Objective lens microenvironment adjusting device

Abstract

The utility model provides an objective lens microenvironment adjusting device, which comprises a lens cone, a pore plate and a rib plate, and is characterized in that the pore plate is arranged around the lens cone, and an air bath cavity is formed between the inner side wall of the pore plate and the outer side wall of the lens cone; the pore plate is provided with a plurality of first air inlets and a plurality of first air outlets, the centers of the first air inlets are located on the same straight line, the centers of the first air outlets are located on the same straight line, the first air inlets correspond to the first air outlets in a one-to-one mode, and the first air inlets and the first air outlets are symmetrical about the axis of the pore plate. The first gas inlet is communicated with a first constant-temperature compressed gas source through a speed regulating valve; the rib plates are arranged around the outer side wall of the lens cone and located in the air bath cavity. According to the objective lens microenvironment adjusting device, the first compressed gas can be uniformly blown to different positions of the outer side wall of the lens barrel, so that the uniformity of a flow field around the lens barrel is improved; and the rib plates are beneficial to guiding and stabilizing the air flow, so that the first constant-temperature compressed air can form stable streaming after entering the air bath cavity, and the stability of a flow field is enhanced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor detection, and specifically relates to an objective lens microenvironment adjusting device. BACKGROUND

[0002] With the rapid development of semiconductor technology, the semiconductor manufacturing process is increasingly refined, and the chip integration is significantly improved, which puts forward higher requirements for defect detection and measurement in the semiconductor manufacturing process. The optical components in the semiconductor detection equipment, especially the objective lens, are crucial to the imaging quality, optical path stability and precision of the equipment. The performance of the objective lens is significantly affected by the cleanliness and temperature stability of its microenvironment.

[0003] In the prior art, the whole gas bath scheme of the internal chamber of the equipment is usually adopted, but due to the irregular arrangement of the mechanical, electrical and optical components in the internal chamber, it is not conducive to form a stable flow field, resulting in uneven and unstable flow field around the key optical components (such as the objective lens), and large local temperature change, thereby reducing the imaging quality and precision of the equipment. SUMMARY

[0004] In view of the problem of uneven and unstable flow field around the lens barrel in the prior art, the present application provides an objective lens microenvironment adjusting device. The objective lens microenvironment adjusting device forms a stable gas bath chamber by setting a hole plate and a rib plate, so that the first constant temperature compressed gas can uniformly blow to different positions of the outer side wall of the lens barrel, thereby improving the uniformity of the flow field around the lens barrel. The setting of the rib plate helps to guide and stabilize the airflow, so that the first constant temperature compressed gas can form a stable flow after entering the gas bath chamber, thereby enhancing the stability of the flow field.

[0005] An embodiment of the present application provides an objective lens microenvironment adjusting device, comprising:

[0006] A lens barrel, along the axial direction of the lens barrel, the inner side wall of the lens barrel is sequentially provided with a plurality of lens seats, and each lens seat is provided with a lens;

[0007] A hole plate is arranged around the outer side wall of the lens barrel, and a gas bath chamber is formed between the inner side wall of the hole plate and the outer side wall of the lens barrel; along the axial direction of the hole plate, the hole plate is provided with a plurality of first gas inlets and a plurality of first gas outlets, the centers of the plurality of first gas inlets are located on a straight line, the centers of the plurality of first gas outlets are located on a straight line, the plurality of first gas outlets and the plurality of first gas inlets correspond one by one, and the first gas inlet and the first gas outlet are symmetrical about the axis of the hole plate; the first gas inlet is communicated with a first constant temperature compressed gas source through a speed regulating valve;

[0008] A plurality of fins are arranged around the outer wall of the lens barrel, and the fins are located in the air bath cavity.

[0009] As an embodiment, the first temperature sensor and the second temperature sensor are further included.

[0010] The lens seat corresponding to the lens generating the most heat is provided with the first temperature sensor.

[0011] The lens seat corresponding to the lens generating the least heat is provided with the second temperature sensor.

[0012] As an embodiment, the control unit is further included, and the first temperature sensor, the second temperature sensor, and the speed regulating valve are connected to the control unit.

[0013] As an embodiment, the outer wall of the lens barrel around the lens seat corresponding to the lens generating the most heat is provided with a plurality of fins, and the first interval is provided between adjacent fins.

[0014] The outer wall of the lens barrel around the lens seat corresponding to the lens other than the lens generating the most heat is provided with a plurality of fins, and the second interval is provided between adjacent fins.

[0015] The first interval is smaller than the second interval.

[0016] As an embodiment, at least two second air inlets are symmetrically arranged at the bottom of the lens barrel, and at least two second air outlets are symmetrically arranged at the top of the lens barrel, the second air inlets are communicated with the second constant temperature compressed gas source through the filter.

[0017] The air passage is arranged on the lens seat to communicate between adjacent internal cavities.

[0018] As an embodiment, the angle between the air passage and the plane where the lens is located is an acute angle along the flow direction of the gas in the air passage.

[0019] As an embodiment, a plurality of air passages are arranged in the whole area of the lens seat along the circumferential direction of the lens seat.

[0020] As an embodiment, a plurality of air passages are arranged in part of the area of the lens seat along the circumferential direction of the lens seat, and the air passages on adjacent lens seats are symmetric about the axis of the lens barrel.

[0021] As an embodiment, the area of the lens seat where the air passage is arranged accounts for 25% to 50% of the total area of the lens seat.

[0022] As an implementation, at least two second air inlets are symmetrically arranged at the middle part of the lens barrel, at least two second air outlets are symmetrically arranged at the top of the lens barrel, and at least two third air outlets are arranged at the bottom of the lens barrel.

[0023] The mirror seat is provided with an air channel to communicate between adjacent internal chambers.

[0024] As described above, the objective lens micro-environment adjusting device has the following beneficial effects:

[0025] The objective lens micro-environment adjusting device of the present application forms an air bath cavity between the outer sidewall of the lens barrel and the hole plate, and the first constant-temperature compressed gas source flows out of the constant-temperature compressed gas through the plurality of first air inlets on the hole plate, which is uniformly blown to different positions of the outer sidewall of the lens barrel, effectively avoiding the local overheating or overcooling phenomenon, and ensuring the uniformity of the flow field around the lens barrel; the existence of the rib plate enhances the flow effect of the gas, so that the gas forms a stable flow around the lens barrel, reduces the turbulence and vortex in the flow field, and improves the overall stability of the flow field. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 A structure schematic diagram of the objective lens micro-environment adjusting device according to the first embodiment of the present application is shown;

[0027] Figure 2 A schematic diagram of the first constant-temperature compressed gas flowing in the objective lens micro-environment adjusting device according to the first embodiment of the present application is shown;

[0028] Figure 3 A structure schematic diagram of the rib plate arranged in the objective lens micro-environment adjusting device according to the first embodiment of the present application is shown;

[0029] Figure 4 A flow chart of temperature control in the air bath cavity of the objective lens micro-environment adjusting device according to the first embodiment of the present application is shown;

[0030] Figure 5 A schematic diagram of the second constant-temperature compressed gas flowing in the objective lens micro-environment adjusting device according to the second embodiment of the present application is shown;

[0031] Figure 6 A structure schematic diagram of the air channel in the objective lens micro-environment adjusting device according to the second embodiment of the present application is shown;

[0032] Figure 7 A structure schematic diagram of the air channel in the objective lens micro-environment adjusting device according to the second embodiment of the present application is shown;

[0033] Figure 8The structure schematic view of the air passage arranged in the lens holder of another objective lens micro-environment adjusting device according to the second embodiment of the utility model is shown.

[0034] Element number explanation

[0035] 100, lens barrel; 110, lens holder; 111, air passage; 120, lens; 130, internal chamber; 140, second air inlet; 150, second air outlet; 200, aperture plate; 210, first air inlet; 220, first air outlet; 300, air bath cavity; 400, speed regulating valve; 500, fin; 600, first temperature sensor; 700, second temperature sensor; 800, filter. DETAILED DESCRIPTION

[0036] The embodiments of the utility model are explained below through specific examples, and other advantages and effects of the utility model can be easily understood by those skilled in the art from the disclosure of the specification. The utility model can also be implemented or applied through other different embodiments, and various modifications or changes can be made to the details in the specification based on different viewpoints and applications without departing from the spirit of the utility model.

[0037] Please refer to Figures 1 to 8 It should be noted that the diagrams provided in the embodiments only schematically illustrate the basic concept of the utility model, and only the components related to the utility model are shown in the diagrams, not the number, shape and size of the components during actual implementation. The shape, number and proportion of the components during actual implementation can be randomly changed, and the component layout pattern can be more complex.

[0038] As a core optical component in semiconductor detection equipment, the performance of the objective lens is directly affected by the cleanliness and temperature stability of the micro-environment. A stable and clean micro-environment can ensure high-precision imaging and optical path stability of the objective lens, thereby meeting the demand for high-precision detection in the semiconductor manufacturing process.

[0039] However, the air bath scheme of the internal chamber of the semiconductor detection equipment in the prior art has obvious deficiencies. The whole chamber air bath method commonly used is difficult to form a stable and uniform flow field due to the irregular arrangement of mechanical, electrical and optical components in the internal chamber. This leads to uneven and unstable flow field around the key optical components, especially the lens barrel, and large local temperature variation, which seriously affects the imaging quality and precision of the equipment.

[0040] In order to improve the cleanliness of the internal chamber, the prior art usually installs a fan filter unit (FFU) on the top of the device, the FFU mainly includes a filter, a fan, a housing, a control assembly and the like, and can provide sufficient air volume for the internal chamber to maintain the cleanliness of the overall chamber. However, the FFU has the following problems in actual application:

[0041] 1. Insufficient temperature regulation capability: the FFU lacks the function of local temperature stabilization and regulation, and the air bath temperature thereof fluctuates greatly with the ambient temperature, which cannot provide the required stable environment for the key optical device, especially the objective lens, and such temperature fluctuation may cause the performance of the objective lens to decrease, thereby affecting the imaging quality and precision;

[0042] 2. Flow field stability problem: due to the irregular arrangement of internal components of the semiconductor detection device, the air bath provided by the FFU is difficult to form a stable flow field, and the existence of local turbulence makes the particles around the key components (such as the objective lens) unable to be timely removed, thereby causing optical pollution and further reducing the imaging quality, optical path stability and precision of the device;

[0043] 3. Measurement precision and adjustment difficulty: the instability of the flow field and the temperature fluctuation in the prior art solution may cause insufficient measurement precision, and increase the difficulty of adjustment, which cannot meet the demand of modern semiconductor wafer factories for high-precision and high-efficiency production.

[0044] In view of the above defects, the present application provides an objective lens micro-environment adjusting device. The following embodiments are used for detailed description.

[0045] Embodiment one

[0046] The present embodiment provides an objective lens micro-environment adjusting device, as shown in Figure 1 The objective lens micro-environment adjusting device includes a lens barrel 100, a hole plate 200 and a rib plate 500.

[0047] The lens barrel 100 is generally a hollow cylindrical structure, and along the axial direction of the lens barrel 100, the inner side wall of the lens barrel 100 is sequentially and spacedly provided with a plurality of lens seats 110 from bottom to top, and each lens seat 110 is respectively provided with a lens 120. Along the horizontal direction, the cross section of the lens 120 is generally circular, the cross section of the lens seat 110 is circular ring, and the lens 120 is embedded in the inside of the lens seat 110. Since there is a certain distance between adjacent lens seats 110, the internal chamber 130 is enclosed between adjacent lens seats 110, lenses 120 and the inner side wall of the lens barrel 100, and the inside of the lens barrel 110 is divided into a plurality of internal chambers 130 by the lens seats 110 and the lenses 120.

[0048] The hole plate 200 is arranged around the circumference of the outer sidewall of the lens barrel 100, and the inner sidewall of the hole plate 200 and the outer sidewall of the lens barrel 100 form the air bath cavity 300. Since the hole plate 200 is arranged around the circumference of the outer sidewall of the lens barrel 100, the cross section of the hole plate 200 is circular ring-shaped (the width of the circular ring is the same as the thickness of the hole plate) in the horizontal plane direction. Along the axial direction of the hole plate 200, a plurality of first air inlets 210 and a plurality of first air outlets 220 are arranged on the hole plate 200, the centers of the plurality of first air inlets 210 are located on the same straight line (for example, the first straight line), the centers of the plurality of first air outlets 220 are located on the same straight line (for example, the second straight line), the first straight line and the second straight line are symmetrical about the axis of the hole plate 200; the positions of the plurality of first air inlets 210 on the hole plate 200 correspond one-to-one to the positions of the plurality of first air outlets 220 on the hole plate 200, and each first air inlet 210 is connected to the first constant-temperature compressed gas source through a speed regulating valve 400. Specifically, as shown in Figure 1 each first air inlet 210 is connected to an air inlet pipe, a plurality of air inlet pipes and the speed regulating valve 400 can be provided with a flow dividing device, each first air outlet 220 is connected to an air outlet pipe, and the outlets of a plurality of air outlet pipes are connected to a flow collecting pipe. In this way, the first constant-temperature compressed gas in the first constant-temperature compressed gas source enters the flow dividing device through the speed regulating valve 400, flows to different air inlet pipes through the flow dividing device, and then enters the air bath cavity 300 through the first air inlet 210. The first constant-temperature compressed gas completes heat convection around the outer sidewall of the lens barrel 100, carries the heat emitted from the inside of the lens barrel 100, and maintains the temperature of the lens 120 stable. Then, the first constant-temperature compressed gas converges at the first air outlet 220 opposite to the first air inlet 210, enters the air outlet pipe through the plurality of first air outlets 220 from the air bath cavity 300, and is finally discharged through the flow collecting pipe. The first constant-temperature compressed gas can be, for example, constant-temperature compressed air.

[0049] The rib plate 500 is arranged around the outer sidewall of the lens barrel 100 and located in the air bath cavity 300. Specifically, one or more rib plates 500 can be arranged on the outer sidewall of the lens barrel 100. When one rib plate 500 is arranged, the shape of the rib plate 500 is spiral, and the rib plate 500 spirals from the bottom of the outer sidewall of the lens barrel 100 to the top of the outer sidewall of the lens barrel 100. When a plurality of rib plates 500 are arranged, the shape of the rib plate 500 can be various, for example, the shape of the rib plate 500 can be circular ring-shaped, a plurality of rib plates 500 are sequentially and spacedly arranged on different positions of the outer sidewall of the lens barrel 100 from bottom to top, or the shape of the rib plate 500 can be needle-shaped, a plurality of needle-shaped rib plates 500 are sequentially and spacedly arranged along the circumference of the outer sidewall of the lens barrel 100, and then sequentially and spacedly arranged on the outer sidewall of the lens barrel 100 from top to bottom along the axial direction of the lens barrel 100 according to the above arrangement method.

[0050] The objective lens micro-environment adjusting device provided by the embodiment sets the hole plate 200, constructs an air bath cavity 300 between the lens barrel 100 and the hole plate 200, and directs the first constant-temperature compressed gas to different positions of the air bath cavity 300 through the plurality of first gas inlets 210, effectively avoiding the local overheating or overcooling phenomenon that may occur in the prior design, and ensuring the temperature uniformity of the flow field around the lens barrel through the uniform distribution of the gas flow, thereby improving the working stability of the objective lens and the imaging quality. The setting of the rib plate 500 not only enhances the flow effect of the gas, but also makes the gas form a stable flow around the lens barrel. The stable flow significantly reduces the turbulence and vortex phenomena in the flow field, reduces the interference of the gas flow on the objective lens, and further improves the overall stability of the flow field.

[0051] In an optional embodiment, as shown in Figure 1 and Figure 2 , the objective lens micro-environment adjusting device provided by the embodiment further comprises a first temperature sensor 600 and a second temperature sensor 700. The first temperature sensor 600 can be used to measure the highest temperature in the lens barrel 100, and the second temperature sensor 700 can be used to measure the lowest temperature in the lens barrel 100. According to the temperature measured by the first temperature sensor 600 and the temperature measured by the second temperature sensor 700, the opening of the speed regulating valve 400 is adjusted to adjust the flow of the first compressed gas entering the air bath cavity 300, thereby adjusting the temperature in the lens barrel 100 and further improving the uniformity of the flow field temperature around the lens barrel. Specifically, as shown in Figure 3 , the lens seat 110 corresponding to the lens 120 that generates the most heat is provided with the first temperature sensor 600, and the side wall of the lens barrel 100 between the two lenses 120 that generate the least heat is provided with the second temperature sensor 700. Because the air domain in the internal cavity 130 between the two lenses 120 that generate the least heat generates less heat, the second temperature sensor 700 is arranged on the side wall of the lens barrel 100 between the two lenses 120 that generate the least heat. For example, Figure 3 , the inner side wall of the lens barrel 100 is sequentially provided with a first lens, a second lens, a third lens and a fourth lens from bottom to top. If the second lens generates the most heat and the third lens and the fourth lens generate the least heat, the first temperature sensor 600 is arranged on the lens seat 110 mounting the second lens, and the second temperature sensor 700 is arranged on the side wall of the lens barrel 100 between the third lens and the fourth lens. As to how to know which lens 120 generates the most heat and which lens 120 generates the least heat in the lens barrel 100, a temperature sensor can be arranged on each lens seat 110 of each lens 120 in the lens barrel 100, or the heat generated by each lens 120 can be known according to the design and function of the semiconductor detection equipment.

[0052] In an optional embodiment, as shown in Figure 2As shown, the objective microenvironment adjusting device of the embodiment further comprises a control unit, the first temperature sensor 600, the second temperature sensor 700 and the speed regulating valve 400 are all connected with the control unit. The first temperature sensor 600 and the second temperature sensor 700 arranged in the lens barrel 100 can monitor the internal temperature of the lens barrel 100 in real time and transmit the temperature data to the control unit, and the control unit adjusts the opening or closing degree of the speed regulating valve 400 according to the internal temperature of the lens barrel 100 to control the gas flow to the gas bath cavity 300, so as to realize closed-loop control.

[0053] The specific control process is as follows: Figure 4 As shown, Figure 4 In the formula, T is the set temperature, Tmax is the highest temperature measured by the first temperature sensor 600, Tmin is the lowest temperature measured by the second temperature sensor 700, F is the opening degree of the speed regulating valve 400, δf is the adjustment amount of the speed regulating valve 400, and δt is the set temperature uniformity parameter. The control unit compares Tmax, T and Tmin after receiving the highest temperature Tmax and the lowest temperature Tmin, and adjusts the opening degree of the speed regulating valve 400 according to the comparison:

[0054] (1) When T > Tmax, the opening degree of the speed regulating valve 400 should be reduced until it is opened to 0%; if the set temperature T cannot be reached, a warning is issued;

[0055] (2) When Tmax > T > Tmin and Tmax-Tmin > δt, the opening degree of the speed regulating valve 400 should be increased until it is opened to 100%; if the set temperature uniformity parameter δt cannot be reached, a warning is issued;

[0056] (3) When Tmax > T > Tmin and Tmax-Tmin < δt, the opening degree of the speed regulating valve 400 does not need to be changed;

[0057] (4) When Tmin > T, the opening degree of the speed regulating valve 400 should be increased until it is opened to 100%; if the set temperature T cannot be reached, a warning is issued.

[0058] After the warning is issued, the cause needs to be investigated to maintain the uniformity of the temperature in the lens barrel 100.

[0059] In an optional embodiment, during the use of the objective lens, light continuously passes through the air region within each lens 120 and the internal chamber 130. Light passing through the air region of the internal chamber 130 can be considered completely transmitted, generating virtually no heat. However, when light passes through the lens 120, it cannot be completely transmitted due to limitations in lens material and manufacturing process, generating more heat compared to the air region of the internal chamber 130. Furthermore, due to optical design requirements, the shapes, sizes, and coatings of different lenses 120 vary, thus the heat generated when light passes through each lens 120 also differs. Figure 3 As shown, when multiple ribs 500 are provided on the outer wall of the lens barrel 100, the distance between adjacent ribs 500 can be the same or different. For example, denser ribs 500 can be provided on the outer wall of the lens barrel 100 where the lens 120 generates the most heat, in which case the first distance L1 between adjacent ribs 500 is smaller; sparser ribs 500 can be provided on the outer wall of the lens barrel 100 where the lens 120 generates less heat, in which case the second distance L2 between adjacent ribs 500 is larger, at least L1 is smaller than L2. The distance between adjacent ribs 500 provided on the outer arm of the lens barrel 100 where the lens 120 generates moderate heat can be set according to actual needs, for example, it can be between L1 and L2, or greater than L2, etc.

[0060] Example 2

[0061] This embodiment also provides a device for adjusting the microenvironment of an objective lens, such as... Figure 5 and Figure 6 As shown, the objective lens microenvironment adjustment device also includes a lens barrel 100, an aperture plate 200, and a rib plate 500. The similarities to Embodiment 1 will not be repeated here; the differences from Embodiment 1 are as follows:

[0062] like Figure 5 and Figure 6As shown, the objective lens micro-environment adjusting device further comprises at least two second air inlets 140 symmetrically arranged at the bottom of the lens barrel 100, and at least two second air outlets 150 symmetrically arranged at the top of the lens barrel 100, the second air inlets 140 are communicated with the second constant-temperature compressed gas source through the filter 800; the air channel 111 is arranged on the lens seat 110 to communicate between adjacent internal chambers 130. The filter 800 can filter particles in the second constant-temperature compressed gas to prevent the particles from being introduced into the internal chamber 130 of the lens barrel 100. In order to further improve the cleanliness of the second constant-temperature compressed gas, two filters 800 can be arranged to filter the second constant-temperature compressed gas. The filtered second constant-temperature compressed gas enters the internal chamber 130 of the lens barrel 100 from the second air inlets 140 at the bottom of the lens barrel 100, and the second constant-temperature compressed gas flows through the air channel 111 arranged on the lens seat 110 from bottom to top in a staggered manner to ensure that each internal chamber 130 can form a flow area. The second constant-temperature compressed gas can be constant-temperature compressed nitrogen.

[0063] The objective lens micro-environment adjusting device of the embodiment can form an internal overpressure in the lens barrel 100, timely discharge the particles generated or existing in the lens barrel 100, and prevent external particles from entering, thereby effectively preventing optical pollution and improving the imaging quality of the objective lens and the detection accuracy of the semiconductor detection equipment.

[0064] In an optional embodiment, as shown in Figure 6 In the flow direction of the gas in the air channel 111, the included angle a between the air channel 111 and the plane where the lens 120 is located is an acute angle, so that the gas can fill each internal chamber 130, and the smaller the value of a is, the better the gas flow effect will be.

[0065] In an optional embodiment, the cross section of the lens seat 110 is annular, and along the circumferential direction of the lens seat 110, as shown in Figure 7 In the entire region of the lens seat 110, a plurality of air channels 111 are arranged, that is, the air channels 111 are arranged around the lens seat 110 by 360°, and the spacing between adjacent air channels 111 is uniform; as shown in Figure 8 In the entire region of the lens seat 110, a plurality of air channels 111 are arranged, that is, the air channels 111 are arranged around the lens seat 110 by 360°, and the spacing between adjacent air channels 111 is uniform; as shown in Figure 8As shown, the air passages 111 on the lower mirror seat 110 are symmetrical with the air passages 111 on the upper mirror seat 110. The shape of the air passages 111 on the mirror seat 110 can be a circular hole or a slot hole. The number of the air passages 111 can be set according to the flow rate of the second constant-temperature compressed gas. When the slot hole is used, the number of the air passages 111 can be reduced because the flow rate of the slot hole is greater than that of the circular hole.

[0066] In an optional embodiment, the objective lens microenvironment adjusting device can also change the flow direction of the second constant-temperature compressed gas in the internal cavity 130 of the lens barrel 100. For example, at least two second air inlets 140 can be symmetrically arranged at the middle part of the lens barrel 100 (i.e. at the middle position of the lens barrel 100 along the axial direction of the lens barrel 100 and along the circumferential direction thereof), at least two second air outlets 150 can be symmetrically arranged at the top of the lens barrel 100, and at least two third air outlets can be symmetrically arranged at the bottom of the lens barrel 100. The air passages 111 are arranged on the mirror seat 110 to communicate between the adjacent internal cavities 130. In this way, after the second constant-temperature compressed gas enters the internal cavity of the lens barrel 100 through the second air inlets 140, the second constant-temperature compressed gas is divided into two paths, one of which flows to the top of the lens barrel 100 and is discharged from the second air outlets, and the other of which flows to the bottom of the lens barrel 100 and is discharged from the third air outlets.

[0067] The above embodiments are only illustrative of the principles and effects of the present application, and are not intended to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed in the present application should be covered by the claims of the present application.

Claims

1. An objective microenvironment adjusting device, characterized by, The application relates to a microscope comprising: a lens barrel, an inner wall of the lens barrel being provided with a plurality of lens holders in sequence along an axial direction of the lens barrel, each of the lens holders being provided with a lens, and an internal cavity being formed between adjacent lenses, lens holders and the inner wall of the lens barrel; a hole plate, an inner wall of the hole plate being provided around an outer wall of the lens barrel, and an air bath cavity being formed between the inner wall of the hole plate and the outer wall of the lens barrel; a plurality of first air inlets and a plurality of first air outlets being provided on the hole plate along an axial direction of the hole plate, centers of the first air inlets being located on a straight line, centers of the first air outlets being located on a straight line, the first air inlets and the first air outlets corresponding to each other, and the first air inlets and the first air outlets being symmetrical about an axis of the hole plate; the first air inlets being communicated with a first constant-temperature compressed gas source through a speed regulating valve; a plurality of fins being provided around the outer wall of the lens barrel and located in the air bath cavity.

2. The objective microenvironment conditioning device of claim 1, wherein, a first temperature sensor and a second temperature sensor are further included; the first temperature sensor is arranged on the lens holder corresponding to the lens generating the most heat; the second temperature sensor is arranged on the side wall of the lens barrel between the two lenses generating the least heat.

3. The objective microenvironment conditioning device of claim 2, wherein, a control unit is further included, and the first temperature sensor, the second temperature sensor and the speed regulating valve are connected with the control unit.

4. The objective microenvironment conditioning device according to any one of claims 1 to 3, characterized in that a plurality of fins are arranged on the outer wall of the lens barrel around the lens holder corresponding to the lens generating the most heat, and a first interval is formed between adjacent fins; a plurality of fins are arranged on the outer wall of the lens barrel around the lens holder corresponding to the lenses except the lens generating the most heat, and a second interval is formed between adjacent fins; the first interval is smaller than the second interval.

5. The objective microenvironment conditioning device of claim 1, wherein, at least two second air inlets are symmetrically arranged at the bottom of the lens barrel, at least two second air outlets are symmetrically arranged at the top of the lens barrel, and the second air inlets are communicated with a second constant-temperature compressed gas source through a filter; air channels are arranged on the lens holders to communicate adjacent internal cavities.

6. The objective microenvironment conditioning device of claim 5, wherein, an included angle between the air channels and a plane where the lenses are located is an acute angle along a flow direction of the gas in the air channels.

7. The objective microenvironment conditioning device of claim 5 or 6, wherein, a plurality of air channels are arranged in all regions of the lens holder along a circumferential direction of the lens holder.

8. The objective microenvironment conditioning device of claim 5 or 6, wherein, a plurality of air channels are arranged in partial regions of the lens holder along a circumferential direction of the lens holder, and the air channels on adjacent lens holders are symmetrical about the axis of the lens barrel.

9. The objective microenvironment conditioning device of claim 8, wherein, the region where the air channels are arranged on the lens holder accounts for 25%-50% of the total region of the lens holder.

10. The objective microenvironment conditioning device of claim 1, wherein, at least two second air inlets are symmetrically arranged at the middle of the lens barrel, at least two second air outlets are symmetrically arranged at the top of the lens barrel, and at least two third air outlets are arranged at the bottom of the lens barrel; air channels are arranged on the lens holders to communicate adjacent internal cavities.

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