Ion source filament distance adjustment inspection tool

Abstract

The utility model relates to the technical field of wafer processing equipment, in particular to an ion source filament distance adjustment inspection tool, which comprises a lower positioning part and an upper positioning part which are placed between two clamps, the upper positioning part is in sliding connection with the lower positioning part, and the lower positioning part is further provided with a limiting structure for fixing the unfolding and storage positions of the upper positioning part; wherein the lower positioning part is provided with an expansion part, the expansion part is provided with a measuring assembly for detecting the height of the two clamps, and the lower positioning part and the upper positioning part are respectively placed between the two clamps and between the fixing blocks of the clamps when the clamps are fixed. In this way, the levelness of the two clamps is guaranteed when the lamp filament is installed, the lamp filament clamp gaps are in a parallel state, the stress borne by the lamp filament is greatly reduced, the maintenance time can be shortened, the property loss can be reduced, and the parallelism and the height of the clamps can be rapidly calibrated and conveniently measured.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing equipment technical field especially relates to a ion source filament distance adjustment check tool. BACKGROUND

[0002] In the semiconductor wafer manufacturing process, ion implantation equipment is a vital component. The ion source generator in these devices is the core component responsible for generating high-energy ions. However, the existing ion source generator has certain limitations in service life, usually around 300 to 350 hours. This means that each device needs to replace the ion source generator 2 to 3 times per month.

[0003] The process of replacing the ion source generator involves the assembly of various consumables, such as the description attached Figure 1 As shown, the current filament fixing generally uses two opposite clamps 1 and two fixed plates 2, and the filament pin 3 is positioned and fixed between the clamp 1 and the fixed plate 2 to achieve fixation. However, the height difference and parallelism difference of the current clamp are only observed and judged by the naked eye. If the installation difference is large, it will affect the position of the installed filament and the size of the stress, and further affect the performance and life of the entire ion source generator.

[0004] Based on this, in order to achieve convenient positioning and checking of the two clamps during filament replacement and installation, we propose an ion source filament distance adjustment check tool. INVENTION CONTENTS

[0005] The utility model aims at solving the shortcomings in the prior art that the height difference and parallelism difference of the current clamp are only observed and judged by the naked eye, and the position error is large, and proposes an ion source filament distance adjustment check tool.

[0006] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0007] An ion source filament distance adjustment check tool is designed, which includes:

[0008] A lower positioning part and an upper positioning part are placed between the two clamps;

[0009] The upper positioning part and the lower positioning part are slidingly connected, and the lower positioning part also has a limiting structure for fixing the unfolded and stored position of the upper positioning part;

[0010] The lower positioning part also has an expansion part, and the expansion part is provided with a measuring assembly for detecting the height of the two clamps.

[0011] Further, the lower positioning part includes a bottom plate and a vertical plate connected to the bottom plate.

[0012] Wherein the upper end of the vertical plate has an opening.

[0013] Further, the upper positioning part comprises a top plate and a matching plate connected vertically below the top plate, and the matching plate is inserted into the opening.

[0014] Further, a guide groove communicating with the opening is formed in the two side edges of the vertical plate, and a guide part sliding with the guide groove is formed on the end face of the matching plate.

[0015] Further, the limiting structure comprises a notch formed in the side edge of the guide groove, and a resilient clamping arm is fixedly connected in the notch.

[0016] Two notches are formed in each guide groove, and two resilient clamping arms are symmetrically distributed.

[0017] Further, the measuring assembly comprises a sliding groove formed on the end face of the expansion part, a measuring rod with scale marks is slidingly connected in the sliding groove, and a locking structure is arranged between the top of the measuring rod and the expansion part.

[0018] Further, a transverse groove is formed in the length direction of the bottom of the sliding groove, and the bottom of the measuring rod has a sliding block slidingly fitted with the transverse groove.

[0019] Further, the locking structure comprises a positioning rod movably inserted on the measuring rod through a spring.

[0020] A sliding groove is formed on the end face of the expansion part, the inner side of the sliding groove has a ring-shaped baffle, the positioning rod slides in the sliding groove, and the outer side of the positioning rod is fixedly installed with a limiting plate abuttingly fitted with the ring-shaped baffle.

[0021] The ion source filament distance adjustment and inspection tool has the beneficial effects that: in the utility model, the lower positioning part and the upper positioning part are arranged to be respectively placed between the two clamps and between the fixed blocks of the clamps when the clamps are fixed, so as to ensure the levelness of the two clamps when the filament is installed, the gap of the filament clamp is in a parallel state, the stress on the filament is greatly reduced, the service life of the filament is improved, the maintenance time is reduced by using the tool, the property loss is reduced, the parallelism and the height of the clamp can be quickly calibrated and measured conveniently, and the convenience and stability of the filament replacement operation are improved. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a structural schematic view of the prior art clamp;

[0023] Figure 2 It is a structural schematic view of the utility model.

[0024] Figure 3 It is the structure schematic view of lower positioning part of the utility model;

[0025] Figure 4 It is the structure schematic view of measuring assembly of the utility model;

[0026] Figure 5 It is the structure schematic view of the tool placed in the clamp.

[0027] In the drawing: 1, lower positioning part;11, extension part;12, bottom plate;13, vertical plate;14, opening;15, guide groove;2, upper positioning part;21, top plate;22, matching plate;23, guide part;3, limiting structure;31, elastic clamping arm;4, measuring assembly;41, sliding groove;42, measuring rod;43, transverse groove;44, spring;45, positioning rod;46, sliding groove;47, annular baffle;48, limiting plate. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0029] Referring to Figures 2-5 For an embodiment of the utility model, it discloses a kind of ion source filament distance adjustment check tools, specifically the tool includes the lower positioning part 1 and upper positioning part 2 placed between two clamps, it needs to be explained, lower positioning part 1 described in the embodiment is placed between two clamps, upper positioning part 2 described is placed between the fixed block of two clamps, since the gap between two fixed blocks is less than the gap between two clamps, so the middle width of upper positioning part 2 described in the embodiment is less than the middle width of lower positioning part 1, so as to ensure the positioning adaptation of clamp and fixed block;

[0030] Upper positioning part 2 and lower positioning part 1 are slidably connected, and the limiting structure 3 for fixing the unfolded and stored positions of upper positioning part 2 is further provided on lower positioning part 1, i.e., in the utility model, the limiting structure 3 is used to fix the unfolded or stored position of upper positioning part 2, so that upper positioning part 2 and lower positioning part 1 can be stored in each other when the tool is not used, thereby saving floor space and improving the convenience of storage and carrying.

[0031] Among them, the lower positioning part 1 further has an extension part 11, and the extension part 11 is provided with a measuring assembly 4 for detecting the height of the two clamps.

[0032] In some embodiments, the lower positioning part 1 comprises a bottom plate 12 and a vertical plate 13 connected to the bottom plate 12, the vertical plate 13 is connected to the middle of the bottom plate 12, and the bottom plate 12 is attached to the bottom of the two clamps to position the bottom of the clamps.

[0033] The upper end of the vertical plate 13 has an opening 14.

[0034] Further, the upper positioning part 2 comprises a top plate 21 and a cooperating plate 22 connected vertically below the top plate 21, the cooperating plate 22 is inserted into the opening 14, and the top plate 21 is attached to the top end of the two clamps, and the cooperating plate 22 is placed between the fixing blocks of the two clamps, and the top plate 21 and the bottom plate 12 are attached to the top end and the bottom of the clamps to ensure that the vertical plate 13 and the cooperating plate 22 are stably placed in the gap of the two clamps, so as to ensure the horizontal degree of the two clamps after fixing and optimize the fixing stability of the filament.

[0035] On the basis of the above embodiment, a guide groove 15 communicating with the opening 14 is further formed in the two side edges of the vertical plate 13, a guide portion 23 sliding with the guide groove 15 is formed on the end face of the cooperating plate 22, the guide portion 23 is a cylinder, and further, two guide grooves 15 are formed on each side edge of the vertical plate 13 in the embodiment, and the two guide grooves 15 are cooperated to avoid the rotation of the cooperating plate 22.

[0036] In addition, the limiting structure 3 comprises a notch formed in the side edge of the guide groove 15, and a resilient clamping arm 31 is fixedly connected in the notch, the resilient clamping arm 31 is substantially in U-shaped structure, and the resilient clamping arm 31 is used for limiting the movement of the guide portion 23, when the upper positioning part 2 is unfolded, the upper positioning part 2 is pulled upward, at this time, the guide portion 23 on the upper positioning part 2 slides in the guide groove 15, until the guide portion 23 abuts against the resilient clamping arm 31 and slides to the other side, at this time, the position of the guide portion 23 is stopped by the resilient clamping arm 31, so as to ensure the positioning stability of the upper positioning part 2, and conversely, the upper positioning part 2 is pushed downward when it is stored, and the guide portion 23 is connected with the resilient clamping arm 31.

[0037] Specifically, two notches are formed in each guide groove 15, and the two resilient clamping arms 31 are symmetrically distributed.

[0038] In some embodiments, the measuring assembly 4 comprises a sliding groove 41 opened on the end face of the expansion part 11, a measuring rod 42 with scale marks is slidingly connected in the sliding groove 41, and a locking structure is arranged between the top of the measuring rod 42 and the expansion part 11, that is, in this embodiment, the slidable measuring rod 42 is designed, which can slide linearly within a certain range, so that the height of the two clamps on both sides can be measured, and after ensuring the height of the two clamps, it can be fixed by bolts and other fasteners, otherwise it needs to check whether there are foreign matters between the clamp and the mounting plate, or whether the clamp is deformed.

[0039] Specifically, the bottom of the sliding groove 41 is provided with a transverse groove 43 along the length direction, and the bottom of the measuring rod 42 is provided with a sliding block which is slidingly matched with the transverse groove 43.

[0040] As preferred, the locking structure in this embodiment comprises a positioning rod 45 which is movably inserted on the measuring rod 42 through a spring 44.

[0041] A sliding groove 46 is opened on the end face of the expansion part 11, the inner side of the sliding groove 46 is provided with an annular baffle 47, the positioning rod 45 slides in the sliding groove 46, and the outer side of the positioning rod 45 is fixedly installed with a limiting plate 48 which is abuttingly matched with the annular baffle 47.

[0042] That is, in this embodiment, the limiting plate 48 is used to abut against the annular baffle 47 to position the sliding of the measuring rod 42, and those skilled in the art also know that friction particles can be arranged on the opposite surfaces of the annular baffle 47 and the limiting plate 48 to improve the fitting and positioning stability of the two.

[0043] Specifically, when the positioning rod 45 is pressed to move downward and press the spring 44, the positioning rod 45 drives the limiting plate 48 to move, and the limiting plate 48 is separated from the annular baffle 47, so that the measuring rod 42 can be freely slid to measure the height of the two clamps within a certain range. After the measurement is completed, the pressing force on the positioning rod 45 is released, and under the abutment of the spring 44, the positioning rod 45 is reset, and the limiting plate 48 is again in contact with the annular baffle 47 to realize the position locking of the whole measuring rod 42, which is simple and convenient to operate.

[0044] In conclusion, the lower positioning part 1 and the upper positioning part 2 are arranged for being respectively placed between two clamps and between the fixing blocks of the clamps when the clamps are fixed, so that the levelness of the two clamps during filament installation is ensured, the stress on the filament is greatly reduced due to the parallel state of the filament clamp gap, the service life of the filament is improved, the maintenance time is reduced, the property loss is reduced, the parallelism and the height of the clamp can be quickly calibrated and measured, and the convenience and stability of filament replacement operation are improved.

[0045] The above merely describes a preferred specific implementation manner of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. An ion source filament distance adjustment inspection tool characterized by, The utility model relates to a two -clamp height detection device, including: The lower positioning part (1) and the upper positioning part (2) are placed between two clamps; The upper positioning part (2) is slidably connected with the lower positioning part (1), and the lower positioning part (1) further has a limiting structure (3) for fixing the unfolding and storage position of the upper positioning part (2); Wherein the lower positioning part (1) further has an extension part (11), and the extension part (11) is provided with a measuring assembly (4) for detecting the height of two clamps.

2. The ion source filament distance adjustment check tool of claim 1, wherein: The lower positioning part (1) comprises a bottom plate (12) and a vertical plate (13) vertically connected to the bottom plate (12). The upper end of the vertical plate (13) has an opening (14).

3. The ion source filament distance adjustment check tool of claim 2, wherein: The upper positioning part (2) comprises a top plate (21) and a matching plate (22) vertically connected below the top plate (21), and the matching plate (22) is inserted into the opening (14).

4. The ion source filament distance adjustment check tool of claim 3, wherein: The vertical plate (13) further has a guide groove (15) communicating with the opening (14) on both sides, and the end face of the matching plate (22) is provided with a guide part (23) sliding with the guide groove (15).

5. The ion source filament distance adjustment check tool of claim 4, wherein: The limiting structure (3) comprises a notch provided on the side of the guide groove (15), and an elastic clamping arm (31) is fixedly connected in the notch. Two notches are provided in each guide groove (15), and two elastic clamping arms (31) are symmetrically distributed.

6. The ion source filament distance adjustment check tool of claim 1, wherein: The measuring assembly (4) comprises a sliding groove (41) provided on the end face of the extension part (11), and a measuring rod (42) with a scale mark is slidably connected in the sliding groove (41), and a locking structure is arranged between the top of the measuring rod (42) and the extension part (11).

7. The ion source filament distance adjustment check tool of claim 6, wherein: The bottom of the sliding groove (41) is provided with a transverse groove (43) along the length direction, and the bottom of the measuring rod (42) is provided with a sliding block slidingly fitted with the transverse groove (43).

8. The ion source filament distance adjustment check tool of claim 6, wherein: The locking structure comprises a positioning rod (45) movably inserted into the measuring rod (42) by a spring (44). A sliding groove (46) is provided on the end face of the extension part (11), the inner side of the sliding groove (46) has a ring-shaped baffle (47), the positioning rod (45) slides in the sliding groove (46), and the outer side of the positioning rod (45) is fixedly installed with a limiting plate (48) abuttingly fitted with the ring-shaped baffle (47).

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