoring member 4.

[0058] Specifically, the monitoring member 4 can be arranged at the first end of the liquid storage tube 5 for monitoring the liquid level in the liquid storage tube. The monitoring member 4 is a non-contact liquid level sensor, which does not directly contact the liquid, thereby avoiding corrosion of the sensor by chemical substances in the liquid. For example, in some furnace tube liquid discharge environments involving strong acid, strong base, or other corrosive liquids, contact sensors are easily corroded, resulting in a decrease in accuracy or even damage, while non-contact liquid level sensors can work normally in such harsh chemical environments, and also do not have impurities in the liquid attached to the sensor to affect its performance.

[0059] It should be noted that the monitoring member 4 can have at least one monitoring mode. For example, the monitoring member can have a real-time monitoring mode, which can accurately track and feedback the liquid level change in the liquid storage pipe, capture fluctuations in an instant, make the control valve 6 respond quickly to the subtle changes in the liquid level, accurately control the liquid volume and pressure balance, and avoid process deviation. For example, the monitoring member can have an interval monitoring mode, which can monitor the liquid level once every certain period of time, reduce the data acquisition and processing frequency, and reduce energy consumption and data transmission pressure.

[0060] In some examples, the furnace tube liquid discharge structure can further include a control valve 6.

[0061] Specifically, the control valve 6 can be arranged on the liquid discharge pipe 7 for controlling the conduction of the liquid discharge pipe 7, wherein the control valve 6 is coupled with the monitoring member 4 for controlling the conduction of the liquid discharge pipe according to the monitoring result of the monitoring member 4. The control valve 6 can be a normally closed control valve, which is in a closed state under normal circumstances, can effectively prevent the liquid in the liquid discharge pipe 7 from leaking or flowing in unintended circumstances, and is helpful to maintain the stability of the liquid storage in the furnace tube.

[0062] During the growth of oxides in the normal pressure furnace tube, the pressure in the furnace tube 1 will change due to the influence of the external atmospheric pressure, thereby affecting the generation thickness of the oxides. In the wet oxygen process, the liquid discharge pipe 7 is always kept closed to prevent liquid from flowing out at inappropriate times. The wet oxygen process generates liquid, which is stored in the U-shaped liquid storage pipe 5. The monitoring member 4 can monitor the liquid level of the U-shaped liquid storage pipe 5. As the wet oxygen process proceeds, the liquid level in the U-shaped liquid storage pipe 5 gradually rises. A value is set in advance for the monitoring member 4. When the liquid level in the U-shaped liquid storage pipe 5 reaches the set value, the monitoring member 4 sends an electrical signal to the normally closed control valve 6. After receiving the signal, the normally closed control valve 6 is opened. The liquid generated in the U-shaped liquid storage pipe 5 is discharged through the liquid discharge pipe 7. Compared with directly discharging the liquid from the liquid discharge pipe 7, the discharge frequency of the liquid can be reduced, the pressure fluctuation in the pipeline caused by liquid discharge during the wet oxygen process can be effectively reduced, and thereby the pressure in the furnace tube 1 is affected.

[0063] In some examples, the furnace tube liquid discharge structure can further include a main controller 8.

[0064] Specifically, the main controller 8 can be coupled with the monitoring member 4 for receiving the monitoring result monitored by the monitoring member 4. When the monitoring member 4 monitors that the liquid level exceeds the preset value, a signal is sent to the main controller 8. The main controller 8 generates an interlocking signal.

[0065] In a specific application scenario, as the wet oxygen process proceeds, the liquid level in the U-shaped liquid storage pipe 5 gradually rises, and the monitoring member 4 is previously set with a value, when the liquid level in the U-shaped liquid storage pipe 5 reaches the set value, the monitoring member 4 sends an electrical signal to the normally closed control valve 6, after receiving the signal, the normally closed control valve 6 opens, the liquid generated in the U-shaped liquid storage pipe 5 is discharged through the liquid discharge pipe 7, if the normally closed control valve 6 is abnormal at this time, the normally closed control valve 6 may not be able to receive the signal sent by the monitoring member 4 or the valve fails, at this time the normally closed control valve 6 cannot be opened, and the liquid in the U-shaped liquid storage pipe 5 cannot be discharged through the liquid discharge pipe 7, at this time the liquid in the U-shaped liquid storage pipe 5 continues to rise, and the monitoring member 4 monitors the liquid level of the U-shaped liquid storage pipe 5 until it exceeds the preset value. After exceeding the preset value, the monitoring member 4 sends a signal to the main controller 8, after receiving the signal, the main controller 8 quickly generates an interlocking signal according to the preset control logic. After the interlocking signal is transmitted to the execution module of the wet oxygen process, the wet oxygen process is stopped immediately, so that the wet oxygen process can no longer continue.

[0066] In a normal process flow, the wet oxygen process is associated with the furnace pipe liquid discharge system, if the normally closed control valve 6 cannot open the liquid discharge due to abnormal conditions such as electrical failure, mechanical jamming or loss of control signal, the liquid in the liquid discharge pipe 7 may flow into the furnace pipe under the action of factors such as furnace pipe internal gas pressure and its own gravity. The inside of the furnace pipe is a space with extremely strict requirements for the process environment, the backflow liquid may carry some impurities, have different chemical components or be in an inappropriate temperature state, which will seriously interfere with various physical and chemical reaction processes being carried out in the furnace pipe, change the key parameters such as reaction rate, equilibrium constant and product selectivity, and inevitably have a negative impact on product quality, such as causing the product to have excessive impurity content, uneven physical properties, chemical structure defects and other problems. By setting the main controller 8 and the interlocking mechanism constructed thereby, the normally closed control valve 6 can be responded to at the first time of abnormality, effectively cutting off the chain reaction chain that may cause liquid backflow between the wet oxygen process and the liquid discharge system, thereby maximizing the stability of the process environment in the furnace pipe, avoiding the decline of product quality caused by liquid backflow, and ensuring the reliability of the entire production process and the consistency of product quality.

[0067] In some examples, the furnace pipe liquid discharge structure further comprises an exhaust assembly 9.

[0068] Specifically, the exhaust assembly 9 can include a tee pipe 91 located between the condenser 2 and the liquid storage pipe 5, a first end of the tee pipe 91 being connected with an outlet of the condenser 2, and a second end of the tee pipe 91 being in communication with a first end of the liquid storage pipe 5; and an exhaust pipe 92 in communication with a third end of the tee pipe 91.

[0069] It should be noted that, in the wet oxygen process of the atmospheric furnace tube, the gas pressure in the liquid storage pipe 5 has an important influence on the stability of the entire process.

[0070] In some examples, the exhaust assembly can further include a first gas pressure sensor 93.

[0071] Specifically, the first gas pressure sensor 93 can be arranged on the exhaust pipe 92 and coupled with the main controller 8. Since the exhaust pipe 92 is in communication with the liquid storage pipe 5 through the tee pipe 91, the first gas pressure sensor 93 can accurately monitor the gas pressure change in the liquid storage pipe 5 in real time.

[0072] In some examples, the exhaust assembly can further include an electromagnetic valve 94.

[0073] Specifically, the electromagnetic valve 94 can be arranged on the exhaust pipe 92 and coupled with the first gas pressure sensor 93.

[0074] When the gas pressure in the liquid storage pipe 5 is too high due to various reasons (e.g., increase in liquid, evaporation of liquid, generation of gas due to chemical reaction, etc.), the first gas pressure sensor 93 can quickly capture this change in gas pressure and send an electrical signal to the electromagnetic valve 94; the electromagnetic valve 94 opens immediately after receiving the signal, and the gas in the liquid storage pipe 5 is discharged through the exhaust pipe 92. At the same time, the first gas pressure sensor 93 also transmits the gas pressure data to the main controller 8, and the main controller 8 can further monitor and control the entire process according to these data. In this way, the gas pressure in the liquid storage pipe 5 can be effectively controlled in a timely manner, and the adverse effects of high gas pressure on the wet oxygen process can be avoided, such as preventing abnormal discharge of liquid caused by high gas pressure, affecting the pressure balance in the furnace tube 1 and thus affecting the thickness of the oxide generated, and ensuring the stable operation of the wet oxygen process of the atmospheric furnace tube and the quality stability of the final product.

[0075] In some examples, a pressure regulating assembly 10 can be arranged on the liquid storage pipe 5.

[0076] Specifically, the pressure regulating assembly 10 can include a pressure regulating plate 11, a first end of the pressure regulating plate 11 being hingedly connected with the inner wall of the liquid storage pipe 5, so that the pressure regulating plate 11 can move relative to the liquid storage pipe 5 with the hinged end as the axis.

[0077] Specifically, during the exhaust process of the exhaust pipe 92, if the exhaust pressure increases and causes the liquid levels at both ends of the liquid storage pipe 5 to have a height difference, after the exhaust pressure of the exhaust pipe 92 returns to normal or decreases, the end with the high liquid level in the liquid storage pipe 5 will flow to the end with the low liquid level. The pressure plate 11 separates the two ends during this process, reduces the possibility of backflow of the liquid at the high liquid level, and thus keeps the liquid level at the end with the low liquid level unchanged, thereby reducing the possibility of causing the air pressure in the exhaust pipe 92 to increase sharply or become turbulent due to backflow of the liquid at the high liquid level, and making the exhaust pressure more stable.

[0078] In some examples, the first end of the pressure plate 11 is hinged to the inner wall at the U-shaped bend of the liquid storage pipe 5.

[0079] In some examples, the pressure regulating assembly 10 can further include a contact switch 12.

[0080] Specifically, the contact switch 12 is arranged on the liquid storage pipe 5 and can be in contact with the pressure plate 11. The contact switch 12 is coupled to the main controller 8. When the contact switch 12 is in contact with the pressure plate 11, the contact switch 12 can send a contact signal to the main controller 8.

[0081] Specifically, when the pressure plate 11 is in contact with or pressed by the contact switch 12, the contact switch 12 can prompt the worker when discharging the liquid in the liquid storage pipe 5 through the liquid discharge pipe 7, so that the normally closed control valve 6 is slowly opened when it is opened, so as to avoid the possibility of unstable pressure in the liquid storage pipe 5 caused by too fast opening of the normally closed control valve 6, and reduce the influence on the exhaust pipe 92.

[0082] In some examples, the pressure regulating assembly 10 can include a second air pressure sensor 13.

[0083] Specifically, the second air pressure sensor 13 is arranged on the liquid discharge pipe 7, and the second air pressure sensor 13 is coupled to the main controller 8.

[0084] Through the second air pressure sensor 13, the air pressure in the liquid discharge pipe 7 is detected in real time. If the air pressure exceeds a certain threshold value, the worker is reminded to discharge the liquid, so as to reduce the possibility of excessive accumulation of liquid in the liquid storage pipe 5 or excessive air pressure in the liquid storage pipe 5, and reduce the possibility of affecting the exhaust pipe 92.

[0085] It can be understood that, in the description of the present application, the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0086] It can be understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0087] It can be understood that, in the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0088] It can be understood that, in the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0089] It can be understood that when an element is referred to as "fixed to" or "provided on" another element, it can be directly on the other element or there can be a middle element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there can be a middle element.

[0090] It can be understood that the term "and / or" in this article is only a description of the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B can represent: A exists alone, A and B exist together, and B exists alone. In addition, the character " / " in this article represents that the front and rear associated objects are in an "or" relationship.

[0091] It can be understood that the above describes a plurality of embodiment schemes provided by the embodiments of the present disclosure, and each optional mode introduced by each embodiment scheme can be combined, cross-referenced in the case of no conflict, thereby extending a plurality of possible embodiment schemes, which can be considered as disclosed and disclosed embodiment schemes of the present disclosure.

[0092] Although the embodiments of the present disclosure are disclosed as above, the present disclosure is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure, and therefore the protection scope of the present disclosure should be subject to the scope defined by the claims.

Claims

1. A drain structure for a furnace tube, characterized by, The application relates to a liquid storage and discharge device for a furnace, which comprises the following parts: a liquid storage pipe, the first end of which is connected with a furnace pipe, and which is used for storing liquid discharged from the furnace pipe; a liquid discharge pipe, the first end of which is connected with the second end of the liquid storage pipe; a monitoring part arranged at the first end of the liquid storage pipe and used for monitoring the liquid level in the liquid storage pipe; a control valve arranged on the liquid discharge pipe and used for controlling the conduction of the liquid discharge pipe, wherein the control valve is coupled with the monitoring part and used for controlling the conduction of the liquid discharge pipe according to the monitoring result of the monitoring part.

2. The furnace tube drain structure according to claim 1, wherein The application further comprises: a main controller coupled with the monitoring part and used for receiving the monitoring result of the monitoring part and generating an interlocking signal.

3. The furnace tube drain structure of claim 1, wherein The liquid storage pipe is a U-shaped pipe.

4. The furnace tube drain structure of claim 1, wherein The monitoring part is a non-contact liquid level sensor.

5. The furnace tube drain structure of claim 1, wherein The application further comprises: a condenser arranged between the liquid storage pipe and the furnace pipe, wherein the outlet of the condenser is communicated with the first end of the liquid storage pipe, and the inlet of the condenser is communicated with the furnace pipe.

6. The furnace tube drain structure of claim 5, wherein The application further comprises: an exhaust assembly, which comprises: a three-way pipe arranged between the condenser and the liquid storage pipe, the first end of the three-way pipe being connected with the outlet of the condenser, and the second end of the three-way pipe being communicated with the first end of the liquid storage pipe; an exhaust pipe communicated with the third end of the three-way pipe.

7. The furnace tube drain structure of claim 6, wherein, The exhaust assembly further comprises: a first air pressure sensor arranged on the exhaust pipe and coupled with the main controller; an electromagnetic valve arranged on the exhaust pipe and coupled with the first air pressure sensor.

8. The furnace tube drain structure of claim 6, wherein, The application further comprises: a pressure regulating assembly used for regulating the liquid level difference in the liquid storage pipe.

9. The furnace tube drain structure of claim 8, wherein, The pressure regulating assembly comprises: a pressure regulating plate hinged with the inner wall of the liquid storage pipe; a contact switch arranged on the liquid storage pipe and capable of abutting against the pressure regulating plate, the contact switch being coupled with the main controller.

10. The furnace tube drain structure of claim 8, wherein, The pressure regulating assembly further comprises: a second air pressure sensor arranged on the liquid discharge pipe and coupled with the main controller.