Mounting and dismounting jig for glass mask plate of vertical exposure machine

Abstract

The utility model relates to the technical field of glass mask plate dismounting and mounting, and discloses a vertical exposure machine glass mask plate mounting and dismounting jig which comprises a frame body, a positioning connecting piece and a placing seat, and the frame body is arranged on a mask plate platform through the positioning connecting piece; the placing seat is arranged on the frame body, and the bottom of the inner wall of the placing groove for placing the glass mask plate on the placing seat is flush with the top of the Y-axis positioning block of the mask plate platform. When the frame body is arranged on the mask plate platform, the bottom of the inner wall of the placing groove is flush with the top of a Y-axis positioning block of the mask plate platform. The device has the effects that the convenience and the stability of dismounting and mounting the glass mask plate are improved, and the possibility of falling of the glass mask plate is reduced.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of glass mask plate dismounting, in particular to a vertical exposure machine glass mask plate mounting and dismounting jig. BACKGROUND

[0002] The vertical exposure machine is a high-precision device for pattern transfer by using the photoetching principle and is widely applied to the fields of semiconductors, PCBs, FPDs, LCDs, TP, IC carriers and the like. The glass mask plate is a key tool for pattern transfer in microelectronic manufacturing, and its performance and quality directly affect the photoetching effect.

[0003] The mask plate platform in the vertical exposure machine is specially used for placing the glass mask plate, and at present, the glass mask plate is generally vertically installed on the mask plate platform. The glass mask plate is replaced according to different product requirements during use. Therefore, the glass mask plate needs to be replaced regularly to ensure the precision and quality of the photoetching process.

[0004] At present, in order to place the glass mask plate accurately, X-axis positioning blocks and Y-axis positioning blocks are arranged on the mask plate platform. When the glass mask plate is placed, the glass mask plate is placed on the top of the Y-axis positioning blocks for preliminary positioning, then the glass mask plate is moved along the X-axis direction and is in contact with the X-axis positioning blocks, so that the positioning is completed.

[0005] However, at present, in order to process the subsequent alignment of the glass mask plate, the thickness of the X-axis positioning blocks and the Y-axis positioning blocks is generally small. When the glass mask plate is placed on the Y-axis positioning blocks, the Y-axis positioning blocks do not exceed the glass mask plate, the contact area between the Y-axis positioning blocks and the glass mask plate is small, and the Y-axis positioning blocks are difficult to stably support the glass mask plate. Therefore, the glass mask plate is unstable and is prone to falling.

[0006] Therefore, at present, at least two operators are needed to cooperate to complete the positioning when the glass mask plate is dismounted. The two operators cooperate to position the glass mask plate, so as to improve the stability during the dismounting process of the glass mask plate.

[0007] The mask plate platform is provided with a vacuum groove, a vacuum generator is communicated with the vacuum groove through a pipeline, and a negative pressure is formed on the vacuum groove after the glass mask plate is placed on the mask plate platform, so that the glass mask plate is adsorbed. The glass mask plate is fixed on the mask plate platform by the vacuum adsorption, so that the dismounting is completed.

[0008] However, sometimes when the glass mask plate is placed, the operator may not accurately install the glass mask plate, so that the glass mask plate is not firmly adsorbed by the vacuum, and the glass mask plate is prone to falling. CONTENT OF THE INVENTION

[0009] In order to improve the convenience and stability of disassembling the glass mask plate and reduce the possibility of glass mask plate falling, the application provides a vertical exposure machine glass mask plate mounting and dismounting jig.

[0010] The vertical exposure machine glass mask plate mounting and dismounting jig provided by the application adopts the following technical scheme:

[0011] A vertical exposure machine glass mask plate mounting and dismounting jig is used to assist in mounting the glass mask plate to the mask plate platform, and the mounting and dismounting jig comprises a frame body, a positioning connecting piece and a placing seat, wherein:

[0012] The frame body is arranged on the mask plate platform through the positioning connecting piece;

[0013] The placing seat is arranged on the frame body, and the inner wall bottom of the placing groove for placing the glass mask plate is flush with the top of the Y-axis positioning block of the mask plate platform;

[0014] When the frame body is placed on the mask plate platform, the inner wall bottom of the placing groove is flush with the top of the Y-axis positioning block of the mask plate platform.

[0015] Optionally, the placing seat is provided with a clamping groove;

[0016] The frame body abuts against the inner wall top of the clamping groove.

[0017] Optionally, the bottom surface and the side surface of the inner wall of the placing groove are arranged at an obtuse angle.

[0018] Optionally, the frame body comprises a first horizontal plate, a second horizontal plate and a vertical plate, wherein:

[0019] The first horizontal plate is parallel to the upper side of the second horizontal plate;

[0020] The vertical plate connects the first horizontal plate and the second horizontal plate.

[0021] Optionally, the frame body is provided with a handle.

[0022] Optionally, the positioning connecting piece comprises a rotating shaft, wherein:

[0023] The rotating shaft is arranged on the frame body;

[0024] The mask plate platform is provided with a plug-in hole for inserting the rotating shaft.

[0025] Optionally, the end of the rotating shaft is provided with a locking block;

[0026] The inner wall of the plug-in hole is provided with a locking groove.

[0027] Optionally, the positioning connecting piece further comprises a shaft sleeve.

[0028] The shaft sleeve is arranged on the frame body;

[0029] The shaft sleeve is arranged on the frame body;

[0030] The rotating shaft penetrates the shaft sleeve and is rotationally matched with the shaft sleeve;

[0031] The rotating shaft is provided with a pointer.

[0032] Optionally, a plurality of clamping members for clamping the glass mask plate are circumferentially arranged on the mask plate platform along the axial direction of the mask plate platform.

[0033] Optionally, the clamping member comprises a sliding block, a baffle and a screw rod, wherein:

[0034] The sliding block is arranged on the mask plate platform;

[0035] The baffle is arranged on the baffle, and a limiting groove for clamping the glass mask plate is formed between the baffle and the sliding block;

[0036] The screw rod is threadedly connected with the mask plate platform;

[0037] The screw rod is threadedly connected with the mask plate platform;

[0038] The screw rod is threadedly connected with the mask plate platform;

[0039] The sliding block is arranged on the mask plate platform;

[0040] 1. By installing the placement seat of the dismounting tool, the bottom of the glass mask plate contacts the inner wall bottom of the placement groove after being vertically carried to the placement groove, and the inner wall bottom of the placement groove cooperates with the Y-axis positioning block to support the glass mask plate. The width of the placement groove is greater than the thickness of the glass mask plate. This design not only improves the support stability of the glass mask plate, avoids the inclination or damage of the glass mask plate due to insufficient support during placement, but also enables the operator to only slightly move the position of the glass mask plate in the X-axis direction to complete positioning when placing the glass mask plate, greatly improving the convenience of placing the glass mask plate and reducing the operation time and labor cost.

[0041] 2. The proximity switch on the mask plate platform works in conjunction with the vacuum suction button. Only when the proximity switch detects that the frame is installed on the mask plate platform, the vacuum suction button can control the vacuum generator to work. This design effectively avoids the situation that the glass mask plate is accidentally dropped due to the false touch of the vacuum suction button. When disassembling the glass mask plate, the frame also needs to be installed on the mask plate platform first. After the proximity switch detects the installation of the frame, the vacuum suction button can release the vacuum inside the vacuum groove, so as to ensure that the glass mask plate can be safely and stably taken down, reduce the safety risk in the operation process, and protect the safety of the operator and the equipment.

[0042] 3. The frame is fixed on the mask plate platform through the positioning connector, and the positioning connector includes a rotating shaft and a shaft sleeve. The end of the rotating shaft is provided with a locking block, and the locking block and the rotating shaft are T-shaped in cross section, which is matched with the locking groove on the inner wall of the plug-in hole on the mask plate platform. When installing the frame, the rotating shaft is inserted into the plug-in hole, the locking block is inserted into the locking groove, and then the rotating shaft is rotated, so that the inner wall of the locking groove limits the locking block, thereby firmly fixing the frame. In addition, the rotating shaft is provided with a pointer, and the shaft sleeve is provided with an indication mark. The operator can judge the position of the locking block in the locking groove by observing the relative position of the pointer and the indication mark, so as to ensure that the locking block is correctly limited. This design not only improves the convenience of installing the frame, so that the operator can quickly and accurately complete the installation of the frame, but also enhances the stability of the frame installation, reduces the possibility of loosening or falling off of the frame in the use process due to insecure installation, and ensures the smooth progress of the entire glass mask plate installation and disassembly process. BRIEF DESCRIPTION OF DRAWINGS

[0043] Figure 1 is the overall structure schematic diagram of the embodiment of the application.

[0044] Figure 2 is the schematic diagram of the embodiment of the application, which embodies the position of the vacuum detection table.

[0045] Figure 3 is the schematic diagram of the embodiment of the application, which embodies the structure of the frame.

[0046] Figure 4 is the schematic diagram of the embodiment of the application, which embodies the position of the positioning column.

[0047] Figure 5 is Figure 2 is the enlarged schematic diagram of part A in

[0048] BRIEF DESCRIPTION OF DRAWINGS

[0049] 1, Mask platform; 11, Clamping piece; 111, Slider; 112, Baffle; 113, Screw; 114, Pressing plate; 12, Vacuum suction button; 13, Vacuum detection table; 14, X-axis positioning block; 15, Y-axis positioning block; 2, Glass mask; 3, Frame body; 31, First horizontal plate; 32, Second horizontal plate; 321, Positioning column; 33, Vertical plate; 331, Handle; 4, Positioning connecting piece; 41, Rotation shaft; 411, Pointer; 42, Shaft sleeve; 421, Indication mark; 5, Placing seat; 51, Placing groove; 52, Clamping groove. DETAILED DESCRIPTION

[0050] The application will be further described below with reference to the accompanying drawings. Figures 1-5 The application will be further described below with reference to the accompanying drawings.

[0051] The application discloses a vertical exposure machine glass mask mounting and dismounting jig.

[0052] The glass mask 2 is placed on the mask platform 1 of the vertical exposure machine, the mask platform 1 of the vertical exposure machine is provided with a vacuum groove, the vacuum groove is internally communicated with a vacuum generator, the vacuum generator is connected with the vacuum suction button 12, and the mask platform 1 is provided with the X-axis positioning block 14 and the Y-axis positioning block 15 at a position close to a groove opening of the vacuum groove. When the glass mask 2 is placed on the mask platform 1, the worker places the glass mask 2 on the top of the Y-axis positioning block 15, the Y-axis positioning block 15 supports the glass mask 2, then the glass mask 2 is moved to make the side edge of the glass mask 2 contact the X-axis positioning block 14.

[0053] After the glass mask 2 is positioned by the X-axis positioning block 14 and the Y-axis positioning block 15, the glass mask 2 covers the groove opening of the vacuum groove, then the operator presses the vacuum suction button 12, the vacuum generator forms a vacuum at the vacuum groove, a negative pressure is formed at the vacuum groove, and the glass mask 2 is adsorbed at the groove opening of the vacuum groove.

[0054] In order to judge the vacuum condition in the vacuum groove, the mask platform 1 is provided with the vacuum detection table 13, so as to judge the vacuum condition in the vacuum groove.

[0055] The vertical exposure machine glass mask mounting and dismounting jig is used for assisting mounting of the glass mask 2 to the mask platform 1. The mounting and dismounting jig comprises a frame body 3, a positioning connecting piece 4 and a placing seat 5, the frame body 3 is fixed at a specific position of the mask platform 1 through the positioning connecting piece 4. The placing seat 5 is fixedly installed on the frame body 3, the placing seat 5 is provided with a placing groove 51, the placing groove 51 is used for placing the glass mask 2, and after the frame body 3 is installed on the mask platform 1, the inner wall bottom of the placing groove 51 is flush with the top of the Y-axis positioning block 15.

[0056] When the glass mask plate 2 is placed, the operator vertically carries the glass mask plate 2 into the placing groove 51 and makes the bottom of the glass mask plate 2 contact with the inner wall bottom of the placing groove 51, the glass mask plate 2 is supported by the inner wall of the placing groove 51, the inner wall bottom of the placing groove 51 cooperates with the Y-axis positioning block 15 to support the glass mask plate 2, the width of the placing groove 51 is greater than the thickness of the glass mask plate 2, thereby improving the support stability of the glass mask plate 2. After the glass mask plate 2 is stably supported at the bottom, the positioning of the glass mask plate 2 can be completed by slightly moving the position of the glass mask plate 2 in the X-axis direction, thereby improving the convenience of placing the glass mask plate 2.

[0057] After the glass mask plate 2 is placed, the operator controls the vacuum generator through the vacuum suction button 12 to form a vacuum at the vacuum groove, so that the glass mask plate 2 is adsorbed at the slot of the vacuum groove, and the vacuum forming condition of the vacuum groove is judged through the vacuum detection table 13.

[0058] The mask plate platform 1 is provided with a proximity switch, the proximity switch is connected with the vacuum suction button 12, and only after the proximity switch detects that the frame body 3 is installed on the mask plate platform 1, the vacuum suction button 12 can control the vacuum generator to work.

[0059] When the glass mask plate 2 needs to be taken down, the frame body 3 is installed on the mask plate platform 1 again through the positioning connecting piece 4, so that the bottom of the glass mask plate 2 contacts with the bottom of the placing groove 51 of the placing seat 5, after the proximity switch detects that the frame body 3 is installed on the mask plate platform 1, the operator controls the vacuum suction button 12 to release the vacuum inside the vacuum groove, so as to facilitate taking down the glass mask plate 2. The proximity switch and the vacuum suction button 12 cooperatively control the vacuum condition of the vacuum groove, thereby reducing the possibility that the glass mask plate 2 is accidentally dropped due to the false touch of the vacuum suction button 12.

[0060] The frame body 3 includes a first horizontal plate 31, a second horizontal plate 32 and a vertical plate 33. The first horizontal plate 31 and the second horizontal plate 32 are arranged in parallel, and the vertical plate 33 connects the first horizontal plate 31 and the second horizontal plate 32. After the frame body 3 is placed on the mask plate platform 1, the first horizontal plate 31 is located above the second horizontal plate 32.

[0061] The vertical plate 33 is provided with a handle 331, the operator carries the frame body 3 through the handle 331, thereby improving the convenience and stability of carrying the frame body 3.

[0062] The positioning connecting piece 4 includes a rotating shaft 41 and a shaft sleeve 42. The shaft sleeve 42 is installed on the frame body 3, in the embodiment of the application, the shaft sleeve 42 is installed at the positions of the two ends of the first horizontal plate 31. The rotating shaft 41 penetrates through the shaft sleeve 42 and rotationally cooperates with the shaft sleeve 42. The rotating shaft 41 penetrates through the first horizontal plate 31 and rotationally cooperates with the first horizontal plate 31.

[0063] The mask plate platform 1 is provided with a plug-in hole matched with the rotating shaft 41, and the inner wall of the plug-in hole is provided with a locking groove, and the cross section of the locking groove and the plug-in hole is T-shaped.

[0064] When the frame body 3 needs to be installed on the mask plate platform 1, the rotating shaft 41 on the frame body 3 is inserted into the plug-in hole, and the locking block is inserted into the locking groove, then the rotating shaft 41 is rotated to rotate the locking block inside the locking groove, and the inner wall of the locking groove limits the locking block, which reduces the possibility of the rotating shaft 41 from the plug-in hole, thereby improving the convenience and stability of the frame body 3 installed on the mask plate platform 1.

[0065] The rotating shaft 41 is provided with a pointer 411, and the shaft sleeve 42 is provided with an indication mark 421. The operator rotates the rotating shaft 41 by rotating the pointer 411, and the operator judges the position of the locking block inside the locking groove by referring to the relative position of the pointer 411 and the indication mark 421, so as to facilitate the judgment of whether the locking block is limited.

[0066] At the same time, the shaft sleeve 42 and the first horizontal plate 31 increase the contact area with the rotating shaft 41, improve the working stability of the rotating shaft 41, and reduce the possibility of local excessive force of the rotating shaft 41.

[0067] In order to make the first horizontal plate 31 in a vertical state when the frame body 3 is installed on the mask plate platform 1, the second horizontal plate 32 is provided with a positioning column 321, and when the frame body 3 is placed on the mask plate platform 1, one end of the positioning column 321 contacts the mask plate platform 1.

[0068] The placing seat 5 is provided with a clamping groove 52, and when the placing seat 5 is installed, the first horizontal plate 31 is placed in the clamping groove 52, and the top of the first horizontal plate 31 contacts the top of the placing seat 5, the side wall of the clamping groove 52 contacts the side wall of the first horizontal plate 31, and the side wall of the clamping groove 52 and the side wall of the first horizontal plate 31 are connected by bolts.

[0069] The clamping groove 52 is positioned by the groove wall and the first horizontal plate 31, and the position accuracy and stability of the placing seat 5 are improved by cooperating with the bolts.

[0070] When the operator carries the glass mask plate 2, the glass mask plate 2 has a certain inclination, and the bottom of the glass mask plate 2 is slightly closer to the position of the frame body 3 than the top of the glass mask plate 2, therefore, in order to facilitate the glass mask plate 2 to be placed into the placing groove 51, the side wall of the placing groove 51 is inclined, and the bottom surface and the side surface of the inner wall of the placing groove 51 are arranged at an obtuse angle.

[0071] The mask plate platform 1 is provided with a plurality of clamping members 11 for clamping the glass mask plate 2 in the circumferential direction along the axis of the mask plate platform 1. The clamping member 11 comprises a sliding block 111, a baffle 112 and a screw rod 113. The sliding block 111 is arranged on the mask plate platform 1, the baffle 112 is arranged on the sliding block 111, the baffle 112 and the sliding block 111 form a limiting groove for clamping the glass mask plate 2, and the screw rod 113 is threadedly connected with the mask plate platform 1. The sliding block 111 is provided with a waist groove, and the screw rod 113 is arranged in the waist groove.

[0072] After the glass mask plate 2 is positioned, the sliding block 111 is moved to place the glass mask plate 2 in the limiting groove, and the glass mask plate 2 is limited by the baffle 112, thereby improving the placement stability of the glass mask plate 2. Then, the screw rod 113 passes through the waist groove and is threadedly connected with the mask plate platform 1, and the pressing plate 114 on the screw rod 113 presses the sliding block 111 tightly on the mask plate platform 1.

[0073] The implementation principle of the glass mask plate mounting and dismounting jig of the vertical exposure machine according to the embodiment of the application is as follows: in the vertical exposure machine, the mounting and dismounting process of the glass mask plate 2 is completed by means of a special mounting and dismounting jig. When mounting, first, the frame body 3 of the mounting and dismounting jig is fixed at a specific position of the mask plate platform 1 through the positioning connecting member 4, at this time, the inner wall bottom of the placement groove 51 of the placement seat 5 is flush with the top of the Y-axis positioning block 15. The operator vertically carries the glass mask plate 2 to the placement groove 51, so that the bottom of the glass mask plate 2 is in contact with the inner wall bottom of the placement groove 51, and the glass mask plate 2 is supported by the inner wall of the placement groove 51 and the Y-axis positioning block 15. Then, the glass mask plate 2 is slightly moved to make the side edge of the glass mask plate 2 in contact with the X-axis positioning block 14 to complete the positioning. After the positioning is completed, the operator presses the vacuum suction button 12, the vacuum groove forms a vacuum through the vacuum generator, the glass mask plate 2 is adsorbed at the groove opening of the vacuum groove, and the vacuum formation of the vacuum groove is judged through the vacuum detection table 13. When dismounting, the frame body 3 is mounted on the mask plate platform 1 again, after the proximity switch detects that the frame body 3 is mounted, the operator controls the vacuum suction button 12 to release the vacuum inside the vacuum groove through the vacuum generator, so as to facilitate taking down the glass mask plate 2. During the whole process, the proximity switch and the vacuum suction button 12 cooperatively control the vacuum of the vacuum groove, effectively reducing the risk of accidental falling of the glass mask plate 2 caused by accidental touch.

[0074] The above are preferred embodiments of the application, which do not limit the protection scope of the application. Any equivalent changes made on the basis of the structure, shape and principle of the application should be covered by the protection scope of the application.

Claims

1.A vertical exposure machine glass mask plate mounting and dismounting jig for assisting mounting of a glass mask plate (2) to a mask plate platform, characterized in that: the mounting and dismounting jig comprises a frame (3), a positioning connector (4) and a placing seat (5), wherein: the frame (3) is arranged on the mask plate platform through the positioning connector (4) ; the placing seat (5) is arranged on the frame (3), and the inner wall bottom of the placing groove (51) for placing the glass mask plate is flush with the top of the Y-axis positioning block (15) of the mask plate platform; and the inner wall bottom of the placing groove (51) is flush with the top of the Y-axis positioning block (15) of the mask plate platform when the frame (3) is placed on the mask plate platform. 2.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 1, characterized in that: the placing seat (5) is provided with a clamping groove (52) ; and the frame (3) is in contact with the inner wall top of the clamping groove (52). 3.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 2, characterized in that: the bottom surface and the side surface of the inner wall of the placing groove (51) are arranged at an obtuse angle. 4.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 1, characterized in that: the frame (3) comprises a first horizontal plate (31), a second horizontal plate (32) and a vertical plate (33), wherein: the first horizontal plate (31) is parallel to the second horizontal plate (32) ; and the vertical plate (33) connects the first horizontal plate (31) and the second horizontal plate (32). 5.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 1, characterized in that: the frame (3) is provided with a handle (331). 6.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 1, characterized in that: the positioning connector (4) comprises a rotating shaft (41), wherein: the rotating shaft (41) is arranged on the frame (3) ; and the mask plate platform is provided with a plug-in hole for inserting the rotating shaft (41). 7.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 6, characterized in that: the end of the rotating shaft (41) is provided with a locking block; and the inner wall of the plug-in hole is provided with a locking groove. 8.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 7, characterized in that: the positioning connector (4) further comprises a shaft sleeve (42) ; the shaft sleeve (42) is arranged on the frame (3) ; the shaft sleeve (42) is provided with an indicator; the rotating shaft (41) penetrates through the shaft sleeve (42) and rotates with the shaft sleeve (42) ; and the rotating shaft (41) is provided with a pointer (411). 9.The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 1, characterized in that: the mask plate platform is provided with a plurality of clamping pieces (11) for clamping the glass mask plate along the circumferential direction of the axis of the mask plate platform. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 10. The vertical exposure machine glass mask plate mounting and dismounting jig according to claim 9, characterized in that: The clamping piece (11) comprises a sliding block (111), a baffle (112) and a screw rod (113), wherein: The sliding block (111) is arranged on the mask plate platform; The baffle (112) is arranged on the baffle (112), and a limiting groove for clamping the glass mask plate is formed between the baffle (112) and the sliding block (111); The screw rod (113) is in threaded connection with the mask plate platform; The screw rod (113) is provided with a pressing plate (114); The sliding block (111) is provided with a waist groove, and the screw rod (113) is arranged in the waist groove.

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