Sample detection device

Abstract

The utility model provides a sample detection device. The sample detection device comprises a light source, a beam splitter, a reference objective lens, a reference reflector, a measurement objective lens, a barrel lens and a detector, the reference objective lens is located in a reference light path between the beam splitter and the reference reflector; the measuring objective lens is positioned in a measuring light path between the beam splitter and the sample to be measured; the barrel lens is located in a light path between the beam splitter and the detector; the reference reflector comprises a plurality of mirror surface partitions; the plurality of mirror surface partitions are provided with film layers with different reflectivity, and the reference reflector rotates around the optical axis of the reference objective lens and is used for enabling the reference light beam to be incident to different mirror surface partitions. Therefore, when the to-be-detected sample is detected, the matched mirror surface partition can be selected based on the to-be-detected sample to reflect the reference light beam, and the reflectivity of the reference reflecting mirror is more matched with the reflectivity of the to-be-detected sample, so that a better interference fringe contrast can be obtained, and the detection precision of the to-be-detected sample is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of sample detection, and in particular to a sample detection device. BACKGROUND

[0002] At present, the surface of a sample to be detected is often detected by using interference fringes. Light emitted by a light source is divided into a reference light beam and a measurement light beam. When the two light beams meet, interference fringes are formed. However, because there are many types of samples to be detected, if the same reference mirror is used to reflect the reference light beam, the interference fringes of each sample to be detected cannot reach the best contrast, which reduces the detection accuracy of the sample to be detected. Therefore, it is an urgent technical problem to provide a suitable sample detection device. CONTENT OF THE UTILITY MODEL

[0003] Therefore, the purpose of the present application is to provide a sample detection device that can obtain better interference fringe contrast and improve detection accuracy. The specific scheme is as follows:

[0004] In one aspect, the present application provides a sample detection device, which comprises a light source (101), a beam splitter (102), a reference objective lens (103), a reference mirror (104), a measurement objective lens (105), a barrel mirror (106), and a detector (107).

[0005] The beam splitter (102) is configured to divide the light emitted by the light source (101) into a reference light beam propagating in a reference light path where the reference objective lens (103) is located and a measurement light beam propagating in a measurement light path where the measurement objective lens (105) is located.

[0006] The reference objective lens (103) is located in the reference light path between the beam splitter (102) and the reference mirror (104). The measurement objective lens (105) is located in the measurement light path between the beam splitter (102) and a sample to be detected (108). The barrel mirror (106) is located in the light path between the beam splitter (102) and the detector (107).

[0007] The reference mirror (104) comprises a plurality of mirror surface partitions (1041). The plurality of mirror surface partitions (1041) are provided with film layers having different reflectivities. The reference mirror (104) is configured to rotate around the optical axis of the reference objective lens (103) to make the reference light beam incident on different mirror surface partitions (1041).

[0008] In one possible implementation, the plurality of mirror surface partitions (1041) have equal areas.

[0009] In a possible implementation, the reflectivity of the film layer of the plurality of mirror partitions (1041) increases or decreases in a clockwise direction.

[0010] In a possible implementation, the sample detection device further comprises a rotating structure (109) connected to the reference mirror (104).

[0011] The rotating structure (109) is configured to drive the reference mirror (104) to rotate around the optical axis of the reference objective (103).

[0012] In a possible implementation, the rotating structure is a rotating motor.

[0013] In a possible implementation, the sample detection device further comprises a Kohler illumination module (110) located in the optical path between the light source (101) and the beam splitter (102).

[0014] In a possible implementation, the sample detection device further comprises an optical fiber (111) connected to the light source (101) and configured to guide the light emitted by the light source (101) to the Kohler illumination module (110).

[0015] In a possible implementation, the Kohler illumination module (110) comprises a first lens (1101), a second lens (1102), an aperture stop (1103), and a third lens (1104); the first lens (1101) is located close to the light source (101), and the third lens (1104) is located close to the beam splitter (102).

[0016] In a possible implementation, the reference mirror (104) is located on the focal plane of the reference objective (103).

[0017] In a possible implementation, the sample to be measured (108) is located on the focal plane of the measurement objective (105).

[0018] The embodiment of the present application provides a sample detection device, which comprises a light source (101), a beam splitter (102), a reference objective (103), a reference mirror (104), a measurement objective (105), a barrel mirror (106) and a detector (107); the beam splitter (102) is used for splitting the light emitted by the light source (101) into a reference light beam propagating in a reference light path where the reference objective (103) is located and a measurement light beam propagating in a measurement light path where the measurement objective (105) is located; the reference objective (103) is located in the reference light path between the beam splitter (102) and the reference mirror (104); the measurement objective (105) is located in the measurement light path between the beam splitter (102) and a sample (108) to be detected; the barrel mirror (106) is located in the light path between the beam splitter (102) and the detector (107); the reference mirror (104) comprises a plurality of mirror surface subareas (1041); the plurality of mirror surface subareas (1041) are provided with film layers with different reflectivities, and the reference mirror (104) rotates around the optical axis of the reference objective (103) and is used for making the reference light beam incident to different mirror surface subareas (1041). In this way, when the sample (108) to be detected is detected, the matched mirror surface subarea (1041) can be selected based on the sample (108) to be detected to reflect the reference light beam, the reflectivity of the reference mirror (104) is more matched with the reflectivity of the sample (108) to be detected, so that better interference fringe contrast can be obtained, and the detection precision is improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0020] Figure 1 A schematic diagram of a sample detection device provided by an embodiment of the present application is shown;

[0021] Figure 2 A planar schematic diagram of a reference mirror (104) provided by an embodiment of the present application is shown;

[0022] Figure 3 A schematic diagram of another sample detection device provided by an embodiment of the present application is shown. DETAILED DESCRIPTION

[0023] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings.

[0024] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced without the specific details. In other instances, well-known methods, procedures, components, and circuits have not been described in detail so as not to unnecessarily obscure aspects of the present application.

[0025] For the convenience of understanding, the sample detection device provided by the embodiment of the present application is described in detail below with reference to the accompanying drawings.

[0026] Reference is made to Figure 1 As shown in the figure, the sample detection device provided by the embodiment of the present application includes a light source (101), a beam splitter (102), a reference objective lens (103), a reference mirror (104), a measurement objective lens (105), a barrel lens (106), and a detector (107).

[0027] The beam splitter (102) can be used to divide the light emitted by the light source (101) into a reference light beam propagating in a reference light path where the reference objective lens (103) is located and a measurement light beam propagating in a measurement light path where the measurement objective lens (105) is located. That is, the beam splitter (102) is located on the light emitting side of the light source (101) and can divide the light emitted by the light source (101) into two beams, one of which is a reference light beam and the other of which is a measurement light beam. The reference light beam can propagate in the reference light path where the reference objective lens (103) is located, and the measurement light beam can propagate in the measurement light path where the measurement objective lens (105) is located.

[0028] The reference objective lens (103) can be located in the reference light path between the beam splitter (102) and the reference mirror (104), so that after the reference light beam is emitted from the beam splitter (102), it can be incident on the reference mirror (104) through the reference objective lens (103), and the reference mirror (104) reflects it.

[0029] The measurement objective lens (105) can be located in the measurement light path between the beam splitter (102) and the sample to be measured (108), so that when the sample to be measured (108) is detected, the measurement light beam emitted from the other side of the beam splitter (102) can be incident on the surface of the sample to be measured (108) through the measurement objective lens (105), and the sample to be measured (108) reflects the measurement light beam.

[0030] The reflected reference beam and the reflected measurement beam can return along the original path and re-enter the beam splitter (102), and interference can occur when the two beams meet, for example, Linnik interference, forming interference fringes. The interference fringes can be detected by the detector (107). Since the light emitted from the beam splitter (102) is parallel light, in order to ensure that the detector (107) can detect the interference fringes, a cylindrical lens (106) can be arranged in the optical path between the beam splitter (102) and the detector (107), and the detector (107) is located on the focal plane of the cylindrical lens (106), so that the interference fringes can be observed in the detector (107).

[0031] In a possible implementation, the reference mirror (104) can be located on the focal plane of the reference objective lens (103), so that the reference beam can converge on the reference mirror (104).

[0032] In a possible implementation, the sample to be measured (108) can be located on the focal plane of the measurement objective lens (105), so that the measurement beam can converge on the sample to be measured (108).

[0033] In order to match the reflectivity of the reference mirror (104) with the reflectivity of the sample to be measured (108), and improve the assembly precision and accuracy, a plurality of mirror sub-regions (1041) can be arranged on the reference mirror (104), that is, the reference mirror (104) can include a plurality of mirror sub-regions (1041). Figure 2 As shown, a plan view of a reference mirror (104) provided by an embodiment of the present application is shown, and eight mirror sub-regions (1041) are shown.

[0034] The plurality of mirror sub-regions (1041) are provided with film layers with different reflectivities. Film layers with different reflectivities can be coated on different mirror sub-regions (1041), and the reflectivity can range from 30% to 50%, for example, the reflectivity of one mirror sub-region (1041) is 34%, and the reflectivity of another mirror sub-region (1041) is 46%. The material of the film layer is not specifically limited here.

[0035] The reference mirror (104) can be rotated around the optical axis of the reference objective lens (103), and by rotating the reference mirror (104), different mirror sub-regions (1041) can be aligned with the reference objective lens (103), so that the reference beam can be incident on different mirror sub-regions (1041), and the light energy of the reflected reference beam is different.

[0036] In this way, when the to-be-tested sample (108) is detected, a matched mirror surface sub-area (1041) can be selected based on the to-be-tested sample (108) to reflect the reference light beam, and the matching can be understood as that the reflectivity of the to-be-tested sample (108) is basically consistent with the reflectivity of the mirror surface sub-area (1041), and the difference is not large.

[0037] The contrast K of the interference fringes can be represented as:

[0038]

[0039] wherein I max represents the maximum value of the light intensity in the interference fringes, I min represents the minimum value of the light intensity in the interference fringes. In addition,

[0040]

[0041] wherein I1 represents the light intensity of the measurement light beam, and I2 represents the light intensity of the reference light beam.

[0042] When I1 and I2 are different, I min will be greater than 0. Since I min is 0, K is 1, at this time, the contrast is best, therefore, when I1 and I2 are different, it will lead to a smaller contrast, and when they are the same, the contrast is best.

[0043] That is, when the reflectivity of the to-be-tested sample (108) matches that of the reference mirror (104), the light intensities of the measurement light beam and the reference light beam are basically equal, I min is closer to 0, K is closer to 1, thereby improving the contrast of the interference fringes.

[0044] Further, when different types of to-be-tested samples (108) are detected, a matched mirror surface sub-area (1041) can be selected based on the reflectivity to reflect the reference light beam, so that when the reflected reference light beam and the reflected measurement light beam interfere with each other, the contrast of the interference fringes is also larger, the black and white stripes are clearer, for example, the zero-order interference fringes detected in the detector (107) are clearer. Better interference fringe contrast can weaken the adverse effects of background light, and further, the detection result is more accurate, which can more carefully reflect the surface defects of the to-be-tested sample (108), and realize high-precision detection.

[0045] In addition, when the to-be-tested sample (108) is switched, without re-installing another reference mirror (104) whose reflectivity matches that of the new to-be-tested sample (108), and without re-adjusting the inclination and axial distance of the new reference mirror (104), the assembly complexity is greatly reduced, and the reference mirror (104) is only rotated to align another mirror segment (1041) with the reference objective lens (103), which is easier to debug and greatly improves the detection efficiency.

[0046] In a possible implementation, the areas of the plurality of mirror segments (1041) can be equal. That is, the mirror surface of the reference mirror (104) can be equally divided into N mirror segments (1041), so that the plurality of mirror segments (1041) have the same size. In this way, when the reference mirror (104) is rotated to align different mirror segments (1041) with the reference objective lens (103), it is easier to find a matching mirror segment (1041), and the detection efficiency is further improved.

[0047] Of course, the areas of the plurality of mirror segments (1041) can also be equal, which can be set based on actual needs to achieve personalized settings.

[0048] In a possible implementation, the reflectivity of the film layer of the plurality of mirror segments (1041) can increase or decrease in the clockwise direction. That is, starting from a certain mirror segment (1041), the reflectivity of the mirror segments (1041) can increase or decrease in the clockwise direction. For example, the reference mirror (104) has six mirror segments (1041), and the reflectivity of the six mirror segments (1041) can be 30%, 35%, 40%, 45%, 50%, and 55% in the clockwise direction.

[0049] In this way, when the mirror segment (1041) with the matching reflectivity is determined based on the to-be-tested sample (108), the position of the mirror segment (1041) is set in a certain regularity, so that the matching mirror segment (1041) can be found more easily. In addition, when the to-be-tested sample (108) is switched, the mirror segment (1041) matching the new to-be-tested sample (108) can also be found more easily, and the detection efficiency is greatly improved.

[0050] In a possible implementation, the sample detection device can further include a rotating structure (109) connected to the reference mirror (104), and the reference Figure 3 FIG. 6 shows a schematic diagram of another sample detection device provided by an embodiment of the present application.

[0051] The rotation structure (109) is connected with the reference mirror (104), and the rotation structure (109) can be used to drive the reference mirror (104) to rotate around the optical axis of the reference objective lens (103). That is, the reference mirror (104) can rotate around the light propagation direction under the driving of the rotation structure (109), so that manual rotation is not required, the rotation position under the control of the rotation structure (109) is more accurate, and the detection efficiency is higher.

[0052] In a possible implementation, the rotation structure can be a rotary motor, which has a lower cost and higher accuracy, thereby reducing the cost of the device.

[0053] In a possible implementation, the sample detection device can further include a Kohler illumination module (110) located in an optical path between the light source (101) and the beam splitter (102). Figure 3 As shown, the light emitted by the light source (101) passes through the Kohler illumination module (110) and then enters the beam splitter (102). The presence of the Kohler illumination module (110) can also make the light beam illumination more uniform and will not cause burns to the sample (108) to be detected, and the detection result is more accurate.

[0054] In a possible implementation, the Kohler illumination module (110) can include a first lens (1101), a second lens (1102), an aperture stop (1103), and a third lens (1104); the first lens (1101) is close to the light source (101), and the third lens (1104) is close to the beam splitter (102).

[0055] That is, the light emitted by the light source (101) passes through the first lens (1101), the second lens (1102), the aperture stop (1103), and the third lens (1104) in sequence, and then exits the beam splitter (102), thereby improving the uniformity of the light beam.

[0056] In a possible implementation, the sample detection device can further include an optical fiber (111) connected with the light source (101), for incidenting the light emitted by the light source (101) into the Kohler illumination module (110).

[0057] That is, the optical fiber (111) can be connected to the light outlet of the light source (101), and the other end of the optical fiber (111) faces the Kohler illumination module (110). The optical fiber (111) can reduce light loss, so that more light emitted by the light source (101) can be incident into the Kohler illumination module (110), thereby improving the utilization rate of the light beam.

[0058] The embodiment of the present application provides a sample detection device, which comprises a light source (101), a beam splitter (102), a reference objective (103), a reference mirror (104), a measurement objective (105), a barrel mirror (106) and a detector (107); the beam splitter (102) is used for splitting the light emitted by the light source (101) into a reference light beam propagating in a reference light path where the reference objective (103) is located and a measurement light beam propagating in a measurement light path where the measurement objective (105) is located; the reference objective (103) is located in the reference light path between the beam splitter (102) and the reference mirror (104); the measurement objective (105) is located in the measurement light path between the beam splitter (102) and a sample (108) to be detected; the barrel mirror (106) is located in the light path between the beam splitter (102) and the detector (107); the reference mirror (104) comprises a plurality of mirror surface subareas (1041); the plurality of mirror surface subareas (1041) are provided with film layers with different reflectivities, and the reference mirror (104) rotates around the optical axis of the reference objective (103) to make the reference light beam incident to different mirror surface subareas (1041). In this way, when the sample (108) to be detected is detected, the matched mirror surface subarea (1041) can be selected based on the sample (108) to reflect the reference light beam, the reflectivity of the reference mirror (104) is more matched with the reflectivity of the sample (108), so that better interference fringe contrast can be obtained, and the detection precision is improved.

[0059] Each of the embodiments in the specification is described in a progressive manner, and the same and similar parts of each of the embodiments can be referred to each other, and each of the embodiments mainly describes the difference from other embodiments.

[0060] The above is only the preferred embodiment of the present application, although the present application has been disclosed as above with the preferred embodiment, however, it is not used to limit the present application. Any person skilled in the art, without departing from the scope of the technical scheme of the present application, can make many possible changes and modifications to the technical scheme of the present application by using the above disclosed methods and technical contents, or modify as equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present application, without departing from the content of the technical scheme of the present application, all still belong to the protection scope of the technical scheme of the present application.

Claims

1. A sample detection device, characterized by, The sample detection device comprises a light source (101), a beam splitter (102), a reference objective (103), a reference mirror (104), a measurement objective (105), a barrel mirror (106) and a detector (107); The beam splitter (102) is used for splitting the light emitted by the light source (101) into a reference light beam propagating in a reference light path where the reference objective (103) is located and a measurement light beam propagating in a measurement light path where the measurement objective (105) is located; The reference objective (103) is located in the reference light path between the beam splitter (102) and the reference mirror (104); the measurement objective (105) is located in the measurement light path between the beam splitter (102) and a sample to be detected (108); and the barrel mirror (106) is located in the light path between the beam splitter (102) and the detector (107); The reference mirror (104) comprises a plurality of mirror surface partitions (1041); the plurality of mirror surface partitions (1041) are provided with film layers with different reflectivities, and the reference mirror (104) rotates around the optical axis of the reference objective (103) to make the reference light beam incident to different mirror surface partitions (1041).

2. The sample testing device of claim 1, wherein, The areas of the plurality of mirror surface partitions (1041) are equal.

3. The sample testing device of claim 1, wherein, The reflectivities of the film layers of the plurality of mirror surface partitions (1041) increase or decrease in a clockwise direction.

4. The sample testing device of claim 1, wherein, The sample detection device further comprises a rotating structure (109) connected with the reference mirror (104); The rotating structure (109) is used for driving the reference mirror (104) to rotate around the optical axis of the reference objective (103).

5. The sample detection device of claim 4, wherein, The rotating structure is a rotating motor.

6. The sample testing device of claim 1, wherein, The sample detection device further comprises a Kohler illumination module (110) located in the light path between the light source (101) and the beam splitter (102).

7. The sample testing device of claim 6, wherein, The sample detection device further comprises an optical fiber (111) connected with the light source (101) and used for making the light emitted by the light source (101) incident into the Kohler illumination module (110).

8. The sample testing device of claim 6, wherein, The Kohler illumination module (110) comprises a first lens (1101), a second lens (1102), an aperture stop (1103) and a third lens (1104); the first lens (1101) is close to the light source (101), and the third lens (1104) is close to the beam splitter (102).

9. The sample testing device of any one of claims 1-8, wherein, The reference mirror (104) is located on the focal plane of the reference objective (103).

10. The sample testing device of any one of claims 1-8, wherein, The sample to be detected (108) is located on the focal plane of the measurement objective (105).

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